Baffling type gas-liquid separation device

Abstract

The utility model discloses a baffling type gas-liquid separation device, which comprises a box body, a first baffle plate, a plurality of guide plates and a second baffle plate, the first baffle plate, the plurality of guide plates and the second baffle plate are arranged in the box body, the first baffle plate divides the box body into a baffling area and a direct flow area, the plurality of guide plates are arranged in the baffling area to form a baffling channel, and the second baffle plate is arranged in the direct flow area. The second baffle is installed at the position close to the bottom face of the box body and is in an arch shape protruding towards the top face of the box body. The waste liquid steam in a waste liquid steam-containing gas-liquid mixture discharged by equipment can be condensed by the baffling type gas-liquid separation device, and is discharged out of the box body, so that no condensed waste liquid is accumulated in an exhaust pipeline, the alarm is reduced or eliminated, and meanwhile, the waste liquid steam in the waste liquid steam-containing gas-liquid mixture discharged by the equipment can be condensed by the baffling type gas-liquid separation device. The risk that parts such as valves are possibly corroded by corrosive waste liquid is effectively avoided; in addition, the box body of the baffling type gas-liquid separation device is additionally provided with radiating fins, so that the condensation effect is effectively improved, and waste liquid steam can be more favorably removed.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas emission, in particular to a baffled gas-liquid separation device. Background Art

[0002] Many chemical solvents are used in the semiconductor processing process. For example, the photoresist used in the coating machine contains a large proportion of N-methyl-2-pyrrolidone (NMP). When the hot plate is baked after the coating is completed, a large amount of NMP vapor is generated, which condenses and accumulates in the exhaust pipe. When the amount exceeds a certain amount, the exhaust alarm will be triggered, causing downtime, resulting in wafer rework and seriously affecting production capacity. In addition, when the condensed NMP liquid flows through the exhaust pipe to the factory-side valve, it will also cause the valve to be corroded, increasing maintenance costs. Utility Model Content

[0003] The technical problem to be solved by the utility model is to provide a baffled gas-liquid separation device, which can separate the waste gas and waste liquid in the exhaust pipe. After separation, the waste liquid and waste gas are discharged separately, and the waste liquid will not accumulate in the exhaust pipe or flow in the exhaust pipe.

[0004] In order to solve the above technical problems, the utility model provides a baffled gas-liquid separation device, comprising:

[0005] The box body has a first side wall and a second side wall arranged opposite to each other;

[0006] a first baffle installed in the box body, wherein the top of the first baffle is in sealing contact with the inner top wall of the box body, the first baffle extends vertically to a bottom position close to the inner bottom surface of the box body, a deflection area is formed between the first baffle and the first side wall, and a direct flow area is formed between the first baffle and the second side wall;

[0007] a plurality of guide plates installed in the deflection area to form a deflection channel for the flow of the gas-liquid mixture, wherein the guide plates are arranged obliquely downward from a position where they contact the first baffle plate or from a position where they contact the first sidewall so that the condensate flows along the guide plates to an adjacent lower layer of guide plates;

[0008] The second baffle is installed near the bottom of the box body. The second baffle is formed into an arch shape. The arch of the second baffle protrudes toward the top surface of the box body. The two side edges of the second baffle extend to the first side wall and the second side wall respectively.

[0009] Specifically, the angle between the guide plate and the horizontal direction is 0° to 45°.

[0010] Specifically, the angle between the guide plate and the horizontal direction is 10° to 30°.

[0011] Specifically, an inlet is provided on the top wall of the box body at the deflection area.

[0012] Specifically, a pressure relief port is provided on the top wall of the box body at the deflection area and adjacent to the inlet.

[0013] Specifically, an outlet is provided on the second side wall of the box body near the top of the box body.

[0014] Specifically, the bottom surface of the box body is formed into a V-shaped bottom surface, and a liquid discharge port is provided at the lowest point of the bottom surface, and the liquid discharge port is located below the second baffle.

[0015] Specifically, there is a gap between the bottom of the first baffle and the second baffle.

[0016] Specifically, the extension length of the guide plate in the horizontal direction accounts for 3 / 5 to 4 / 5 of the distance between the first side wall and the first baffle.

[0017] Specifically, the outer surface of the box is provided with heat sinks.

[0018] The utility model connects the baffle-type gas-liquid separation device in series in the exhaust pipeline, or directly connects it to the exhaust equipment. When the gas-liquid mixture containing waste liquid vapor discharged from the equipment flows through the baffle-type gas-liquid separation device, the waste liquid vapor is condensed in the baffle area and flows along the guide plate, and is finally discharged from the drain port, while the waste gas continues to enter the exhaust pipeline from the direct current area. Since the waste liquid vapor has been condensed and eliminated, there is no condensed waste liquid accumulation in the exhaust pipeline, which reduces or eliminates the alarm. At the same time, it effectively avoids the risk that valves and other components may be corroded by corrosive waste liquid. In addition, the box body of the baffle-type gas-liquid separation device of the utility model effectively increases the condensation effect by adding heat sinks, which is more conducive to removing waste liquid vapor. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the present invention, the following is a brief introduction to the drawings required for the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 This is a schematic diagram of an embodiment of a baffled gas-liquid separation device of the present utility model;

[0021] Figure 2 This is a cross-sectional view of an embodiment of the baffled gas-liquid separation device of the present utility model;

[0022] In the figure, 1-box; 11-first side wall; 12-second side wall; 13-inlet; 14-pressure relief port; 15-outlet; 16-drain port; 17-heat sink; 2-first baffle; 3-guide plate; 4-second baffle. DETAILED DESCRIPTION

[0023] The following is a clear and complete description of the technical solutions of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0024] refer to Figure 1 and 2 , shows a baffled gas-liquid separation device of the present invention, comprising:

[0025] The box body has a first side wall and a second side wall arranged opposite to each other;

[0026] a first baffle installed in the box body, wherein the top of the first baffle is in sealing contact with the inner top wall of the box body, the first baffle extends vertically to a bottom position close to the inner bottom surface of the box body, a deflection area is formed between the first baffle and the first side wall, and a direct flow area is formed between the first baffle and the second side wall;

[0027] a plurality of guide plates installed in the deflection area to form a deflection channel for the flow of the gas-liquid mixture, wherein the guide plates are arranged obliquely downward from a position where they contact the first baffle plate or from a position where they contact the first sidewall so that the condensate flows along the guide plates to an adjacent lower layer of guide plates;

[0028] The second baffle is installed near the bottom of the box body. The second baffle is formed into an arch shape. The arch of the second baffle protrudes toward the top surface of the box body. The two side edges of the second baffle extend to the first side wall and the second side wall respectively.

[0029] In the embodiment of the present invention, the gas-liquid mixture refers to the steam containing waste liquid in the exhaust gas, and the mixture formed by the exhaust gas and the waste liquid steam. The baffled gas-liquid separation device provided by the present invention is generally connected in series in the exhaust pipeline, and is preferably directly connected to the exhaust equipment of the gas-liquid mixture. The equipment discharges the gas-liquid mixture directly into the baffled gas-liquid separation device of the present invention, and the waste liquid steam is condensed, and the remaining waste gas is then discharged into the exhaust pipeline. Since the waste gas no longer contains waste liquid steam after passing through the baffled gas-liquid separation device, the presence of condensate in the exhaust pipeline is effectively avoided, thereby effectively avoiding the impact of the exhaust alarm on production capacity. At the same time, since there is no condensed waste liquid in the exhaust pipeline, the corrosive effect of the waste liquid on components including valves is also well avoided when the waste liquid is corrosive.

[0030] The first baffle is used to divide the box into two spaces: a deflection zone and a direct flow zone. The waste liquid vapor is mainly condensed in the deflection zone, and the gas-liquid mixture flows in the deflection channel defined by multiple guide plates in the deflection zone. During the flow process, when the waste liquid vapor contacts the inner surface of the box and the surfaces of the guide plates, baffles, etc., the vapor condenses into liquid. Since the guide plates are set in an oblique downward direction, the condensed waste liquid flows along the surface of the guide plates and eventually flows to the second baffle, and flows from the edge of the second baffle to the bottom of the box. The waste gas continues to flow from the deflection zone to the direct flow zone and enters the exhaust pipe from the direct flow zone. Increasing the number of guide plates is conducive to the full condensation of the waste liquid vapor. The second baffle is set in an arched shape to effectively prevent the horizontal airflow formed by the deflection from forming a vacuum effect at the drain port at the bottom of the box, affecting the discharge of the condensed waste liquid. It should be noted that the first side wall and the second side wall of the box are defined as the left and right side walls, and the two side walls perpendicular to the left and right side walls are the front and rear side walls respectively. The first baffle, multiple guide plates and the second baffle are in sealed contact with the front and rear side walls to ensure that the gas-liquid mixture flows along the deflection channel.

[0031] For example Figure 2A specific structure with four guide plates is shown, wherein one side of two guide plates is in contact with the first side wall of the box body (or sealed connected, such as by welding or other connection methods), and extends toward the first baffle plate, and a gap is left between the other side of the two guide plates and the first baffle plate for deflection of the gas-liquid mixture; one side of the other two guide plates is in contact with the first baffle plate (or sealed connected, such as by welding or other connection methods), and extends toward the first side wall, and a gap is left between the other side of the two guide plates and the first side wall for deflection of the gas-liquid mixture, and the two guide plates sealed connected to the first side wall and the two guide plates connected to the first baffle plate are alternately arranged to form a deflection circuit; in other specific embodiments, the guide plates can also be three, five, six, seven, etc., and the setting principle is the same as the setting principle of the four guide plates. It should be noted that the horizontal extension length of the guide plate accounts for 3 / 5 to 4 / 5 of the distance between the first side wall and the first baffle, which is equivalent to the gap width between the guide plate and the first side wall or the first baffle accounting for 1 / 5 to 1 (excluding 1) of the distance between the first side wall and the first baffle. At the same time, if the horizontal extension length of the guide plate is too small, such as less than 3 / 5 of the distance between the first side wall and the first baffle, the effective stroke of the deflection channel (deflection circuit) formed by it is short, which affects the condensation effect.

[0032] In one specific embodiment, the guide plate has an angle with the horizontal direction of 0° to 45°, preferably 10° to 30°. It is understood that the guide plate is arranged obliquely downward from the first side wall or the first baffle plate so that the condensed waste liquid flows from top to bottom and ultimately to the bottom of the box. If the angle between the guide plate and the horizontal direction is too large (equivalent to a steep slope), the condensation effect may be affected. If the angle is too small (equivalent to a gentle slope), the speed of the condensate flow may be affected. Therefore, the angle between the guide plate and the horizontal direction should be reasonably set, for example, 15°.

[0033] In a specific embodiment, the top wall of the box body is provided with an inlet located at the deflection area, and the second side wall of the box body is provided with an outlet located near the top of the box body. It is understood that the positions of the inlet and outlet can maximize the flow rate, facilitate the full condensation of the steam, and remove the waste liquid vapor. Preferably, the top wall of the box body is provided with a pressure relief port located at the deflection area and adjacent to the inlet, so as to relieve pressure in the event that the condensate at the bottom may accumulate due to the influence of the internal airflow pressure and cannot be discharged.

[0034] In one specific embodiment, the bottom surface of the box body is formed into a V-shape, and a drain port is defined at the lowest point of the bottom surface, the drain port being located below the second baffle. It is understood that the V-shaped bottom surface facilitates the collection of condensed waste liquid, but this restriction is not desired and may alternatively be a hemispherical shape or other shape that facilitates the collection of condensed waste liquid.

[0035] In a specific embodiment, a gap is provided between the bottom of the first baffle and the second baffle to provide a flow channel.

[0036] In a specific embodiment, the outer surface of the housing is provided with heat sinks. It is understood that providing heat sinks on the outer surface of the housing can effectively increase the heat dissipation area (especially, for example, on the outer surfaces of the front and rear side walls), thereby improving the condensation effect. Without being bound by this, for example, to improve the condensation effect, condensation pipes can be added to the surface of the housing, through which refrigerant flows to increase the condensation effect, or refrigerant flow channels can be provided within the interior of each side wall of the housing, the first baffle, each guide plate, and the second baffle. These methods for improving the condensation effect can be achieved using existing technologies and will not be further described here.

[0037] The above description is only a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A baffled gas-liquid separation device, characterized in that: Connected in series in the exhaust pipe, including: The box body has a first side wall and a second side wall arranged opposite to each other; a first baffle installed in the box body, wherein the top of the first baffle is in sealing contact with the inner top wall of the box body, the first baffle extends vertically to a bottom position close to the inner bottom surface of the box body, a deflection area is formed between the first baffle and the first side wall, and a direct flow area is formed between the first baffle and the second side wall; a plurality of guide plates installed in the deflection area to form a deflection channel for the flow of the gas-liquid mixture, wherein the guide plates are arranged obliquely downward from a position where they contact the first baffle plate or from a position where they contact the first sidewall so that the condensate flows along the guide plates to an adjacent lower layer of guide plates; The second baffle is installed near the bottom of the box body. The second baffle is formed into an arch shape. The arch of the second baffle protrudes toward the top surface of the box body. The two side edges of the second baffle extend to the first side wall and the second side wall respectively.

2. The baffled gas-liquid separation device according to claim 1, characterized in that: The angle between the guide plate and the horizontal direction is 0° to 45°.

3. The baffled gas-liquid separation device according to claim 2, characterized in that: The angle between the guide plate and the horizontal direction is 10° to 30°.

4. The baffled gas-liquid separation device according to claim 1, characterized in that: The top wall of the box body is provided with an inlet at the position of the deflection area.

5. The baffled gas-liquid separation device according to claim 4, characterized in that: The top wall of the box body is located at the deflection area and is provided with a pressure relief port adjacent to the inlet.

6. The baffled gas-liquid separation device according to claim 1, characterized in that: An outlet is formed on the second side wall of the box body near the top of the box body.

7. The baffled gas-liquid separation device according to claim 1, characterized in that: The bottom surface of the box body is formed into a V-shaped bottom surface, and a liquid discharge port is provided at the lowest point of the bottom surface. The liquid discharge port is located below the second baffle.

8. The baffled gas-liquid separation device according to claim 1, characterized in that: A gap is defined between the bottom of the first baffle and the second baffle.

9. The baffled gas-liquid separation device according to claim 1, characterized in that: The extension length of the guide plate in the horizontal direction accounts for 3 / 5 to 4 / 5 of the distance between the first side wall and the first baffle.

10. The baffled gas-liquid separation device according to claim 1, characterized in that: The outer surface of the box is provided with heat sinks.

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