Spin coating equipment

Abstract

The utility model discloses spin-coating equipment which comprises a spin-coating assembly, the spin-coating assembly comprises a base table, the base table is provided with a containing groove, and a rotary objective table is arranged in the containing groove. The spin coating equipment further comprises a vacuum drying assembly, and the vacuum drying assembly comprises a cover body, a driving assembly and a vacuumizing assembly. The cover body covers the rotary objective table in a separable mode and is matched with the containing groove to form a sealed cabin. The driving assembly is arranged on the side, away from the containing groove, of the cover body, the cover body comprises an airflow through hole, and the vacuumizing assembly communicates with the airflow through hole. According to the spin-coating equipment, in-situ use of a vacuum drying technology in the spin-coating equipment is realized, the automation degree of film forming is improved, and the uniformity and the quality repeatability of the film are improved; in the forming crystallization process of the perovskite thin film, the uniformity of the perovskite thin film and the repeatability of the quality are improved, so that the performance of the perovskite solar cell is improved, and meanwhile, the research and development reliability of the perovskite solar cell in the small-area development stage is improved.

Description

Technical Field

[0001] The present application relates to the field of new energy technology, and in particular to a spin coating device. Background Art

[0002] Spin coating is widely used in the fields of microelectronics, optoelectronic materials, and sensors to prepare high-performance thin films. Many thin films formed by spin coating need to go through a solvent removal process. In order to improve the efficiency of solvent removal, other drying technologies are usually required after spin coating. The two process steps of spin coating and drying usually require the use of different equipment, or rely heavily on manual operation, which will have an adverse effect on the uniformity and repeatability of the film quality. In particular, in the preparation of small-area perovskite films, after spin coating, the perovskite is usually crystallized by manually adding an "anti-solvent". Manual operation is prone to errors, resulting in poor uniformity of the perovskite film and low repeatability of the quality, which leads to reduced performance of solar cell devices and reduced reliability of conclusions based on research and development of small-area solar cell devices.

[0003] The above statements are only used to provide background information related to the present application and do not necessarily constitute prior art. Utility Model Content

[0004] The main technical problem solved by this application is to provide a spin coating device that can realize the in-situ use of vacuum drying technology in the spin coating device, improve the uniformity and quality repeatability of the perovskite film, thereby improving the performance of solar cell devices and enhancing R&D reliability.

[0005] In order to solve the above technical problems, the technical solution adopted in this application is: to provide a spin coating device, including: a spin coating component, the spin coating component includes a base, the base is provided with a receiving groove, and a rotating stage is provided in the receiving groove; a vacuum drying component, the vacuum drying component includes a cover body, a drive component and a vacuum pumping component, the cover body is detachably provided with a rotating stage, and cooperates with the receiving groove to form a sealed cabin, the drive component is arranged on the side of the cover body away from the receiving groove, the cover body includes an air flow hole, and the vacuum pumping component is connected to the air flow hole.

[0006] In the technical solution of the embodiment of the present application, the spin coating equipment realizes the in-situ use of vacuum drying technology in the spin coating equipment, improves the degree of automation of thin film forming, and improves the uniformity and quality repeatability of the thin film. At the same time, the air flow holes are located in the cover body, so that the spin coating equipment has a more uniform drying effect and can reduce interference with the thin film structure; in the forming and crystallization process of the perovskite film, it is beneficial to improve the uniformity and quality repeatability of the perovskite film, thereby improving the performance of the perovskite solar cell, and at the same time improving the research and development reliability of the perovskite solar cell in the small-area development stage.

[0007] In one embodiment, the cover includes a top wall and a first side wall surrounding the top wall, the base includes a bottom wall and a second side wall surrounding the bottom wall, the end of the first side wall away from the top wall is detachably pressed against the bottom wall of the base, and the second side wall is detachably surrounding the first side wall.

[0008] In the technical solution of the embodiment of the present application, the space enclosed by the top wall, the first side wall and the bottom wall of the cover body constitutes the cavity of the sealed cabin. The vacuum assembly extracts the gas in the sealed cavity through the air flow hole, so that a low-pressure environment can be formed in the sealed cavity, thereby achieving the purpose of vacuum drying.

[0009] In one embodiment, the cover body includes a top wall and a first side wall surrounding the top wall, the base includes a bottom wall and a second side wall surrounding the bottom wall, the end of the second side wall away from the bottom wall is detachably pressed against the top wall of the cover body, and the first side wall is detachably surrounding the second side wall.

[0010] In the technical solution of the embodiment of the present application, the space enclosed by the top wall of the cover, the bottom wall of the base, and the second side wall constitutes the cavity of the sealed chamber. The vacuum assembly extracts the gas in the sealed chamber through the air flow hole, creating a low-pressure environment in the sealed chamber, thereby achieving the purpose of vacuum drying.

[0011] In one embodiment, the driving assembly is connected to a side of the top wall of the cover body away from the accommodating groove, and the driving assembly includes an air pump mechanical cantilever.

[0012] In the technical solution of the embodiment of the present application, the driving assembly is used to realize a detachable cover for the rotating stage, and the air pump mechanical cantilever has good stability.

[0013] In one embodiment, the spin coating device further includes a mounting portion and a supporting portion, wherein the mounting portion is connected to the base via the supporting portion; the driving assembly is connected to the mounting portion and accommodated between the mounting portion and the base.

[0014] In the technical solution of the embodiment of the present application, the mounting portion, the supporting portion and the base form a frame structure of the spin coating equipment, which serves to fix and connect other functional components.

[0015] In one embodiment, the cover has an opening, and the inner diameter of the opening is 15 cm to 20 cm.

[0016] In the technical solution of the embodiment of the present application, the cover opening of the above-mentioned size is suitable for the forming and crystallization of small-area perovskite films.

[0017] In one embodiment, the rotating stage includes: a carrier suction cup having a through hole; a rotating shaft having a cavity, the rotating shaft being fixed to the bottom surface of the accommodating groove and connected to the carrier suction cup; and a first vacuum pump connected to the through hole of the carrier suction cup through the cavity of the rotating shaft.

[0018] In the technical solution of the embodiment of the present application, the spin coating function can be achieved through the above-mentioned settings.

[0019] In one embodiment, the vacuum pumping assembly includes: a connecting pipe; and a second vacuum pump, wherein the second vacuum pump is connected to the air flow hole of the cover body through the connecting pipe.

[0020] In the technical solution of the embodiment of the present application, the second vacuum pump is used to provide a vacuum environment for the sealed cabin.

[0021] In one embodiment, the vacuum assembly further includes a sealing device, which is located at the abutting surface between the cover and the receiving groove, and the abutting surface is located at the cover and / or the receiving groove.

[0022] In the technical solution of the embodiment of the present application, the sealing device is beneficial to improving the sealing performance of the sealed cabin.

[0023] In one embodiment, the vacuum drying assembly further includes a vacuum degree detection assembly, and the vacuum degree detection assembly is located in the cover or the receiving tank.

[0024] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0026] Figure 1 A schematic structural diagram of a spin coating device in a first state according to one or more embodiments of the present application;

[0027] Figure 2 A schematic structural diagram of a spin coating device in a second state according to one or more embodiments of the present application;

[0028] Figure 3 for Figure 1 Side view of;

[0029] Figure 4 for Figure 1 Side view of;

[0030] Figure 5 for Figure 1 Schematic diagram of the cross-section structure;

[0031] Figure 6 for Figure 2 Side view of;

[0032] Figure 7 for Figure 2 The main view;

[0033] Figure 8 for Figure 2 Schematic diagram of the cross-section structure;

[0034] Figure 9 A schematic diagram of a cover and a base according to an embodiment of the present application;

[0035] Figure 10 This is a schematic diagram of a cover and a base according to one embodiment of the present application.

[0036] In the attached figure:

[0037] 100. Spin coating equipment; 10. Spin coating assembly; 11. Base; 12. Receiving groove; 11a. Bottom wall; 11b. Second side wall; 13. Rotating stage; 131. Loading suction cup; 131a. Through hole; 132. Rotating shaft; 20. Vacuum drying assembly; 21. Cover; 21a. Top wall; 21b. First side wall; 211. Air flow hole; 22. Driving assembly; 30. Mounting portion; 40. Support portion. DETAILED DESCRIPTION

[0038] The following embodiments of the technical solution of the present application will be described in detail with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application and are therefore only examples and are not intended to limit the scope of protection of the present application.

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned figure descriptions are intended to cover non-exclusive inclusions.

[0040] In the description of the embodiments of this application, the technical terms "first" and "second" are used only to distinguish different objects and should not be understood to indicate or imply relative importance or implicitly specify the quantity, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, the meaning of "plurality" is more than two, unless otherwise clearly and specifically defined.

[0041] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0042] In the description of the embodiments of this application, the term "and / or" is simply a description of the association relationship between associated objects, indicating that three relationships can exist. For example, A and / or B can represent the following three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this document generally indicates that the associated objects are in an "or" relationship.

[0043] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0044] Spin coating is widely used in fields such as microelectronics, optoelectronic materials, and sensors to produce high-performance thin films. Many spin-coated films require solvent removal. To improve solvent removal efficiency, additional drying techniques are often employed after spin coating. These two processes typically require separate equipment or rely heavily on manual labor, negatively impacting film uniformity and repeatable quality.

[0045] Spin coating is also a common method for forming small-area perovskite thin films. Perovskite solar cells, due to their outstanding advantages such as high photoelectric conversion efficiency, low cost, and simple fabrication, have become a promising solar cell and a research hotspot. Perovskite solar cells can be used in lunar rovers, satellite panels, various sensors and detectors, as well as in civilian products such as wearable electronics and automotive power supplies. In many ways, perovskite solar cells have become a power source for consumer products. With the continuous expansion of the application fields of perovskite solar cells and their flexible and foldable nature, their market demand is also growing.

[0046] In perovskite cells, the perovskite film acts as a light-absorbing layer, converting light energy into electrical energy. The quality of the perovskite film significantly affects the photoelectric conversion efficiency of perovskite solar cells. High-quality perovskite films have low grain boundaries and defect densities, which can reduce non-radiative recombination of charge carriers, thereby improving the photoelectric conversion efficiency of perovskite solar cells.

[0047] In addition, the research results of the prototype device of small-area perovskite battery can provide a front-end test platform and R&D ideas for the development of practical large-area perovskite battery, thereby significantly reducing the cost of perovskite battery development. At present, the preparation of small-area perovskite films often adopts the method of manually adding "anti-solvent". The anti-solvent method refers to the method of using the anti-solvent to react with the precursor and causing the solute to precipitate and crystallize. The uniformity and quality repeatability of the perovskite film prepared by the anti-solvent method are poor, resulting in reduced performance of perovskite battery devices and reduced reliability of the conclusions based on the research and development of small-area devices.

[0048] In order to solve the above technical problems, the present application provides a spin coating device. Figures 1 to 8 , Figure 1 This is a structural diagram of a spin coating device in a first state according to one or more embodiments of the present application. Figure 2 This is a structural diagram of the spin coating device in the second state according to one or more embodiments of the present application. Figure 3 for Figure 1 Side view of Figure 4 for Figure 1 The main view, Figure 5 for Figure 1 Schematic diagram of the cross-section structure, Figure 6 for Figure 2 Side view of Figure 7 for Figure 2 The main view, Figure 8 for Figure 2 Schematic diagram of the cross-section structure.

[0049] In an embodiment of the present application, a spin coating apparatus 100 includes a spin coating assembly 10, which includes a base 11, a receiving tank 12, and a rotating stage 13 disposed within the receiving tank 12. The spin coating apparatus 100 also includes a vacuum drying assembly 20, which includes a cover 21, a drive assembly 22, and a vacuum pumping assembly. The cover 21 detachably covers the rotating stage 13 and cooperates with the receiving tank 12 to form a sealed chamber. The drive assembly 22 is disposed on a side of the cover 21 facing away from the receiving tank 12. The cover 21 includes an air flow hole 211, and the vacuum pumping assembly is connected to the air flow hole 211.

[0050] The spin coating assembly 10 rotates and utilizes centrifugal force to evenly spread the liquid material (usually a solution or suspension) dripped onto the substrate into a thin film. The liquid material includes, but is not limited to, polymer materials, metal and metal oxide nanoparticles, inorganic materials and their precursors, organic-inorganic composite materials, etc. Polymer materials include polyvinyl alcohol (PVA), polymethyl methacrylate (PMMA), and polyvinylidene chloride (PVDF); metal nanoparticles include silver, gold, and copper nanoparticles; metal oxide nanoparticles include zinc oxide and titanium oxide; inorganic materials and their precursors include perovskite materials and zinc oxide (ZnO); and organic-inorganic composite materials include composite materials of organosilicon and metal oxides. By adjusting the amount of liquid material and the rotation parameters (including rotation speed, rotation time, and rotation acceleration), the spin coating process can control the thickness and uniformity of the film. In this embodiment, the rotating stage 13 is used to support the substrate and spread the liquid material on the substrate into a thin film through the centrifugal force generated by the rotation.

[0051] In one embodiment, the liquid material includes a perovskite precursor solution, that is, the spin coating assembly 10 can evenly spread the perovskite precursor solution into a thin film.

[0052] The vacuum drying assembly 20 utilizes a low-pressure vacuum environment to remove moisture or other solvents from the material, thereby drying the film. This vacuum drying method removes solvents without affecting the material's properties, while also providing a more uniform and consistent drying effect on the material within the vacuum drying environment.

[0053] In one embodiment, vacuum drying is used to promote the crystallization process of the perovskite film. Compared with the anti-solvent method, the vacuum drying method reduces human errors in operation and reduces the use of toxic and hazardous solvents, which is beneficial to environmental protection.

[0054] The vacuum drying assembly 20 includes a cover 21, a drive assembly 22, and a vacuum pump assembly. The drive assembly 22 is used to move the cover 21 toward or away from the rotating stage 13, thereby achieving a detachable cover for the rotating stage 13. When the cover 21 is placed on the rotating stage 13, it cooperates with the receiving groove 12 to form a sealed chamber. The vacuum pump assembly extracts air from the sealed chamber through the airflow holes 211, creating a low-pressure environment within the sealed chamber and achieving vacuum drying.

[0055] By setting the air flow holes 211 on the cover body 21, it is beneficial to promote the uniform distribution of airflow in the sealed cabin chamber, thereby achieving a more uniform drying effect; at the same time, exhausting air from above can reduce interference with the film structure and avoid deformation or damage of the film due to improper airflow direction.

[0056] In one embodiment, the spin coating apparatus 100 is in a Figure 1In the first state shown, the cover 21 of the vacuum drying assembly 20 is away from the rotating stage 13, and the rotating stage 13 is exposed, and the liquid material used for spin coating can be placed and the spin coating operation is performed to evenly spread the liquid material into a thin film. Subsequently, the driving assembly 22 drives the cover 21 to approach and cover the rotating stage 13, and cooperate with the receiving tank 12 to form a sealed cabin. The spin coating equipment 100 is in the following state. Figure 2 In the second state shown, the vacuum assembly is working, so that the sealed cavity is in a vacuum environment, and the solvent in the thin film formed by spin coating is removed, thereby achieving drying of the thin film.

[0057] In other embodiments, a liquid spray head may also be provided within the cover 21. The cover 21 and the receiving tank 12 may be closed to form a sealed chamber, and then the liquid spray head may be controlled to output the liquid material, perform spin coating, and subsequently perform vacuuming. Regarding the method for controlling the liquid spray head to output the liquid material, a liquid reservoir and a wireless / wired control component connected to the reservoir may be provided within the cover, and an external terminal device may be used to control the wireless / wired control component to drive the liquid material in the reservoir to be output from the liquid spray head. Alternatively, the liquid reservoir may be provided outside the cover 21, and the reservoir and the liquid spray head may be connected via a connecting pipe, thereby controlling the liquid to be output from the reservoir through the liquid spray head.

[0058] The above-mentioned spin coating equipment 100 integrates the spin coating component and the vacuum drying component, so that the thin film formed by spin coating can be directly vacuum dried in situ, realizing the in-situ use of vacuum drying technology in the spin coating equipment, which can reduce the transfer of the thin film during the preparation process, reduce the impact of pollutants in the environment on the thin film, and can also improve the degree of automation of thin film forming, improve the uniformity and quality repeatability of the thin film, improve the operability of the preparation process, and improve production efficiency.

[0059] Furthermore, applying the above-mentioned spin coating equipment 100 to the forming and crystallization process of small-area perovskite films is beneficial to improving the uniformity and quality repeatability of the perovskite films, thereby improving the performance of perovskite solar cells and improving the research and development reliability of perovskite solar cells in the small-area development stage.

[0060] In one embodiment, the spin coating assembly 10 of the spin coating apparatus 100 can work alone, that is, only performing the spin coating process of the thin film.

[0061] In one embodiment, the vacuum drying assembly 20 of the spin coating apparatus 100 can work alone, that is, only performing a vacuum drying process of the material.

[0062] See also Figure 9 , Figure 9This is a schematic diagram of a cover and base according to one embodiment of the present application. In one embodiment, the cover 21 includes a top wall 21a and a first side wall 21b surrounding the top wall 21a. The base 11 includes a bottom wall 11a and a second side wall 11b surrounding the bottom wall 11a. The end of the first side wall 21b, distal from the top wall 21a, detachably abuts against the bottom wall 11a of the base 11. The second side wall 11b detachably surrounds the first side wall 21b.

[0063] In the above embodiment, the space enclosed by the top wall 21a and first side wall 21b of the cover 21 and the bottom wall 11a of the base 11 constitutes the sealed chamber. The vacuum assembly extracts gas from the sealed chamber through the air flow holes 211, creating a low-pressure environment within the sealed chamber, thereby achieving the purpose of vacuum drying.

[0064] See also Figure 10 , Figure 10 This is a schematic diagram of a cover and base according to one embodiment of the present application. In one embodiment, the cover 21 includes a top wall 21a and a first side wall 21b surrounding the top wall 21a. The base 11 includes a bottom wall 11a and a second side wall 11b surrounding the bottom wall 11a. The end of the second side wall 11b, distal from the bottom wall 11a, detachably abuts against the top wall 21a of the cover 21, and the first side wall 21b detachably surrounds the second side wall 11b.

[0065] In the above embodiment, the space enclosed by the top wall 21a of the cover 21, the bottom wall 11a of the base 11, and the second side wall 11b constitutes the sealed chamber. The vacuum assembly extracts gas from the sealed chamber through the air flow holes 211, creating a low-pressure environment within the sealed chamber, thereby achieving the purpose of vacuum drying.

[0066] In one embodiment, the driving assembly 22 is connected to a side of the top wall 21 a of the cover 21 away from the receiving groove 12 , and the driving assembly 22 includes an air pump mechanical cantilever.

[0067] The driving assembly 22 is connected to the cover 21 and is used to drive the cover 21 to move closer to or away from the rotating stage 13, thereby realizing a detachable cover for the rotating stage 13. The air pump mechanical cantilever refers to a mechanical structure driven by an air pump and has good stability.

[0068] In one embodiment, the number of the air pump mechanical cantilever is one or more. As long as a stable connection with the cover body 21 and a smooth drive of the cover body 21 can be achieved, Figures 1 to 8 In the embodiment, the number of the air pump mechanical cantilevers is two.

[0069] In one embodiment, the driving assembly 22 further includes a displacement sensor. The displacement sensor is used to measure the travel of the cover 21 to determine whether the cover 21 has reached the target position.

[0070] In one embodiment, the spin coating apparatus 100 further includes a mounting portion 30 and a support portion 40 , wherein the mounting portion 30 is connected to the base 11 via the support portion 40 ; the driving assembly 22 is connected to the mounting portion 30 and accommodated between the mounting portion 30 and the base 11 .

[0071] The mounting portion 30 is used to install and fix the driving assembly 22, and the supporting portion 40 is used to connect the mounting portion 30 and the base 11. The mounting portion 30, the supporting portion 40 and the base 11 form the frame structure of the spin coating device 100, which plays the role of fixing and connecting other functional components.

[0072] See also Figures 1 to 8 In one embodiment, the mounting portion 30 is a mounting plate, and the supporting portion 40 is a supporting column, with four supporting columns. In other embodiments, the mounting portion 30 includes, but is not limited to, a mounting plate, a mounting block, etc., and the supporting portion 40 includes, but is not limited to, a supporting column, a supporting plate, etc. The mounting portion 30 and the supporting portion 40 may be an integrated structure or independent structures. The specific structure and number of the mounting portion 30 and the supporting portion 40 are determined to ensure the structural stability of the spin coating apparatus 100.

[0073] In one embodiment, the cover 21 has an opening with an inner diameter of 15 cm to 20 cm, which can be 15 cm, 16 cm, 16.5 cm, 17 cm, 18 cm, 19 cm, 20 cm, etc., or a range consisting of any two of the above values, such as 15 cm-16 cm, 16.5 cm-18 cm, 19 cm-20 cm, etc.

[0074] The size of the opening in cover 21 determines the size of the film that can be produced by spin coating apparatus 100. When the inner diameter of the opening is 15 cm to 20 cm, spin coating apparatus 100 is suitable for forming and crystallizing small-area perovskite films. In actual applications, the size of the opening in cover 21 can be adjusted according to the size of the target perovskite film.

[0075] The size of the spin-coated substrate structure suitable for the equipment used in this application can be less than or equal to 10×10 cm 2 In some embodiments, it can be 2×2 cm 2 ~5×5cm 2 .

[0076] In one embodiment, the rotating stage 13 includes: a carrier suction cup 131 having a through hole 131a; a rotating shaft 132 having a cavity, the rotating shaft 132 being fixed to the bottom surface of the receiving groove 12 and connected to the carrier suction cup 131; a first vacuum pump (not shown) connected to the through hole 131a of the carrier suction cup 131 through the cavity of the rotating shaft 132.

[0077] The carrier chuck 131 is used to hold the substrate to be formed into a thin film. The rotating shaft 132 is used to drive the carrier chuck 131 to rotate. A first vacuum pump is connected to the through hole 131a of the carrier chuck 131 through the cavity of the rotating shaft 132. This creates a negative pressure between the film substrate and the carrier chuck 131, thereby adsorbing the film substrate to the carrier chuck 131. As the carrier chuck 131 rotates, the liquid material on the substrate is evenly spread into a thin film. The spin coating function can be driven by a motor, and the spin coating parameters, including spin coating time, spin coating speed, and spin coating acceleration, can be set.

[0078] In one embodiment, the vacuum pump assembly includes: a connecting pipe; and a second vacuum pump (not shown). The second vacuum pump is connected to the air flow hole 211 of the cover body 21 through the connecting pipe.

[0079] The second vacuum pump is used to provide a vacuum environment for the sealed chamber, and to extract the gas in the sealed chamber through the air flow hole 211, so as to form a low-pressure environment in the sealed chamber, thereby achieving the purpose of vacuum drying.

[0080] In one embodiment, the vacuum assembly further includes a sealing device, which is located at the abutting surface between the cover 21 and the receiving groove 12 , and the abutting surface is located at the cover 21 and / or the receiving groove 12 .

[0081] The sealing device includes but is not limited to a sealing ring, the shape of the sealing ring matches the shape of the abutting surface, and the material includes but is not limited to rubber, etc. The sealing device is conducive to improving the sealing performance of the sealed cabin.

[0082] In one embodiment, the vacuum drying assembly 20 further includes a vacuum degree detection assembly, which is located in the cover 21 or the receiving tank 12 .

[0083] The vacuum detection component is used to detect the vacuum degree in the sealed cabin cavity and determine whether the sealing of the sealed cabin cavity meets the standard, which is conducive to improving production efficiency.

[0084] For example, in some embodiments, the workflow of the spin coating apparatus 100 may be as follows:

[0085] In the first state, the spin coating device is on standby, and the cover is away from the receiving tank;

[0086] Place the substrate on the carrier chuck of the spin coating assembly and drop an appropriate amount of the liquid material to be spin-coated on the center of the substrate;

[0087] The driving assembly drives the cover body so that the cover body covers the receiving groove, and the cover body and the receiving groove cooperate to form a sealed cabin. At this time, the spin coating device enters the second state;

[0088] Start the first vacuum pump to fix the substrate on the loading chuck, set the spin coating parameters, start the spin coating motor, and the liquid material diffuses outward due to centrifugal force to form a thin film;

[0089] Start the second vacuum pump, and detect the vacuum degree of the sealed cabin by the vacuum degree drying assembly to dry the film.

[0090] In an embodiment, a spin coating device is used for forming and crystallizing a perovskite film, and a method for manufacturing a perovskite solar cell in the embodiment can include the following steps:

[0091] S110: Preparation of a hole transport layer and a hole modification layer

[0092] The FTO glass is cleaned, and after drying in an oven, the surface of the cleaned FTO glass is treated by ultraviolet-ozone.

[0093] The hole transport layer solution is spin coated on the treated FTO glass, and then heat annealing is performed to form the hole transport layer.

[0094] The hole modification layer solution is spin coated on the hole transport layer, and then heat annealing is performed to form the hole modification layer.

[0095] S120: Preparation of a perovskite light absorption layer

[0096] A perovskite precursor solution is configured.

[0097] The substrate / hole transport layer / hole modification layer substrate is placed on the spin coating chuck of the spin coating device of the present application, and the perovskite precursor solution is added dropwise.

[0098] The spin coating assembly is started to spin.

[0099] After a period of spin coating, the driving assembly is started to form a sealed cabin, and the second vacuum pump is started to dry the perovskite film.

[0100] After vacuum drying, the perovskite film is placed in the air for annealing to form the perovskite light absorption layer.

[0101] S130: Preparation of an electron transport layer and a hole blocking layer

[0102] The electron transport material and the hole blocking material are sequentially and respectively evaporated onto the surface of the perovskite light absorption layer by a vacuum evaporation method to obtain the electron transport layer and the hole blocking layer.

[0103] S140: Preparation of an electrode

[0104] The electrode material is evaporated on the surface of the hole blocking layer by a vacuum evaporation method to obtain the electrode.

[0105] The perovskite solar cells prepared by the above method have good uniformity and quality repeatability of the perovskite film, which is beneficial to improving the performance of perovskite solar cells and at the same time improving the research and development reliability of perovskite solar cells in the small-area development stage.

[0106] In order to make the technical problems, technical solutions and beneficial effects solved by the embodiments of the present application clearer, the following will be further described in detail with reference to the embodiments and drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is in no way intended to limit the present application and its applications. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0107] 1. Preparation of perovskite solar cells

[0108] Example 1 to Example 5:

[0109] (1) Clean the fluorine-doped tin oxide (FTO) substrate with detergent, deionized water, acetone, and isopropanol in sequence; place the cleaned FTO glass (size 2×2 cm) 2 ) After drying in an oven at 70° C., the surface was treated with UV-ozone for 15 minutes, wherein the thickness of the FTO layer was 500 nm.

[0110] (2) Spin-coat nickel oxide (NiO) on the treated FTO glass at 6000 rpm. x ) nanoparticle solution (10 mg / mL deionized water dispersion), which was then thermally annealed at 150 ° C for 10 minutes to form a nickel oxide film with a thickness of 10 nm; then transferred to a nitrogen glove box, x A Me-4PCz (0.5 mg / mL) hole modification layer was spin-coated at 5000 rpm, and then thermally annealed at 100° C. for 10 minutes to form an interface layer with a thickness of 2 nm.

[0111] (3) Prepare the perovskite precursor solution: 1.5 mol / L (949.47 mg / mL formamidinium lead iodide) FAPbI3, the additive is 0.525 mol / mL (35.45 mg / mL methylammonium chloride) MACl, the solvent used is DMF (N,N-dimethylformamide) and DMSO (dimethyl sulfoxide), the solvent volume ratio is 8:1, the solvent volume is 1 mL, stir until completely dissolved, and filter with a polytetrafluoroethylene filter with a pore size of 0.22 μm to obtain a perovskite precursor solution that can be used for deposition;

[0112] Using the spin coating equipment of this application, FTO / NiOx The / Me-4PCz substrate was placed on the suction cup of the device, 100 μL of perovskite precursor solution was added, and the rotation speed was 6000 r / min (1500 r / min 2 The film was spin-coated at 100°C for 60 seconds (at a controlled rate of 20-30% RH). The device was set to close the VCD chamber 20 seconds after the start of spin coating, and simultaneously evacuated to 2 Pa for 40 seconds. Afterward, the film was annealed in air at 150°C for 15 minutes (controlling the ambient humidity between 20% and 30%) to form a 650nm thick FAPbI3 perovskite light-absorbing layer.

[0113] (4) Using vacuum evaporation method to deposit C 60 , 2,9-diphenyl-4,7-dinitro-1,10-phenanthroline (BCP) were sequentially evaporated onto the surface of the perovskite light-absorbing layer to obtain an electron transport layer with a thickness of 20 nm and a modification layer with a thickness of 7 nm.

[0114] (5) Copper (Cu) is evaporated on the surface of the electron transport layer by vacuum evaporation to obtain a metal electrode Cu with a thickness of 100 nm.

[0115] After steps (1) to (5), a complete perovskite solar cell is obtained.

[0116] Comparative Examples 1 to 5:

[0117] The difference between Comparative Examples 1 to 5 and Examples 1 to 5 is step (3), which is as follows:

[0118] (3) Prepare the perovskite precursor solution: 1.5 mol / L (949.47 mg / mL formamidinium lead iodide) FAPbI3, the additive is 0.525 mol / mL (35.45 mg / mL methylammonium chloride) MACl, the solvent used is DMF (N,N-dimethylformamide) and DMSO (dimethyl sulfoxide), the solvent volume ratio is 8:1, the solvent volume is 1 mL, stir until completely dissolved, and filter with a polytetrafluoroethylene filter with a pore size of 0.22 μm to obtain a perovskite precursor solution that can be used for deposition;

[0119] Use ordinary spin coating equipment to coat FTO / NiO x The / Me-4PCz substrate was placed on the suction cup of the device, 100 μL of perovskite precursor was added, and the rotation speed was 6000 rpm (1500 r / min 2 The film was spin-coated at 150°C for 15 minutes (the humidity of the air was controlled at 20-30 RH%) to form a FAPbI3 perovskite light-absorbing layer with a thickness of 650 nm.

[0120] 2. Perovskite Solar Cell Performance Test

[0121] At 25℃ and relative humidity below 3%, the temperature was kept constant under standard simulated sunlight (AM 1.5G, 100mW / cm 2 ) irradiation using an IV test system to test the light conversion efficiency of the battery, the test voltage range is -0.5V to 1.5V, the scan rate is 20mV / s, and the short-circuit current, open-circuit voltage, fill factor and initial efficiency can be obtained.

[0122] The test results are shown in Table 1.

[0123] Table 1 Test parameters of various embodiments and comparative examples

[0124]

[0125] 3. Performance Test Results Analysis

[0126] The comparative examples and examples above demonstrate that the perovskite solar cell devices prepared using the spin coating apparatus provided herein exhibit superior photoelectric performance and repeatability compared to those prepared using the artificial antisolvent method. This demonstrates that the spin coating apparatus provided herein has excellent operability and repeatability during the R&D phase of small-area perovskite cells, facilitating the experimentation and verification of R&D conclusions.

[0127] The above description is only an implementation method of the present application and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of this application, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A spin coating device, characterized in that include: A spin coating assembly, the spin coating assembly comprising a base, the base being provided with a receiving groove, and a rotating stage being provided in the receiving groove; A vacuum drying component includes a cover body, a drive component and a vacuum pumping component. The cover body is detachably provided to cover the rotating stage and cooperates with the accommodating tank to form a sealed cabin. The drive component is arranged on the side of the cover body away from the accommodating tank. The cover body includes an air flow hole, and the vacuum pumping component is connected to the air flow hole.

2. The spin coating apparatus according to claim 1, wherein The cover body includes a top wall and a first side wall surrounding the top wall, the base includes a bottom wall and a second side wall surrounding the bottom wall, the end of the first side wall away from the top wall is detachably pressed against the bottom wall of the base, and the second side wall is detachably surrounding the first side wall.

3. The spin coating apparatus according to claim 1, wherein The cover body includes a top wall and a first side wall surrounding the top wall, the base includes a bottom wall and a second side wall surrounding the bottom wall, the end of the second side wall away from the bottom wall is detachably pressed against the top wall of the cover body, and the first side wall is detachably surrounding the second side wall.

4. The spin coating device according to any one of claims 1 to 3, wherein: The driving assembly is connected to a side of the top wall of the cover body away from the accommodating groove, and the driving assembly includes an air pump mechanical cantilever.

5. The spin coating device according to any one of claims 1 to 3, characterized in that: The spin coating device further includes a mounting portion and a supporting portion, wherein the mounting portion is connected to the base via the supporting portion; The driving assembly is connected to the mounting portion and is accommodated between the mounting portion and the base.

6. The spin coating device according to any one of claims 1 to 3, characterized in that: The cover body has an opening, and the inner diameter of the opening is 15 cm to 20 cm.

7. The spin coating device according to any one of claims 1 to 3, wherein: The rotating stage comprises: The object-carrying suction cup has a through hole; A rotating shaft having a cavity, the rotating shaft being fixed to the bottom surface of the receiving groove and connected to the loading suction cup; The first vacuum pump is connected to the through hole of the object-carrying suction cup through the cavity of the rotating shaft.

8. The spin coating device according to any one of claims 1 to 3, characterized in that: The vacuum assembly comprises: connecting pipe; A second vacuum pump is connected to the air flow hole of the cover body through the connecting pipe.

9. The spin coating device according to any one of claims 1 to 3, wherein: The vacuum assembly further includes a sealing device, which is located at the abutting surface between the cover and the receiving groove, and the abutting surface is located at the cover and / or the receiving groove.

10. The spin coating device according to any one of claims 1 to 3, characterized in that: The vacuum drying component further includes a vacuum degree detection component, and the vacuum degree detection component is located in the cover body or the accommodating tank.

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