Fluid mixing device

Abstract

The utility model provides a fluid mixing device which comprises a front switch valve, a Tesla valve, an electromagnetic mixing unit and a rear switch valve. The front switch valve and the rear switch valve are arranged on the Tesla valve at an interval; and the electromagnetic mixing unit is communicated with the output end of the Tesla valve. The device comprises a Tesla valve and an electromagnetic mixing unit, and when fluid flows forwards along the Tesla valve, the Tesla valve can mix the fluid; when the fluid reversely flows along the Tesla valve, the Tesla valve has a non-return effect, so that the pressure of the fluid on the front switch valve and the pressure of the fluid on the rear switch valve are reduced, namely, the water hammer effect is relieved; and the electromagnetic mixing unit can be used for further mixing the mixture output by the Tesla valve. The unexpected effect is that after more than two fluids flow through the device, the uniformity of the mixture output by the device is more uniform; in addition, the service life of the front switch valve and the rear switch valve is longer.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a device for mixing fluids. Background Art

[0002] During the wafer manufacturing process, cleaning equipment is required to clean the wafers. Currently, cleaning equipment generally uses a liquid mixing device to mix multiple liquids to form a mixture, and then uses the mixture to clean the wafers.

[0003] Current devices for mixing liquids are usually as follows Figure 1 As shown, it includes a mixing tube 1 and a tank 2 that are interconnected. A first switch valve 3 and multiple second switch valves 4 are provided on the mixing tube 1. Deionized water flows into the mixing tube 1 through the first switch valve 3, and various chemical liquids flow into the mixing tube 1 through the corresponding second switch valves 4. Depending on the material to be cleaned, it is possible to choose which second switch valves 4 to open and which second switch valves 4 to close. When the first switch valve 3 and at least one second switch valve 4 are opened at the same time, the deionized water and the chemical liquid are preliminarily mixed in the mixing tube 1, and then flow into the tank 2 for further mixing. The wafer is placed in the tank 2 for cleaning. Figure 1 In the figure, the arrow in the mixing tube 1 indicates the direction of liquid flow. The first on-off valve 3 is larger than the second on-off valve 4 to distinguish the different types of liquids flowing into the first on-off valve 3 and the second on-off valve 4. In actual use, the first on-off valve 3 and the second on-off valve 4 can be the same or different in size and type.

[0004] However, whenever liquid mixing is performed, the liquid in the mixing tube 1 flows in one direction, which results in an uneven distribution of the mixture just added to the tank 2. It takes a while for the distribution of the mixture in the tank 2 to become uniform, which results in different levels of cleanliness of the wafers cleaned at different times, affecting the uniformity of the process. Secondly, the irregular backflow of liquid and gas in the mixing tube 1 also affects the uniformity of the mixture. Thirdly, whenever the states of the first switch valve 3 and the second switch valve 4 are switched, a water hammer effect will occur, and the liquid will exert pressure on the first switch valve 3 and the second switch valve 4. Long-term switching will have a great impact on the service life of the first switch valve 3 and the second switch valve 4. Utility Model Content

[0005] The utility model provides a fluid mixing device to solve the technical problems of uneven fluid mixing and short service life of a switch valve.

[0006] In order to solve the above technical problems, the utility model provides a device for mixing fluids, including a front switch valve, a Tesla valve, an electromagnetic mixing unit and a rear switch valve; the front switch valve and the rear switch valve are arranged at intervals on the Tesla valve; the electromagnetic mixing unit is connected to the output end of the Tesla valve.

[0007] Optionally, the Tesla valve includes an input channel, a mixing channel and an output channel connected in sequence; the front switching valve is connected to the input port of the input channel; the rear switching valve is connected to the mixing channel; and the electromagnetic mixing unit is connected to the output port of the output channel.

[0008] Optionally, there are multiple mixing channels and multiple post-switch valves, and one post-switch valve is provided on each mixing channel.

[0009] Optionally, the mixing channel is in the shape of a water drop.

[0010] Optionally, the mixing channel includes arc segments and pointed segments; adjacent arc segments are alternately arranged on both sides of the output channel, and the post-switching valve is connected to the corresponding arc segment of the mixing channel; the pointed segment is connected to the adjacent mixing channel.

[0011] Optionally, a guide plate is provided in the mixing channel, and an angle a is formed between the guide plate and an inner wall of the mixing channel, and the angle a ranges from 25° to 35°.

[0012] Optionally, a plurality of guide plates are provided in the mixing channel.

[0013] Optionally, a plurality of guide plates are evenly distributed on the inner wall of the mixing channel.

[0014] Optionally, the electromagnetic mixing unit includes a pipeline, a magnetic block and a coil; the pipeline is connected to the output end of the Tesla valve, the magnetic block is installed in the pipeline, and the coil is arranged outside the pipeline.

[0015] Optionally, the magnetic block is spherical in shape.

[0016] This utility model provides a fluid mixing device comprising a Tesla valve and an electromagnetic mixing unit. When fluid flows in the forward direction through the Tesla valve, the Tesla valve mixes the fluids. When fluid flows in the reverse direction through the Tesla valve, the Tesla valve acts as a check valve, reducing the pressure exerted on the front and rear switch valves, thereby mitigating the water hammer effect. The electromagnetic mixing unit further mixes the mixture output by the Tesla valve. An unexpected effect is that after two or more fluids flow through the device, the output mixture becomes more uniform. Furthermore, the service life of the front and rear switch valves is extended. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a liquid mixing device in the prior art.

[0018] Figure 2 This is a schematic structural diagram of a fluid mixing device provided in one embodiment of the present utility model.

[0019] Figure 3 yes Figure 2 Schematic diagram of the right side of the electromagnetic mixing unit.

[0020] Figure 4 This is a schematic diagram of a Tesla valve provided by an embodiment of the present invention for mixing fluids.

[0021] Figure 5 This is a schematic diagram of a Tesla valve for preventing fluid from flowing backwards, provided by an embodiment of the present invention.

[0022] [Description of reference numerals is as follows]:

[0023] Mixing pipe-1, tank-2, first switch valve-3, second switch valve-4;

[0024] Pre-switch valve-11, Tesla valve-12, electromagnetic mixing unit-13, post-switch valve-14;

[0025] Input channel-121, mixing channel-122, output channel-123;

[0026] Arc segment-1221, sharp angle segment-1222, guide plate-1223;

[0027] Pipe-131, magnet-132, coil-133. DETAILED DESCRIPTION

[0028] To make the purpose, advantages, and features of the present invention more clear, the following is a detailed description of a fluid mixing device proposed in the present invention, with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and are not to exact scale, and are only used to facilitate and clearly illustrate the purpose of the embodiments of the present invention.

[0029] In the description of this utility model, the terms "first," "second," and other qualifiers are added for convenience of description and reference and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, features qualified with qualifiers such as "first," "second," and the like may explicitly or implicitly include one or more of such features.

[0030] like Figure 2-Figure 5As shown, this embodiment provides a device for mixing fluids, including a front switch valve 11, a Tesla valve 12, an electromagnetic mixing unit 13 and a rear switch valve 14; the front switch valve 11 and the rear switch valve 14 are arranged at intervals on the Tesla valve 12; the electromagnetic mixing unit 13 is connected to the output end of the Tesla valve 12.

[0031] The fluid may be liquid and / or gas, such as liquid for cleaning wafers; the front switch valve 11 and the rear switch valve 14 may be solenoid valves; and the electromagnetic mixing unit 13 is used to further mix the mixture output by the Tesla valve 12. Figure 2 In the figure, a spring and a T-shaped valve core are used to indicate that the front switch valve 11 is larger than the rear switch valve 14. The larger size of the front switch valve 11 is to distinguish the different types of fluids flowing into the front switch valve 11 and the rear switch valve 14. In actual use, the size and type of the front switch valve 11 and the rear switch valve 14 can be the same or different. Figure 4 and Figure 5 The arrows in the Tesla valve 12 indicate the flow direction of the fluid.

[0032] This embodiment provides a fluid mixing device, including a Tesla valve 12 and an electromagnetic mixing unit 13, such as Figure 2 and Figure 4 As shown, when the fluid flows in the forward direction along the Tesla valve 12, the Tesla valve 12 can mix the fluid; Figure 2 and Figure 5 As shown, when fluid flows in the reverse direction along the Tesla valve 12, the Tesla valve 12 has a check effect, reducing the pressure exerted by the fluid on the front switch valve 11 and the rear switch valve 14, thereby mitigating the water hammer effect. The electromagnetic mixing unit 13 further mixes the mixture output by the Tesla valve 12. An unexpected effect is that after two or more fluids flow through this device, the output mixture becomes more uniform. In addition, the service life of the front switch valve 11 and the rear switch valve 14 is extended.

[0033] Optional, such as Figure 2 As shown, the Tesla valve 12 includes an input channel 121, a mixing channel 122, and an output channel 123, which are sequentially connected. The pre-switching valve 11 is connected to the input port of the input channel 121; the post-switching valve 14 is connected to the mixing channel 122; and the electromagnetic mixing unit 13 is connected to the output port of the output channel 123. The pre-switching valve 11 can be used to input deionized water, and the post-switching valve 14 can be used to input chemical liquids. By inputting deionized water from the input port of the input channel 121, the entire Tesla valve 12 is filled with deionized water, preventing the chemical liquid input by the post-switching valve 14 from corroding the inner wall of the Tesla valve 12.

[0034] Optional, such as Figure 2 As shown, there are multiple mixing channels 122 and multiple post-switch valves 14, with one post-switch valve 14 provided on each mixing channel 122. Different post-switch valves 14 can input different fluids, allowing the different fluids to be mixed and then used to clean the wafers to meet production needs.

[0035] Optional, such as Figure 2 As shown, the shape of the mixing channel 122 is a teardrop shape. This facilitates the manufacture of the mixing channel 122. In other embodiments, the shape of the mixing channel 122 can be other shapes.

[0036] Optional, such as Figure 2 and Figure 4 As shown, the mixing channel 122 includes arc segments 1221 and sharp-angled segments 1222; adjacent arc segments 1221 are alternately arranged on both sides of the output channel 123, and the post-on / off valve 14 communicates with the corresponding arc segments 1221 of the mixing channel 122; the sharp-angled segments 1222 communicate with the adjacent mixing channel 122. Adjacent arc segments 1221 are alternately arranged on both sides of the output channel 123, and the post-on / off valve 14 communicates with the corresponding arc segments 1221 of the mixing channel 122. This increases the spacing between adjacent post-on / off valves 14, facilitates installation of the post-on / off valves 14, and improves the fluid mixing effect.

[0037] Optional, such as Figure 4 As shown, a guide plate 1223 is provided in the mixing channel 122, and the included angle between the guide plate 1223 and the inner wall of the mixing channel 122 is a, and the range of a is 25° to 35°. The guide plate 1223 can increase the forward flow velocity of the fluid and the reverse flow prevention effect.

[0038] Optional, such as Figure 4 As shown, a plurality of guide plates 1223 are provided in the mixing channel 122, which can further increase the forward flow velocity and reverse anti-return effect of the fluid.

[0039] Optional, such as Figure 4 As shown, the plurality of guide plates 1223 are evenly distributed on the inner wall of the mixing channel 122 , which can make the flow velocity of each section in the mixing channel 122 more stable.

[0040] Optional, such as Figure 2 and Figure 3As shown, the electromagnetic mixing unit 13 includes a pipe 131, a magnet 132 and a coil 133; the pipe 131 is connected to the output end of the Tesla valve 12, the magnet 132 is installed in the pipe 131, and the coil 133 is arranged outside the pipe 131. When current is passed through the coil 133, a magnetic field is generated. The size of the magnetic field can be changed by changing the on / off and size of the current. The magnet 132 can move under the action of the changing magnetic field, thereby mixing the fluid. Figure 3 In FIG. 1 , the circle on the left side of the magnetic block 132 represents the output port of the output end of the Tesla valve 12 .

[0041] Optional, such as Figure 3 As shown, the magnetic block 132 is spherical in shape. The spherical magnetic block 132 can rotate quickly in the pipe 131, thereby improving the mixing effect of the fluid.

[0042] Optional, reference Figure 2 As shown, the device further comprises a tank, which is connected to the output end of the electromagnetic mixing unit 13. The mixture output by the electromagnetic mixing unit 13 can be further mixed in the tank to improve the uniformity of the mixture.

[0043] In summary, the present invention provides a fluid mixing device comprising a Tesla valve 12 and an electromagnetic mixing unit 13. When fluid flows forward along the Tesla valve 12, the Tesla valve 12 can mix the fluids. When fluid flows reversely along the Tesla valve 12, the Tesla valve 12 has a check valve effect, reducing the pressure exerted by the fluid on the front switch valve 11 and the rear switch valve 14, thereby mitigating the water hammer effect. The electromagnetic mixing unit 13 can further mix the mixture output by the Tesla valve 12. An unexpected effect is that after two or more fluids flow through the device, the mixture output by the device becomes more uniform. Furthermore, the service life of the front switch valve 11 and the rear switch valve 14 is extended.

[0044] The above description is only a description of the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art based on the above disclosure shall fall within the scope of protection of the present invention.

Claims

1. A device for mixing fluids, characterized in that: It includes a front switch valve, a Tesla valve, an electromagnetic mixing unit and a rear switch valve; the front switch valve and the rear switch valve are arranged on the Tesla valve at intervals; the electromagnetic mixing unit is connected to the output end of the Tesla valve.

2. A fluid mixing device according to claim 1, characterized in that: The Tesla valve includes an input channel, a mixing channel and an output channel connected in sequence; the front switch valve is connected to the input port of the input channel; the rear switch valve is connected to the mixing channel; and the electromagnetic mixing unit is connected to the output port of the output channel.

3. A fluid mixing device according to claim 2, characterized in that: There are multiple mixing channels and multiple post-switch valves, and each mixing channel is provided with one post-switch valve.

4. A fluid mixing device according to claim 3, characterized in that: The mixing channel is in the shape of a water drop.

5. A fluid mixing device according to claim 4, characterized in that: The mixing channel includes an arc segment and a sharp-angle segment; adjacent arc segments are alternately arranged on both sides of the output channel, and the post-switching valve is connected to the corresponding arc segment of the mixing channel; the sharp-angle segment is connected to the adjacent mixing channel.

6. A fluid mixing device as claimed in claim 2, characterized in that: A guide plate is provided in the mixing channel, and an angle a is formed between the guide plate and the inner wall of the mixing channel, and the range of a is 25° to 35°.

7. A fluid mixing device according to claim 6, characterized in that: A plurality of guide plates are arranged in the mixing channel.

8. A fluid mixing device according to claim 7, characterized in that: The plurality of guide plates are evenly distributed on the inner wall of the mixing channel.

9. A fluid mixing device according to claim 1, characterized in that: The electromagnetic mixing unit includes a pipeline, a magnetic block and a coil; the pipeline is connected to the output end of the Tesla valve, the magnetic block is installed in the pipeline, and the coil is arranged outside the pipeline.

10. A fluid mixing device according to claim 9, characterized in that: The shape of the magnetic block is spherical.

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