Equipment for testing adsorption force of electrostatic chuck

Abstract

The utility model discloses an electrostatic chuck adsorption force test device which comprises a bottom supporting plate, a supporting column is installed on the bottom supporting plate, a top supporting plate is installed at the top end of the supporting column, an electric telescopic rod is installed on the top supporting plate, and an installation base used for installing an electrostatic chuck is installed at the bottom of the electric telescopic rod. A spring is installed on the bottom supporting plate, an adsorption plate is installed at the top end of the spring, an L-shaped supporting rod is welded to the outer wall of the supporting column, and a supporting disc is installed at the top end of the L-shaped supporting rod. The adsorption plate lengthens the spring, so that the suction condition of the electrostatic chuck can be tested; when the adsorption plate is separated from the electrostatic chuck, the maximum adsorption force of the electrostatic chuck can be obtained according to the scale marks, so that the test is more accurate, the test process is simple, and the use is convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of adsorption force testing, in particular to an electrostatic chuck adsorption force testing device. Background Art

[0002] Electrostatic chucks are primarily used to hold flat objects such as metal plates, glass sheets, and wafers. They use electrostatic force to hold objects to the chuck surface and are suitable for a variety of applications in industrial production and laboratory environments. After production, electrostatic chucks require testing for their holding power.

[0003] Existing methods for testing the adsorption force of electrostatic chucks rely on using objects of varying weights for adsorption. This requires multiple changes in weight, making the test process time-consuming and labor-intensive. Furthermore, the adsorption force cannot be accurately measured (e.g., if a 200-gram object can be adsorbed but a 220-gram object cannot, the only conclusion is that the electrostatic chuck's adsorption force is between 200 and 220 grams). Utility Model Content

[0004] In view of the problems existing in the existing electrostatic chuck adsorption force testing equipment, the present utility model is proposed.

[0005] Therefore, the purpose of the present invention is to provide an electrostatic chuck adsorption force testing device, which solves the following problems of the existing electrostatic chuck adsorption force testing method: it mainly uses objects of different weights for the electrostatic chuck to adsorb, so it is necessary to change objects of different weights multiple times, making the testing process time-consuming and labor-intensive; and it cannot accurately test the adsorption force.

[0006] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0007] The electrostatic suction cup adsorption force testing equipment includes a bottom support plate, a support column is installed on the bottom support plate, a top support plate is installed on the top of the support column, an electric telescopic rod is installed on the top support plate, a mounting base for installing the electrostatic suction cup is installed at the bottom of the electric telescopic rod, a spring is installed on the bottom support plate, and an adsorption plate is installed on the top of the spring.

[0008] As a preferred solution of the electrostatic suction cup adsorption force testing equipment described in the present invention, an L-shaped support rod is welded to the outer wall of the support column, a support plate is installed on the top of the L-shaped support rod, and the adsorption plate is placed on the support plate.

[0009] As a preferred solution of the electrostatic chuck adsorption force testing device described in the utility model, wherein: the support column is provided with scale lines, and pointers are welded at both ends of the adsorption plate.

[0010] As a preferred solution of the electrostatic suction cup adsorption force testing equipment described in the present invention, wherein: a first support connecting seat is welded to the bottom of the support plate, the top end of the L-shaped support rod is inserted into the first support connecting seat, and the first support connecting seat and the L-shaped support rod are fixed by bolts.

[0011] As a preferred solution of the electrostatic suction cup adsorption force testing equipment described in the utility model, wherein: the upper and lower ends of the spring are respectively welded with a first mounting plate and a second mounting plate, and the first mounting plate and the second mounting plate are respectively fixed between the adsorption plate and the bottom support plate by bolts.

[0012] As a preferred solution of the electrostatic chuck adsorption force testing equipment described in the utility model, wherein: the mounting seat is a hollow structure with an open bottom, the top end of the electrostatic chuck is inserted into the mounting seat, and the mounting seat and the electrostatic chuck are fixed by bolts.

[0013] As a preferred solution of the electrostatic chuck adsorption force testing device described in the present invention, wherein: sliders are welded at both ends of the mounting seat, a slide groove is opened on the support column, and the inner wall of the slide groove is slidably connected to the slider.

[0014] As a preferred embodiment of the electrostatic chuck adsorption force testing device of the present invention, a second support connection seat is welded to the bottom end of the top support plate, the top end of the electric telescopic rod is inserted into the second support connection seat, and the second support connection seat and the electric telescopic rod are fixed by bolts;

[0015] A third supporting and connecting seat is welded to the top end of the mounting seat, the bottom end of the electric telescopic rod is inserted into the third supporting and connecting seat, and the third supporting and connecting seat and the electric telescopic rod are fixed by bolts.

[0016] Compared with existing technologies:

[0017] An electric telescopic rod is set to drive the electrostatic chuck to rise. The electrostatic chuck rises and drives the adsorption plate to rise. The adsorption plate stretches the spring, so that the suction force of the electrostatic chuck can be tested. When the adsorption plate and the electrostatic chuck are separated, the maximum adsorption force of the electrostatic chuck can be obtained according to the scale line. Therefore, the test is more accurate, and the test process is simple and easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the structure provided by the utility model;

[0019] Figure 2 The utility model provides Figure 1 Enlarged view of point A in the middle;

[0020] Figure 3The utility model provides Figure 1 Enlarged view of point B in the middle;

[0021] Figure 4 The utility model provides Figure 1 A partial cross-sectional view of .

[0022] In the figure: bottom support plate 1, third support connecting seat 2, support column 3, slide groove 31, fourth support connecting seat 4, top support plate 5, second support connecting seat 6, electric telescopic rod 7, third support connecting seat 8, mounting seat 9, slider 91, electrostatic suction cup 10, spring 11, first mounting plate 111, second mounting plate 112, adsorption plate 12, L-shaped support rod 13, pointer 14, first support connecting seat 15, support plate 16. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0024] This utility model provides an electrostatic chuck adsorption force test device, please refer to Figure 1-4 , including a bottom support plate 1, a support column 3 is installed on the bottom support plate 1, specifically, a third support connecting seat 2 is welded on the bottom support plate 1, the inner wall of the third support connecting seat 2 is plugged into the support column 3, and the support column 3 and the third support connecting seat 2 are fixed by bolts, and a top support plate 5 is installed on the top of the support column 3, specifically, a fourth support connecting seat 4 is welded on the bottom of the top support plate 5, the inner wall of the fourth support connecting seat 4 is plugged into the support column 3, and the support column 3 and the fourth support connecting seat 4 are fixed by bolts, an electric telescopic rod 7 is installed on the top support plate 5, specifically, a second support connecting seat 6 is welded on the bottom end of the top support plate 5, the top end of the electric telescopic rod 7 is inserted into the second support connecting seat 6, and the second support connecting seat 6 and The electric telescopic rods 7 are fixed by bolts, and a mounting base 9 for installing an electrostatic suction cup 10 is installed at the bottom of the electric telescopic rod 7. Specifically, a third support connecting base 8 is welded to the top of the mounting base 9, and the bottom end of the electric telescopic rod 7 is inserted into the third support connecting base 8, and the third support connecting base 8 and the electric telescopic rod 7 are fixed by bolts. Sliders 91 are welded at both ends of the mounting base 9, and a slide groove 31 is provided on the support column 3. The inner wall of the slide groove 31 is slidably connected to the slider 91. Specifically, the mounting base 9 is a hollow structure with an opening at the bottom, and the top of the electrostatic suction cup 10 is inserted into the mounting base 9, and the mounting base 9 and the electrostatic suction cup 10 are fixed by bolts. The bottom support plate 1 is installed with a spring 11, and the top of the spring 11 is installed with an adsorption plate 12.

[0025] An L-shaped support rod 13 is welded to the outer wall of the support column 3, and a support plate 16 is installed at the top of the L-shaped support rod 13. Specifically, a first support connecting seat 15 is welded to the bottom of the support plate 16, and the top of the L-shaped support rod 13 is inserted into the first support connecting seat 15, and the first support connecting seat 15 and the L-shaped support rod 13 are fixed by bolts. The adsorption plate 12 is placed on the support plate 16, and the spring 11 is in a normal state (non-compressed and extended state) at this time; the support plate 16 is set to rubber material, so that when the adsorption plate 12 is separated from the electrostatic suction cup 10, the noise when the adsorption plate 12 drops onto the support plate 16 under the elastic action of the spring 11 is smaller.

[0026] Scale lines are provided on the support column 3 , and pointers 14 are welded to both ends of the adsorption plate 12 .

[0027] A first mounting plate 111 and a second mounting plate 112 are welded to the upper and lower ends of the spring 11 , respectively. The first mounting plate 111 and the second mounting plate 112 are fixed to the adsorption plate 12 and the bottom support plate 1 by bolts, respectively.

[0028] During actual use, the electrostatic suction cup 10 to be tested is inserted into the mounting base 9, and then the electrostatic suction cup 10 and the mounting base 9 are fixed by bolts; the electric telescopic rod 7 extends to drive the electrostatic suction cup 10 to contact the adsorption plate 12, and the electrostatic suction cup 10 adsorbs the adsorption plate 12; the electric telescopic rod 7 rises to drive the adsorption plate 12 to rise (the electric telescopic rod 7 should be slowly retracted), and the adsorption plate 12 drives the spring 11 to be stretched, and the height to which the adsorption plate 12 can rise is observed. According to the rising height of the adsorption plate 12 and the elastic coefficient of the spring 11, the downward pulling force (elastic force) exerted on the adsorption plate 12 can be obtained, and the position of the scale line pointed by the pointer 14 is observed when the adsorption plate 12 is separated from the electrostatic suction cup 10.

[0029] While the present invention has been described above with reference to specific embodiments, various modifications may be made and equivalent components may be substituted without departing from the scope of the present invention. In particular, as long as no structural conflicts exist, the various features of the embodiments disclosed herein may be combined with one another in any manner, and the omission of an exhaustive description of these combinations in this specification is solely for the sake of space and resource conservation. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions within the scope of the claims.

Claims

1. An electrostatic chuck adsorption force testing device, comprising a bottom support plate (1), a support column (3) mounted on the bottom support plate (1), a top support plate (5) mounted on the top of the support column (3), characterized in that: An electric telescopic rod (7) is installed on the top support plate (5), a mounting seat (9) for mounting an electrostatic suction cup (10) is installed at the bottom of the electric telescopic rod (7), a spring (11) is installed on the bottom support plate (1), and an adsorption plate (12) is installed at the top end of the spring (11).

2. The electrostatic chuck adsorption force testing device according to claim 1, characterized in that: An L-shaped support rod (13) is welded to the outer wall of the support column (3), a support plate (16) is installed at the top end of the L-shaped support rod (13), and the adsorption plate (12) is placed on the support plate (16).

3. The electrostatic chuck adsorption force testing device according to claim 2, characterized in that: The support column (3) is provided with scale lines, and pointers (14) are welded to both ends of the adsorption plate (12).

4. The electrostatic chuck adsorption force testing device according to claim 2 or 3, characterized in that: A first support connection seat (15) is welded to the bottom of the support plate (16), the top end of the L-shaped support rod (13) is inserted into the first support connection seat (15), and the first support connection seat (15) and the L-shaped support rod (13) are fixed by bolts.

5. The electrostatic chuck adsorption force testing device according to claim 1, characterized in that: A first mounting plate (111) and a second mounting plate (112) are respectively welded to the upper and lower ends of the spring (11); the first mounting plate (111) and the second mounting plate (112) are respectively fixed to the adsorption plate (12) and the bottom support plate (1) via bolts.

6. The electrostatic chuck adsorption force testing device according to claim 3, characterized in that: The mounting seat (9) is a hollow structure with an open bottom, the top end of the electrostatic suction cup (10) is inserted into the mounting seat (9), and the mounting seat (9) and the electrostatic suction cup (10) are fixed by bolts.

7. The electrostatic chuck adsorption force testing device according to claim 6, characterized in that: Slide blocks (91) are welded to both ends of the mounting seat (9), a slide groove (31) is provided on the support column (3), and the inner wall of the slide groove (31) is slidably connected to the slide block (91).

8. The electrostatic chuck adsorption force testing device according to claim 1, characterized in that: A second support connection seat (6) is welded to the bottom end of the top support plate (5), the top end of the electric telescopic rod (7) is inserted into the second support connection seat (6), and the second support connection seat (6) and the electric telescopic rod (7) are fixed by bolts; A third supporting connection seat (8) is welded to the top end of the mounting seat (9), the bottom end of the electric telescopic rod (7) is inserted into the third supporting connection seat (8), and the third supporting connection seat (8) and the electric telescopic rod (7) are fixed by bolts.

Images