High-strength quartz crucible melting device
By adjusting the heating arc through the lifting and opening adjustment mechanism, combined with the limit plate and air vent design, the problem of poor strength of the upper mouth of the quartz crucible is solved, and the production quality and efficiency of single crystal silicon rods are improved.
Patent Information
- Application Number
- CN202422491767.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-15
- Publication Date
- 2025-10-03
- Estimated Expiration
- 2034-10-15
AI Technical Summary
During the melting process, the upper mouth strength of the quartz crucible is poor, which affects the efficiency and quality of single crystal silicon rod production.
A high-strength quartz crucible melting device is used, including a melting furnace body, a melting mold, a vacuum assembly and a heating assembly. The height and opening of the heating arc are adjusted by the lifting mechanism and the opening adjustment mechanism to ensure the appropriate heating distance. Combined with the limit plate and air vent design, the high-temperature material melting effect at the top of the crucible is achieved.
The strength of the upper end of the quartz crucible is improved, ensuring the production quality and efficiency of single crystal silicon rods.
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Figure CN223409525U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of crucible processing, and in particular to a high-strength quartz crucible melting device. Background Art
[0002] Quartz crucibles are containers made by shaping high-purity quartz sand through a mold and then producing it at high temperatures using an electric arc method. They offer high-temperature resistance, long service life, and high purity, making them a crucial consumable in the production of single-crystal silicon rods in the semiconductor and photovoltaic industries. Quartz crucibles are primarily used in the single-crystal silicon rod drawing process, serving as a heating container to directly hold polycrystalline silicon material. After heating and melting, the material is processed into silicon rods / wafers, which are then used in the downstream production and processing of semiconductor chips, photovoltaic panels, and other products.
[0003] During the melting process of quartz crucibles, there is a problem of poor strength of the upper mouth of the processed crucible due to the inappropriate upper mouth material temperature. The upper mouth strength of the quartz crucible has a strong correlation with the yield of crystal pulling, which restricts the application of quartz crucibles.
[0004] In view of this, the present application aims to provide a high-strength quartz crucible melting device to better solve the above technical problems. Summary of the Invention
[0005] The purpose of the embodiments of the present application is to provide a high-strength quartz crucible melting device, which can solve the technical problem of poor strength of the upper end of the quartz crucible.
[0006] An embodiment of the present application provides a high-strength quartz crucible melting device, comprising a melting furnace body, a melting mold, a vacuum assembly and a heating assembly, wherein a fixed frame is provided in the melting furnace body, a rotating seat is provided on the fixed frame, the melting mold is mounted on the rotating seat, the vacuum assembly is communicated with the melting furnace body, the heating assembly is provided with a lifting mechanism, a heating arc and an opening adjustment mechanism, the lifting mechanism is mounted on the fixed frame and is located above the melting mold, and a mounting seat is provided at the bottom end of the lifting mechanism, the bottom end of the heating arc is rotatably arranged on the mounting seat, the opening adjustment mechanism is mounted on the mounting seat and is connected to the heating arc drive for pushing the heating arc to rotate around the mounting seat to achieve opening adjustment of the heating arc.
[0007] Furthermore, a limiting plate is provided on the fixing frame, a limiting groove is provided on the limiting plate for limiting the rotation position of the heating arc, and the heating arc passes through the limiting groove.
[0008] Furthermore, there are at least three heating arcs, and the opening adjustment mechanism is set to match the number of the heating arcs.
[0009] Furthermore, the lifting mechanism is provided with a servo lifting motor, and the opening adjustment mechanism is provided with a push-pull servo motor.
[0010] Furthermore, the opening adjustment mechanism is movably hinged to the heating arc.
[0011] Furthermore, a plurality of air holes are evenly arranged at the bottom end of the melting mold.
[0012] Furthermore, the vacuum pumping assembly is provided with a vacuum pipeline and a vacuum pump, and the vacuum pipeline is connected to the vacuum pump and the melting furnace body respectively.
[0013] Furthermore, the position where the vacuum pipeline is connected to the melting furnace body is sealed with metal, and the vacuum pump is set to be a variable frequency vacuum pump.
[0014] Beneficial effects of the utility model:
[0015] The cam is connected to the heating unit and the heating unit is installed on the support frame, and the support frame is connected with the support frame to the support frame. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.
[0017] Figure 1 It is a schematic diagram of the structure of some embodiments of the present utility model;
[0018] Figure 2 Schematic diagram of the connection between the heating arc and the opening adjustment mechanism in some embodiments of the present utility model;
[0019] Figure 3 Schematic diagram of the structure of the limiting plate in some embodiments of the present invention.
[0020] The reference numerals are:
[0021] Melting furnace body 1, fixed frame 11, rotating seat 12, limiting plate 13, limiting groove 131, melting mold 2, air vent 21, vacuum assembly 3, vacuum pipeline 31, vacuum pump 32, heating assembly 4, lifting mechanism 41, mounting seat 411, heating arc 42, opening adjustment mechanism 43. DETAILED DESCRIPTION
[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.
[0023] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.
[0024] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not require further definition or explanation in subsequent drawings.
[0025] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the product of this application is typically placed when in use. These terms are intended only to facilitate the description of this application and simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0026] Furthermore, terms such as "horizontal," "vertical," and "overhanging" do not necessarily imply that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.
[0027] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.
[0028] See also Figure 1-Figure 3 As shown, the high-strength quartz crucible melting device described in this embodiment includes a melting furnace body 1, a melting mold 2, a vacuum assembly 3 and a heating assembly 4. A fixed frame 11 is provided in the melting furnace body 1, and a rotating seat 12 is provided on the fixed frame 11. The melting mold 2 is installed on the rotating seat 12. The vacuum assembly 3 is connected to the melting furnace body 1, and the heating assembly 4 is provided with a lifting mechanism 41, a heating arc 42 and an opening adjustment mechanism 43. The lifting mechanism 41 is installed on the fixed frame 11 and is located above the melting mold 2. A mounting seat 411 is provided at the bottom end of the lifting mechanism 41. The bottom end of the heating arc 42 is rotatably set on the mounting seat 411. The opening adjustment mechanism 43 is installed on the mounting seat 411 and is driven by the heating arc 42 for pushing the heating arc 42 to rotate around the mounting seat to achieve opening adjustment of the heating arc 42.
[0029] Specifically, in this embodiment, the opening adjustment mechanism 43 is movably hinged to the heating arc 42 .
[0030] This embodiment has a simple structure and a reasonable design. The height and opening of the heating arc 42 are adjusted by the lifting mechanism 41 and the opening adjustment mechanism 43, so that the upper end of the crucible is heated at a more appropriate distance, ensuring the high-temperature material melting effect of the upper end of the crucible, and further ensuring the strength of the upper end of the crucible.
[0031] Specifically, in this embodiment, the arc starting heating position of the heating arc 42 for heating the upper mouth can be set to 75mm, and the opening can be set to 100mm to fully burn the upper mouth quartz sand without affecting the lower wall temperature, so as to fully chemically synthesize the material through the high temperature of the upper mouth and improve the upper mouth strength of the quartz crucible.
[0032] In some embodiments, a limiting plate 13 is provided on the fixing frame 11 . A limiting groove 131 is provided on the limiting plate 13 for limiting the rotation position of the heating arc 42 . The heating arc 42 is arranged to pass through the limiting groove 131 .
[0033] In this embodiment, by providing the limiting plate 13 and providing the limiting groove 131 on the limiting plate 13, stability in the opening adjustment process of the heating arc 42 can be achieved, thereby achieving better opening adjustment.
[0034] In some embodiments, at least three heating arcs 42 are provided, and the opening adjustment mechanism 43 is provided to match the number of the heating arcs 42 .
[0035] In this embodiment, at least three heating arcs 42 are provided, and corresponding opening adjustment mechanisms 43 are provided, so that one-to-one adjustment is performed to achieve better opening adjustment, thereby ensuring a suitable distance and performing better heating.
[0036] In some embodiments, the lifting mechanism 41 is provided with a servo lifting motor, and the opening adjustment mechanism 43 is provided with a push-pull servo motor.
[0037] This embodiment specifically shows that the height is adjusted by a servo lifting motor, and the opening is adjusted by a push-pull servo motor. It has a simple structure and high adjustment accuracy, which can better meet the adjustment of the upper heating position during the melting process.
[0038] In some embodiments, a plurality of air holes 21 are evenly formed at the bottom of the melting mold 2 .
[0039] In this embodiment, by evenly disposing a plurality of air holes 21 at the bottom of the melting mold 2, the bottom of the mold is evenly stressed when vacuuming, thereby reducing the movement of quartz sand, making the final formed quartz crucible more uniform, and ensuring the forming strength.
[0040] In some embodiments, the vacuum assembly 3 is provided with a vacuum pipeline 31 and a vacuum pump 32 , and the vacuum pipeline 31 is connected to the vacuum pump 32 and the melting furnace body 1 respectively.
[0041] Specifically, the position where the vacuum pipeline 31 is connected to the melting furnace body 1 is sealed with metal, and the vacuum pump 32 is configured as a variable frequency vacuum pump 32 .
[0042] In this embodiment, by connecting the vacuum pipe 31 to the melting furnace body 1 in a metal sealing manner, the connection sealing can be effectively ensured, thereby ensuring the vacuum effect during the melting process. The vacuum pump 32 adopts a variable frequency vacuum pump 32 to achieve flexible vacuum degree control, thereby ensuring the molding effect and better molding a high-strength quartz crucible.
[0043] The above are merely preferred embodiments of the present application and are not intended to limit the present application. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.
Claims
1. A high-strength quartz crucible melting device, characterized in that: It includes a melting furnace body, a melting mold, a vacuum assembly and a heating assembly. The melting furnace body is provided with a fixed frame, the fixed frame is provided with a rotating seat, the melting mold is installed on the rotating seat, the vacuum assembly is connected to the melting furnace body, and the heating assembly is provided with a lifting mechanism, a heating arc and an opening adjustment mechanism. The lifting mechanism is installed on the fixed frame and is located above the melting mold, and a mounting seat is provided at the bottom end of the lifting mechanism. The bottom end of the heating arc is rotatably set on the mounting seat. The opening adjustment mechanism is installed on the mounting seat and is connected to the heating arc drive for pushing the heating arc to rotate around the mounting seat to achieve opening adjustment of the heating arc.
2. The high-strength quartz crucible melting device according to claim 1, characterized in that: The fixing frame is provided with a limiting plate, the limiting plate is provided with a limiting groove for limiting the rotation position of the heating arc, and the heating arc is arranged to pass through the limiting groove.
3. The high-strength quartz crucible melting device according to claim 1, characterized in that: There are at least three heating arcs, and the opening adjustment mechanism is set to match the number of the heating arcs.
4. The high-strength quartz crucible melting device according to claim 1, characterized in that: The lifting mechanism is provided with a servo lifting motor, and the opening adjustment mechanism is provided with a push-pull servo motor.
5. The high-strength quartz crucible melting device according to claim 1, characterized in that: The opening adjustment mechanism is movably hinged to the heating arc.
6. The high-strength quartz crucible melting device according to claim 1, characterized in that: A plurality of air holes are evenly arranged at the bottom of the melting mold.
7. The high-strength quartz crucible melting device according to claim 1, characterized in that: The vacuum pumping assembly is provided with a vacuum pipeline and a vacuum pump, and the vacuum pipeline is connected to the vacuum pump and the melting furnace body respectively.
8. The high-strength quartz crucible melting device according to claim 7, characterized in that: The position where the vacuum pipeline is connected to the melting furnace body is sealed with metal, and the vacuum pump is a variable frequency vacuum pump.