Piezoresistive pressure sensor

Abstract

The utility model discloses a piezoresistive pressure sensor, which comprises a connector, a chip, a cable and an output interface, and is characterized in that the connector is a plastic connector and comprises a micro-capacity connector and a large-capacity connector; the chip is arranged in the connector, and the chip is provided with a power supply end and a signal output end; the cable is connected with the chip; the output interface is a plastic output interface and is connected to the other end of the cable. The pressure sensor is small in size, and residues of medicine in the pressure sensor are greatly reduced; the connector and the output interface adopt plastic shells, the biological safety is high, gamma rays can smoothly penetrate through the sensor, the irradiation sterilization effect is achieved, and the sterile irradiation verification standard in the global pharmaceutical field is met; the device can be plugged and used, can be thrown after being used, and is very suitable for the field of preparation of drugs such as virus cells.

Description

Technical Field

[0001] The utility model belongs to the technical field of pressure sensors, and in particular relates to a piezoresistive pressure sensor. Background Art

[0002] Current pressure detection devices primarily consist of pressure gauges, either pointer-type or digital. These respond to changes in liquid or gas pressure by measuring the deformation of a diaphragm. Alternatively, voltage is applied to the gauge, causing changes in liquid pressure to drive a change in the detector current. By detecting the output current, the pressure value is calculated using a conversion formula. These pressure gauges all require connection to stainless steel pipes.

[0003] Existing biopharmaceutical pressure gauges are bulky, have low accuracy, and are made of metal. They cannot be sterilized by irradiation, are not disposable, and cannot be plug-and-disposable. They cannot meet the gamma ray irradiation requirements of high-end biopharmaceuticals and cannot meet the requirements of disposable, sterile, and airtight production processes. In the future, the requirements for disposable manufacturing processes and sterile airtightness in the pharmaceutical field will become increasingly stringent, becoming a mainstream trend. In particular, the production of cell therapy, gene therapy, and nucleic acid drugs will require the use of fully disposable, sterile products.

[0004] Therefore, developing a pressure sensor that can achieve irradiation sterilization effects and can be used in the biopharmaceutical field is an urgent problem that needs to be solved. Utility Model Content

[0005] In order to solve the above problems, the present utility model proposes a piezoresistive pressure sensor.

[0006] The piezoresistive pressure sensor of the present invention includes: a connector, which is a plastic connector and includes a micro-capacity connector and a large-capacity connector; a chip, which is arranged in the connector and has a power supply end and a signal output end; a cable, which is connected to the chip; and an output interface, which is a plastic output interface and is connected to the other end of the cable.

[0007] The output interface is a quick-plug interface, and the output interface is a rectangular groove socket. The rectangular groove socket is a socket that matches the crystal head and can also be replaced by any socket that can connect four wires.

[0008] Optionally, a hemispherical cover is additionally provided on the outer surface of the output interface, and the outer surface of the hemispherical cover has an anti-slip portion.

[0009] The power supply end on the chip includes a positive power supply electrode and a negative power supply electrode, and the signal output end includes a positive signal electrode and a negative signal electrode. The positive power supply electrode, the negative signal electrode, the positive signal electrode and the negative power supply electrode are arranged side by side, and the order is randomly arranged.

[0010] Specifically, the signal positive electrode and the signal negative electrode may be located between the power positive electrode and the power negative electrode.

[0011] The chip comprises a ceramic substrate, four semiconductor silicons are mounted on the ceramic substrate, a conductive soft silicone pad is mounted on the semiconductor silicon, and the ceramic substrate and the conductive soft silicone pad are sealed and isolated by a plastic shell.

[0012] The four semiconductor silicons are respectively connected to the positive pole of the power supply, the negative pole of the signal, the positive pole of the signal and the negative pole of the power supply through wires. The positive pole of the power supply, the negative pole of the signal, the positive pole of the signal and the negative pole of the power supply are distinguished by cables of different colors.

[0013] Specifically, the positive pole of the power supply is the red wire, the negative pole of the signal is the white wire, the positive pole of the signal is the green wire, and the negative pole of the power supply is the black wire.

[0014] The micro-capacity connector includes a lower cover and an upper cover connected to each other, with a receiving cavity between the upper cover and the lower cover. The chip is installed on the lower cover. Both ends of the upper cover extend outward with threaded interfaces, which are provided with external threads and are threaded with a plug.

[0015] The threaded interfaces are symmetrically arranged at both ends of the upper cover, and the threaded interfaces of the micro-capacity connector are connected to the device to be detected through an adapter.

[0016] The threaded interface is replaced with a TC interface, a pagoda head interface or a barbed interface, and is connected with a corresponding plug.

[0017] The large-capacity connector includes a hollow cylindrical shell, one side of the shell extends outward to form a boss, a chip is installed in the boss, and the other end of the chip is connected to the output interface through a cable. The large-capacity connector is connected to the device to be tested through a clamp, flange, barbed connector or pagoda connector.

[0018] The beneficial effects of the present invention are:

[0019] The utility model has a small size, which greatly reduces the residue of drugs in the pressure sensor; the connector and the output interface are both made of plastic shell, with high biosafety, and gamma rays can smoothly penetrate the sensor to achieve irradiation sterilization effect, which complies with the global pharmaceutical field sterile irradiation verification standards; it can be plug-and-play and disposable after use, which is very suitable for the preparation of drugs such as viral cells; biopharmaceutical equipment can be made into a small size, low cost, and different projects can mix equipment without worrying about cross contamination, which greatly reduces the investment in plant construction. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the micro-capacity connector pressure sensor of the present utility model.

[0021] Figure 2It is a side view of the micro-capacity connector pressure sensor of the present utility model.

[0022] Figure 3 It is a side view of the output interface of the utility model.

[0023] Figure 4 It is a top view of the chip of the present invention.

[0024] Figure 5 It is a schematic structural diagram of the chip of the present utility model.

[0025] Figure 6 It is a structural diagram of a large-capacity connector pressure sensor of the utility model.

[0026] Figure 7 This is the first embodiment of the micro-capacity connector pressure sensor of the present utility model.

[0027] Figure 8 This is the second embodiment of the micro-capacity connector pressure sensor of the present utility model.

[0028] Reference numerals:

[0029] Chip 1; ceramic substrate 101; semiconductor silicon 102; conductive soft silicone pad 103; plastic housing 104; upper cover 2; lower cover 3; plug 4; cable 5; output interface 6; threaded interface 7; large-capacity connector 8; device to be tested 9; adapter 10. DETAILED DESCRIPTION

[0030] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0031] like Figures 1-8 As shown, the piezoresistive pressure sensor of the present invention comprises: a connector, a chip 1, a cable 5, and an output interface 6. The connector is a plastic connector and includes a micro-capacity connector and a large-capacity connector. The micro-capacity connector is used to connect to small-caliber devices to be tested, while the large-capacity connector is used to connect to large-caliber devices to be tested. The chip 1 is disposed in the connector and has a power supply terminal and a signal output terminal. The chip 1 is the core component of the pressure sensor and is used to detect and output voltage signals. The cable 5 is connected to the chip 1. The output interface 6 is a plastic output interface and is connected to the other end of the cable 5. The arrangement of the plastic connector and plastic output interface provides high biosafety, allowing gamma rays to smoothly penetrate the sensor, achieving irradiation sterilization, and can be used in the biopharmaceutical field.

[0032] like Figure 1-Figure 3As shown, the output interface 6 is a quick-plug interface, and the output interface 6 is a rectangular groove socket. The rectangular groove socket is the shape of a socket that matches the crystal head. The receiving signal end is made into the shape of a crystal head, which can realize quick plugging and unplugging with the output interface 6 and realize fast signal output. Moreover, this connector can be plug and play and can be thrown away after use. It is very suitable for the preparation of drugs such as virus cells; the rectangular groove socket can also be replaced with any socket that can connect four wires.

[0033] Optionally, in some embodiments, the outer surface of the output interface 6 is provided with a hemispherical cover, and the outer surface of the hemispherical cover has an anti-slip portion to achieve quick plugging and unplugging.

[0034] The power supply terminal on chip 1 includes a positive power supply electrode and a negative power supply electrode, and the signal output terminal includes a positive signal electrode and a negative signal electrode. The positive power supply electrode, the negative signal electrode, the positive signal electrode and the negative power supply electrode are arranged side by side, and the order is randomly arranged.

[0035] In some embodiments, as Figure 3 As shown, the signal positive electrode and the signal negative electrode are located between the power supply positive electrode and the power supply negative electrode.

[0036] like Figure 4 and Figure 5 As shown, the chip 1 includes a ceramic substrate 101 , four semiconductor silicons 102 are mounted on the ceramic substrate 101 , a conductive soft silicone pad 103 is mounted on the semiconductor silicon 102 , and the ceramic substrate 101 and the conductive soft silicone pad 103 are sealed and isolated by a plastic shell 104 .

[0037] The four semiconductor silicons 102 are respectively connected to the positive pole of the power supply, the negative pole of the signal, the positive pole of the signal and the negative pole of the power supply through wires. The positive pole of the power supply, the negative pole of the signal, the positive pole of the signal and the negative pole of the power supply are distinguished by cables of different colors.

[0038] In some embodiments, as Figure 4 As shown, the positive pole of the power supply is the red line, the negative pole of the signal is the white line, the positive pole of the signal is the green line, and the negative pole of the power supply is the black line.

[0039] Pressure changes will squeeze the conductive soft silicone pad 103 and deform it. After the conductive soft silicone pad 103 is deformed, the area of ​​contact with the semiconductor silicon 102 on the chip will also change. The greater the pressure applied, the greater the squeezing deformation of the conductive soft silicone pad 103, and the larger the contact area with the semiconductor silicon 102 on the ceramic substrate 101. The corresponding resistance value is also higher, and the voltage output by the green line and the white line is also higher.

[0040] like Figure 1-Figure 2As shown, the microcapacity connector includes an upper cover 2 and a lower cover 3 connected to each other, with a receiving cavity between the upper cover 2 and the lower cover 3. The chip 1 is mounted on the lower cover 3. Threaded interfaces 7 extend outward from both ends of the upper cover 2. The threaded interfaces 7 are provided with external threads, and a plug 4 is threadedly connected to the threaded interfaces 7. The upper cover 2, lower cover 3, and plug 4 of the microcapacity connector are all made of plastic. After the chip 1 is mounted on the lower cover 3, the upper cover 2 and the lower cover 3 are connected by a snap-fit ​​method. The lower cover 3 is a plate-like structure. The bottom of the upper cover 2 is provided with a slot that can cooperate with the lower cover 3, so that the upper cover 2 and the lower cover 3 can be snapped together. The cable 5 is connected to the chip 1, so the lower edge of the upper cover 2 has a hole or slot for the cable 5 to pass through. The shape and size of the hole or slot match the cable 5.

[0041] The threaded interfaces 7 are symmetrically arranged at both ends of the upper cover 2 , and the threaded interfaces 7 of the micro-capacity connector are connected to the device to be tested through an adapter 10 .

[0042] Since there are two threaded interfaces 7 , one or two threaded interfaces 7 can be selected for use according to the needs of the detection position. When one threaded interface 7 is used, the other threaded interface 7 needs to be blocked with a plug.

[0043] In some embodiments, the threaded interface 7 can be replaced with a TC interface, a pagoda head interface or a barbed interface, and connected with a corresponding plug.

[0044] like Figure 6 As shown, the large-capacity connector 8 includes a hollow cylindrical shell, one side of the shell extends outward to form a boss, and the chip 1 is installed in the boss. The other end of the chip 1 is connected to the output interface 6 through a cable 5. The large-capacity connector 8 is connected to the device to be tested through a clamp, flange, barbed connector or pagoda connector.

[0045] Principle: Pressure changes cause the conductive soft silicone pad 103 to deform. This deformation changes the area of ​​the conductive soft silicone pad 103 in contact with the semiconductor silicon 102 on the chip 1, causing corresponding changes in resistance and voltage. By applying an input voltage, the output voltage changes with the deformation of the conductive soft silicone pad 103. The output resistance and voltage are proportional to the pressure value. This utility model detects the pressure value by inputting a fixed voltage and detecting the output voltage. Based on the corresponding relationship between the output voltage and the pressure value, the pressure value can be detected.

[0046] Example 1

[0047] like Figure 7 As shown, when the piezoresistive pressure sensor of the present invention is used to detect the pressure at the side end of the column tube: one of the threaded interfaces 7 of the micro-capacity connector is connected to the side end of the device to be detected 9, i.e., the column tube, through the adapter 10, and the other threaded interface 7 of the micro-capacity connector is blocked with a plug. Figure 7The liquid flows from the left end of the center column tube to the right end, passes through the adapter 10 and enters the micro-capacity connector, thereby squeezing the chip 1 to detect the pressure.

[0048] Example 2

[0049] like Figure 8 As shown, when the piezoresistive pressure sensor of the present invention is used to detect the pressure at the top of the column tube, one threaded interface 7 of the micro-capacity connector is connected to the top of the device to be detected 9, i.e., the column tube, through an adapter 10, and the other threaded interface 7 is connected to another pipe through an adapter 10, and the side end of the column tube is blocked. Figure 8 The liquid flows from the bottom of the central column tube to the top, enters the micro-capacity connector through the adapter 10, squeezes the chip 1, thereby detecting the pressure, and then flows out from another pipe.

[0050] Example 3

[0051] like Figure 6 As shown, when the piezoresistive pressure sensor of the present invention is used to detect the pressure of a large-capacity pipeline: the two ends of the cylindrical shell of the large-capacity connector 8 are connected to the device to be detected and the output pipeline respectively through clamps or flanges. When the liquid or gas passes through the cylindrical shell, the chip 1 will be squeezed, thereby detecting the pressure.

[0052] Example 4

[0053] The chip 1 of the piezoresistive pressure sensor of this embodiment has an input resistance of 1200 to 3200Ω, an output resistance of 285 to 315Ω, a signal output range of -1.5mv to 30mv, and a sensitivity of 4.85 to 5.15uV / V / mmHg, or a wider range.

[0054] The micro-capacity connector is designed in a regular shape with a width of 24.6mm and a length of 48.2mm. The inner diameter of the threaded interface 7 is 4.2mm, or the inner diameter of the threaded interface can be adjusted according to the application scenario. The length of the cable 5 is 1000mm.

[0055] The corresponding relationship between output voltage and pressure value is:

[0056] Pressure (bar) = output voltage (millivolts) × 4 ÷ 15.

[0057] The chip of this embodiment outputs a current of 30mV at the output end when an input voltage of 1.2V is applied and a pressure of 8bar is applied.

[0058] According to different requirements, the input resistance can be adjusted to 200 to 6800Ω or a wider range, the output resistance can be set to 5 to 3500Ω or a wider range, and the signal output range can be adjusted to -30mv to 300mv or a wider range.

[0059] The width and length of the micro-capacity connector and the length of the cable can be adjusted to any length according to actual usage requirements.

[0060] In the description of the present invention, it should be understood that the terms "up", "down", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0061] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection, or communication; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0062] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0063] In the present invention, the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples without contradiction.

[0064] Although the above embodiments have been shown and described, it is understood that the above embodiments are illustrative and cannot be understood as limitations on the present invention. Changes, modifications, substitutions and variations of the above embodiments made by ordinary technicians in this field are all within the scope of protection of the present invention.

Claims

1. A piezoresistive pressure sensor, characterized in that: include: Connectors, which are plastic connectors, include micro-capacity connectors and large-capacity connectors; A chip is provided in the connector and has a power supply terminal and a signal output terminal; a cable connected to the chip; The output interface is a plastic output interface, and the output interface is connected to the other end of the cable.

2. The piezoresistive pressure sensor according to claim 1, wherein: The output interface is a quick-plug interface, and the output interface is a rectangular groove socket.

3. The piezoresistive pressure sensor according to claim 1, wherein: The power supply end on the chip includes a positive power supply electrode and a negative power supply electrode, and the signal output end includes a positive signal electrode and a negative signal electrode. The positive power supply electrode, the negative signal electrode, the positive signal electrode and the negative power supply electrode are arranged side by side, and the order is randomly arranged.

4. The piezoresistive pressure sensor according to claim 3, wherein: The chip comprises a ceramic substrate, four semiconductor silicons are mounted on the ceramic substrate, a conductive soft silicone pad is mounted on the semiconductor silicon, and the ceramic substrate and the conductive soft silicone pad are sealed and isolated by a plastic shell.

5. The piezoresistive pressure sensor according to claim 4, wherein: The four semiconductor silicons are respectively connected to the positive pole of the power supply, the negative pole of the signal, the positive pole of the signal and the negative pole of the power supply through wires. The positive pole of the power supply, the negative pole of the signal, the positive pole of the signal and the negative pole of the power supply are distinguished by cables of different colors.

6. The piezoresistive pressure sensor according to claim 1, wherein: The micro-capacity connector includes a lower cover and an upper cover connected to each other, with a receiving cavity between the upper cover and the lower cover. The chip is installed on the lower cover. Both ends of the upper cover extend outward with threaded interfaces, which are provided with external threads and are threaded with a plug.

7. The piezoresistive pressure sensor according to claim 6, wherein: The threaded interfaces are symmetrically arranged at both ends of the upper cover, and the threaded interfaces of the micro-capacity connector are connected to the device to be detected through an adapter.

8. The piezoresistive pressure sensor according to claim 6 or 7, characterized in that: The threaded interface is replaced with a TC interface, a pagoda head interface or a barbed interface, and is connected with a corresponding plug.

9. The piezoresistive pressure sensor according to claim 1, wherein: The large-capacity connector includes a hollow cylindrical shell, one side of the shell extends outward to form a boss, a chip is installed in the boss, and the other end of the chip is connected to the output interface through a cable. The large-capacity connector is connected to the device to be tested through a clamp, flange, barbed connector or pagoda connector.

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