Device for treating tail gas containing phosphorane and silane

Abstract

The utility model discloses a device for treating tail gas containing phosphorane and silane, which relates to the technical field of tail gas treatment and comprises a PLC (programmable logic controller) self-control touch screen control cabinet, a full-sealed anti-corrosion spraying reaction box, a centrifugal fan, a medicament circulating liquid adding pump, a reactant filter, various detection instruments and control valves. The PLC self-control touch screen control cabinet starts the centrifugal fan and the chemical circulation liquid adding pump to start processing, and after processing is completed, the device automatically stops and sends out a signal; the equipment has the functions of data monitoring, alarming, recording, storage and statistics, and is in butt joint with carried upper computer control software to facilitate background management of managers; the circuit connection in the equipment is explosion-proof, safe and reliable; the equipment adopts a skid-mounted integrated design, is convenient to carry, safe, attractive and durable, and adapts to severe environments.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to a tail gas treatment device containing phosphine and silane. Background Art

[0002] The tail gas treatment devices for phosphine and silane in the prior art are not able to conveniently monitor, alarm, record, save and count data, which is not conducive to subsequent docking and facilitating back-end management for management personnel. Utility Model Content

[0003] Therefore, in order to solve the above-mentioned deficiencies, the present invention provides a tail gas treatment device containing phosphine and silane.

[0004] The present invention is implemented by constructing a tail gas treatment device containing phosphine and silane, which includes a PLC automatic touch screen control cabinet, a fully sealed anti-corrosion spray reaction box, a centrifugal fan, a reagent circulation and liquid addition pump, a reactant filter, and various detection instruments and control valves. The PLC automatic touch screen control cabinet is equipped with a high-definition touch screen display, mechanical control buttons, and a buzzer alarm device; the fully sealed anti-corrosion spray reaction box is equipped with an exhaust gas flow direction baffle, a no-dead-angle spray head, a temperature and pressure detection instrument, and a reagent detection instrument, and is filled with corrosion-resistant ball rings to increase the contact area between the reagent and the tail gas; the tail gas containing phosphine and silane is drawn into the fully sealed anti-corrosion spray reaction box through an air duct by a centrifugal fan for reaction, and is discharged from the centrifugal fan outlet at high altitude after passing the test.

[0005] Preferably, the centrifugal fan and the reagent circulation and liquid adding pump are controlled by a PLC automatic touch screen control cabinet, and are turned on or off directly on the high-definition touch screen, or are controlled by an automatic program and continue to work according to the front-end exhaust emission conditions.

[0006] Preferably, the fully sealed anti-corrosion spray reaction box is controlled by a PLC automatic touch screen control cabinet, and the exhaust gas continuously reacts with the reagent through the air duct to treat the harmful gases therein. During the process, the temperature, pressure, reagent condition and exhaust gas condition in the fully sealed anti-corrosion spray reaction box are monitored in real time, displayed on the high-definition touch display and a signal is sent. After the processing is completed, it is directly turned on or off on the high-definition touch display, or controlled by an automatic program, and data is generated and saved.

[0007] Preferably, the automatic control system carried in the PLC automatic touch screen control cabinet, all equipment and instruments of this device are connected to the automatic control system, and are equipped with upper computer control software, which can be monitored and controlled by the system, making it convenient for management personnel to perform data statistics and monitoring.

[0008] The utility model has the following advantages: The utility model provides an improved tail gas treatment device containing phosphine and silane, which has the following improvements compared with similar equipment:

[0009] The utility model discloses a tail gas treatment device containing phosphine and silane, which starts the centrifugal fan and the reagent circulation and liquid adding pump through the PLC automatic touch screen control cabinet to start the treatment, and automatically stops and sends a signal after the treatment is completed; the equipment has data monitoring, alarm, recording, storage, and statistical functions, and is connected to the upper computer control software to facilitate management personnel to perform background management; the circuit connections in the equipment are all explosion-proof, safe and reliable; the equipment adopts a skid-mounted integrated design, which is convenient for transportation, safe, beautiful, durable, and adaptable to harsh environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a three-dimensional structural diagram of the utility model.

[0011] Including: PLC automatic touch screen control cabinet-1, fully sealed anti-corrosion spray reaction box-2, centrifugal fan-3, reagent circulation and liquid addition pump-4, reactant filter-5. DETAILED DESCRIPTION

[0012] The following will be combined with the Figure 1 The present invention is described in detail, and the technical solutions in the embodiments of the present invention are clearly explained. Although the embodiments described are complete, it is obvious that the embodiments described are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0013] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a central component. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a central component. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0014] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are intended only to describe specific embodiments and are not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0015] Referring to Figure 1 The utility model discloses a phosphine, silane's tail gas processing apparatus, including PLC automatic control touch -sensitive screen control cabinet 1, fully -enclosed anticorrosive type shower reaction box 2, centrifugal fan 3, reagent circulating liquid feeding pump 4, reactant filter 5, PLC automatic control touch -sensitive screen control cabinet 1, fully -enclosed anticorrosive type shower reaction box 2, centrifugal fan 3, reagent circulating liquid feeding pump 4, reactant filter 5, and various detection instruments, control valve, PLC automatic control touch -sensitive screen control cabinet 1 is equipped with high -definition touch -sensitive display screen, mechanical control button and buzzer alarm device, fully -enclosed anticorrosive type shower reaction box 2 is provided with tail gas flow direction baffle, dead angle shower head, temperature and pressure detection instrument, reagent detection instrument, and for increasing reagent and tail gas contact area integral filling corrosion -resistant bower ring, phosphine, silane tail gas is drawn into fully -enclosed anticorrosive type shower reaction box 2 by centrifugal fan 3 through air duct and carries out the reaction, and after detecting qualified, from centrifugal fan 3 export place high -altitude emission.

[0016] Specifically, centrifugal fan 3, reagent circulating liquid feeding pump 4 are controlled by PLC automatic control touch -sensitive screen control cabinet 1, and are directly opened or closed on high -definition touch -sensitive display screen, or are controlled through automatic program, and continuously work according to front end tail gas emission condition.

[0017] Specifically, fully -enclosed anticorrosive type shower reaction box 2 is controlled by PLC automatic control touch -sensitive screen control cabinet 1, and tail gas is treated by the continuous reaction of air duct and reagent, and the temperature, pressure, reagent condition, tail gas condition in fully -enclosed anticorrosive type shower reaction box 2 are monitored in real time during the process, and are displayed on high -definition touch -sensitive display and send signal, and are directly opened or closed on high -definition touch -sensitive display after processing is completed, or are controlled through automatic program, and data is saved.

[0018] Specifically, the automatic control system carried in PLC automatic control touch -sensitive screen control cabinet 1, all devices and instruments of the device are connected with the automatic control system, and are equipped with host computer control software, can be monitored and controlled through the system, and data statistics and monitoring are convenient for management personnel.

[0019] High -definition touch -sensitive display screen, mechanical control button and buzzer alarm device, automatic control system are equipped on PLC automatic control touch -sensitive screen control cabinet 1, and centrifugal fan 3 and reagent circulating liquid feeding pump 4 are directly opened or closed on high -definition touch -sensitive display screen or are controlled through automatic program under the industrial and mining of front end tail gas emission.

[0020] When the exhaust gas enters the fully sealed anti-corrosion spray reaction box 2 for reaction, the PLC automatic touch screen control cabinet 1 will monitor the temperature, pressure, reagent conditions, and exhaust gas conditions in the fully sealed anti-corrosion spray reaction box 2; after the processing is completed, the PLC automatic touch screen control cabinet 1 will feedback the signal, generate and save the data; the upper computer control software will collect statistics on the obtained data to facilitate background management by management personnel.

[0021] The utility model provides an improved tail gas treatment device containing phosphine and silane, and its working principle is as follows:

[0022] During use, the operator first checks whether the various indicator data in the PLC automatic touch screen control cabinet 1 are normal. If the reagent situation is not enough to meet the current processing needs, it is necessary to open the manual dosing valve and then open the reagent circulation and liquid adding pump 4 to add the reagent to the fully sealed anti-corrosion spray reaction box 2 until it meets the requirements; after the preparatory work is confirmed to be completed, the centrifugal fan 3 and the reagent circulation and liquid adding pump 4 are simultaneously turned on through the PLC automatic touch screen control cabinet 1; the reagent passes through the reactant filter 5 and is pumped by the reagent circulation and liquid adding pump 4 to the spray head on the top of the fully sealed anti-corrosion spray reaction box 2 for spraying; after entering the fully sealed anti-corrosion spray reaction box 2, the exhaust gas will flow through the internal partition and filler to continuously react with the reagent, and the reactant generated after the reaction will be filtered by the reactant filter 5, and the filtered reagent will continue to be recycled through the reagent circulation and liquid adding pump 4; during this process, the PLC automatic touch screen control cabinet 1 monitors the temperature, pressure, reagent situation, and exhaust situation in real time, generates and saves data and feeds back signals.

[0023] The above shows and describes the basic principles, main features and advantages of the present invention, and the standard parts used in the present invention can be purchased from the market, and special-shaped parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the existing technology. The machinery, parts and equipment all adopt conventional models in the existing technology, and the circuit connection adopts the conventional connection method in the existing technology, which will not be described in detail here.

[0024] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A tail gas treatment device containing phosphine and silane, including a PLC automatic touch screen control cabinet, a fully sealed anti-corrosion spray reaction box, a centrifugal fan, a reagent circulation and liquid addition pump, a reactant filter, and various detection instruments and control valves; Its characteristics are: The PLC automatic touch screen control cabinet is equipped with a high-definition touch display screen, mechanical control buttons and a buzzer alarm device; the fully sealed and corrosion-resistant spray reaction box is provided with an exhaust gas flow direction baffle, a spray head with no dead angle, a temperature and pressure detection instrument, and a reagent detection instrument, and is filled with corrosion-resistant ball rings as a whole to increase the contact area between the reagent and the exhaust gas; the phosphine and silane-containing exhaust gas is drawn into the fully sealed and corrosion-resistant spray reaction box by a centrifugal fan through an air duct for reaction, and is discharged into the air at high altitude from the centrifugal fan outlet after passing the test.

2. The tail gas treatment device containing phosphine and silane according to claim 1, characterized in that: The centrifugal fan and reagent circulation and liquid adding pump are controlled by a PLC automatic touch screen control cabinet, and can be turned on or off directly on the high-definition touch screen, or controlled by an automatic program, and continue to work according to the front-end exhaust emission conditions.

3. The tail gas treatment device containing phosphine and silane according to claim 2, characterized in that: The fully sealed anti-corrosion spray reaction box is controlled by a PLC automatic touch screen control cabinet. The exhaust gas continuously reacts with the reagent through the air duct to treat the harmful gas therein. During the process, the temperature, pressure, reagent condition and exhaust gas condition in the fully sealed anti-corrosion spray reaction box are monitored in real time, displayed on the high-definition touch display and a signal is sent. After the processing is completed, it is directly turned on or off on the high-definition touch display, or controlled by an automatic program, and data is generated and saved.

4. The tail gas treatment device containing phosphine and silane according to claim 3, characterized in that: The automatic control system carried by the PLC automatic touch screen control cabinet.

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