Air inlet device and reaction chamber

Abstract

The utility model discloses an air inlet device and a reaction chamber. The air inlet device comprises an air distribution block and a plurality of flow channels. The tail ends of the plurality of flow channels are converged at the position, close to the reaction chamber, of the gas distribution block and then are communicated to the reaction chamber; a gas mixing cavity is formed in the front end of one flow channel, and at least two different gas paths connected into the gas mixing cavity are arranged on the gas distribution block. According to the utility model, the mode that a mixer is arranged in a gas distribution block to carry out layered gas inlet mixing in the prior art is optimized, and the open gas mixing cavity is arranged in one flow channel to realize gas inlet mixing, so that the flowing obstruction of gas is reduced; after the gas flowing smoothness is improved, the problems of particulate matter generation and residue caused by gas retention and condensation can be reduced, different gases can be easily and cleanly purged through the purge gas, the later maintenance is more convenient, and thus the process performance is more stable.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an air intake device and a reaction chamber. Background Art

[0002] In the existing gas intake device of the reaction chamber, a gas distributor provides multiple different gas paths for gas intake. Some processes require that some gases be mixed before entering the reaction chamber.

[0003] In order to achieve the mixing of part of the gas, the existing technology usually embeds a mixer in the channel of the gas separation block. For example, the gas mixer disclosed in the existing Chinese patent document with application number 202211508983.0 adopts an upper and lower layered air intake method. This air intake method does not flow smoothly in the stratified area, which can easily cause the gas to condense after being retained in the stratified area. After the gas condenses, it forms a liquid and corrodes the internal flow channel, thereby causing Pa problems (i.e., the generation of larger metal particles), which requires frequent maintenance. Utility Model Content

[0004] The utility model aims to provide an air intake device and a reaction chamber, aiming to solve the problem that the flow path of the existing air intake device is not smooth, resulting in corrosion after condensation.

[0005] In order to solve the above technical problems, the purpose of the present invention is achieved through the following technical solutions: providing an air intake device for use in a reaction chamber, comprising:

[0006] Gas distribution block;

[0007] A plurality of flow channels all pass through the gas distribution block, and ends of the plurality of flow channels converge at a position of the gas distribution block close to the reaction chamber and then communicate with the reaction chamber;

[0008] A gas mixing cavity is provided at the front end of one of the flow channels, and the gas separation block is provided with at least two different gas paths connected to the gas mixing cavity.

[0009] Furthermore, the plurality of flow channels include:

[0010] A first flow channel vertically passes through the gas separation block, and the gas mixing chamber is provided at the front end of the first flow channel;

[0011] The second flow channel is connected to the gas separation block along a lateral direction, and the end of the second flow channel is connected to the end of the first flow channel and then connected to the reaction chamber.

[0012] Furthermore, the gas mixing chamber is divided into a first chamber and a second chamber along the gas path direction, and the inner diameter of the first chamber decreases toward the second chamber.

[0013] Furthermore, the first cavity is connected to the second cavity through a funnel-type variable diameter structure.

[0014] Furthermore, the second cavity extends along the gas path direction to a position close to the inlet of the reaction chamber.

[0015] Furthermore, the gas separation block is provided with a heating element for heating the gas separation block.

[0016] Furthermore, the heating element includes:

[0017] a temperature detector, disposed in the gas separation block;

[0018] The heating rod is inserted into the gas distribution block.

[0019] Furthermore, a heat-insulating component for keeping the gas separation block warm is provided on the outside of the gas separation block.

[0020] Furthermore, the thermal insulation component includes at least one of a thermal insulation cotton layer, a ceramic thermal insulation layer, and a foam glass thermal insulation layer.

[0021] An embodiment of the present invention further provides a reaction chamber, comprising the air intake device as described above.

[0022] The beneficial effects of the embodiments of the present utility model are: it optimizes the existing technology of setting a mixer in the gas separation block to perform stratified intake mixing, and sets an open mixing chamber in one of the flow channels to achieve intake mixing, thereby reducing the flow obstruction of the gas. After the smoothness of the gas flow is improved, the problem of particulate matter generation and residue caused by gas retention and condensation can be reduced, and different gases can also be easily purged clean by purge gas, which makes later maintenance more convenient, thereby making the process performance more stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 This is a schematic diagram of the overall structure of the air intake device provided in an embodiment of the present utility model.

[0025] Figure 2 This is a schematic cross-sectional view of the air intake device provided in an embodiment of the present utility model.

[0026] Description of the symbols in the figure:

[0027] 1. Gas distributor; 2. First flow channel; 21. Gas mixing chamber; 211. First chamber; 212. Second chamber; 3. Second flow channel; 4. Merging chamber; 5. Temperature detector; 6. Heating rod; 7. Insulation component. DETAILED DESCRIPTION

[0028] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] It will be understood that when used in this specification and the appended claims, the terms “comprises” and “comprising” indicate the presence of described features, integers, steps, operations, elements and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof.

[0030] It should also be understood that the terms used in this utility model specification are only for the purpose of describing specific embodiments and are not intended to limit the utility model. As used in this utility model specification and the appended claims, the singular forms "a", "an" and "the" are intended to include plural forms unless the context clearly indicates otherwise.

[0031] It should be further understood that the term “and / or” used in the present specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0032] See also Figure 1 and Figure 2 , Figure 1 A schematic diagram of the overall structure of the air intake device provided in an embodiment of the present utility model; Figure 2 This is a schematic cross-sectional view of the air intake device provided in an embodiment of the present invention.

[0033] The present invention provides an air intake device for use in a reaction chamber, comprising:

[0034] Gas distribution block 1;

[0035] Multiple flow channels all pass through the gas distribution block 1, and the ends of the multiple flow channels converge at a position of the gas distribution block 1 close to the reaction chamber and then connect to the reaction chamber;

[0036] A gas mixing chamber 21 is provided at the front end of one of the flow channels, and the gas distribution block 1 is provided with at least two different gas paths connected to the gas mixing chamber 21 .

[0037] In this embodiment, the gas distribution block 1 can be made of an aluminum block, and multiple flow channels are used for different gases to enter and reach the reaction chamber for process reactions. Each flow channel can be used for a single gas access or for multiple gas accesses. The number of flow channels, the number and type of gases accessed, etc. can be set according to process requirements.

[0038] This embodiment optimizes the existing technology of setting a mixer in the gas separation block 1 to perform stratified air intake. This embodiment sets an open mixing chamber 21 in one of the flow channels to achieve air intake mixing, reducing gas flow obstruction and improving gas flow smoothness, thereby reducing the generation and residue of particulate matter caused by gas retention and condensation. Different gases can also be easily purged clean by purge gas, making later maintenance more convenient, thereby making the process performance more stable.

[0039] In one embodiment, the multiple flow channels include a first flow channel 2 and a second flow channel 3; the first flow channel 2 passes through the gas separation block 1 in a vertical direction, and the gas mixing chamber 21 is arranged at the front end of the first flow channel 2; the second flow channel 3 is connected to the gas separation block 1 in a lateral direction, and the end of the second flow channel 3 is connected to the end of the first flow channel 2 and then connected to the reaction chamber.

[0040] This embodiment is introduced by taking the setting of two flow channels as an example, namely, including a first flow channel 2 and a second flow channel 3, wherein the first flow channel 2 is used for two gases to enter and mix to obtain a mixed gas, and the second flow channel 3 is used for one gas to enter and enter the reaction chamber together with the mixed gas at the end.

[0041] In this embodiment, the gas mixing chamber 21 is provided at the front end of the first flow channel 2. Two gases are connected to the gas mixing chamber 21 from the gas separator block 1 for mixing. One gas can be connected to the gas mixing chamber 21 vertically downward from the top of the gas separator block 1, and the other gas can be connected to the gas mixing chamber 21 laterally from the side of the gas separator block 1. The two gases can collide and mix in the middle of the gas mixing chamber 21 to improve the mixing effect of the gases, and then continue to flow along the gas path and reach the end of the first flow channel 2. The second flow channel 3 can be connected laterally from the side of the gas separator block 1 and merge with the end of the first flow channel 2. It should be noted that there is a merging chamber 4 at the end of the first flow channel 2 and the second flow channel 3. The merging chamber 4 is connected to the cavity mouth of the reaction chamber. After the ends of the first flow channel 2 and the second flow channel 3 merge, they directly enter the reaction chamber.

[0042] In one embodiment, the gas mixing chamber 21 is divided into a first chamber 211 and a second chamber 212 along the gas path direction, and the inner diameter of the first chamber 211 decreases toward the second chamber 212 .

[0043] In this embodiment, the flow rate in the first flow channel 2 can be increased so that the mixed gas quickly passes through the gas separator block 1 and enters the reaction chamber, thereby preventing the mixed gas from condensing or being retained inside the gas separator block 1. This can reduce the generation and residue of metal particles. Specifically, the internal shape of the gas mixing chamber 21 can be improved, and the gas mixing chamber 21 can be divided into a first chamber 211 and a second chamber 212 along the gas path direction. After the two gases enter the first chamber 211 and mix, the inner diameter is reduced when they flow to the second chamber 212. The reduction in the inner diameter while keeping the flow rate unchanged can increase the flow rate, that is, the mixed gas can be accelerated from the first chamber 211 to enter the second chamber 212 and quickly reach the reaction chamber, thereby reducing the generation and residue of metal particles.

[0044] More specifically, in one way of reducing the inner diameter of the first cavity 211 toward the second cavity 212, a funnel-shaped connecting structure may be provided at the position where the first cavity 211 connects to the second cavity 212, that is, the first cavity 211 is connected to the second cavity 212 through the funnel-type reducing structure.

[0045] More specifically, in another way of reducing the inner diameter of the first cavity 211 toward the second cavity 212 , the internal space shape of the first cavity 211 can be set to an inverted cone, that is, the first cavity 211 is connected to the second cavity 212 through an inverted cone-shaped variable diameter structure.

[0046] In one embodiment, the second cavity 212 extends along the gas path direction to a position close to the inlet of the reaction chamber.

[0047] In this embodiment, the purpose of inputting gases separately through the first flow channel 2 and the second flow channel 3 is to prevent the gases in the first flow channel 2 and the second flow channel 3 from reacting prematurely. The end of the second chamber 212 is also the end of the first flow channel 2. After the mixed gas is output from the end of the second chamber 212, it will merge with the gas from the second flow channel 3 and enter the reaction chamber directly. Therefore, the second chamber 212 is extended along the gas path to a position close to the reaction chamber entrance. In this way, the mixed gas output from the end of the second chamber 212 can directly reach the reaction chamber entrance, and the gas from the end of the second flow channel 3 also merges with the mixed gas output from the second chamber 212 and enters the reaction chamber only after reaching the reaction chamber entrance.

[0048] In one embodiment, a heating element for heating the gas dividing block 1 is provided on the gas dividing block 1 .

[0049] In this embodiment, heating the gas separator block 1 can prevent the temperature in the flow channel from dropping and causing gas condensation, that is, prevent the formation of residual metal particles after gas condensation.

[0050] In a specific embodiment of the heating element, the heating element may include a temperature detector 5 and a heating rod 6; the temperature detector 5 is arranged in the gas separation block 1; the heating rod 6 is inserted into the gas separation block 1, and the temperature detector 5 can collect the temperature in the gas separation block 1 in real time and feed it back to the control system. The control system controls the heating rod 6 to adjust the temperature according to the temperature information, so that the gas separation block 1 is at the temperature required by the current process.

[0051] In one embodiment, a heat-insulating member 7 is provided on the outside of the gas distribution block 1 for keeping the gas distribution block 1 warm.

[0052] In this embodiment, by keeping the heated gas separation block 1 warm, the temperature drop rate of the gas separation block 1 can be slowed down, thereby improving the heat preservation efficiency of the gas separation block 1.

[0053] In the specific embodiment of the thermal insulation component 7, the thermal insulation component 7 includes at least one of a thermal insulation cotton layer, a ceramic thermal insulation layer, and a foam glass thermal insulation layer; this embodiment preferably adopts a thermal insulation cotton layer, and the thermal insulation cotton layer can adopt a sheet structure. The thermal insulation cotton layer is attached to each outer surface of the air distributor block 1 to achieve all-round thermal insulation.

[0054] An embodiment of the present invention further provides a reaction chamber, comprising the air intake device as described above.

[0055] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and such modifications or substitutions are intended to be within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims.

Claims

1. An air intake device, used in a reaction chamber, characterized in that: include: Gas distribution block; A plurality of flow channels all pass through the gas distribution block, and ends of the plurality of flow channels converge at a position of the gas distribution block close to the reaction chamber and then communicate with the reaction chamber; A gas mixing cavity is provided at the front end of one of the flow channels, and the gas separation block is provided with at least two different gas paths connected to the gas mixing cavity.

2. The air intake device according to claim 1, characterized in that: Multiple flow channels include: A first flow channel vertically passes through the gas separation block, and the gas mixing chamber is provided at the front end of the first flow channel; The second flow channel is connected to the gas separation block along a lateral direction, and the end of the second flow channel is connected to the end of the first flow channel and then connected to the reaction chamber.

3. The air intake device according to claim 1, characterized in that: The gas mixing chamber is divided into a first chamber and a second chamber along the gas path direction, and the inner diameter of the first chamber decreases toward the second chamber.

4. The air intake device according to claim 3, characterized in that: The first cavity is connected to the second cavity through a funnel-type reducing structure.

5. The air intake device according to claim 3, characterized in that: The second cavity extends along the gas path direction to a position close to the inlet of the reaction chamber.

6. The air intake device according to claim 1, characterized in that: The gas separation block is provided with a heating element for heating the gas separation block.

7. The air intake device according to claim 6, characterized in that: The heating element comprises: a temperature detector, disposed in the gas separation block; The heating rod is inserted into the gas distribution block.

8. The air intake device according to claim 1, characterized in that: A heat-insulating component for keeping the gas separation block warm is provided on the outside of the gas separation block.

9. The air intake device according to claim 8, characterized in that: The thermal insulation component includes at least one of a thermal insulation cotton layer, a ceramic thermal insulation layer, and a foam glass thermal insulation layer.

10. A reaction chamber, characterized in that: The invention comprises an air intake device according to any one of claims 1 to 9.

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