Self-adaptive positioning tool for electrostatic chuck machining

Abstract

The utility model provides a self-adaptive positioning tool for electrostatic chuck machining. The self-adaptive positioning tool comprises a base plate body, an adjusting assembly and a control assembly. The substrate main body is used for placing an electrostatic chuck, and a cavity is formed in the substrate main body; the adjusting assembly is embedded in the cavity of the base plate body, and the control assembly penetrates through the surface of the base plate body to be connected with the adjusting assembly and can drive the adjusting assembly to move. The adjusting assembly comprises a lead screw and two sliding blocks. The screw rod is arranged in the cavity of the substrate main body; the surfaces of the two ends of the lead screw are provided with a first thread and a second thread which are opposite in thread. The two sliding blocks are arranged at the two ends of the lead screw in a sleeving mode respectively and can move along the first thread and the second thread of the lead screw respectively, so that the distance between the two sliding blocks is matched with the size of the electrostatic chuck, and then the electrostatic chuck is fixed. According to the positioning tool disclosed by the utility model, the electrostatic chucks with different sizes are limited, and the convenience of self-adaptive positioning when the positioning tool is used for processing the electrostatic chucks is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of tooling, in particular to an electrostatic chuck processing adaptive positioning tooling. Background Art

[0002] During the electrostatic chuck manufacturing process, positioning fixtures are required. After each machining operation, the chuck must be removed for dimensional measurement. If rework is required, secondary machining is required. Existing clamping methods make it difficult to determine the position before removal, resulting in deviations in secondary positioning, which in turn affects the accuracy of the secondary machining process. Furthermore, existing positioning fixtures have poor assembly performance. Different sizes and specifications of electrostatic chucks require the manufacture of different fixtures, wasting raw materials and processing time. Utility Model Content

[0003] The purpose of the utility model is to provide an adaptive positioning tool for electrostatic chuck processing, which can realize the limiting of electrostatic chucks of different sizes and increase the convenience of the positioning tool in adaptively positioning the electrostatic chuck during processing.

[0004] To achieve the above-mentioned object, the present invention provides an electrostatic chuck processing adaptive positioning tool, comprising: a substrate body, an adjustment component, and a control component; the substrate body is used to place the electrostatic chuck, and has a cavity therein; the adjustment component is embedded in the cavity of the substrate body, and the control component is connected to the adjustment component through the surface of the substrate body, and can drive the adjustment component to move, so that the size of the adjustment component matches the size of the electrostatic chuck, thereby positioning the electrostatic chuck;

[0005] Wherein, the adjustment component includes:

[0006] A screw rod is disposed in the cavity of the substrate body; and a first thread and a second thread are respectively provided on both end surfaces of the screw rod with opposite threads;

[0007] A first bevel gear is provided at one end of the screw rod and is connected to the control assembly;

[0008] The two sliders are respectively mounted on the first thread and the second thread of the screw rod and can move along the first thread and the second thread of the screw rod respectively, so that the distance between the two sliders matches the size of the electrostatic chuck.

[0009] Optionally, the first thread and the second thread are symmetrically arranged on the surface of the screw rod, and their total length is greater than or equal to the length of the slot, and the distance between the first thread and the second thread is less than the length of the slot.

[0010] Optionally, the first thread and the second thread are symmetrically arranged on the surface of the screw rod, and their total length is greater than or equal to the length of the slot, and the distance between the first thread and the second thread is less than the length of the slot.

[0011] Optionally, a limit platform is provided at the top of each slider, the limit platform is inserted into the slot, and a positioning pin is provided on its surface; the positioning pin protrudes from the surface of the substrate body and is used to fix the electrostatic chuck;

[0012] Among them, the electrostatic chuck includes: a support platform and a boss, the support platform is arranged in the middle of the boss, and the thickness of the support platform is greater than the thickness of the boss; the bottom end of the boss is provided with a number of evenly distributed positioning holes, and when the electrostatic chuck is fixed on the substrate body, the positioning holes can be sleeved on the positioning pins.

[0013] Optionally, each of the sliders is provided with an adjustment hole, and the interior of the adjustment hole is provided with a threaded structure corresponding to the first thread or the second thread, so that the slider can be inserted into the screw rod through the adjustment hole, so that the slider can move in the slot along the first thread or the second thread of the screw rod.

[0014] Optionally, a second through hole is provided on a side wall of one end of the base body along the length direction of the slot, so that the end of the screw rod not provided with the first bevel gear is inserted into the second through hole and placed parallel to the length direction of the slot.

[0015] Optionally, the control component includes:

[0016] a central rod passing through the first through hole of the substrate body so that one end thereof is located in the cavity of the substrate body and the other end thereof is located outside the substrate body;

[0017] A second bevel gear is provided at one end of the center rod located in the cavity of the base plate body and is meshed with the first bevel gear;

[0018] The hand wheel is arranged at one end of the center rod located outside the base plate body.

[0019] Optionally, it also includes: a clamping plate, which is annular and has a thickness smaller than the thickness of the support platform of the electrostatic chuck; and the inner diameter of the clamping plate is larger than the diameter of the support platform of the electrostatic chuck and smaller than the diameter of the boss of the electrostatic chuck, so that the electrostatic chuck can be clamped between the clamping plate and the substrate body; and the outer diameter of the clamping plate is larger than the outer diameter of the boss of the electrostatic chuck.

[0020] Optionally, the upper surface of the substrate body is further provided with a plurality of evenly arranged first fixing holes, and the plurality of first fixing holes are evenly distributed around the card slot; the edge of the clamping plate is provided with second fixing holes corresponding to the plurality of first fixing holes of the substrate body.

[0021] Optionally, it further comprises: a plurality of fixing members, wherein the plurality of fixing members sequentially pass through the second fixing holes of the pressing plate and the first fixing holes of the substrate body to fix the pressing plate on the substrate body.

[0022] Compared with the prior art, the technical solution of the present utility model has at least the following beneficial effects:

[0023] The tooling of the utility model is provided with threads with opposite directions on the surface of the screw rod, and two sliders are symmetrically installed on the opposite threads, so that the two sliders are moved closer or farther away from each other when the screw rod rotates, thereby adjusting the distance between the two sliders, and then realizing the limiting of electrostatic chucks of different sizes, ensuring that the position of the electrostatic chuck will not be deviated when the electrostatic chuck is repeatedly disassembled, and increasing the convenience of the positioning tooling for adaptive positioning of the electrostatic chuck during processing.

[0024] The tooling of the present invention is provided with a clamping plate, which realizes the stability of the clamping and positioning of the electrostatic chuck on the substrate body, making it easy to process the electrostatic chuck; and the thickness of the clamping plate is lower than the thickness of the support platform of the electrostatic chuck, avoiding the dangerous situation of "colliding with the knife" or "colliding with the machine" during the processing of the electrostatic chuck, thereby reducing the property loss caused by equipment failure. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a cross-sectional view of the electrostatic chuck processing adaptive positioning tooling described in the present invention.

[0026] Figure 2 This is an exploded view of the electrostatic chuck processing adaptive positioning tooling described in the present invention.

[0027] Figure 3 This is a schematic diagram of the installation of the self-adaptive positioning tooling for electrostatic chuck processing described in the present invention.

[0028] In the figure, 1-base plate body, 2-screw rod, 3-first bevel gear, 4-handwheel, 5-second bevel gear, 6-slider, 7-limiting platform, 8-locating pin, 9-slot, 10-electrostatic chuck, 11-pressing plate, 12-fixing part, 13-center rod, 14-first thread, 15-second thread, 16-second through hole. DETAILED DESCRIPTION

[0029] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0030] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections; they may refer to direct connections, indirect connections through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0032] The electrostatic chuck 10 is used to hold wafers in semiconductor processing equipment, facilitating wafer processing. It comprises a support platform and a boss. The support platform is positioned in the middle of the boss and is thicker than the boss. The boss has several evenly distributed positioning holes at the bottom to limit the position of the electrostatic chuck 10 during processing.

[0033] like Figure 1 As shown, the present invention provides an adaptive positioning tool for electrostatic chuck machining, used to secure electrostatic chucks 10 of varying sizes. The tool comprises a substrate body 1, an adjustment assembly, and a control assembly. The substrate body 1 is used to house the electrostatic chuck 10, the adjustment assembly is embedded within the substrate body 1, and the control assembly connects to the adjustment assembly through the surface of the substrate body 1, driving the adjustment assembly to match the size of the electrostatic chuck 10. This allows the positioning hole of the electrostatic chuck 10 to be inserted into the adjustment assembly, thereby positioning the electrostatic chuck 10.

[0034] The substrate body 1 has a cavity within it. A slot 9 and a first through-hole are provided on the upper surface of the substrate body 1, communicating with the cavity and connecting it to the outside. The slot 9 and the first through-hole are coaxially arranged. A second through-hole 16 is provided on a sidewall of the substrate body 1 along the length of the slot 9 for securing the adjustment assembly.

[0035] The adjustment assembly is disposed in the cavity of the base body 1 and includes a screw rod 2, a first bevel gear 3, and two sliders 6. The screw rod 2 is disposed in the cavity of the base body 1 and is positioned parallel to the length of the slot 9. One end of the screw rod 2 is inserted into the second through hole 16, allowing it to rotate in place within the second through hole 16. The first bevel gear 3 is disposed at the other end of the screw rod 2 and is connected to the control assembly, which can drive the screw rod 2 to rotate via the first bevel gear 3.

[0036] Furthermore, the two end surfaces of the screw rod 2 are provided with symmetrical first threads 14 and second threads 15, and the second threads 15 are reverse threads of the first threads 14; the total length of the first threads 14 and the second threads 15 on the surface of the screw rod 2 is greater than or equal to the length of the slot 9, and the distance between the first thread 14 and the second thread 15 is less than the length of the slot 9.

[0037] The two sliders 6 are respectively arranged on the first thread 14 and the second thread 15 of the screw rod 2. And the top of each slider 6 is provided with an integrally formed limit platform 7, and the limit platform 7 is inserted into the card slot 9. Furthermore, the surface of each limit platform 7 is provided with a positioning pin 8; the positioning pin 8 protrudes from the surface of the substrate body 1, so that when the electrostatic chuck 10 is placed on the substrate body 1, the two positioning pins 8 can respectively pass through the corresponding positioning holes on the electrostatic chuck 10 to limit and fix the electrostatic chuck 10. Each slider 6 is provided with an adjustment hole, and the inner wall of the adjustment hole is provided with a thread structure corresponding to the first thread 14 or the second thread 15, so that the slider 6 can be inserted into the screw rod 2 through the adjustment hole, so that the slider 6 can move in the card slot 9 along the first thread 14 or the second thread 15 of the screw rod 2. In a preferred embodiment, the two sliders 6 are symmetrically inserted into the first thread 14 and the second thread 15 of the screw rod 2, so that the positioning pins 8 on the two limit platforms 7 are symmetrically placed in the slots 9; when the screw rod 2 is rotated, since the thread directions of the first thread 14 and the second thread 15 are opposite, the two sliders 6 can move towards each other or away from each other at the same time along the first thread 14 and the second thread 15, respectively, so that the relative position between the two positioning pins 8 can be adjusted (that is, the spacing distance between the two positioning pins 8 is adjusted) to match the corresponding positioning holes on electrostatic chucks 10 of different sizes, thereby achieving the purpose of positioning electrostatic chucks 10 of different sizes, thereby increasing the convenience of the positioning tooling for adaptive positioning of the electrostatic chuck 10 during processing.

[0038] In a preferred embodiment, the positioning pin 8 is a cylindrical component made of polyimide, which prevents the positioning pin 8 from damaging the electrostatic chuck 10 when inserted into the positioning hole of the electrostatic chuck 10 , thereby improving the safety of the electrostatic chuck 10 .

[0039] The control assembly includes: a handwheel 4, a center rod 13, and a second bevel gear 5. The center rod 13 passes through the first through hole of the substrate body 1, so that one end of the center rod 13 is located in the cavity of the substrate body 1 and the other end is located outside the substrate body 1. The second bevel gear 5 is arranged at the end of the center rod 13 located in the cavity of the substrate body 1 and is meshed with the first bevel gear 3. The handwheel 4 is arranged at the end of the center rod 13 located outside the substrate body 1, and a rocker is provided at the edge of the handwheel 4 to facilitate the rotation of the center rod 13 and drive the second bevel gear 5 to rotate, and then the second bevel gear 5 drives the first gear 3 and the screw rod 2 to rotate in turn, so that the two pulleys 6 move closer to or away from each other along the first thread 14 and the second thread 15 respectively.

[0040] Further, if Figure 2 As shown, the upper surface of the substrate body 1 is further provided with a plurality of evenly arranged first fixing holes, and the plurality of first fixing holes are evenly distributed around the card slot 9 .

[0041] The positioning tooling also includes: a clamping plate 11 and a plurality of fixing parts 12. The clamping plate 11 is annular, and its inner diameter is larger than the diameter of the support platform of the electrostatic chuck 10 and smaller than the diameter of the boss of the electrostatic chuck 10, so that the clamping plate 11 can be mounted on the outside of the support platform and cover the top of the boss, and clamp the electrostatic chuck 10 between the clamping plate 11 and the substrate body 1. Furthermore, the thickness of the clamping plate 11 is smaller than the thickness of the support platform of the electrostatic chuck 10, so that when the clamping plate 11 clamps the electrostatic chuck 10, the height of the clamping plate 11 does not exceed the height of the electrostatic chuck 10, thereby avoiding the dangerous situation of "colliding with the tool" or "colliding with the machine" of the electrostatic chuck 10 during the processing, and reducing the losses caused by machine failure. The edge of the clamping plate 11 is provided with a second fixing hole corresponding to the plurality of first fixing holes of the substrate body 1. The plurality of fixing parts 12 can pass through the second fixing hole of the clamping plate 11 and the first fixing hole of the substrate body 1 in sequence to fix the clamping plate 11 on the substrate body 1.

[0042] Furthermore, the outer diameter of the clamping plate 11 is larger than the outer diameter of the boss of the electrostatic chuck 10, so that the fixing part 12 will not touch the electrostatic chuck 10 when passing through the second fixing hole of the clamping plate 11 and the first fixing hole of the substrate body 1 in sequence, thereby avoiding damage to the electrostatic chuck 10 during the process of clamping the electrostatic chuck 10.

[0043] In a preferred embodiment, the boss of the electrostatic chuck 10 is provided with an even number of symmetrically distributed positioning holes. When the positioning holes of the electrostatic chuck 10 are passed through the positioning pins 8 on the slider 6, the axis of the electrostatic chuck 10 coincides with the retaining groove 9 of the substrate body 1. This allows for precise positioning of the center position and rotation angle of the electrostatic chuck 10, facilitating precise machining of the electrostatic chuck 10. In this case, the first fixing holes provided on the surface of the substrate body 1 are evenly and symmetrically distributed around the retaining groove 9.

[0044] In a preferred embodiment, the base plate body 1, the screw rod 2, the first bevel gear 3, the hand wheel 4, the second bevel gear 5 and the slider 6 are all made of steel components, so that the positioning tool has good rigidity, hardness, rust resistance and corrosion resistance, and prevents the positioning tool from deformation and cracking.

[0045] When fixing the electrostatic chuck 10, the rocker at the edge of the handwheel 4 is shaken clockwise or counterclockwise to drive the center rod 13 to rotate, thereby driving the second bevel gear 5 to rotate; the second bevel gear 5 drives the first bevel gear 3 meshing with it to rotate, thereby driving the screw rod 2 to rotate; since the two sliders 6 are respectively located on the first thread 14 and the second thread 15 on the surface of the screw rod 2, and the thread directions of the first thread 14 and the second thread 15 are opposite, when the screw rod 2 rotates in one direction, the movement directions of the two sliders 6 are opposite (that is, the two sliders approach each other or move away from each other), thereby changing the distance between the two positioning pins 8 in the slot 9, so that the two positioning pins 8 can be respectively inserted into the two symmetrical positioning holes on the electrostatic chuck 10, thereby limiting the electrostatic chuck 10. Subsequently, the pressing plate 11 is placed on the outside of the support platform of the electrostatic chuck 10, and the boss of the electrostatic chuck 10 is pressed; the fixing member 12 is passed through the second fixing hole of the pressing plate 11 and the first fixing hole of the substrate body 1 in sequence, so that the electrostatic chuck 10 is clamped between the pressing plate 11 and the substrate body 1, as shown in FIG. Figure 3 As shown, the stability of the electrostatic chuck 10 being clamped and positioned on the substrate body 1 by the pressing plate 11 is achieved, which facilitates the processing of the electrostatic chuck 10 .

[0046] To sum up, the utility model arranges threads with opposite directions on the surface of the screw rod, and uses two sliders symmetrically installed on the reverse threads to achieve the limitation of electrostatic chucks of different sizes, which increases the convenience of adaptive positioning of the positioning tool during electrostatic chuck processing; and realizes the stability of the clamping and positioning of the electrostatic chuck on the substrate body through the clamping plate.

[0047] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as limiting the present invention. After reading the above description, various modifications and alternatives to the present invention will be readily apparent to those skilled in the art. Therefore, the scope of protection of the present invention shall be defined by the appended claims.

Claims

1. An electrostatic chuck processing adaptive positioning tool, characterized in that: include: A substrate body, an adjustment assembly, and a control assembly; the substrate body is used to place the electrostatic chuck and has a cavity therein; the adjustment assembly is embedded in the cavity of the substrate body; the control assembly is connected to the adjustment assembly through the surface of the substrate body and can drive the adjustment assembly to move so that the size of the adjustment assembly matches the size of the electrostatic chuck, thereby positioning the electrostatic chuck; Wherein, the adjustment component includes: The screw rod is arranged in the cavity of the substrate body; and the surfaces of both ends of the screw rod are respectively provided with a first thread and a second thread with opposite threads; A first bevel gear is provided at one end of the screw rod and is connected to the control assembly; The two sliders are respectively mounted on the first thread and the second thread of the screw rod and can move along the first thread and the second thread of the screw rod respectively, so that the distance between the two sliders matches the size of the electrostatic chuck.

2. The electrostatic chuck processing adaptive positioning tool according to claim 1, characterized in that: A card slot and a first through hole communicating with the cavity are provided on the upper surface of the substrate body, so that the cavity is communicated with the outside; and the card slot and the first through hole are coaxially arranged.

3. The electrostatic chuck processing adaptive positioning tool according to claim 2, characterized in that: The first thread and the second thread are symmetrically arranged on the surface of the screw rod, and their total length is greater than or equal to the length of the slot, and the distance between the first thread and the second thread is less than the length of the slot.

4. The electrostatic chuck processing adaptive positioning tool according to claim 2, characterized in that: A limit platform is provided at the top of each slider, the limit platform is inserted into the card slot, and a positioning pin is provided on its surface; the positioning pin protrudes from the surface of the substrate body and is used to fix the electrostatic chuck; Among them, the electrostatic chuck includes: a support platform and a boss, the support platform is arranged in the middle of the boss, and the thickness of the support platform is greater than the thickness of the boss; the bottom end of the boss is provided with a number of evenly distributed positioning holes, and when the electrostatic chuck is fixed on the substrate body, the positioning holes can be sleeved on the positioning pins.

5. The electrostatic chuck processing adaptive positioning tool according to claim 1, characterized in that: Each of the sliders is provided with an adjustment hole, and the interior of the adjustment hole is provided with a thread structure corresponding to the first thread or the second thread, so that the slider can be inserted into the screw rod through the adjustment hole, so that the slider can move in the slot along the first thread or the second thread of the screw rod.

6. The electrostatic chuck processing adaptive positioning tool according to claim 2, characterized in that: A second through hole is provided on one side wall of the base body along the length direction of the slot, so that the end of the screw rod not provided with the first bevel gear is inserted into the second through hole and placed parallel to the length direction of the slot.

7. The electrostatic chuck processing adaptive positioning tool according to claim 2, characterized in that: The control component includes: a central rod passing through the first through hole of the substrate body so that one end thereof is located in the cavity of the substrate body and the other end thereof is located outside the substrate body; A second bevel gear is provided at one end of the center rod located in the cavity of the base plate body and is meshed with the first bevel gear; The hand wheel is arranged at one end of the center rod located outside the base plate body.

8. The electrostatic chuck processing adaptive positioning tool according to claim 4, characterized in that: Also includes: The clamping plate is annular and has a thickness smaller than the thickness of the support platform of the electrostatic chuck; the inner diameter of the clamping plate is larger than the diameter of the support platform of the electrostatic chuck and smaller than the diameter of the boss of the electrostatic chuck, so that the electrostatic chuck can be clamped between the clamping plate and the substrate body; and the outer diameter of the clamping plate is larger than the outer diameter of the boss of the electrostatic chuck.

9. The electrostatic chuck processing adaptive positioning tool according to claim 8, characterized in that: The upper surface of the substrate body is further provided with a plurality of evenly arranged first fixing holes, and the plurality of first fixing holes are evenly distributed around the card slot; Second fixing holes corresponding to the first fixing holes of the base plate body are provided at the edge of the pressing plate.

10. The electrostatic chuck processing adaptive positioning tool according to claim 9, characterized in that: Also includes: A plurality of fixing members are sequentially passed through the second fixing holes of the pressing plate and the first fixing holes of the base plate body to fix the pressing plate on the base plate body.

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