Developing cavity structure of gluing developing machine

Abstract

The utility model discloses a developing cavity structure of a gluing developing machine, which relates to the technical field of gluing developing machines and comprises an outer developing cavity, an inner developing cavity is arranged in the outer developing cavity, one end of the inner developing cavity is fixedly connected with a sealing slide block, a gluing developing sucker is arranged at the extending end of the inner developing cavity, and the sealing slide block is fixedly connected with the sealing slide block. An adjusting mechanism acting on the outer developing cavity is arranged at the bottom of the gluing developing suction cup, and the adjusting mechanism is composed of an air pressure sensor, a relay, a motor, an adjusting lead screw and a connecting rod. Therefore, the total space inside the outer developing cavity and the inner developing cavity is increased, overlarge air pressure is released, damage to the cavities caused by overlarge pressure intensity inside the cavities is avoided, and certain buffer time is provided for workers to solve the air pressure problem.

Description

Technical Field

[0001] The utility model relates to the technical field of glue coating and developing machines, in particular to a developing cavity structure of a glue coating and developing machine. Background Art

[0002] The glue coating and developing machine is used to coat the surface of semiconductor wafers with glue to make the surface uniform and flat, so as to facilitate the subsequent development, rinsing and drying processes to be carried out one by one. It utilizes existing automated equipment, integrates the mechanical transmission wafer loading and unloading system and the glue coating and developing system to perform intelligent work in the program control system. The developing chamber is a partial component of the glue coating and developing machine, including the glue coating chamber tube, suction nozzle and air pressure control glue amount device structure. However, the existing glue coating and developing chamber has problems such as inaccurate glue flow control, inaccurate glue pressure control, and uncontrollable airflow pressure in the chamber.

[0003] According to a Chinese patent document with publication number CN219737994U, a developing chamber for a coating developer is disclosed. By providing a threaded groove within the developing chamber and a threaded ring column on the inner chamber tube, the developing chamber is adjustable, allowing the pressure within the chamber to be released without damaging the chamber. However, when adjusting the size of the developing chamber, the aforementioned device requires manual rotation of the developing chamber to control its downward movement in order to increase the internal space of the developing chamber, making it impossible to achieve automatic adjustment of the internal space of the developing chamber. Therefore, a developing chamber structure for a coating developer is proposed. Utility Model Content

[0004] The purpose of the present utility model is to provide a developing chamber structure of a glue coating and developing machine to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a developing chamber structure of a glue coating and developing machine, comprising an outer developing chamber, an inner developing chamber arranged inside the outer developing chamber, one end of the inner developing chamber fixedly connected to a sealing slider, the sealing slider slidingly fitting with the inner portion of the outer developing chamber, the other end of the inner developing chamber slidingly passing through the outer developing chamber and being located outside the outer developing chamber, a glue coating and developing suction cup being arranged at the protruding end of the inner developing chamber, an adjusting mechanism acting on the outer developing chamber being arranged at the bottom of the glue coating and developing suction cup, the adjusting mechanism being composed of an air pressure sensor, a relay, and a control unit. The invention consists of an electrical appliance, a motor, an adjusting screw and a connecting rod, wherein the connecting rod is fixedly connected to the outer wall of the outer developing chamber, the adjusting screw is inserted into the inside of the connecting rod and is connected to the connecting rod by threaded fitting, the other end of the adjusting screw is rotatably connected to the bottom of the glue developing suction cup, the motor is fixedly connected to the glue developing suction cup through a fixed plate, a transmission mechanism is provided between the motor and the adjusting screw, the relay is fixed to the bottom of the glue developing suction cup, the air pressure sensor is fixedly connected to the outer wall of the inner developing chamber, and the sensing head of the air pressure sensor extends to the inside of the inner developing chamber.

[0006] As a further preferred embodiment of the present technical solution, the relay is electrically connected to the motor, and the air pressure sensor is signal-connected to the relay.

[0007] As a further preferred embodiment of the present technical solution, the transmission mechanism consists of a driving gear and a driven gear, the output shaft of the motor passes through the fixed plate and is fixedly connected to the driving gear, the other end of the driving gear is rotatably connected to the glue coating and developing suction cup through a rotating shaft, the driven gear is sleeved on the outer wall of the adjusting screw, the driven gear is fixedly connected to the adjusting screw, and the driven gear and the driving gear are meshed with each other.

[0008] As a further preferred embodiment of the present technical solution, an externally threaded sleeve is fixedly connected to the upper end of the inner developing cavity, and the externally threaded sleeve passes through the bottom of the glue coating and developing suction cup and is connected to the glue coating and developing suction cup by threaded engagement.

[0009] As a further preferred embodiment of the present technical solution, an air cavity is provided inside the glue coating and developing suction cup, and a plurality of air outlet holes are provided on the upper surface of the glue coating and developing suction cup, and the air outlet holes are in communication with the air cavity.

[0010] As a further preferred embodiment of the present technical solution, two vacuum suction cups are fixedly mounted on the upper end of the glue coating and developing suction cup, and the two vacuum suction cups are symmetrically distributed.

[0011] As a further preferred embodiment of the present technical solution, a baffle is provided at the center of the upper end of the glue coating and developing suction cup.

[0012] The utility model provides a developing chamber structure of a glue coating and developing machine, which has the following beneficial effects:

[0013] The utility model has a unique structural design. When the air pressure inside the developing chamber is too high, the outer developing chamber can be automatically controlled to move downward, thereby increasing the total space inside the outer developing chamber and the inner developing chamber, so that the excessive air pressure is released, avoiding damage to the chamber caused by excessive pressure inside the chamber, and providing a certain buffer time for the staff to solve the air pressure problem. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 It is a schematic diagram of the dissection of the overall structure of the utility model;

[0016] Figure 3 This is a schematic diagram of the disassembly of the overall structure of the utility model;

[0017] Figure 4 For this utility model Figure 1 Schematic diagram of the structure of A;

[0018] In the figure: 1. External developing chamber; 2. Internal developing chamber; 3. Glue coating developing suction cup; 4. Sealing slider; 5. Externally threaded sleeve; 6. Air cavity; 7. Air outlet; 8. Air pressure sensor; 9. Relay; 10. Motor; 11. Adjusting screw; 12. Connecting rod; 13. Baffle; 14. Vacuum suction cup; 15. Fixed plate; 16. Driving gear; 17. Driven gear. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0020] The utility model provides a technical solution: Figures 1 to 4As shown, in this embodiment, a developing chamber structure of a glue coating and developing machine includes an outer developing chamber 1, an inner developing chamber 2 is provided inside the outer developing chamber 1, one end of the inner developing chamber 2 is fixedly connected to a sealing slider 4, the sealing slider 4 is slidably fitted with the inner part of the outer developing chamber 1, the other end of the inner developing chamber 2 slides through the outer developing chamber 1 and is located outside the outer developing chamber 1, a glue coating and developing suction cup 3 is provided at the protruding end of the inner developing chamber 2, and an adjustment mechanism acting on the outer developing chamber 1 is provided at the bottom of the glue coating and developing suction cup 3. The adjustment mechanism is composed of an air pressure sensor 8, a relay 9, a motor 10, an adjustment screw 11 and a connecting rod 12. The connecting rod 1 2 is fixedly connected to the outer wall of the outer developing chamber 1. The adjusting screw 11 is inserted into the interior of the connecting rod 12 and is connected to the connecting rod 12 through threaded engagement. The other end of the adjusting screw 11 is rotatably connected to the bottom of the glue coating and developing suction cup 3. The motor 10 is fixedly connected to the glue coating and developing suction cup 3 through a fixing plate 15. A transmission mechanism is provided between the motor 10 and the adjusting screw 11. The relay 9 is electrically connected to the motor 10. The relay 9 is fixed to the bottom of the glue coating and developing suction cup 3. The air pressure sensor 8 is fixedly connected to the outer wall of the inner developing chamber 2. The sensing head of the air pressure sensor 8 extends into the interior of the inner developing chamber 2. The air pressure sensor 8 is signal-connected to the relay 9.

[0021] Among them, the transmission mechanism consists of a driving gear 16 and a driven gear 17. The output shaft of the motor 10 passes through the fixed plate 15 and is fixedly connected to the driving gear 16. The other end of the driving gear 16 is rotatably connected to the glue coating and developing suction cup 3 through a rotating shaft. The driven gear 17 is sleeved on the outer wall of the adjusting screw 11. The driven gear 17 is fixedly connected to the adjusting screw 11, and the driven gear 17 and the driving gear 16 are engaged with each other.

[0022] During use, the motor 10 drives the driving gear 16 to rotate, thereby driving the driven gear 17 to rotate. The rotation of the driven gear 17 can drive the adjusting screw 11 to rotate.

[0023] Among them, the upper end of the inner developing cavity 2 is fixedly connected with an external threaded sleeve 5, which passes through the bottom of the glue coating and developing suction cup 3 and is connected to the glue coating and developing suction cup 3 through threaded engagement.

[0024] Among them, an air cavity 6 is opened inside the glue coating and developing suction cup 3, and a plurality of air outlet holes 7 are opened on the upper surface of the glue coating and developing suction cup 3. The air outlet holes 7 are connected with the air cavity 6. Two vacuum suction cups 14 are fixedly installed on the upper end of the glue coating and developing suction cup 3, and the two vacuum suction cups 14 are symmetrically distributed.

[0025] The wafer is placed on the upper ends of the two vacuum suction cups 14 , and the wafer is adsorbed and fixed by the vacuum suction cups 14 .

[0026] A baffle 13 is provided at the center of the upper end of the glue coating and developing suction cup 3 .

[0027] The baffle 13 can be fixedly connected to the glue coating and developing suction cup 3 by fixing bolts. After the baffle 13 is installed, there needs to be a certain gap between it and the glue coating and developing suction cup 3. The gap can ensure the circulation of nitrogen. The set baffle 13 can prevent nitrogen from being ejected from the air outlet 7 and directly impacting the bottom of the wafer, thereby alleviating the impact force.

[0028] The utility model provides a developing chamber structure of a glue coating and developing machine, and the specific working principle is as follows:

[0029] Among them, the model of the air pressure sensor 8 is CY-YD-200, and the model of the relay 9 is RXM4LB2BD. When in use, the air pressure inside the inner developing chamber 2 can be sensed by the air pressure sensor 8. When the air pressure is too high, the air pressure sensor 8 can transmit a signal to the relay 9. The relay 9 will control the output shaft of the motor 10 to rotate for a period of time. The motor 10 will drive the driving gear 16 to rotate, thereby driving the driven gear 17 to rotate. The rotation of the driven gear 17 can drive the adjusting screw 11 to rotate, and then control the connecting rod 12 to move downward. The downward movement of the connecting rod 12 will drive the outer developing chamber 1 to move downward, thereby increasing the total space inside the outer developing chamber 1 and the inner developing chamber 2, so that the excessive air pressure can be released to avoid damage to the chamber due to excessive pressure inside the chamber, thereby providing a certain buffer time for the staff to solve the air pressure problem.

[0030] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A developing chamber structure of a coating and developing machine, comprising an external developing chamber (1), characterized in that: An inner developing chamber (2) is provided inside the outer developing chamber (1), one end of the inner developing chamber (2) is fixedly connected to a sealing slider (4), the sealing slider (4) is slidingly engaged with the inner part of the outer developing chamber (1), the other end of the inner developing chamber (2) slides through the outer developing chamber (1) and is located outside the outer developing chamber (1), a glue coating developing sucker (3) is provided at the protruding end of the inner developing chamber (2), an adjusting mechanism acting on the outer developing chamber (1) is provided at the bottom of the glue coating developing sucker (3), the adjusting mechanism is composed of an air pressure sensor (8), a relay (9), a motor (10), an adjusting screw (11) and a connecting rod (12), the connecting rod (12) 2) is fixedly connected to the outer wall of the external developing chamber (1), the adjusting screw (11) is inserted into the interior of the connecting rod (12) and is connected to the connecting rod (12) by threaded engagement, the other end of the adjusting screw (11) is rotatably connected to the bottom of the glue developing suction cup (3), the motor (10) is fixedly connected to the glue developing suction cup (3) through a fixing plate (15), a transmission mechanism is provided between the motor (10) and the adjusting screw (11), the relay (9) is fixed to the bottom of the glue developing suction cup (3), the air pressure sensor (8) is fixedly connected to the outer wall of the internal developing chamber (2), and the sensing head of the air pressure sensor (8) extends to the interior of the internal developing chamber (2).

2. The developing chamber structure of the coating and developing machine according to claim 1, characterized in that: The relay (9) is electrically connected to the motor (10), and the air pressure sensor (8) is signal-connected to the relay (9).

3. The developing chamber structure of the coating and developing machine according to claim 1, characterized in that: The transmission mechanism is composed of a driving gear (16) and a driven gear (17). The output shaft of the motor (10) passes through the fixed plate (15) and is fixedly connected to the driving gear (16). The other end of the driving gear (16) is rotatably connected to the glue coating and developing sucker (3) through a rotating shaft. The driven gear (17) is sleeved on the outer wall of the adjusting screw (11). The driven gear (17) is fixedly connected to the adjusting screw (11), and the driven gear (17) and the driving gear (16) are meshed with each other.

4. The developing chamber structure of the coating and developing machine according to claim 1, characterized in that: An external threaded sleeve (5) is fixedly connected to the upper end of the inner developing cavity (2); the external threaded sleeve (5) passes through the bottom of the glue coating and developing sucker (3) and is connected to the glue coating and developing sucker (3) through threaded engagement.

5. The developing chamber structure of the coating and developing machine according to claim 1, characterized in that: An air cavity (6) is provided inside the glue coating and developing sucker (3), and a plurality of air outlet holes (7) are provided on the upper surface of the glue coating and developing sucker (3), wherein the air outlet holes (7) are in a communicating state with the air cavity (6).

6. The developing chamber structure of the coating and developing machine according to claim 1, characterized in that: Two vacuum suction cups (14) are fixedly mounted on the upper end of the glue coating and developing suction cup (3), and the two vacuum suction cups (14) are symmetrically distributed.

7. The developing chamber structure of the coating and developing machine according to claim 1, characterized in that: A baffle (13) is provided at the center of the upper end of the glue coating and developing sucker (3).

Images