Detection equipment for trace helium in silane gas

Abstract

The utility model relates to detection equipment for trace helium in silane gas, which comprises a gas concentrator and a gas chromatograph with a TCD (thermal conductivity detector), the sample input end of the gas concentrator is connected with a sample branch, a standard gas branch and a first carrier gas branch which are arranged in parallel; the sample branch is used for inputting silane gas and is connected with the purging branch and the vacuumizing branch; the driving gas input end of the gas concentrator is connected with the first driving gas branch, and the tail gas output end of the gas concentrator is connected with the first tail gas emission branch; the sample input end of the gas chromatograph is connected with the compressed gas output end of the gas concentrator and the second carrier gas branch, the driving gas input end of the gas chromatograph is connected with the second driving gas branch, and the tail gas output end of the gas chromatograph is connected with the second tail gas emission branch. The device is reasonable in design, facilitates the analysis of the helium content in the silane gas, and has the advantages of high gas tightness, high efficiency, stability and high sensitivity.

Description

Technical Field

[0001] The utility model relates to a device for detecting trace helium in silane gas. Background Art

[0002] Currently, the silane product standard GB / T 15909-2017 "Silane Gas for the Electronics Industry" stipulates the detection of components, moisture and metal content, but does not include relevant content on helium content detection; however, some advanced international semiconductor companies such as TSMC and Yangtze Memory have put forward requirements for the helium content in silane.

[0003] Methods for trace analysis of gas components include gas chromatography-mass spectrometry and gas chromatography. Gas chromatography-mass spectrometry requires equipment that can cost hundreds of thousands or even millions of yuan, and subsequent maintenance and operating costs are high. Gas chromatography, based on detector performance, is categorized into helium ionization gas chromatography (PDD), hydrogen flame ionization gas chromatography (FID), flame photometry gas chromatography (FPD), and conductivity detection gas chromatography (TCD). Helium ionization gas chromatography, hydrogen flame ionization gas chromatography, and flame photometry gas chromatography are unable to detect helium content. While conductivity detection gas chromatography can detect helium content, its high detection limit of 10 ppmv falls far short of the helium content requirements of semiconductor customers. Furthermore, silane, a gas in the electronics industry that spontaneously ignites in contact with air, cannot be safely detected using traditional gas chromatography. Utility Model Content

[0004] The present invention aims to improve the problems existing in the prior art, that is, to provide a safe, efficient, stable and highly sensitive detection device for trace helium in silane gas.

[0005] In order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a detection device for trace helium in silane gas, comprising a gas concentrator and a gas chromatograph with a TCD detector, the sample input end of the gas concentrator being connected to a sample branch, a standard gas branch and a first carrier gas branch arranged in parallel, the sample branch being used to input silane gas and being connected to a purge branch and a vacuum branch; the driving gas input end of the gas concentrator being connected to the first driving gas branch, and the exhaust gas output end of the gas concentrator being connected to the first exhaust gas exhaust branch; the sample input end of the gas chromatograph being connected to the compressed gas output end and the second carrier gas branch of the gas concentrator, the driving gas input end of the gas chromatograph being connected to the second driving gas branch, and the exhaust gas output end of the gas chromatograph being connected to the second exhaust gas exhaust branch.

[0006] Furthermore, the sample branch includes a first valve for controlling the input of silane gas and a fifth valve for controlling the output of silane gas, and the first valve and the fifth valve are arranged in series; the purge branch is connected between the first valve and the fifth valve, and the purge branch includes a second valve for controlling the output of purge gas and a third valve for controlling the input of purge gas, and the second valve and the third valve are arranged in parallel, and a first one-way valve is arranged in series on the output side of the second valve, and a second one-way valve is arranged in series on the output side of the third valve.

[0007] Furthermore, a first pressure gauge, a first pressure regulating valve and a second pressure gauge are sequentially arranged between the first valve and the fifth valve along the gas flow direction, and the input end of the second valve and the output end of the second one-way valve are connected between the first valve and the first pressure gauge.

[0008] Furthermore, the sample branch also includes a fourth valve for controlling the input of backup silane gas, and the fourth valve is arranged in parallel with the first valve.

[0009] Furthermore, the standard gas branch includes a sixth valve for controlling the input of standard gas, and the output side of the sixth valve is sequentially provided with a second pressure regulating valve, a third pressure gauge and a seventh valve along the gas flow direction; the vacuum branch includes a vacuum pump and a twenty-third valve, and the twenty-third valve is connected between the vacuum pump and the sample input end of the gas concentrator.

[0010] Furthermore, the first carrier gas branch is arranged in parallel with the first drive gas branch, and the first carrier gas branch includes an eighth valve, a third pressure regulating valve, a fourth pressure gauge and a ninth valve arranged in sequence along the gas flow direction; the first drive gas branch includes a tenth valve, a fourth pressure regulating valve, a fifth pressure gauge and an eleventh valve arranged in sequence along the gas flow direction, the input ends of the eighth valve and the tenth valve are both connected to the first nitrogen input end, and a sixth pressure gauge is arranged between the input ends of the eighth valve and the tenth valve.

[0011] Furthermore, the first exhaust gas emission branch is connected to the first emission drive branch, and the first exhaust gas emission branch includes a twelfth valve, a seventh pressure gauge and a third one-way valve arranged in sequence along the gas flow direction; the first emission drive branch includes a thirteenth valve for controlling the nitrogen input, and the output side of the thirteenth valve is sequentially provided with an eighth pressure gauge, a fifth pressure regulating valve, a ninth pressure gauge, a fourth one-way valve and a fourteenth valve along the gas flow direction, and the output end of the fourteenth valve is connected between the twelfth valve and the seventh pressure gauge.

[0012] Furthermore, the second carrier gas branch is arranged in parallel with the second drive gas branch, and the second carrier gas branch includes a fifteenth valve, a sixth pressure regulating valve, an eighth pressure gauge and a sixteenth valve arranged in sequence along the gas flow direction; the second drive gas branch includes a seventeenth valve, a seventh pressure regulating valve, a ninth pressure gauge and an eighteenth valve arranged in sequence along the gas flow direction, the input ends of the fifteenth valve and the seventeenth valve are both connected to the second nitrogen input end, and a tenth pressure gauge is arranged between the input ends of the fifteenth valve and the seventeenth valve.

[0013] Furthermore, the second exhaust gas emission branch is connected to the second emission drive branch, and the second exhaust gas emission branch includes a twentieth valve, an eleventh pressure gauge and a fifth one-way valve arranged in sequence along the gas flow direction; the second emission drive branch includes a twenty-first valve for controlling the nitrogen input, and the output side of the twenty-first valve is provided with a twelfth pressure gauge, a sixth pressure regulating valve, a thirteenth pressure gauge, a sixth one-way valve and a twenty-second valve in sequence along the gas flow direction, and the output end of the twenty-second valve is connected between the twentieth valve and the eleventh pressure gauge; the carrier gas output end of the gas chromatograph is connected to the carrier gas emission branch, and the carrier gas emission branch includes a nineteenth valve, a twelfth pressure gauge and a seventh one-way valve arranged in sequence along the gas flow direction.

[0014] Compared with the prior art, the present invention has the following effects: the present invention is reasonably designed, is convenient for analyzing the helium content in silane gas, and has the advantages of high air tightness, high efficiency, stability and high sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a PID diagram of an embodiment of the present utility model.

[0016] In the picture:

[0017] 101-gas concentrator; 102-gas chromatograph; 103-sample branch; 104-standard gas branch; 105-first carrier gas branch; 106-first drive gas branch; 107-first tail gas discharge branch; 108-second carrier gas branch; 109-second drive gas branch; 110-second tail gas discharge branch; 111-first discharge drive branch; 112-second discharge drive branch; 113-vacuum branch; 114-carrier gas discharge branch; 1 15-purge branch; 1-first valve; 2-second valve; 3-third valve; 4-fourth valve; 5-fifth valve; 6-sixth valve; 7-seventh valve; 8-eighth valve; 9-ninth valve; 10-tenth valve; 11-eleventh valve; 12-twelfth valve; 13-thirteenth valve; 14-fourteenth valve; 15-fifteenth valve; 16-sixteenth valve; 17-seventeenth valve; 18-eighteenth valve; 19-nineteenth valve; 2 0-20th valve; 21-21st valve; 22-22nd valve; 23-23rd valve; 24-1st pressure gauge; 25-1st pressure regulating valve; 26-2nd pressure gauge; 27-1st check valve; 28-2nd check valve; 29-2nd pressure regulating valve; 30-3rd pressure gauge; 31-3rd pressure regulating valve; 32-4th pressure gauge; 33-4th pressure regulating valve; 34-5th pressure gauge; 35-6th pressure gauge; 36-7th pressure gauge; 37-3rd One-way valve; 38-eighth pressure gauge; 39-fifth pressure regulating valve; 40-ninth pressure gauge; 41-fourth one-way valve; 42-sixth pressure regulating valve; 43-eighth pressure gauge; 44-seventh pressure regulating valve; 45-ninth pressure gauge; 46-tenth pressure gauge; 47-eleventh pressure gauge; 48-fifth one-way valve; 49-twelfth pressure gauge; 50-sixth pressure regulating valve; 51-thirteenth pressure gauge; 52-sixth one-way valve; 53-twelfth pressure gauge; 54-seventh one-way valve. DETAILED DESCRIPTION

[0018] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0019] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present invention.

[0020] like Figure 1As shown, the present invention provides a device for detecting trace helium in silane gas, which is used to analyze the helium content in silane gas. The device comprises a gas concentrator 101, a gas chromatograph 102 with a TCD detector, and an analysis disk. The analysis disk transmits a silane gas sample generated by an external device to the gas concentrator 101, where the sample gas is concentrated. The gas chromatograph 102 with the TCD analyzes the trace helium using the principle of heart cutting. Specifically, the gas concentrator 101 concentrates the silane gas in a concentrator tube using liquid nitrogen, then desorbs the sample into the gas chromatograph via a heating module, thereby greatly improving the sensitivity of helium detection. The gas chromatograph 102 is equipped with a TCD detector and a corresponding chromatographic column suitable for helium analysis, thereby detecting trace helium in silane. The heart cutting method utilizes the different distribution coefficients of silane and helium in the chromatographic column. By controlling the valve switching time of a ten-way valve, helium is introduced into the detector while silane is vented, thereby preventing silane from contaminating the detector.

[0021] It should be noted that the gas concentrator and the gas chromatograph with a TCD detector are both existing products, and their specific working principles will not be repeated here.

[0022] The analysis disk is provided with a sample branch 103, a purge branch 115, a standard gas branch 104, a first carrier gas branch 105, a first drive gas branch 106, a first tail gas discharge branch 107, a second carrier gas branch 108, a second drive gas branch 109, a second tail gas discharge branch 110, a first discharge drive branch 111, a second discharge drive branch 112, a vacuum branch 113, and a carrier gas discharge branch 114, that is, a gas concentrator and a gas chromatograph with a TCD detector are all connected to the analysis disk.

[0023] The sample input end of the gas concentrator 101 is connected to a sample branch 103, a standard gas branch 104 and a first carrier gas branch 105 arranged in parallel. The sample branch is used to input a silane gas sample. The sample branch 105 is connected to a purge branch 115 and a vacuum branch 113. The purge branch is used to purge the pipeline, and the vacuum branch is used to vacuum. The gas of the standard gas branch 104 is used to transport standard gas to the gas concentrator 101, and the first carrier gas branch 105 is used to transport carrier gas to the gas concentrator 101. The driving gas input end of the gas concentrator is connected to the first driving gas branch 106, and the driving gas is transported to the gas concentrator through the first driving gas branch. The driving gas is used to facilitate the normal operation of the internal valves of the gas concentrator. The exhaust gas output end of the gas concentrator 101 is connected to the first exhaust gas exhaust branch 107, and the exhaust gas of the gas concentrator is discharged through the first exhaust gas exhaust branch.

[0024] The sample input end of the gas chromatograph 102 is connected to the compressed gas output end of the gas concentrator 101 and the second carrier gas branch 108. The compressed gas output by the gas concentrator is input from the sample input end of the gas chromatograph. The second carrier gas branch 108 is used to transport carrier gas to the gas chromatograph. The driving gas input end of the gas chromatograph 102 is connected to the second driving gas branch 109, and the driving gas is transported to the gas chromatograph through the second driving gas branch. The driving gas is used to facilitate the normal operation of the internal valves of the gas chromatograph. The exhaust gas output end of the gas chromatograph 102 is connected to the second exhaust gas exhaust branch 110, and the exhaust gas of the gas chromatograph is discharged through the second exhaust gas exhaust branch.

[0025] In this embodiment, the sample branch 103 includes a first valve 1 for controlling the input of silane gas and a fifth valve 5 for controlling the output of silane gas, and the first valve 1 and the fifth valve 5 are arranged in series; further, a first pressure gauge 24, a first pressure regulating valve 25 and a second pressure gauge 26 are arranged in sequence between the first valve 1 and the fifth valve 5 along the gas flow direction.

[0026] In this embodiment, the purge branch 103 is connected between the first valve 1 and the fifth valve 5. The purge branch 103 includes a second valve 2 for controlling the output of the purge gas and a third valve 3 for controlling the input of the purge gas. Nitrogen is used as the purge gas. The second valve 2 and the third valve 3 are arranged in parallel. A first one-way valve 27 is arranged in series with the output side of the second valve 2, and a second one-way valve 28 is arranged in series with the output side of the third valve 3. Furthermore, the input end of the second valve 2 and the output end of the second one-way valve 28 are connected between the first valve 1 and the first pressure gauge 24.

[0027] In this embodiment, the sample branch 103 further includes a fourth valve 4 for controlling the input of the backup silane gas. The fourth valve 4 is arranged in parallel with the first valve 1 .

[0028] In this embodiment, the standard gas branch 104 includes a sixth valve 6 for controlling the input of standard gas, and the output side of the sixth valve 6 is sequentially provided with a second pressure regulating valve 29, a third pressure gauge 30 and a seventh valve 7 along the gas flow direction; the standard gas comes from a steel cylinder.

[0029] In this embodiment, the vacuum branch 113 includes a vacuum pump and a twenty-third valve 23. The twenty-third valve 23 is connected between the vacuum pump and the sample input port of the gas concentrator 101. The vacuum pump is used to perform vacuuming, and the twenty-third valve controls whether vacuuming is enabled. Furthermore, the vacuum pump has a maximum vacuum level of -30 psi.

[0030] In this embodiment, the first carrier gas branch 105 and the first drive gas branch 106 are arranged in parallel. The first carrier gas branch 105 includes an eighth valve 8, a third pressure regulating valve 31, a fourth pressure gauge 32, and a ninth valve 9, arranged in sequence along the gas flow direction. The first drive gas branch 106 includes a tenth valve 10, a fourth pressure regulating valve 33, a fifth pressure gauge 34, and an eleventh valve 11, arranged in sequence along the gas flow direction. The inputs of the eighth and tenth valves 8 and 10 are both connected to the first nitrogen input. That is, the gas concentrator uses nitrogen as both carrier and drive gas. A sixth pressure gauge 35 is located between the inputs of the eighth and tenth valves 8 and 10. It should be noted that the first nitrogen input delivers high-purity nitrogen.

[0031] In this embodiment, the first exhaust gas discharge branch 107 includes a twelfth valve 12 , a seventh pressure gauge 36 , and a third one-way valve 37 , which are sequentially arranged along the gas flow direction.

[0032] In this embodiment, to facilitate exhaust gas treatment, the exhaust gas discharged from the gas concentrator is directly sent to the exhaust gas treatment equipment. However, since the exhaust gas treatment equipment is a certain distance away from the detection equipment, to facilitate better delivery of the exhaust gas discharged from the gas concentrator to the exhaust gas treatment equipment, the first exhaust gas discharge branch 107 is connected to the first discharge drive branch 111. Specifically, the first discharge drive branch 111 includes a thirteenth valve 13 for controlling nitrogen input. The output side of the thirteenth valve 13 is sequentially provided with an eighth pressure gauge 38, a fifth pressure regulating valve 39, a ninth pressure gauge 40, a fourth check valve 41, and a fourteenth valve 14 along the gas flow direction. The output end of the fourteenth valve 14 is connected between the twelfth valve 12 and the seventh pressure gauge. It should be noted that high-purity nitrogen is input into the first discharge drive branch here, and the input nitrogen is used to assist in driving the delivery of the exhaust gas.

[0033] In this embodiment, the second carrier gas branch 108 is arranged in parallel with the second drive gas branch 109, and the second carrier gas branch 108 includes a fifteenth valve 15, a sixth pressure regulating valve 42, an eighth pressure gauge 43 and a sixteenth valve 16 arranged in sequence along the gas flow direction; the second drive gas branch 109 includes a seventeenth valve 17, a seventh pressure regulating valve 44, a ninth pressure gauge 45 and an eighteenth valve 18 arranged in sequence along the gas flow direction, the input ends of the fifteenth valve 15 and the seventeenth valve 17 are both connected to the second nitrogen input end, and a tenth pressure gauge 46 is provided between the input ends of the fifteenth valve and the seventeenth valve.

[0034] In this embodiment, the second exhaust gas discharge branch 110 includes a twentieth valve 20, an eleventh pressure gauge 47, and a fifth one-way valve 48, which are sequentially arranged along the gas flow direction.

[0035] In this embodiment, to facilitate the treatment of exhaust gas, the exhaust gas discharged from the gas chromatograph is directly sent to the exhaust gas treatment equipment. However, since the exhaust gas treatment equipment is a certain distance away from the detection equipment, in order to facilitate the better delivery of the exhaust gas discharged from the gas chromatograph to the exhaust gas treatment equipment, the second exhaust gas discharge branch 110 is connected to the second discharge drive branch 112. Specifically, the second discharge drive branch 112 includes a twenty-first valve 21 for controlling the input of nitrogen gas. The output side of the twenty-first valve 21 is provided with a twelfth pressure gauge 49, a sixth pressure regulating valve 50, a thirteenth pressure gauge 51, a sixth one-way valve 52, and a twenty-second valve 22 in sequence along the gas flow direction. The output end of the twenty-second valve 22 is connected between the twentieth valve 20 and the eleventh pressure gauge. It should be noted that high-purity nitrogen is input into the second discharge drive branch here, and the input nitrogen is used to assist in driving the delivery of the exhaust gas.

[0036] In this embodiment, the carrier gas output end of the gas chromatograph 102 is connected to a carrier gas exhaust branch 114. This facilitates the discharge of carrier gas, and gas analyzed by the gas chromatograph is also discharged through this carrier gas exhaust branch. Specifically, carrier gas exhaust branch 114 includes a nineteenth valve 19, a twelfth pressure gauge 53, and a seventh check valve 54, which are sequentially arranged along the direction of gas flow.

[0037] In this embodiment, the nitrogen gas used for purging, the driving gas for each valve, and the carrier gas used are all high-purity nitrogen gas.

[0038] In this embodiment, the analysis disk includes the inlet and outlet of silane gas sample, standard gas, carrier gas, drive gas and tail gas, as well as pipelines for replacement and cleaning and vacuum pump pipelines. EP tubes and VCR connectors are used for branch connection. The valves used in the above branches are all diaphragm valves to ensure the airtightness of the entire system and the safety of operation.

[0039] In this embodiment, the method for detecting trace amounts of helium in silane gas comprises the following steps:

[0040] Step S1, connecting the carrier gas: opening the seventeenth valve 17 and the eighteenth valve 18, and the carrier gas is passed into the gas chromatograph 102; opening the tenth valve 10 and the eleventh valve 11, and the carrier gas is passed into the gas concentrator 101;

[0041] Step S2, cleaning the pipeline: close the second valve 2, the fourth valve 4 and the fifth valve 5, open the first valve and the third valve 3, close the third valve 3 after 30 seconds, open the second valve 2, wait until the pressure gauge pressure drops to 0 PSI, and then close the second valve 2; repeat the above steps 10 times, and use nitrogen to clean the sample pipeline; the cleaning process line is cleaned by passing high-purity nitrogen gas, and then the silane gas sample is passed through for cleaning. The two cleanings are combined to improve the cleaning effect;

[0042] Step S3, vacuuming: open the first valve 1, the fifth valve 5, and the twenty-third valve 23, start the vacuum pump, and close the vacuum pump and the twenty-third valve 23 after the pressure gauge pressure of the vacuum pump drops to -30 PSI;

[0043] Step S4, confirming the chromatographic conditions: checking whether the parameters of the chromatographic column, TCD detector, etc. of the gas chromatograph 102 are set according to the method requirements, confirming whether the valve cut-off time of the ten-way valve V1 of the gas chromatograph 102 is correct, and confirming that the instrument "Start Analysis" button is in green state;

[0044] Step S5, adding liquid nitrogen: adding liquid nitrogen to the liquid nitrogen barrel of the gas concentrator 101 to the scale line position;

[0045] Step S6, sampling stage: under negative pressure, the silane gas sample is sent to the sample branch, the second valve 2 is opened, and then closed for 10 seconds; then the fifth valve 5 is opened to send the silane gas sample to the gas concentrator 101;

[0046] Step S7, sample concentration and analysis: start the gas concentrator 101, the gas concentrator 101 concentrates the silane gas sample and then desorbs it, and triggers the "start analysis" button of the gas chromatograph 102 during the desorption process, and the gas chromatograph starts analysis. Specifically, the gas concentrator starts the automatic analysis process of carrier gas pre-purge - sample concentration - sample desorption - carrier gas purge, concentrates the silane gas sample and then desorbs it, and automatically triggers the "start analysis" button of the gas chromatograph during the desorption process, and the chromatographic analysis starts;

[0047] Step S8, gas chromatography analysis: When the gas concentrator 101 is desorbing the sample, the gas chromatograph 102 automatically starts sample injection analysis. The gas chromatograph analyzes the sample according to the set detector temperature, chromatographic column temperature, and valve cut-off time of the ten-way valve V1;

[0048] Step S9, exhaust gas discharge: the exhaust gas from the gas concentrator is discharged to the exhaust gas main pipe on the analysis disk through the twelfth valve 12, and the exhaust gas from the gas chromatograph 102 is discharged to the exhaust gas main pipe on the analysis disk through the twentieth valve 20, and the exhaust gas is sent to the exhaust gas treatment equipment via the exhaust gas main pipe.

[0049] The advantages of the utility model are: (1) high air tightness; (2) analysis time is less than 30 minutes, which is characterized by high analysis efficiency; (3) repeatability and linearity are less than 10%, and the analysis is stable; (4) the detection limit is less than 10 ppbv, which is characterized by high sensitivity.

[0050] If the present invention discloses or involves components or structural parts that are fixedly connected to each other, then, unless otherwise stated, the fixed connection can be understood as: a detachable fixed connection (for example, connection using bolts or screws), and can also be understood as: a non-detachable fixed connection (for example, riveting, welding). Of course, the mutual fixed connection can also be replaced by an integrated structure (for example, manufactured by integral molding using a casting process) (except where it is obviously impossible to use an integrated molding process).

[0051] In addition, unless otherwise stated, the terms used in any technical solution disclosed in the above-mentioned utility model to express positional relationships or shapes include states or shapes that are approximate, similar or close thereto.

[0052] Any component provided by the present invention can be assembled from multiple separate components, or can be a separate component manufactured by an integral forming process.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model and not to limit it; although the utility model is described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the specific implementation methods of the utility model can still be modified or some technical features can be replaced by equivalents; without departing from the spirit of the technical solution of the utility model, they should all be included in the scope of the technical solution for protection of the utility model.

Claims

1. A device for detecting trace helium in silane gas, comprising a gas concentrator and a gas chromatograph with a TCD detector, characterized in that: The sample input end of the gas concentrator is connected to a sample branch, a standard gas branch and a first carrier gas branch arranged in parallel. The sample branch is used to input silane gas and is connected to the purge branch and the vacuum branch; the driving gas input end of the gas concentrator is connected to the first driving gas branch, and the exhaust gas output end of the gas concentrator is connected to the first exhaust gas emission branch; the sample input end of the gas chromatograph is connected to the compressed gas output end and the second carrier gas branch of the gas concentrator, the driving gas input end of the gas chromatograph is connected to the second driving gas branch, and the exhaust gas output end of the gas chromatograph is connected to the second exhaust gas emission branch.

2. The device for detecting trace helium in silane gas according to claim 1, wherein: The sample branch includes a first valve for controlling the input of silane gas and a fifth valve for controlling the output of silane gas, and the first valve and the fifth valve are arranged in series; the purge branch is connected between the first valve and the fifth valve, and the purge branch includes a second valve for controlling the output of purge gas and a third valve for controlling the input of purge gas, and the second valve and the third valve are arranged in parallel, and a first one-way valve is arranged in series on the output side of the second valve, and a second one-way valve is arranged in series on the output side of the third valve.

3. The device for detecting trace helium in silane gas according to claim 2, wherein: A first pressure gauge, a first pressure regulating valve and a second pressure gauge are sequentially arranged between the first valve and the fifth valve along the gas flow direction, and the input end of the second valve and the output end of the second one-way valve are connected between the first valve and the first pressure gauge.

4. The device for detecting trace helium in silane gas according to claim 3, wherein: The sample branch further includes a fourth valve for controlling the input of backup silane gas, and the fourth valve is arranged in parallel with the first valve.

5. The device for detecting trace helium in silane gas according to claim 2, wherein: The standard gas branch includes a sixth valve for controlling the input of standard gas, and the output side of the sixth valve is sequentially provided with a second pressure regulating valve, a third pressure gauge and a seventh valve along the gas flow direction; the vacuum branch includes a vacuum pump and a twenty-third valve, and the twenty-third valve is connected between the vacuum pump and the sample input end of the gas concentrator.

6. The device for detecting trace helium in silane gas according to claim 1, wherein: The first carrier gas branch is arranged in parallel with the first drive gas branch, and the first carrier gas branch includes an eighth valve, a third pressure regulating valve, a fourth pressure gauge, and a ninth valve arranged in sequence along the gas flow direction; the first drive gas branch includes a tenth valve, a fourth pressure regulating valve, a fifth pressure gauge, and an eleventh valve arranged in sequence along the gas flow direction, the input ends of the eighth valve and the tenth valve are both connected to the first nitrogen input end, and a sixth pressure gauge is arranged between the input ends of the eighth valve and the tenth valve.

7. The device for detecting trace helium in silane gas according to claim 1, wherein: The first exhaust gas emission branch is connected to the first emission drive branch, and the first exhaust gas emission branch includes a twelfth valve, a seventh pressure gauge and a third one-way valve arranged in sequence along the gas flow direction; the first emission drive branch includes a thirteenth valve for controlling the nitrogen input, and the output side of the thirteenth valve is sequentially provided with an eighth pressure gauge, a fifth pressure regulating valve, a ninth pressure gauge, a fourth one-way valve and a fourteenth valve along the gas flow direction, and the output end of the fourteenth valve is connected between the twelfth valve and the seventh pressure gauge.

8. The device for detecting trace helium in silane gas according to claim 1, wherein: The second carrier gas branch is arranged in parallel with the second drive gas branch, and the second carrier gas branch includes a fifteenth valve, a sixth pressure regulating valve, an eighth pressure gauge, and a sixteenth valve arranged in sequence along the gas flow direction; the second drive gas branch includes a seventeenth valve, a seventh pressure regulating valve, a ninth pressure gauge, and an eighteenth valve arranged in sequence along the gas flow direction, the input ends of the fifteenth valve and the seventeenth valve are both connected to the second nitrogen input end, and a tenth pressure gauge is arranged between the input ends of the fifteenth valve and the seventeenth valve.

9. The device for detecting trace helium in silane gas according to claim 1, characterized in that: The second exhaust gas emission branch is connected to the second emission drive branch, and the second exhaust gas emission branch includes a 20th valve, an 11th pressure gauge and a fifth one-way valve arranged in sequence along the gas flow direction; the second emission drive branch includes a 21st valve for controlling the nitrogen input, and the output side of the 21st valve is provided with a 12th pressure gauge, a sixth pressure regulating valve, a 13th pressure gauge, a sixth one-way valve and a 22nd valve in sequence along the gas flow direction, and the output end of the 22nd valve is connected between the 20th valve and the 11th pressure gauge; the carrier gas output end of the gas chromatograph is connected to the carrier gas emission branch, and the carrier gas emission branch includes a 19th valve, a 12th pressure gauge and a seventh one-way valve arranged in sequence along the gas flow direction.

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