Vacuum pneumatic stop valve of semiconductor equipment

Abstract

The utility model relates to the technical field of vacuum pneumatic stop valves, in particular to a vacuum pneumatic stop valve of semiconductor equipment. The valve cover is arranged on the valve body, the valve rod penetrates through the valve cover and extends into the valve body, the pneumatic executing mechanism is connected with the valve rod, the valve clack is arranged on the valve rod, a valve cover gasket is arranged between the valve body and the valve cover, a first wave-tooth-shaped gasket is arranged between the valve cover gasket and the valve cover, and a second wave-tooth-shaped gasket is arranged between the valve cover gasket and the valve cover. And a second wave-tooth-shaped gasket is arranged between the valve cover gasket and the valve body. According to the utility model, the valve cover gasket is arranged, the upper and lower layers of corrugated tooth-shaped gaskets are adopted by the valve cover gasket, so that a better sealing effect is achieved, and the corrugated tooth-shaped gaskets are provided with corrugated tooth grooves, so that not only can the influence of negative pressure on the nonmetal gasket be avoided, but also the sealing effect can be achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pneumatic stop valves, in particular to a vacuum pneumatic stop valve for semiconductor equipment. Background Art

[0002] The high-purity gas system in semiconductor manufacturing technology directly affects the operation of the entire factory production and the quality of the products. The vacuum degree of the gas pipeline directly determines the purity of the gas, which has a decisive impact on the device performance and yield rate.

[0003] Conventional vacuum shutoff valves used in semiconductor systems typically consist of a valve body, bonnet, disc, stem, center flange bolts, and stem nuts. A metal-bonded graphite spiral wound gasket seals the valve body and bonnet, while a separate graphite packing seals the packing. This sealing structure, when used in vacuum lines for extended periods, can cause negative pressure and frequent closing and closing movements, leading to pressure fluctuations and wear on the packing, resulting in leakage and impacting the vacuum level of the entire line. Utility Model Content

[0004] In view of the defects of the prior art, the utility model provides a vacuum pneumatic stop valve for semiconductor equipment, which is provided with a valve cover gasket, and the valve cover gasket adopts two layers of upper and lower corrugated tooth gaskets to achieve a better sealing effect. The corrugated tooth gasket has corrugated tooth grooves, which can not only avoid the influence of negative pressure on non-metallic gaskets, but also play a sealing role.

[0005] In order to achieve the above-mentioned purpose, the technical solution provided by the utility model is a vacuum pneumatic stop valve for semiconductor equipment, which includes a valve body, a valve cover arranged on the valve body, a valve stem passing through the valve cover and extending into the valve body, a pneumatic actuator connected to the valve stem, and a valve disc arranged on the valve stem, a valve cover gasket is arranged between the valve body and the valve cover, a first corrugated tooth gasket is arranged between the valve cover gasket and the valve cover, and a second corrugated tooth gasket is arranged between the valve cover gasket and the valve body.

[0006] Furthermore, the number of wave teeth of the first wave-toothed washer is greater than the number of wave teeth of the second wave-toothed washer.

[0007] Furthermore, a first sealing member is provided between the valve cover gasket and the valve disc, and the first sealing member is sleeved on the outside of the valve stem to seal the valve stem inside the first sealing member.

[0008] Furthermore, the first sealing member is a metal bellows.

[0009] Furthermore, the metal bellows is a U-shaped bellows.

[0010] Furthermore, one end of the metal bellows is fixedly connected to the valve disc, and the other end of the metal bellows abuts against the valve cover gasket.

[0011] Furthermore, one end of the metal bellows and the valve disc adopt a lip welding structure.

[0012] Furthermore, a second sealing member is provided between the valve cover and the valve stem.

[0013] Furthermore, the second sealing member is a flexible graphite filler.

[0014] The beneficial effects of the utility model are as follows: the use of a corrugated tooth gasket, since the corrugated tooth gasket has corrugated tooth grooves, can not only avoid the influence of negative pressure on the non-metallic gasket, but also play a sealing role. In addition, a valve cover gasket is provided, and the valve cover gasket adopts an upper and lower layer of corrugated tooth gaskets, that is, corrugated tooth gaskets are provided at the upper and lower positions with different pressures, so as to achieve a better sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a structural diagram of a vacuum pneumatic stop valve for semiconductor equipment in one embodiment of the present utility model;

[0016] Figure 2 for Figure 1 A partial enlarged view of the position of the middle valve cover gasket;

[0017] Figure 3 for Figure 1 A partial enlarged view of the first sealing member provided between the middle valve cover gasket and the valve disc;

[0018] Figure 4 for Figure 1 A partial enlarged view of the second sealing member provided between the middle valve cover and the valve stem;

[0019] In the picture:

[0020] 100, valve body, 110, inlet channel, 120, outlet channel,

[0021] 200, valve cover, 210, valve cover gasket, 211, first wave toothed gasket, 212, second wave toothed gasket,

[0022] 300, valve stem,

[0023] 400, pneumatic actuator,

[0024] 500, valve disc,

[0025] 600, Metal Bellows,

[0026] 700. Flexible graphite filler. DETAILED DESCRIPTION

[0027] To make the above-mentioned objects, features, and advantages of the present invention more clearly understood, the following detailed description of specific embodiments of the present invention is provided in conjunction with the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0028] See also Figure 1-Figure 4 , shows a structural schematic diagram of a vacuum pneumatic stop valve for semiconductor equipment in one embodiment of the present invention, which includes a valve body 100, a valve cover 200 arranged on the valve body 100, a valve stem 300 passing through the valve cover 200 and extending into the valve body 100, a pneumatic actuator 400 connected to the valve stem 300, and a valve disc 500 arranged on the valve stem 300. An inlet channel 110 and an outlet channel 120 are opened on the valve body 100. The working mode of the vacuum pneumatic stop valve is: the pneumatic actuator 400 drives the valve stem 300 and the valve disc 500 to move up and down, thereby realizing the opening and closing of the valve. When opened, the inlet channel 110 is connected to the outlet channel 120, and when closed, the inlet channel 110 is isolated from the outlet channel 120. In this embodiment, a valve cover gasket 210 is provided between the valve body 100 and the valve cover 200 , a first corrugated tooth washer 211 is provided between the valve cover gasket 210 and the valve cover 200 , and a second corrugated tooth washer 212 is provided between the valve cover gasket 210 and the valve body 100 .

[0029] In a specific configuration, the semiconductor equipment vacuum pneumatic stop valve is pre-tightened by the middle flange bolts 130 so that the first wave tooth-shaped gasket 211 and the second wave tooth-shaped gasket 212 between the valve body 100 and the valve cover 200 are sealed.

[0030] The semiconductor device vacuum pneumatic shut-off valve is equipped with a valve cover gasket 210. This gasket utilizes two layers of corrugated gaskets, one at the top and one at the bottom, where pressures differ, to provide a better seal. In this embodiment, the corrugated gasket, with its corrugated grooves, not only prevents negative pressure from affecting non-metallic gaskets but also provides a seal.

[0031] In one embodiment, the first wave-tooth washer 211 has a greater number of corrugated teeth than the second wave-tooth washer 212, meaning the two have different corrugated tooth types. The first wave-tooth washer 211 has a large and dense number of corrugated teeth, while the second wave-tooth washer 212 has only two corrugated teeth. The first wave-tooth washer 211 provides an absolute seal, while the second wave-tooth washer 212 provides only a supplementary seal.

[0032] The above-mentioned semiconductor equipment vacuum pneumatic stop valve is based on the upper and lower layers of corrugated tooth gaskets. Taking into account the different pressures at the positions of the two corrugated tooth gaskets, a first corrugated tooth gasket 211 with a large and dense number of corrugated teeth is used on the upper side to play an absolute sealing role, and a second corrugated tooth gasket 212 with two corrugated teeth is used on the lower side to play an auxiliary sealing role, thereby achieving a better sealing effect.

[0033] The two gaskets have the same pressure, and the preload force is provided by the preload bolts.

[0034] In one embodiment, a first sealing member is provided between the valve cover gasket 210 and the valve disc 500 . The first sealing member is sleeved on the outside of the valve stem 300 to seal the valve stem 300 inside the first sealing member.

[0035] In one embodiment, the first sealing member is a metal bellows 600 .

[0036] In one embodiment, the metal bellows 600 is a U-shaped bellows.

[0037] In one embodiment, one end of the metal bellows 600 is fixedly connected to the valve flap 500 , and the other end of the metal bellows 600 abuts against the valve cover gasket 210 .

[0038] In one embodiment, one end of the metal bellows 600 and the valve flap 500 adopt a lip welding structure.

[0039] It should be noted that the first seal is a metal bellows 600, and the outer side of the valve stem 300 adopts a bellows structure. In this embodiment, the metal bellows 600 is a U-shaped bellows with strong pressure resistance, and the metal bellows 600 is connected to the valve disc 500 by welding, isolating the direct contact between the medium and the filler.

[0040] In one embodiment, a second sealing member is provided between the valve cover 200 and the valve stem 300 .

[0041] In one embodiment, the second sealing member is a flexible graphite packing 700 .

[0042] The valve stem of this semiconductor vacuum pneumatic stop valve utilizes a U-shaped metal bellows combined with packing to achieve dual sealing. Specifically, the first seal is provided by the metal bellows 600, a section of which is welded to the valve disc 500, reducing the risk of leakage. A second seal is provided above the metal bellows 600 using flexible graphite packing 700. This seal can also be restored in the event of a failure of the metal bellows 600 seal. This design ensures smooth and reliable operation of the semiconductor vacuum pneumatic stop valve in high-vacuum pipelines.

[0043] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0044] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0045] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0046] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it can mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher horizontal height than the second feature. When a first feature is "below," "below," or "below" a second feature, it can mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower horizontal height than the second feature. It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there can be an intermediate element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there can be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

Claims

1. A vacuum pneumatic stop valve for semiconductor equipment, comprising a valve body, a valve cover disposed on the valve body, a valve stem passing through the valve cover and extending into the valve body, a pneumatic actuator connected to the valve stem, and a valve disc disposed on the valve stem, characterized in that: A valve cover gasket is provided between the valve body and the valve cover, a first corrugated tooth-shaped gasket is provided between the valve cover gasket and the valve cover, and a second corrugated tooth-shaped gasket is provided between the valve cover gasket and the valve body.

2. A vacuum pneumatic stop valve for semiconductor equipment according to claim 1, characterized in that: The number of wave teeth of the first wave-toothed washer is greater than the number of wave teeth of the second wave-toothed washer.

3. The vacuum pneumatic stop valve for semiconductor equipment according to claim 1, characterized in that: A first sealing member is provided between the valve cover gasket and the valve disc. The first sealing member is sleeved on the outside of the valve stem to seal the valve stem inside the first sealing member.

4. A vacuum pneumatic stop valve for semiconductor equipment according to claim 3, characterized in that: The first sealing member is a metal bellows.

5. The vacuum pneumatic stop valve for semiconductor equipment according to claim 4, characterized in that: The metal bellows is a U-shaped bellows.

6. The vacuum pneumatic stop valve for semiconductor equipment according to claim 4, characterized in that: One end of the metal bellows is fixedly connected to the valve disc, and the other end of the metal bellows abuts against the valve cover gasket.

7. The vacuum pneumatic stop valve for semiconductor equipment according to claim 4, characterized in that: One end of the metal bellows and the valve disc adopt a lip welding structure.

8. A vacuum pneumatic stop valve for semiconductor equipment according to any one of claims 1 to 7, characterized in that: A second sealing member is provided between the valve cover and the valve stem.

9. The vacuum pneumatic stop valve for semiconductor equipment according to claim 8, characterized in that: The second sealing member is a flexible graphite packing.

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