Hanging basket transfer device for silicon wafer cleaning

Abstract

According to the hanging basket transfer device for silicon wafer cleaning, a bearing plate is rotationally connected with a lifting hook through a rotary connecting assembly, the rotary connecting assembly comprises two mounting plates which are parallel to each other and fixedly connected with the bearing plate, a supporting shaft is fixedly connected between the two mounting plates, a through hole is formed in the lifting hook, and the supporting shaft penetrates through the through hole; the rotary driving mechanism is correspondingly connected with the lifting hooks through a plurality of transmission mechanisms, the rotary driving mechanism comprises a rotary driver fixedly arranged on the bearing plate, the rotary driver is in driving connection with at least one rotary disc, and the rotary disc is connected with at least one eccentric connecting shaft; the transmission mechanism comprises a transmission rod, one end of the transmission rod is rotationally connected with the eccentric connecting shaft, and the other end of the transmission rod is rotationally connected with the lifting hook through a middle connecting shaft. According to the utility model, the stability of the hanging basket is improved, and the control difficulty and the control cost are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer cleaning, in particular to a hanging basket transfer device for silicon wafer cleaning. Background Art

[0002] During processing, silicon wafers require multiple cleanings to remove surface residues and organic impurities for easier processing. Existing cleaning methods typically involve placing the wafers in a hanging basket, which is then placed in an alkaline cleaning tank and then a pure water cleaning tank, where ultrasonic cleaning is performed.

[0003] In order to improve the efficiency of grabbing and transporting the hanging basket, a translation lifting device is usually used to transport the hanging basket to the corresponding cleaning tank. In order to facilitate the connection between the translation lifting device and the hanging basket, the Chinese patent document "CN217655850U" discloses a hanging basket hook device for an automatic silicon wafer cleaning machine. This solution sets two sets of telescopic components in a rectangular shell of a hydraulic cylinder to be connected to the hook. The telescopic component includes two opposing telescopic cylinders. The output end of the telescopic cylinder is connected to a vertical plate, which is connected to the hook. A telescopic spring is commonly connected between the two vertical plates. The distance between the two hooks is changed by the extension and contraction of the output end of the telescopic cylinder, so that the hook is extended into the hanging ring of the hanging basket.

[0004] However, this solution only uses two hooks, which is unstable when lifting the hanging basket. Moreover, since each hook in this solution needs to be equipped with a telescopic cylinder, when hooks are added to ensure the stability of the hanging basket, an additional telescopic cylinder is required for each additional hook, which makes control more difficult and increases the cost. Utility Model Content

[0005] In order to solve the problem in the prior art that the control difficulty increases and the cost is high due to the improvement of the stability of the hanging basket, the utility model provides a hanging basket transfer device for silicon wafer cleaning, which improves the stability of the hanging basket while reducing the control difficulty and control cost.

[0006] The technical solution adopted by the utility model to solve the above technical problems is as follows: a hanging basket transfer device for cleaning silicon wafers, comprising a carrying plate, a plurality of hooks rotatably connected to the carrying plate for hanging the hanging basket, and a rotary drive mechanism for driving the hooks to rotate;

[0007] The supporting plate is rotatably connected to the hook via a rotating connection assembly, which includes two mounting plates that are parallel to each other and fixedly connected to the supporting plate, a support shaft being fixedly connected between the two mounting plates, and a through hole being formed on the hook, through which the support shaft passes;

[0008] The rotary drive mechanism is connected to the hook through a plurality of transmission mechanisms. The rotary drive mechanism includes a rotary drive fixedly arranged on the bearing plate. The rotary drive is driven and connected to at least one turntable, and the turntable is connected to at least one eccentric connecting shaft.

[0009] The transmission mechanism includes a transmission rod, one end of which is rotatably connected to the eccentric connecting shaft, and the other end of which is rotatably connected to the hook via an intermediate connecting shaft.

[0010] As a further optimization of a utility model of a hanging basket transfer device for cleaning silicon wafers: the hanging basket transfer device includes a screw, a slider is provided on the screw, the slider is fixedly connected to the first cylinder, and the axis of the first cylinder and the axis of the screw are perpendicular to each other, and the piston rod of the first cylinder is fixedly connected to the supporting plate.

[0011] As a further optimization of a hanging basket transfer device for cleaning silicon wafers, a utility model is provided: a connecting plate is provided between the piston rod and the supporting plate, the piston rod and the connecting plate are fixedly connected, and the connecting plate and the supporting plate are fixedly connected by multiple pillars to form an accommodating space for accommodating the rotary drive.

[0012] As a further optimization of the utility model of a hanging basket transfer device for cleaning silicon wafers: a slide is provided on the supporting plate, and the hook can swing in the slide.

[0013] As a further optimization of a utility model of a hanging basket transfer device for cleaning silicon wafers: the hooks are set to four, the rotary drive includes two motors, each of the two motors drives a turntable, and each turntable is connected to two eccentric connecting shafts.

[0014] As a further optimization of a utility model of a hanging basket transfer device for cleaning silicon wafers: the turntable is coaxially fixedly connected to a fixed shaft, a fixed sleeve of the fixed shaft is provided with a gear, the rotary drive includes a second cylinder, and a rack meshing with the gear is fixedly provided on the piston rod of the second cylinder.

[0015] As a further optimization of a utility model of a hanging basket transfer device for cleaning silicon wafers: the intermediate connecting shaft includes a screw and a sleeve sleeved on the middle of the screw, the two ends of the screw respectively pass through the hook and the transmission rod and are fixed by nuts, and the two ends of the sleeve respectively rest on the hook and the transmission rod.

[0016] As a further optimization of a utility model of a hanging basket transfer device for cleaning silicon wafers: the hook includes a connecting part and a hook body, the intermediate connecting shaft and the supporting shaft are respectively rotatably connected to the connecting part, and the hook body is used to hook the hanging basket.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] 1) The utility model is provided with a carrying plate, a hook for lifting a hanging basket rotatably connected to the carrying plate, and a slewing drive mechanism for driving the hook to rotate. The carrying plate is rotatably connected to the hook through a slewing connection assembly. The slewing connection assembly includes two mounting plates parallel to each other and fixedly connected to the carrying plate. A support shaft is fixedly connected between the two mounting plates. A through hole is provided on the hook, and the support shaft passes through the through hole. The slewing drive mechanism is correspondingly connected to the hook through a plurality of transmission mechanisms. The slewing drive mechanism includes a slewing drive fixedly arranged on the carrying plate. The slewing drive is driven and connected to at least one turntable, and the turntable is connected to at least one eccentric connecting shaft; the transmission mechanism includes a transmission rod, one end of the transmission rod is rotatably connected to the eccentric connecting shaft, and the other end of the transmission rod is rotatably connected to the hook through an intermediate connecting shaft. In this way, one turntable can drive at least one eccentric shaft, and one eccentric shaft is connected to a transmission rod of a transmission mechanism, thereby finally realizing control of the corresponding hook. In order to better control the effect, when adding hooks, there is no need to add an additional slewing drive of the same number as the hooks, so that the control difficulty is low and the cost is also reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the cooperation between the second cylinder and the fixed shaft;

[0021] Figure 3 This is a schematic diagram of the coordination of the hook, transmission rod and screw;

[0022] Figure 4 This is a schematic diagram of the coordination of the hook, mounting plate and load-bearing plate;

[0023] Figure 5 It is a schematic diagram of the hanging basket;

[0024] Markings in the figure: 1. hanging basket, 2. containing basket, 3. connecting basket, 4. through slot, 5. limiting column, 6. silicon wafer, 7. hook, 8. screw, 9. slider, 10. first cylinder, 11. connecting plate, 12. pillar, 13. bearing plate, 14. rotary drive, 15. turntable, 16. eccentric connecting shaft, 17. transmission rod, 18. intermediate connecting shaft, 19. support shaft, 20. mounting plate, 21. slide, 22. sleeve, 23. nut, 24. screw, 25. fixed shaft, 26. second cylinder, 27. rack, 28. gear, 29. connecting part, 30. hook body. DETAILED DESCRIPTION

[0025] The technical solution of the present invention is further elaborated in detail below in conjunction with specific embodiments. The parts not described and disclosed in detail in the following embodiments of the present invention should be understood as existing technologies known or should be known to those skilled in the art, such as the structure of the hanging basket 1, how the silicon wafer 6 is placed in the hanging basket 1, the model, structure and working principle of the screw 8, how the screw 8 cooperates with the slider 9, the model of the first cylinder 10 and the second cylinder 26, the model of the motor, the model of the gear 28 and the rack 27, how to clean the silicon wafer 6, the cooperation between the screw 8, the first cylinder 10 and the second cylinder 26, the cooperation between the screw 8, the first cylinder 10 and the motor, etc.

[0026] Example 1

[0027] A hanging basket transfer device for cleaning silicon wafers, such as Figure 1-Figure 5 As shown, it includes a supporting plate 13, a plurality of hooks 7 rotatably connected to the supporting plate 13 for lifting the hanging basket 1, and a rotary drive mechanism for driving the hooks 7 to rotate. In order not to affect the rotation of the hooks 7, a slide 21 is provided on the supporting plate 13, and the hooks 7 can swing in the slide 21. The carrier plate 13 is rotatably connected to the hook 7 via a rotating connection assembly. The rotating connection assembly includes two parallel mounting plates 20 fixedly connected to the carrier plate 13. A support shaft 19 is fixedly connected between the two mounting plates 20. The hook 7 has a through hole through which the support shaft 19 passes. A rotary drive mechanism is correspondingly connected to the hook 7 via several transmission mechanisms. The rotary drive mechanism includes a rotary drive 14 fixedly mounted on the carrier plate 13. The rotary drive 14 is driven by at least one turntable 15, to which at least one eccentric connecting shaft 16 is connected. The transmission mechanism includes a transmission rod 17, one end of which is rotatably connected to the eccentric connecting shaft 16, and the other end of which is rotatably connected to the hook 7 via an intermediate connecting shaft 18. The hook 7 includes a connecting portion 29 and a hook body 30. The intermediate connecting shaft 18 and the support shaft 19 are respectively rotatably connected to the connecting portion 29. The hook body 30 is used to hook the hanging basket 1.

[0028] The hanging basket 1 includes a receiving basket 2 and a connecting basket 3. The connecting basket 3 is located above the receiving frame and is fixedly connected to the receiving frame. The receiving frame is used to hold silicon wafers 6. The receiving frame is configured as a hollow structure to facilitate the entry of cleaning liquid for cleaning silicon wafers 6 into the receiving basket. The connecting basket 3 is provided with a limiting post 5 and a through slot 4 for a hook 7 to enter.

[0029] When it is necessary to lift the hanging basket 1 and move it, the slewing drive 14 drives the turntable 15 to rotate. At this time, the eccentric connecting shaft 16 rotates together. Since the two ends of the transmission rod 17 are rotatably connected to the eccentric connecting shaft 16 and the intermediate connecting shaft 18 respectively, when the transmission rod 17 is deflected to a certain extent due to the eccentric connecting shaft 16, the intermediate connecting shaft 18 will also be deflected to a certain extent, thereby driving the hook 7 to deflect around the support shaft 19, so that the hook 7 enters the through groove 4 on the hanging basket 1. Since the connecting portion 29 of the hook 7 is rotatably connected to the support shaft 19, the rotation of the hook 7 is more stable; when it is necessary to detach the hook 7 from the hanging basket 1, the slewing drive 14 drives the turntable 15 to rotate in the opposite direction. In this way, a turntable 15 can drive at least one eccentric shaft, and one eccentric shaft is connected to a transmission rod 17 of a transmission mechanism, thereby finally realizing the control of the corresponding hook 7. In order to better control the effect, two eccentric shafts are set on the turntable 15. In this way, when adding hooks 7 to improve the stability of the hanging basket 1, there is no need to add the same number of rotary drives 14 as the hooks 7, so the control difficulty is lower and the cost is also reduced.

[0030] The above is a basic implementation of the present invention, which can be further improved, optimized and limited to obtain the following embodiments:

[0031] Example 2

[0032] This embodiment is an improvement on the embodiment 1, and its main structure is the same as that of the embodiment 1, with the improvement being that, in order to realize the movement of the hanging basket 1 in the horizontal and vertical directions, the hanging basket 1 transfer device includes a lead screw 8, on which a slider 9 is provided, which is fixedly connected to a first cylinder 10, and the axis of the first cylinder 10 is perpendicular to the axis of the lead screw 8, and the piston rod of the first cylinder 10 is fixedly connected to the supporting plate 13. When horizontal movement is required, the lead screw 8 is directly driven to move the slider 9 to a suitable position. When vertical movement is required, the first cylinder 10 is driven, and the piston rod of the first cylinder 10 extends downward, driving the supporting plate 13 and the components on the supporting plate 13 to move downward.

[0033] Example 3

[0034] This embodiment is an improvement on the basis of Example 2. Its main structure is the same as that of Example 2. The improvement lies in that: in order to better place the rotary drive 14, a connecting plate 11 is provided between the piston rod and the supporting plate 13. The piston rod is fixedly connected to the connecting plate 11. The connecting plate 11 is fixedly connected to the supporting plate 13 by a plurality of pillars 12 to form an accommodating space for accommodating the rotary drive 14.

[0035] Example 4

[0036] This embodiment is an improvement on the basis of embodiment 1, and its main structure is the same as that of embodiment 1, with the improvement being that, in order to stably lift the hanging basket 1, four hooks 7 are provided, distributed at the four corners of the bearing plate 13, and the rotary drive 14 includes two motors, each of which drives a turntable 15, and each turntable 15 is connected to two eccentric connecting shafts 16.

[0037] Example 5

[0038] This embodiment is an improvement on the embodiment 1. Its main structure is the same as that of the embodiment 1, and the improvement lies in that: the turntable 15 is coaxially fixedly connected to a fixed shaft 25, and a gear 28 is fixedly sleeved on the fixed shaft 25. The rotary drive 14 includes a second cylinder 26, and a rack 27 is fixedly provided on the piston rod of the second cylinder 26, which is engaged with the gear 28. The piston rod of the second cylinder 26 is extended and retracted to achieve the forward and backward movement of the rack 27, thereby achieving the forward and reverse rotation of the gear 28. During the forward and reverse rotation of the gear 28, the forward and reverse rotation of the turntable 15 can be achieved through the fixed shaft 25. In this way, one cylinder can achieve the forward and reverse rotation of the two turntables 15. It is preferably provided with two eccentric connecting shafts 16 on the two turntables 15. Each eccentric connecting shaft 16 is rotatably connected to the hook 7 through a transmission mechanism. In this way, one cylinder can achieve the control of the four hooks 7, while improving the stability of the hanging basket 1 and reducing the control difficulty and control cost.

[0039] Example 6

[0040] This embodiment is an improvement on the basis of embodiment 1. Its main structure is the same as that of embodiment 1. The improvement lies in that: in order to better realize the rotational connection between the hook 7 and the transmission rod 17 and the intermediate connecting shaft 18, the intermediate connecting shaft 18 includes a screw rod 24 and a sleeve 22 sleeved on the middle part of the screw rod 24. The two ends of the screw rod 24 respectively pass through the hook 7 and the transmission rod 17 and are fixed by a nut 23. The two ends of the sleeve 22 respectively abut against the hook 7 and the transmission rod 17.

[0041] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A hanging basket transfer device for silicon wafer cleaning, characterized in that: It comprises a carrying plate (13), a plurality of hooks (7) rotatably connected to the carrying plate (13) for hanging a hanging basket (1), and a rotary drive mechanism for driving the hooks (7) to rotate; The supporting plate (13) is rotatably connected to the hook (7) via a rotating connection assembly, the rotating connection assembly comprising two mounting plates (20) parallel to each other and fixedly connected to the supporting plate (13), a support shaft (19) being fixedly connected between the two mounting plates (20), a through hole being provided on the hook (7), and the support shaft (19) passing through the through hole; The rotary drive mechanism is correspondingly connected to the hook (7) through a plurality of transmission mechanisms. The rotary drive mechanism includes a rotary drive (14) fixedly arranged on the carrier plate (13). The rotary drive (14) is driven and connected to at least one rotary disk (15). The rotary disk (15) is connected to at least one eccentric connecting shaft (16). The transmission mechanism comprises a transmission rod (17), one end of which is rotationally connected to the eccentric connecting shaft (16), and the other end of which is rotationally connected to the hook (7) via an intermediate connecting shaft (18).

2. The hanging basket transfer device for silicon wafer cleaning according to claim 1, wherein: The hanging basket transfer device comprises a screw (8), a slider (9) is provided on the screw (8), the slider (9) is fixedly connected to a first cylinder (10), and the axis of the first cylinder (10) is perpendicular to the axis of the screw (8), and the piston rod of the first cylinder (10) is fixedly connected to the bearing plate (13).

3. The hanging basket transfer device for silicon wafer cleaning according to claim 2, wherein: A connecting plate (11) is provided between the piston rod and the supporting plate (13), the piston rod and the connecting plate (11) are fixedly connected, and the connecting plate (11) and the supporting plate (13) are fixedly connected via a plurality of pillars (12) to form an accommodating space for accommodating the rotary drive (14).

4. The hanging basket transfer device for silicon wafer cleaning according to claim 2, wherein: A slideway (21) is provided on the bearing plate (13), and the hook (7) can swing in the slideway (21).

5. The hanging basket transfer device for silicon wafer cleaning according to claim 1, wherein: The number of the hooks is four, and the rotary drive (14) includes two motors. Each of the two motors drives a rotating disk (15), and each rotating disk (15) is connected to two eccentric connecting shafts (16).

6. The hanging basket transfer device for silicon wafer cleaning according to claim 1, wherein: The turntable (15) is coaxially fixedly connected to a fixed shaft (25), a gear (28) is fixedly sleeved on the fixed shaft (25), and the rotary driver (14) includes a second cylinder (26), and a rack (27) meshing with the gear (28) is fixedly provided on the piston rod of the second cylinder (26).

7. The hanging basket transfer device for silicon wafer cleaning according to claim 1, wherein: The intermediate connecting shaft (18) comprises a screw rod (24) and a sleeve (22) sleeved on the middle of the screw rod (24). The two ends of the screw rod (24) respectively pass through the hook (7) and the transmission rod (17) and are fixed by nuts (23). The two ends of the sleeve (22) respectively abut against the hook (7) and the transmission rod (17).

8. The hanging basket transfer device for silicon wafer cleaning according to claim 1, wherein: The hook (7) comprises a connecting portion (29) and a hook body (30), the intermediate connecting shaft (18) and the supporting shaft (19) are rotatably connected to the connecting portion (29) respectively, and the hook body (30) is used to hook the hanging basket (1).

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