Cleaning device for exhaust funnel of single crystal furnace

Abstract

The utility model provides a cleaning device for an exhaust funnel of a single crystal furnace, and belongs to the technical field of crystal pulling furnace production. Comprising a rotating rod which is of a hollow rod-shaped structure; an air inlet of the air extractor is connected with the first end of the rotating rod, and the air inlet is communicated with the interior of the air extractor and the interior of the rotating rod; the grinding head sleeves the second end of the rotating rod; the suction rod structure is connected with the second end of the rotating rod, the suction rod structure is of a hollow rod-shaped structure, the interior of the suction rod structure communicates with the interior of the rotating rod, and a plurality of suction holes are formed in the suction rod structure; the driving mechanism is connected with the rotating rod; wherein the driving mechanism is used for driving the rotating rod to rotate so as to drive the grinding head to rotate, so that the grinding head rotationally cleans an object to be cleaned; the air extractor is used for providing suction force, so that substances generated by cleaning of the grinding head sequentially pass through the suction hole, the rotating rod and the air inlet to be adsorbed into the air extractor. According to the technical scheme, the exhaust funnel of the single crystal furnace can be effectively cleaned.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal pulling furnace production, in particular to a single crystal furnace exhaust pipe cleaning device. Background Art

[0002] In crystal pulling furnace production, the exhaust pipe in the bottom heat field must remain unobstructed. If the hole in the bottom exhaust pipe is small and the crystal pulling furnace is operated for a long time, oxides in the exhaust pipe will gradually accumulate and cause blockage. If the bottom vent valve is fully opened to maintain unobstructed flow, it will be difficult to meet the pressure control requirements in the crystal pulling furnace. At this time, impurities will enter, further causing uneven growth of the crystal rod, which is very likely to cause crystal line breakage and even loss of the single crystal structure. In addition, it will cause uneven argon flow, causing temperature fluctuations, which will affect single crystal growth and resistance uniformity.

[0003] Currently, there is still a lack of tools that can effectively clean the exhaust chimney of a single crystal furnace. Utility Model Content

[0004] The utility model provides a single crystal furnace exhaust pipe cleaning device, which can effectively clean the single crystal furnace exhaust pipe.

[0005] In order to achieve the above-mentioned purpose, the technical solution adopted in the embodiment of the present utility model is:

[0006] A single crystal furnace exhaust pipe cleaning device, comprising:

[0007] A rotating rod, wherein the rotating rod is a hollow rod-shaped structure;

[0008] an air extraction device, wherein an air inlet of the air extraction device is connected to the first end of the rotating rod, and the air inlet communicates with the interior of the air extraction device and the interior of the rotating rod;

[0009] a grinding head, sleeved on the second end of the rotating rod;

[0010] a suction rod structure connected to the second end of the rotating rod, the suction rod structure being a hollow rod-shaped structure, the interior of the suction rod structure being in communication with the interior of the rotating rod, and having a plurality of suction holes formed thereon;

[0011] a driving mechanism connected to the rotating rod;

[0012] The driving mechanism is used to drive the rotating rod to rotate, thereby driving the grinding head to rotate, so that the grinding head rotates and cleans the object to be cleaned;

[0013] The air extraction device is used to provide suction, so that the substances generated by the grinding head cleaning are sucked into the interior of the air extraction device through the suction hole, the rotating rod and the air inlet in sequence.

[0014] In some embodiments, the grinding head includes:

[0015] a brush grinding head, the surface of which is covered with a brush, and the brush grinding head is used to clean the object to be cleaned when rotating with the rotating rod;

[0016] The hard grinding head is used for grinding and cleaning the object to be cleaned while rotating along with the rotating rod.

[0017] In some embodiments, the hard grinding head is made of metal and / or graphite.

[0018] In some embodiments, the hard grinding head is in the shape of a truncated cone and gradually narrows from top to bottom in a direction perpendicular to the horizontal plane.

[0019] In some embodiments, the second end of the rotating rod is provided with a first limiting portion and a second limiting portion;

[0020] The inner wall of the brush grinding head is provided with a first mounting structure matching the first limiting portion;

[0021] The inner wall of the hard grinding head is provided with a second mounting structure matching the second limiting portion.

[0022] In some embodiments, the first limiting portion includes at least one first strip structure protruding from the outer wall of the rotating rod, and the second limiting portion includes at least one second strip structure protruding from the outer wall of the rotating rod;

[0023] Wherein, the length extension direction of the first strip structure and the length extension direction of the second strip structure are both parallel to the central axis of the rotating rod;

[0024] The number of the first strip-shaped structures is less than or equal to the number of the second strip-shaped structures;

[0025] The first mounting structure is a groove matching the shape of the first strip structure;

[0026] The second mounting structure is a groove that matches the shape of the second strip structure.

[0027] In some embodiments, the plurality of suction holes are evenly spaced apart along the axial direction of the suction rod structure.

[0028] In some embodiments, the plurality of suction holes are arranged in pairs, and the two suction holes in the same pair of suction holes are symmetrical with respect to the central axis of the suction rod structure.

[0029] In some embodiments, the single crystal furnace exhaust stack cleaning device further comprises:

[0030] A hand-held portion is arranged on the outer wall of the driving mechanism, and the hand-held portion is used for an operator to grasp.

[0031] In some embodiments, the air extraction device includes:

[0032] Suction duct, power mechanism and storage mechanism;

[0033] The air inlet is provided at one end of the air intake duct, the air outlet of the air intake duct is connected to the storage mechanism, and the air intake duct communicates with the interior of the rotating rod and the interior of the storage mechanism;

[0034] The power mechanism is used to provide suction, so that the substances generated by the grinding head cleaning are sucked into the interior of the storage mechanism through the suction hole, the rotating rod and the suction pipe in sequence.

[0035] The beneficial effects of the utility model are:

[0036] In this embodiment, a driving mechanism can be used to drive the rotating rod to rotate, thereby driving the grinding head mounted on the rotating rod to rotate. In this way, the grinding head can grind and clean the objects to be cleaned (such as oxides accumulated in the exhaust pipe of the single crystal furnace) during the rotation process, and use the exhaust device to adsorb the substances produced by cleaning from the exhaust pipe of the single crystal furnace to achieve a better cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 A partial schematic diagram showing a single crystal furnace exhaust chimney cleaning device according to an embodiment of the present invention;

[0038] Figure 2-1 A schematic cross-sectional view showing the installation of the brush grinding head and the rotating rod according to an embodiment of the present invention;

[0039] Figure 2-2 A schematic cross-sectional view showing the installation of the hard grinding head and the rotating rod according to an embodiment of the present invention;

[0040] Figure 3 A partial schematic diagram showing a single crystal furnace exhaust chimney cleaning device according to another embodiment of the present invention;

[0041] Figure 4 A schematic diagram showing the blockage of oxides in the exhaust pipe of a single crystal furnace according to an embodiment of the present invention;

[0042] Figure 5 A schematic diagram showing the effect of cleaning the exhaust pipe of a single crystal furnace in the prior art;

[0043] Figure 6 A schematic diagram showing the cleaning effect of a single crystal furnace exhaust chimney after being treated by a single crystal furnace exhaust chimney cleaning device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0044] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field are within the scope of protection of the present invention.

[0045] In order to solve the above technical problems, an embodiment of the present utility model provides a single crystal furnace exhaust chimney cleaning device, which can effectively clean the single crystal furnace exhaust chimney.

[0046] like Figure 1 As shown, the embodiment of the utility model provides a single crystal furnace exhaust pipe cleaning device, comprising:

[0047] Rotating rod 1, air extraction device 2, grinding head 3, suction rod structure 4 and driving mechanism 5.

[0048] Among them, the rotating rod 1 is a hollow rod-shaped structure; the air inlet of the exhaust device 2 is connected to the first end of the rotating rod 1, and the air inlet is connected to the interior of the exhaust device 2 and the interior of the rotating rod 1; the grinding head 3 is sleeved on the second end of the rotating rod 1; the suction rod structure 4 is connected to the second end of the rotating rod 1, the suction rod structure 4 is a hollow rod-shaped structure, the interior of the suction rod structure 4 is connected to the interior of the rotating rod 1, and a plurality of suction holes are opened on the suction rod structure 4; the driving mechanism 5 is connected to the rotating rod 1.

[0049] Among them, the driving mechanism 5 is used to drive the rotating rod 1 to rotate, so as to drive the grinding head 3 to rotate, so that the grinding head 3 rotates and cleans the items to be cleaned; the exhaust device 2 is used to provide suction, so that the substances generated by the cleaning of the grinding head 3 are absorbed into the interior of the exhaust device 2 through the suction hole, the rotating rod 1 and the air inlet in turn.

[0050] Here, the driving mechanism 5 may specifically be a motor.

[0051] In this embodiment, the driving mechanism 5 can be used to drive the rotating rod 1 to rotate, thereby driving the grinding head 3 mounted on the rotating rod 1 to rotate. In this way, the grinding head 3 can grind and clean the objects to be cleaned (such as oxides accumulated in the exhaust pipe of the single crystal furnace) during the rotation process, and use the exhaust device 2 to adsorb the substances produced by cleaning from the exhaust pipe of the single crystal furnace to achieve a better cleaning effect.

[0052] In some embodiments, the grinding head 3 includes:

[0053] A brush grinding head 301, the surface of which is covered with a brush, and the brush grinding head 301 is used to clean the object to be cleaned when rotating along with the rotating rod 1;

[0054] The hard grinding head 302 is used to grind and clean the object to be cleaned while rotating along with the rotating rod 1 .

[0055] It should be noted that the brush grinding head 301 and the hard grinding head 302 are replaceable consumables. When the cleaning effect is not good, the brush grinding head 301 and the hard grinding head 302 can be replaced with new ones to ensure the cleaning effect.

[0056] In this embodiment, when the exhaust pipe of the single crystal furnace needs to be cleaned, the grinding head 3 can be sent into the exhaust pipe of the single crystal furnace, and the driving mechanism 5 can be started. The driving mechanism 5 will drive the rotating rod 1 to rotate, and then drive the grinding head to rotate, so that the hard grinding head 302 grinds and breaks the oxide layer in the exhaust pipe, and the brush grinding head 301 cleans the polished exhaust pipe wall again to achieve a better cleaning effect.

[0057] In some embodiments, the hard grinding head 302 is made of metal and / or graphite.

[0058] It should be noted that the hard grinding head 302 can be made of a material with a relatively high hardness. Specifically, metal and / or graphite materials can be selected according to actual production needs to prepare the hard grinding head 302. The hardness and density of the brush grinding head 301 can be selected according to actual needs. The brush grinding head 301 can be a bristle brush.

[0059] In some embodiments, the hard grinding head 302 is in the shape of a truncated cone and gradually narrows from top to bottom in a direction perpendicular to the horizontal plane.

[0060] It should be noted that one end of the hard grinding head 302 is narrower, which is convenient for cleaning deep into the small holes of the oxide layer, thereby gradually expanding the cleaning surface, and fully grinding and breaking the oxide layer attached to the exhaust pipe of the single crystal furnace. Through the hard grinding head 302, the oxide layer in the exhaust pipe of the bottom thermal field can be removed on a large scale, and the brush grinding head 301 can be used to clean the inner wall of the exhaust pipe after grinding again. At the same time, the oxide dust or blocks after grinding will be adsorbed by the exhaust device during cleaning, further reducing dust and avoiding back suction, realizing in-depth cleaning of the exhaust pipe of the single crystal furnace, and solving the problem of the exhaust pipe of the thermal field at the bottom of the single crystal furnace being blocked by dust and oxides.

[0061] It should also be noted that the diameter of the brush grinding head 301 can be greater than or equal to the diameter of the top end of the hard grinding head 302 (that is, the diameter of the wider end).

[0062] In some embodiments, the second end of the rotating rod 1 is provided with a first limiting portion and a second limiting portion; the inner wall of the brush grinding head 301 is provided with a first mounting structure matching the first limiting portion; the inner wall of the hard grinding head 302 is provided with a second mounting structure matching the second limiting portion.

[0063] In this embodiment, both the brush grinding head 301 and the hard grinding head 302 are provided with mounting structures matching the rotating rod 1 , so that the brush grinding head 301 and the hard grinding head 302 can be firmly fixed on the rotating rod 1 .

[0064] In a specific example, the first limiting portion includes at least one first strip structure 101 protruding from the outer wall of the rotating rod 1, and the second limiting portion includes at least one second strip structure 102 protruding from the outer wall of the rotating rod 1; wherein, the length extension direction of the first strip structure 101 and the length extension direction of the second strip structure 102 are both parallel to the central axis of the rotating rod 1; the number of the first strip structures 101 is less than or equal to the number of the second strip structures 102; the first mounting structure is a groove that matches the shape of the first strip structure 101; and the second mounting structure is a groove that matches the shape of the second strip structure 102.

[0065] It should be noted that the hard grinding head 302 is mainly used for grinding and cleaning the items to be cleaned, while the brush grinding head 301 is mainly responsible for cleaning the items to be cleaned to remove the powder or block substances generated by the grinding and cleaning of the hard grinding head 302. Therefore, the hard grinding head 302 will be subjected to a greater friction force when grinding and cleaning. In other words, the hard grinding head 302 needs to be more tightly connected to the rotating rod 1 than the brush grinding head 301 and the rotating rod 1. Therefore, in the embodiment of the present invention, a larger number of second strip structures 102 can be provided compared to the first strip structures 101, for example, Figure 2-1 and Figure 2-2 As shown, in an optional example, four first strip structures 101 and eight second strip structures 102 may be provided, but the present invention is not limited thereto.

[0066] like Figure 3 As shown, in some embodiments, the plurality of suction holes are evenly spaced along the axial direction of the suction rod structure 4 .

[0067] In this embodiment, the multiple suction holes on the suction rod structure 4 can laterally absorb the substances produced by the cleaning of the grinding head 3. The length of the suction rod structure 4 can be selected according to the size of the exhaust pipe of the single crystal furnace to achieve a better adsorption effect.

[0068] In some embodiments, the plurality of suction holes are arranged in pairs, and the two suction holes in the same pair of suction holes are symmetrical with respect to the central axis of the suction rod structure 4 .

[0069] In some embodiments, the single crystal furnace exhaust chimney cleaning device further includes: a hand-held portion 6 disposed on the outer wall of the driving mechanism 5 , and the hand-held portion 6 is used for an operator to grasp.

[0070] In some embodiments, the air extraction device 2 includes: an air suction pipe, a power mechanism and a storage mechanism; wherein, the air inlet is opened at one end of the air suction pipe, the air outlet of the air suction pipe is connected to the storage mechanism, and the air suction pipe connects the interior of the rotating rod 1 and the interior of the storage mechanism; the power mechanism is used to provide suction, so that the substances generated by the cleaning of the grinding head are absorbed into the interior of the storage mechanism through the suction hole, the rotating rod 1 and the air suction pipe in sequence.

[0071] Here, the intake duct may specifically be a high-pressure (HV) intake duct.

[0072] The following is an explanation of the assembly process and usage of the single crystal furnace exhaust pipe cleaning device:

[0073] Align the groove in the hard grinding head 302 with the second strip structure 102 on the rotating rod 1, thereby firmly fitting the hard grinding head 302 onto the rotating rod 1. Similarly, align the groove in the brush grinding head 301 with the first strip structure 101 on the rotating rod 1, thereby tightly fitting the brush grinding head 301 onto the rotating rod 1. A fixing screw can also be installed above the brush grinding head 301 to limit the position of the brush grinding head 301 along the length of the rotating rod 1. The tail of the drive mechanism 5 (which can be a handheld motor) is fixed to the rotating rod 1 (near the first end of the rotating rod 1). The suction pipe of the exhaust device 2 is connected to the first end of the rotating rod 1. At this point, the single crystal furnace exhaust stack cleaning device is installed.

[0074] It should be noted that before using the single crystal furnace exhaust chimney cleaning device, it is necessary to remove the upper heat field of the single crystal furnace before cleaning to avoid bumping into the heat field components.

[0075] After the single crystal furnace exhaust chimney cleaning device is installed, the operator inserts the grinding head 3 into the exhaust chimney from the opening of the single crystal furnace exhaust chimney, and then turns on the switch of the driving mechanism 5 (the switch can be set on the handheld part 6 for easy operation) to remove the oxide.

[0076] After the cleaning is completed, the power supply of the driving mechanism 5 should be turned off first, then the air intake pipe should be pulled out, and finally the cleaning device should be disassembled and stored for the next use.

[0077] Below, the comparison of the use effect of the single crystal furnace exhaust pipe cleaning device is as follows:

[0078] like Figure 4As shown in FIG, after the single crystal furnace is finished running, the oxide blockage in the exhaust pipe at the bottom of the single crystal furnace is quite serious, and even the exhaust pipe is often completely blocked. In the prior art, the exhaust pipe of the single crystal furnace is cleaned after the single crystal furnace is finished running. However, since the oxides in the exhaust pipe of the single crystal furnace are closely attached to the inner wall of the exhaust pipe, the blockage of the bottom exhaust pipe is usually slightly improved after cleaning (e.g. Figure 5 As shown), there are still a lot of residual oxides, which will affect the gas flow and pressure to a certain extent, hindering the growth of single crystals. Moreover, when replacing the exhaust pipe of the single crystal furnace, the bottom heat field needs to be dismantled and replaced in batches, which is very costly.

[0079] like Figure 6 The figure shows a schematic diagram of the cleaning effect of the single crystal furnace exhaust pipe after being treated by the single crystal furnace exhaust pipe cleaning device according to an embodiment of the present invention. It can be seen that there are fewer oxide residues in the single crystal furnace exhaust pipe after cleaning, achieving a better cleaning effect.

[0080] In this embodiment, the driving mechanism 5 can be used to drive the rotating rod 1 to rotate, thereby driving the grinding head 3 mounted on the rotating rod 1 to rotate. In this way, the grinding head 3 can grind and clean the objects to be cleaned (such as oxides accumulated in the exhaust pipe of the single crystal furnace) during the rotation process, and use the exhaust device 2 to adsorb the substances produced by cleaning from the exhaust pipe of the single crystal furnace to achieve a better cleaning effect.

[0081] It should be noted that the various embodiments in this specification are described in a progressive manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences from other embodiments. In particular, since the embodiments are generally similar to the product embodiments, the description is relatively simple. For relevant parts, refer to the partial description of the product embodiments.

[0082] Unless otherwise defined, the technical or scientific terms used in this disclosure should have the usual meanings understood by persons of ordinary skill in the field to which this disclosure belongs. The words "first", "second" and similar terms used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0083] It will be understood that when an element such as a layer, film, region, or substrate is referred to as being “on” or “under” another element, it can be “directly on” or “under” the other element or intervening elements may be present.

[0084] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

[0085] The above description is merely a specific embodiment of the present disclosure, but the scope of protection of the present disclosure is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this disclosure should be included in the scope of protection of the present disclosure. Therefore, the scope of protection of the present disclosure should be based on the scope of protection of the claims.

Claims

1. A single crystal furnace exhaust pipe cleaning device, characterized in that: include: A rotating rod (1), wherein the rotating rod (1) is a hollow rod-shaped structure; An air extraction device (2), wherein an air inlet of the air extraction device (2) is connected to the first end of the rotating rod (1), and the air inlet communicates with the interior of the air extraction device (2) and the interior of the rotating rod (1); A grinding head (3) is sleeved on the second end of the rotating rod (1); A suction rod structure (4) is connected to the second end of the rotating rod (1), the suction rod structure (4) is a hollow rod-shaped structure, the interior of the suction rod structure (4) is connected to the interior of the rotating rod (1), and a plurality of suction holes are formed on the suction rod structure (4); A driving mechanism (5) connected to the rotating rod (1); The driving mechanism (5) is used to drive the rotating rod (1) to rotate, thereby driving the grinding head (3) to rotate, so that the grinding head (3) rotates and cleans the object to be cleaned; The air extraction device (2) is used to provide suction force, so that the substances generated by the cleaning of the grinding head (3) are sucked into the interior of the air extraction device (2) through the suction hole, the rotating rod (1) and the air inlet in sequence.

2. The single crystal furnace exhaust pipe cleaning device according to claim 1, characterized in that: The grinding head (3) comprises: a brush grinding head (301), the surface of the brush grinding head (301) being covered with a brush, and the brush grinding head (301) being used to clean the object to be cleaned while rotating along with the rotating rod (1); The hard grinding head (302) is used for grinding and cleaning the object to be cleaned while rotating along with the rotating rod (1).

3. The single crystal furnace exhaust pipe cleaning device according to claim 2, characterized in that: The hard grinding head (302) is made of metal and / or graphite.

4. The single crystal furnace exhaust pipe cleaning device according to claim 2, characterized in that: The hard grinding head (302) is in the shape of a truncated cone and gradually narrows from top to bottom in a direction perpendicular to the horizontal plane.

5. The single crystal furnace exhaust pipe cleaning device according to claim 2, characterized in that: The second end of the rotating rod (1) is provided with a first limiting portion and a second limiting portion; The inner wall of the brush grinding head (301) is provided with a first mounting structure matching the first limiting portion; The inner wall of the hard grinding head (302) is provided with a second mounting structure matching the second limiting portion.

6. The single crystal furnace exhaust pipe cleaning device according to claim 5, characterized in that: The first limiting portion comprises at least one first strip structure (101) protruding from the outer wall of the rotating rod (1), and the second limiting portion comprises at least one second strip structure (102) protruding from the outer wall of the rotating rod (1); Wherein, the length extension direction of the first strip structure (101) and the length extension direction of the second strip structure (102) are both parallel to the central axis of the rotating rod (1); The number of the first strip-shaped structures (101) is less than or equal to the number of the second strip-shaped structures (102); The first mounting structure is a groove having a shape matching that of the first strip structure (101); The second mounting structure is a groove that matches the shape of the second strip structure (102).

7. The single crystal furnace exhaust pipe cleaning device according to claim 1, characterized in that: The plurality of suction holes are evenly spaced along the axial direction of the suction rod structure (4).

8. The single crystal furnace exhaust pipe cleaning device according to claim 1, characterized in that: The plurality of suction holes are arranged in pairs, and the two suction holes in the same pair of suction holes are symmetrical with respect to the central axis of the suction rod structure (4).

9. The single crystal furnace exhaust pipe cleaning device according to claim 1, characterized in that: Also includes: A hand-held portion (6) is provided on the outer wall of the driving mechanism (5), and the hand-held portion (6) is used for an operator to grasp.

10. The single crystal furnace exhaust pipe cleaning device according to claim 1, characterized in that: The air extraction device (2) comprises: Suction duct, power mechanism and storage mechanism; One end of the air intake duct is provided with the air inlet, the air outlet of the air intake duct is connected to the storage mechanism, and the air intake duct communicates with the interior of the rotating rod (1) and the interior of the storage mechanism; The power mechanism is used to provide suction, so that the substances generated by the grinding head cleaning are sequentially adsorbed into the interior of the storage mechanism through the suction hole, the rotating rod (1) and the suction pipe.

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