Buffering and conveying device of vacuum evaporator

Abstract

The utility model provides a buffer conveying device of a vacuum evaporator, which comprises a main chamber of the evaporator, at least one side of the main chamber is communicated with a transition chamber, the main chamber comprises a feeding transition chamber and a discharging transition chamber, a tray support is arranged in the feeding transition chamber, one side of the tray support is provided with a rack, the upper part of the rack is provided with teeth, and the lower part of the rack is provided with a V-shaped roller. First gears and first guide rails are arranged on the side walls in the feeding transition cavity and the discharging transition cavity, when the tray support needs to be transported, the first gears are meshed with the racks, the first guide rails are connected with the V-shaped rolling wheels in a matched mode, the first gears are connected with a first driving mechanism, and the first driving mechanism drives the first gears to rotate; according to the buffer conveying device for the vacuum evaporator, the V-shaped rollers slide on the first guide rails, when the V-shaped rollers are conveyed to a main cavity of the evaporator, the tray support is separated from an uncoated plating pot, the body of the uncoated plating pot does not need to be improved, and the buffer conveying device for the vacuum evaporator is high in structural automation degree and does not cause limitation of subsequent vacuum coating.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, and more specifically to a buffer conveying device for a vacuum evaporation machine. Background Art

[0002] Vacuum evaporation coating (abbreviated as evaporation) is the earliest developed and widely used coating technology within PVD (physical vapor deposition) technology. Its working principle is as follows: a film material is placed in the evaporation source (a device used to heat the film material to vaporize and evaporate it) of the vacuum coating equipment. Under high vacuum conditions, the evaporation source heats the film material, causing it to evaporate and form vapor. Once the vapor reaches the surface of the substrate being coated, due to the substrate's lower temperature, it condenses on the substrate to form a thin film.

[0003] Currently, the most widely used chamber-type evaporation coating machine utilizes two main evaporation sources: a resistance heating evaporation source and an electron beam heating evaporation source (consisting of an electron gun and a crucible). This type of coating machine primarily includes a vacuum chamber, an exhaust system, an evaporation source, a film thickness measurement system, an ion source, and a heater.

[0004] The basic process of substrate coating processing in existing box-type evaporation coating machines is: a. Loading (loading the substrate to be evaporated onto the workpiece rack); b. Putting on the rack (installing the workpiece rack with the substrate loaded into the vacuum chamber); c. Vacuuming (closing the vacuum chamber door, and evacuating the vacuum chamber through the vacuum pump until the vacuum pressure reaches the set value, such as better than 10-2Pa); d. Heating (heating the substrate until the substrate temperature reaches the set value, and heating is also optional according to the coating requirements); e. Ion cleaning (rotating the workpiece rack, cleaning the substrate through the ion source, and cleaning is also optional according to the coating requirements); f. Coating (turning on the evaporation source to realize coating until the film thickness reaches the set value); g. Stopping (stop heating, stop rotating the workpiece rack, and expand the vacuum chamber); h. Unloading (opening the vacuum chamber door and taking out the coated substrate workpiece rack); then returning to step a to execute the next production process.

[0005] Existing patent publication number: CN103290364B, discloses a continuous vacuum evaporation coating device, comprising: a coating chamber, a workpiece rack, and a film material rack; one end of the coating chamber is connected to a first transition chamber, and the other end is connected to a second transition chamber; the first transition chamber, the coating chamber, and the second transition chamber are respectively provided with a first track and a second track; both ends of the first transition chamber and the second transition chamber are provided with a gate valve; and the first transition chamber, the coating chamber, and the second transition chamber are each equipped with an independent exhaust system. During operation, the device provided by this patent performs all operations automatically, except for manual loading and unloading of the workpiece rack and film material.

[0006] However, the workpiece rack includes: a workpiece rack body, a first guide rail adapted to the first pulley is provided on the top of the workpiece rack body, and a first rack meshed with the first gear is provided on one side of the first guide rail. When the workpiece rack is mounted on the first rail, the first pulley slides and fits with the first guide rail, the first gear meshes with the first rack, and the first gear rotates under the drive of the motor. As the first gear rotates, the first rack drives the workpiece rack to move along the length of the first rack, thereby achieving the purpose of transporting the workpiece rack. However, the workpiece rack body and the first rack are on the same component, which will cause significant space limitations for the subsequent coating of the workpiece rack body, which is a problem that currently needs to be solved. Utility Model Content

[0007] In view of this, in order to solve the above problems, the present invention proposes a vacuum evaporation machine buffer conveying device, comprising a main chamber 10 of the evaporation machine, at least one side of the main chamber 10 of the evaporation machine is connected to a transition chamber 20, a tray bracket 40 is placed in the feed transition chamber 21 for placing an uncoated plating pot 50, and the discharge transition chamber 24 is used to place the tray bracket 40 output from the main chamber 10 of the evaporation machine, a rack 41 is provided on one side of the tray bracket 40, the upper part of the rack 41 is provided with teeth, and the lower part is provided with a V-shaped roller 42, the side walls of the feed transition chamber 21 and the discharge transition chamber 24 are provided with a first gear 27 and a first guide Rail 28, when the pallet holder 40 needs to be transported, the first gear 27 is engaged with the rack 41, and the first guide rail 28 is matched with the V-shaped roller 42 to keep the transport pallet holder 40 in linear motion. The first gear 27 is connected to the first drive mechanism 30, and the first drive mechanism 30 drives the first gear 27 to rotate, so that the V-shaped roller 42 slides on the first guide rail 28. When transported to the main chamber 10 of the evaporation machine, the pallet holder 40 is separated from the uncoated plating pot 50, and there is no need to improve the body of the uncoated plating pot 50. The cache conveying device structure of the vacuum evaporation machine has a high degree of automation and will not cause limitations in subsequent vacuum coating.

[0008] A vacuum evaporation machine buffer conveying device includes a main chamber 10 of the evaporation machine, characterized in that: at least one side of the main chamber 10 of the evaporation machine is connected to a transition chamber 20, when there are two transition chambers 20, the two transition chambers 20 are symmetrically arranged on both sides of the main chamber 10 of the evaporation machine, one of which is a feed transition chamber 21, and the other is a discharge transition chamber 24; when there is only one transition chamber 20, the feed transition chamber 21 and the discharge transition chamber 24 of the transition chamber 20 are the same, a tray bracket 40 is placed in the feed transition chamber 21 for placing an uncoated plating pot 50, and the discharge transition chamber 24 is a tray bracket 40 for placing an uncoated plating pot 50, and the discharge transition chamber 24 is a tray bracket 40 for placing an uncoated plating pot 50. A tray bracket 40 for placing the output of the main chamber 10 of the vapor deposition machine is provided on one side of the tray bracket 40. The upper part of the rack 41 is provided with teeth, and the lower part is provided with a V-shaped roller 42. The side walls of the feed transition chamber 21 and the discharge transition chamber 24 are provided with a first gear 27 and a first guide rail 28. When the tray bracket 40 needs to be transported, the first gear 27 is engaged with the rack 41, and the first guide rail 28 is matched with the V-shaped roller 42. The first gear 27 is connected to the first driving mechanism 30, and the first gear 27 is driven to rotate by the first driving mechanism 30, so that the V-shaped roller 42 slides on the first guide rail 28.

[0009] Furthermore, the V-shaped rollers 42 are multiple cylinders with V-shaped grooves that are evenly spaced and arranged at the bottom of the tray bracket 40 .

[0010] Furthermore, when there is only one transition chamber 20, the feed end of the feed transition chamber 21 is provided with a first gate plate, and the discharge end is provided with a second gate plate 23. The top of the transition chamber 20 is provided with a vacuum device 60. After the uncoated plating pot 50 is placed on the tray bracket 40, the first gate plate and the second gate plate 23 are closed, and the vacuum is pumped to the same vacuum degree as the main chamber 10 of the vapor deposition machine to ensure that the vacuum degree of the main chamber 10 is not destroyed. After the tray bracket 40 is transported out, the feed transition chamber 21 becomes the discharge transition chamber 24 for transporting the tray bracket 40 next time. When the tray bracket 40 needs to be output from the main chamber 10 of the plating machine, the second gate plate 23 is opened and the first gate plate is closed.

[0011] Furthermore, when there are two transition chambers 20, the feeding end of the feeding transition chamber 21 is provided with a first gate, and the discharging end is provided with a second gate 23. The top of the transition chamber 20 is provided with a vacuum device 60. After the uncoated plating pot 50 is placed on the tray support 40, the first gate and the second gate 23 are closed, and the vacuum is pumped to the same vacuum degree as that of the main chamber 10 of the vapor deposition machine to ensure that the vacuum degree of the main chamber 10 is not destroyed. The feeding end of the discharging transition chamber 24 is provided with a third gate 25, and the discharging end is provided with a fourth gate. When the tray support 40 outputted from the main chamber 10 of the plating machine is required, the first gate 25 is opened. There are three gates 25, and the fourth gate is closed; after the pallet holder 40 is transported out, the feed transition chamber 21 becomes the discharge transition chamber 24 for the next transport of the pallet holder 40. When the pallet holder 40 is needed to be output from the main chamber 10 of the plating machine, the second gate 23 is opened and the first gate is closed. The discharge transition chamber 24 becomes the feed transition chamber 21 for the next transport of the pallet holder 40. After placing the uncoated plating pot 50 on the pallet holder 40, the third gate 25 and the fourth gate are closed, and the vacuum is drawn to the same vacuum degree as that of the main chamber 10 of the vapor deposition machine to ensure that the vacuum degree of the main chamber 10 is not destroyed.

[0012] Furthermore, the side wall of the main chamber 10 of the evaporation machine is provided with a second gear 11 and a second guide rail 13, and the second gear 11 and the first gear 27 are on the same horizontal line, and the first guide rail 28 and the second guide rail 13 are on the same horizontal line, so as to ensure that when the racks 41 on both sides of the tray bracket 40 and the first guide rail 28 are transported to the main chamber 10 of the evaporation machine, the racks 41 and the second gear 11 are precisely engaged, and the V-shaped rollers 42 are precisely matched and connected with the second guide rail 13.

[0013] Furthermore, the second gear 11 is connected to the second driving mechanism, and the second driving mechanism drives the second gear 11 to rotate, so that the V-shaped roller 42 slides on the second guide rail 13 .

[0014] Furthermore, the second gear 11 is connected to the first drive mechanism 30 closest to it through a synchronous belt 12, and the first drive mechanism 30 drives the second gear 11 to rotate, so that the V-shaped roller 42 slides on the second guide rail 13, thereby ensuring the synchronization of the operation of the first gear 27 and the second gear 11.

[0015] When the feed transition chamber 21 is evacuated to the same vacuum degree as the main chamber 10 of the evaporation machine, the second gate 23 or the third gate valve is opened to transport the tray bracket 40 of the uncoated plating pot 50 to the designated position of the main chamber 10 of the evaporation machine.

[0016] Furthermore, the first driving mechanism 30 is a servo motor.

[0017] Beneficial effects of the present invention: The present invention proposes a buffer conveying device for a vacuum evaporation machine, comprising a main chamber 10 of the evaporation machine, wherein at least one side of the main chamber 10 of the evaporation machine is connected to a transition chamber 20, a tray bracket 40 is placed in the feed transition chamber 21 for placing an uncoated plating pot 50, and the discharge transition chamber 24 is used to place the tray bracket 40 output from the main chamber 10 of the evaporation machine, a rack 41 is provided on one side of the tray bracket 40, the upper part of the rack 41 is provided with teeth, and the lower part is provided with a V-shaped roller 42, and the side walls of the feed transition chamber 21 and the discharge transition chamber 24 are provided with a first gear 27 and a first guide rail 2 8. When the pallet holder 40 needs to be transported, the first gear 27 is engaged with the rack 41, and the first guide rail 28 is matched with the V-shaped roller 42 to keep the transport pallet holder 40 in linear motion. The first gear 27 is connected to the first drive mechanism 30, and the first drive mechanism 30 drives the first gear 27 to rotate, so that the V-shaped roller 42 slides on the first guide rail 28. When transported to the main chamber 10 of the evaporation machine, the pallet holder 40 is separated from the uncoated plating pot 50, and there is no need to improve the body of the uncoated plating pot 50. The cache conveying device structure of the vacuum evaporation machine has a high degree of automation and will not cause limitations in subsequent vacuum coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is an overall structural diagram of the buffer conveying device of the vacuum evaporation machine of the present invention.

[0019] Figure 2 This is a structural diagram of the outer shell of the transition chamber of the buffer conveying device of the vacuum evaporation machine of the present invention.

[0020] Figure 3 This is a structural diagram of the buffer conveying device of the vacuum evaporation machine of the present invention.

[0021] Figure 4 This is a structural diagram of the tray support of the buffer conveying device of the vacuum evaporation machine of the present invention.

[0022] Figure 5 This is a structural diagram of the main chamber of the vacuum evaporation machine of the utility model, which includes a buffer and conveying device.

[0023] Description of main component symbols

[0024] Main chamber 10, second gear 11, synchronous belt 12, second guide rail 13, transition chamber 20, feed transition chamber 21, second gate 23, discharge transition chamber 24, third gate 25, first gear 27, V-shaped roller 42, first drive mechanism 30, tray bracket 40, rack 41, first guide rail 28, plating pot 50, vacuum device 60.

[0025] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0026] Example:

[0027] like Figure 1-4 As shown, a vacuum evaporation machine buffer conveying device includes a main chamber 10 of the evaporation machine, and a transition chamber 20 is connected to at least one side of the main chamber 10 of the evaporation machine. When there are two transition chambers 20, the two transition chambers 20 are symmetrically arranged on both sides of the main chamber 10 of the evaporation machine, one of which is a feed transition chamber 21, and the other is a discharge transition chamber 24; when there is one transition chamber 20, the feed transition chamber 21 and the discharge transition chamber 24 of the transition chamber 20 are the same, and a tray bracket 40 is placed in the feed transition chamber 21 for placing an uncoated plating pot 50, and the discharge transition chamber 24 is used to place the tray bracket 40 output from the main chamber 10 of the evaporation machine, and a rack 41 is provided on one side of the tray bracket 40, and the upper part of the rack 41 is provided with teeth, and the lower part is provided with a V-shaped roller 42, and the V-shaped roller 42 is a plurality of cylinders with V-shaped grooves that are evenly spaced and arranged at the bottom of the tray bracket 40.

[0028] The side walls of the feed transition chamber 21 and the discharge transition chamber 24 are both provided with a first gear 27 and a first guide rail 28. When the pallet support 40 needs to be transported, the first gear 27 is engaged with the rack 41, and the first guide rail 28 is matched and connected with the V-shaped roller 42. The first gear 27 is connected to the first drive mechanism 30, and the first drive mechanism 30 drives the first gear 27 to rotate, so that the V-shaped roller 42 slides on the first guide rail 28. When there is only one transition chamber 20, the feed end of the feed transition chamber 21 is provided with a first gate, and the discharge end is provided with a The second gate 23, a vacuum device 60 is provided on the top of the transition chamber 20. After the uncoated plating pot 50 is placed on the tray bracket 40, the first gate and the second gate 23 are closed, and the vacuum is drawn to the same vacuum degree as that of the main chamber 10 of the vapor deposition machine to ensure that the vacuum degree of the main chamber 10 is not destroyed. After the tray bracket 40 is transported out, the feed transition chamber 21 becomes the discharge transition chamber 24 for transporting the tray bracket 40 next time. When the tray bracket 40 output from the main chamber 10 of the plating machine is needed, the second gate 23 is opened and the first gate is closed.

[0029] When there are two transition chambers 20, the feeding end of the feeding transition chamber 21 is provided with a first gate, and the discharging end is provided with a second gate 23. The top of the transition chamber 20 is provided with a vacuum device 60. After the uncoated plating pot 50 is placed on the tray support 40, the first gate and the second gate 23 are closed, and the vacuum is pumped to the same vacuum degree as the main chamber 10 of the evaporation machine to ensure that the vacuum degree of the main chamber 10 is not destroyed. The feeding end of the discharging transition chamber 24 is provided with a third gate 25, and the discharging end is provided with a fourth gate. When the tray support 40 outputted from the main chamber 10 of the plating machine is required, the third gate is opened. Plate 25, close the fourth gate; after the tray holder 40 is transported out, the feed transition chamber 21 becomes the discharge transition chamber 24 for the next transport of the tray holder 40. When the tray holder 40 is needed to be output from the main chamber 10 of the plating machine, open the second gate 23 and close the first gate. The discharge transition chamber 24 becomes the feed transition chamber 21 for the next transport of the tray holder 40. After placing the uncoated plating pot 50 on the tray holder 40, close the third gate 25 and the fourth gate, and evacuate to the same vacuum degree as that of the main chamber 10 of the vapor deposition machine to ensure that the vacuum degree of the main chamber 10 is not destroyed.

[0030] like Figure 5 As shown, the side wall of the main chamber 10 of the evaporation machine is provided with a second gear 11 and a second guide rail 13, the second gear 11 and the first gear 27 are on the same horizontal line, and the first guide rail 28 and the second guide rail 13 are on the same horizontal line, so as to ensure that the racks 41 on both sides of the tray bracket 40 and the first guide rail 28 are transported to the main chamber 10 of the evaporation machine. The racks 41 and the second gear 11 are precisely engaged, and the V-shaped roller 42 is precisely matched and connected with the second guide rail 13. The second gear 11 is connected to the second driving mechanism, and the second driving mechanism drives the second gear 11 to rotate, so that the V-shaped roller 42 slides on the second guide rail 13. The second gear 11 is connected to the first driving mechanism 30 closest to it through the synchronous belt 12, and the first driving mechanism 30 drives the second gear 11 to rotate, so that the V-shaped roller 42 slides on the second guide rail 13, thereby ensuring the synchronization of the operation of the first gear 27 and the second gear 11.

[0031] When the feed transition chamber 21 is evacuated to the same vacuum degree as the main chamber 10 of the evaporation machine, the second gate 23 or the third gate valve is opened to transport the tray bracket 40 of the uncoated plating pot 50 to the designated position of the main chamber 10 of the evaporation machine.

[0032] The first driving mechanism 30 is a servo motor.

[0033] Beneficial effects of the present invention: The present invention proposes a buffer conveying device for a vacuum evaporation machine, comprising a main chamber 10 of the evaporation machine, wherein at least one side of the main chamber 10 of the evaporation machine is connected to a transition chamber 20, a tray bracket 40 is placed in the feed transition chamber 21 for placing an uncoated plating pot 50, and the discharge transition chamber 24 is used to place the tray bracket 40 output from the main chamber 10 of the evaporation machine, a rack 41 is provided on one side of the tray bracket 40, the upper part of the rack 41 is provided with teeth, and the lower part is provided with a V-shaped roller 42, and the side walls of the feed transition chamber 21 and the discharge transition chamber 24 are provided with a first gear 27 and a first guide rail 2 8. When the pallet holder 40 needs to be transported, the first gear 27 is engaged with the rack 41, and the first guide rail 28 is matched with the V-shaped roller 42 to keep the transport pallet holder 40 in linear motion. The first gear 27 is connected to the first drive mechanism 30, and the first drive mechanism 30 drives the first gear 27 to rotate, so that the V-shaped roller 42 slides on the first guide rail 28. When transported to the main chamber 10 of the evaporation machine, the pallet holder 40 is separated from the uncoated plating pot 50, and there is no need to improve the body of the uncoated plating pot 50. The cache conveying device structure of the vacuum evaporation machine has a high degree of automation and will not cause limitations in subsequent vacuum coating.

[0034] The above-described embodiments merely represent several implementation methods of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A buffer conveying device for a vacuum evaporation machine, comprising a main chamber (10) of the evaporation machine, characterized in that: At least one side of the main chamber (10) of the evaporation machine is connected to a transition chamber (20). When there are two transition chambers (20), the two transition chambers (20) are symmetrically arranged on both sides of the main chamber (10) of the evaporation machine, one of which is a feed transition chamber (21) and the other is a discharge transition chamber (24). When there is only one transition chamber (20), the feed transition chamber (21) and the discharge transition chamber (24) of the transition chamber (20) are the same. A tray bracket (40) is placed in the feed transition chamber (21) for placing an uncoated plating pot (50). The discharge transition chamber (24) is used to place the tray bracket (40) output from the main chamber (10) of the evaporation machine. A rack (41) is provided on one side of the rack (40), the upper part of the rack (41) is provided with teeth, and the lower part is provided with a V-shaped roller (42). The side walls of the feed transition chamber (21) and the discharge transition chamber (24) are provided with a first gear (27) and a first guide rail (28). When the pallet support (40) needs to be transported, the first gear (27) and the rack are connected. (41) is engaged, the first guide rail (28) is matched and connected with the V-shaped roller (42), the first gear (27) is connected to the first driving mechanism (30), and the first gear (27) is driven to rotate by the first driving mechanism (30), so that the V-shaped roller (42) slides on the first guide rail (28).

2. The buffer conveying device for a vacuum evaporation machine according to claim 1, wherein: The V-shaped rollers (42) are cylinders with V-shaped grooves that are evenly spaced and arranged at the bottom of the tray support (40).

3. The buffer conveying device for a vacuum evaporation machine according to claim 1, wherein: When there is only one transition chamber (20), the feed end of the feed transition chamber (21) is provided with a first gate plate, and the discharge end is provided with a second gate plate (23). The top of the transition chamber (20) is provided with a vacuum pumping device (60). After the uncoated plating pot (50) is placed on the tray support (40), the first gate plate and the second gate plate (23) are closed, and the vacuum is pumped to the same vacuum degree as the main chamber (10) of the vapor deposition machine to ensure that the vacuum degree of the main chamber (10) is not destroyed. After the tray support (40) is transported out, the feed transition chamber (21) becomes the discharge transition chamber (24) for the next transport of the tray support (40). When the tray support (40) output from the main chamber (10) of the plating machine is required, the second gate plate (23) is opened and the first gate plate is closed.

4. The buffer conveying device for a vacuum evaporation machine according to claim 1, wherein: When there are two transition chambers (20), the feed end of the feed transition chamber (21) is provided with a first gate, and the discharge end is provided with a second gate (23). The top of the transition chamber (20) is provided with a vacuum device (60). After the uncoated plating pot (50) is placed on the tray support (40), the first gate and the second gate (23) are closed, and the vacuum is pumped to the same vacuum degree as the main chamber (10) of the evaporation machine to ensure that the vacuum degree of the main chamber (10) is not destroyed. The feed end of the discharge transition chamber (24) is provided with a third gate (25), and the discharge end is provided with a fourth gate. When the tray support (40) output from the main chamber (10) of the plating machine is required, the third gate (25) is opened. 25), close the fourth gate; when the tray holder (40) is transported out, the feed transition chamber (21) becomes the discharge transition chamber (24) for the next transport tray holder (40), and when the tray holder (40) output from the main chamber (10) of the plating machine is required, open the second gate (23) and close the first gate, and the discharge transition chamber (24) becomes the feed transition chamber (21) for the next transport tray holder (40). After placing the uncoated plating pot (50) on the tray holder (40), close the third gate (25) and the fourth gate, and evacuate to the same vacuum degree as the main chamber (10) of the evaporation machine to ensure that the vacuum degree of the main chamber (10) is not destroyed.

5. The buffer conveying device for a vacuum evaporation machine according to claim 1, wherein: The side wall of the main chamber (10) of the evaporation machine is provided with a second gear (11) and a second guide rail (13), the second gear (11) and the first gear (27) are on the same horizontal line, and the first guide rail (28) and the second guide rail (13) are on the same horizontal line, so as to ensure that when the racks (41) on both sides of the tray bracket (40) and the first guide rail (28) are transported to the main chamber (10) of the evaporation machine, the racks (41) and the second gear (11) are precisely engaged, and the V-shaped rollers (42) and the second guide rail (13) are precisely matched and connected.

6. The buffer conveying device for a vacuum evaporation machine according to claim 5, characterized in that: The second gear (11) is connected to the second driving mechanism, and the second driving mechanism drives the second gear (11) to rotate, so that the V-shaped roller (42) slides on the second guide rail (13).

7. The buffer conveying device for a vacuum evaporation machine according to claim 5, wherein: The second gear (11) is connected to the first drive mechanism (30) closest to it through a synchronous belt (12). The first drive mechanism (30) drives the second gear (11) to rotate, so that the V-shaped roller (42) slides on the second guide rail (13), thereby ensuring the synchronization of the operation of the first gear (27) and the second gear (11).

8. The buffer conveying device for a vacuum evaporation machine according to claim 1, wherein: The first driving mechanism (30) is a servo motor.

Images