Positioning clamp for semiconductor nozzle

Abstract

The utility model relates to the technical field of clamps, and discloses a positioning clamp for a semiconductor nozzle. The positioning clamp for the semiconductor sprayer comprises a base, a first clamping plate and a sliding assembly, a supporting part used for supporting the circumferential outer wall of the sprayer is arranged at the top of the base, sliding grooves are formed in the positions, located on the two sides of the supporting part, of the base respectively, the sliding grooves extend in the width direction of the base, and the first clamping plate corresponds to the sliding grooves and is fixedly arranged on the base; the sliding assemblies are arranged corresponding to the sliding grooves, each sliding assembly is movably arranged on the corresponding sliding groove and suitable for being fixed to the designated position of the corresponding sliding groove, the second clamping plates and the first clamping plates are arranged in a one-to-one correspondence mode, and the second clamping plates and the first clamping plates are used for clamping the two opposite sides of the spray head respectively. By adjusting the position of the sliding assembly in the sliding groove, reliable clamping of the second clamping plate and the first clamping plate on the two opposite sides of the spray head is achieved, the spray head can be fixed more effectively, the possibility that the spray head displaces in the operation process is reduced, and therefore clamping stability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of clamps, in particular to a positioning clamp for a semiconductor nozzle. Background Art

[0002] In the production process of semiconductor nozzles, clamping and fixing nozzle parts is a key step for subsequent processing or measurement.

[0003] Existing nozzle clamping methods have many shortcomings and are difficult to meet the requirements of high-precision processing and measurement. For example, the clamping device has relatively poor clamping stability, and the nozzle may move during operation, which will adversely affect the nozzle processing or measurement results. Utility Model Content

[0004] In view of this, the present invention provides a positioning fixture for a semiconductor shower head to solve the problem of relatively poor clamping stability of existing clamping devices.

[0005] In a first aspect, the utility model provides a positioning fixture for a semiconductor shower head, comprising:

[0006] The base has a support portion on the top for supporting the outer circumferential wall of the nozzle, and the base has slide grooves on both sides of the support portion, and the slide grooves extend along the width direction of the base;

[0007] First clamping plates are arranged corresponding to the sliding grooves and fixed on the base, and each of the first clamping plates protrudes from the supporting portion;

[0008] The sliding components are arranged in a one-to-one correspondence with the slide grooves. Each of the sliding components can be movably arranged on the corresponding slide groove and is suitable for being fixed at a designated position corresponding to the slide groove. Each of the sliding components is provided with a second clamping plate. The second clamping plate is arranged in a one-to-one correspondence with the first clamping plate. The second clamping plate and the first clamping plate are respectively used to clamp the opposite sides of the nozzle.

[0009] Beneficial Effects: When clamping a semiconductor nozzle, the positioning fixture first places the nozzle's outer circumference on the support portion of the base. The close contact between the nozzle's outer circumference and the support portion helps ensure the nozzle remains horizontal within the fixture, improving dimensional accuracy during subsequent processing or measurement.

[0010] Next, align one side of the nozzle tightly against the first clamping plate. Next, adjust the position of the sliding assembly within the chute until the second clamping plate also aligns with the other side of the nozzle. Finally, secure the sliding assembly at its designated position, ensuring the second and first clamping plates securely clamp the nozzle on opposite sides. Compared to existing clamping devices, this more effectively secures the nozzle, reducing the possibility of nozzle displacement during operation and improving clamping stability.

[0011] In addition, since the sliding assembly can move on the slide groove and be fixed at a specified position, the positioning fixture for the semiconductor nozzle can adapt to nozzles of different sizes and specifications, thereby improving the versatility and flexibility of the fixture.

[0012] In an optional embodiment, the sliding assembly includes a first sliding member and a second sliding member, the first sliding member is movably disposed in the sliding groove, the second sliding member is disposed on the sliding groove, and the first sliding member and the second sliding member are connected via a fastener;

[0013] When the fastener is in a relaxed state, the sliding assembly is suitable for moving along the slide groove; when the fastener is in a tightened state, the first sliding member and the second sliding member clamp the groove wall of the slide groove to fix the sliding assembly on the slide groove.

[0014] Beneficial Effects: When the sliding assembly needs to be fixed, the first and second sliding members can tightly clamp the groove wall by tightening the fasteners, firmly fixing the sliding assembly to the groove, ensuring that it will not move during the nozzle processing or measurement process, and ensuring the stability of the nozzle clamping. The sliding assembly consisting of the first and second sliding members and fasteners has a simple structure, is easy to manufacture and maintain, and reduces production costs.

[0015] In an optional embodiment, a step surface is provided at one end close to the second sliding member, and the second clamping plate is provided on the step surface.

[0016] Beneficial effect: By setting a step surface on the second sliding part, the step surface provides a clear installation position for the second clamping plate, so that the second clamping plate can be positioned quickly and accurately during installation, ensuring the accuracy of the relative position of the second clamping plate and the first clamping plate, thereby improving the accuracy of clamping the nozzle.

[0017] The second clamping plate is installed on the step surface, which increases the contact area between the second clamping plate and the sliding assembly, making the second clamping plate more stable when subjected to force and less likely to shake or deflect, further improving the stability of the nozzle clamping.

[0018] In an optional embodiment, the support portion includes two inclined surfaces arranged opposite to each other, and the two inclined surfaces gradually shrink from the top of the base to the bottom of the base.

[0019] Beneficial Effects: The two gradually tapering inclined surfaces guide the placement of the nozzle, making it easier and more accurate to place the nozzle on the support, improving the convenience and accuracy of placement and facilitating subsequent clamping operations. Furthermore, the two inclined surfaces can adapt to nozzles of varying diameters, allowing the nozzle's outer wall to better contact the support, ensuring the nozzle's levelness in the fixture and increasing the fixture's compatibility with nozzles of varying sizes.

[0020] In an optional embodiment, the two inclined surfaces are symmetrical with respect to a central plane of the support portion.

[0021] Beneficial Effects: The two symmetrically arranged inclined surfaces ensure a more even force distribution when the nozzle is placed on the support, maintaining better stability and balance, and reducing nozzle shaking or deviation caused by uneven force. Because the nozzle is stably and balanced, errors caused by unstable nozzle position are reduced during machining or measurement operations, thereby improving machining or measurement accuracy.

[0022] In an optional embodiment, a relief notch for avoiding the nozzle installation groove is provided on the first clamping plate, and the relief notch is an arc-shaped structure.

[0023] Beneficial effect: When clamping the nozzle, the avoidance gap can effectively avoid the installation groove of the nozzle, prevent the first clamping plate from interfering with the nozzle installation groove, ensure the smooth progress of the clamping operation, and avoid affecting the processing of the installation groove due to the first clamping plate directly contacting the installation groove position of the nozzle.

[0024] The avoidance notch of the arc-shaped structure can ensure a large clamping area between the first clamping plate and the side of the nozzle while avoiding the installation groove, thereby improving the clamping stability.

[0025] In an optional embodiment, the first clamping plate and the second clamping plate are arranged in parallel.

[0026] Beneficial Effects: The parallel arrangement of the first and second clamping plates evenly distributes the clamping force on both sides of the printhead, preventing deformation or damage to the printhead due to uneven clamping force and ensuring the stability of the printhead during processing or measurement. This also helps to more accurately position the printhead, making its position in the fixture more stable and precise, thereby improving the accuracy of subsequent processing or measurement.

[0027] In an optional embodiment, the axis of the sliding groove is arranged perpendicular to the first clamping plate.

[0028] Beneficial effects: Because the axis of the sliding groove is perpendicular to the first clamping plate, when the sliding assembly moves in the sliding groove, the second clamping plate can move in a direction perpendicular to the first clamping plate, so that the parallel clamping of the two sides of the nozzle is better realized, and the accuracy and stability of clamping are ensured. The vertical arrangement makes it more intuitive and convenient for the operator to adjust the position of the second clamping plate, and the second clamping plate can be quickly adjusted to the appropriate position to clamp the nozzle, thereby improving the work efficiency.

[0029] In an alternative embodiment, the sliding groove is a "T"-shaped groove.

[0030] Beneficial effects: The shape of the "T"-shaped groove can provide good guidance for the sliding assembly, making it more stable and accurate during movement, reducing shaking and deviation, and thus ensuring accurate cooperation between the second clamping plate and the nozzle.

[0031] The structure of the "T"-shaped groove can withstand a large vertical and horizontal force, so that the sliding assembly can clamp the nozzle more stably after being fixed, thereby improving the clamping reliability of the clamp.

[0032] Compared with other shapes of sliding grooves, the "T"-shaped groove can better limit the disengagement of the sliding assembly, ensuring that the sliding assembly does not accidentally disengage from the sliding groove during use, and ensuring normal use of the clamp.

[0033] In an alternative embodiment, a lead screw mechanism is further included, the lead screw mechanism is provided with a movable sliding block, and the base is fixed to the sliding block.

[0034] Beneficial effects: Through the rotation of the lead screw mechanism, the movement of the sliding block can be accurately controlled, thereby driving the base and the nozzle to be finely adjusted in the horizontal direction, and the nozzle can be more accurately positioned at the required processing or measuring position, so that the operator can flexibly adjust the position of the nozzle according to the actual needs, facilitating multi-angle and multi-position processing or measuring operation, and improving the work efficiency and processing quality. BRIEF DESCRIPTION OF DRAWINGS

[0035] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings described below are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0036] Figure 1 FIG. 1 is a structural schematic view of a positioning clamp for a semiconductor nozzle according to an embodiment of the present application;

[0037] Figure 2This is a schematic structural diagram of a positioning fixture for a semiconductor shower head according to an embodiment of the present utility model from another perspective;

[0038] Figure 3 This is a front view of a positioning fixture for a semiconductor shower head according to an embodiment of the present utility model;

[0039] Figure 4 This is an exploded schematic diagram of a positioning fixture for a semiconductor shower head according to an embodiment of the present utility model.

[0040] Description of reference numerals:

[0041] 1. Base; 101. Support part; 1011. Inclined surface; 102. Slide groove; 2. Nozzle; 201. Mounting groove; 3. First clamping plate; 301. Avoidance gap; 4. Sliding assembly; 401. First sliding member; 402. Second sliding member; 4021. Step surface; 403. Fastener; 5. Second clamping plate; 6. Screw mechanism; 601. Slider. DETAILED DESCRIPTION

[0042] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of the present invention.

[0043] The existing nozzle clamping methods in the prior art have many shortcomings, making it difficult to meet the requirements of high-precision machining and measurement. For example, the clamping device has relatively poor clamping stability, and the nozzle may shift during operation, which can adversely affect the nozzle machining or measurement results.

[0044] In order to solve the above technical problems, the following Figures 1 to 4 , describing the embodiments of the present utility model.

[0045] According to an embodiment of the present invention, on the one hand, Figures 1 to 4 As shown, a positioning fixture for a semiconductor shower head is provided, comprising a base 1 , a first clamping plate 3 and a sliding assembly 4 .

[0046] Specifically, if Figure 1 As shown, a support portion 101 is provided on the top of the base 1 for supporting the circumferential outer wall of the nozzle 2. Slide grooves 102 are provided on both sides of the support portion 101 of the base 1, and the slide grooves 102 extend along the width direction of the base 1.

[0047] Specifically, if Figure 1As shown, the first clamping plates 3 are fixed on the base 1 and the first clamping plates 3 are correspondingly arranged with the sliding grooves 102 , and each first clamping plate 3 protrudes from the supporting portion 101 .

[0048] Specifically, if Figure 1 As shown, the sliding components 4 are arranged in a one-to-one correspondence with the slide slots 102. Each sliding component 4 can be movably arranged on the corresponding slide slot 102, and each sliding component 4 is suitable for being fixed at a designated position of the corresponding slide slot 102.

[0049] Specifically, if Figure 1 As shown, each sliding assembly 4 is provided with a second clamping plate 5 , and the second clamping plate 5 is provided in a one-to-one correspondence with the first clamping plate 3 . The second clamping plate 5 and the first clamping plate 3 are respectively used to clamp the opposite sides of the spray head 2 .

[0050] When clamping the nozzle 2, the semiconductor nozzle positioning fixture first places the outer circumference of the nozzle 2 on the support portion 101 of the base 1. The close contact between the outer circumference of the nozzle 2 and the support portion 101 helps ensure that the nozzle 2 remains horizontal within the fixture, thereby improving the dimensional accuracy of subsequent processing or measurement.

[0051] Next, one side of the nozzle 2 is tightly fitted against the first clamping plate 3. The position of the sliding assembly 4 in the chute 102 is then adjusted until the second clamping plate 5 is also in contact with the other side of the nozzle 2. Finally, the sliding assembly 4 is fixed at its designated sliding position, thereby reliably clamping the second clamping plate 5 and the first clamping plate 3 against the opposite sides of the nozzle 2. Compared to existing clamping devices, this more effectively secures the nozzle 2, reduces the possibility of nozzle 2 displacement during operation, and thus improves clamping stability.

[0052] In addition, since the sliding assembly 4 can move on the slide groove 102 and be fixed at a specified position, the positioning fixture for the semiconductor nozzle can adapt to nozzles 2 of different sizes and specifications, thereby improving the versatility and flexibility of the fixture.

[0053] Specifically, the support portion 101 can be configured to have any existing structure as long as the support portion 101 can support the circumferential outer wall of the nozzle 2. For example, the support portion 101 can be configured to have an arc-shaped structure that fits the circumferential outer wall of the nozzle 2. In the embodiment of the present application, the structure of the support portion 101 is not specifically limited.

[0054] Specifically, the slide groove 102 can be set to any shape such as a linear groove, an "L"-shaped groove, etc. In the embodiment of the present application, there is no specific limitation on the shape of the slide groove 102.

[0055] Specifically, the first splint 3 and the second splint 5 can be rectangular splints, square splints or arc-shaped splints, etc. In the implementation of this application, there is no specific limitation on the shapes of the first splint 3 and the second splint 5.

[0056] Specifically, the movement of the sliding assembly 4 on the chute 102 can be achieved by external force, such as manual pushing by an operator, or by using a driving member such as a motor. The sliding assembly 4 can be fixed to a specified position in the chute 102 by a snap connection or by a limiting structure such as a limit block. In the embodiment of the present application, there is no specific limitation on the sliding method and fixing method of the sliding assembly 4.

[0057] In one embodiment, Figure 1 and Figure 3 As shown, the sliding assembly 4 includes a first sliding member 401 and a second sliding member 402 . The first sliding member 401 is movably disposed in the sliding groove 102 , and the second sliding member 402 is disposed on the sliding groove 102 . The first sliding member 401 and the second sliding member 402 are connected by a fastener 403 .

[0058] When the fastener 403 is in a loose state, the sliding assembly 4 is adapted to move along the chute 102. When the fastener 403 is in a tightened state, the first sliding member 401 and the second sliding member 402 clamp the chute wall of the chute 102 so that the sliding assembly 4 is fixed on the chute 102.

[0059] When the fastener 403 is in a relaxed state, the sliding assembly 4 can move smoothly along the slide groove 102, making it easy to quickly adjust the position of the second clamping plate 5, so that the nozzle 2 can be placed between the first clamping plate 3 and the second clamping plate 5 for clamping or removal, while adapting to nozzles 2 of different sizes, making operation convenient and efficient.

[0060] When the sliding assembly 4 needs to be secured, the first sliding member 401 and the second sliding member 402 are tightly clamped against the wall of the chute 102 by tightening the fastener 403, firmly securing the sliding assembly 4 to the chute 102. This prevents displacement during the processing or measurement of the printhead 2 and ensures the stability of the printhead 2. The sliding assembly 4, consisting of the first sliding member 401, the second sliding member 402, and the fastener 403, has a simple structure, is easy to manufacture and maintain, and reduces production costs.

[0061] Specifically, if Figure 4As shown, a threaded hole can be provided on the first sliding member 401, and a through hole corresponding to the threaded hole is provided on the second sliding member 402. The fastener 403 passes through the through hole of the second sliding member 402 and is connected to the threaded hole of the first sliding member 401. When the fastener 403 is loosened, the gap between the first sliding member 401 and the second sliding member 402 is relatively large. At this time, the friction between the sliding assembly 4 and the groove wall of the slide groove 102 is small, allowing the sliding assembly 4 to move smoothly in the slide groove 102. Conversely, when the fastener 403 is tightened, the gap between the first sliding member 401 and the second sliding member 402 is reduced. At this time, the friction between the sliding assembly 4 and the groove wall of the slide groove 102 is large, allowing the sliding assembly 4 to be firmly fixed to the slide groove 102.

[0062] Specifically, the fastener 403 can be a fastening screw or a nut, etc. In the embodiment of the present application, there is no specific limitation on the type of the fastener 403.

[0063] In one embodiment, Figure 1 As shown, a step surface 4021 is provided at one end close to the second sliding member 402 , and the second clamping plate 5 is disposed on the step surface 4021 .

[0064] By setting a step surface 4021 on the second sliding member 402, the step surface 4021 provides a clear installation position for the second clamping plate 5, so that the second clamping plate 5 can be positioned quickly and accurately during installation, ensuring the accuracy of the relative position of the second clamping plate 5 and the first clamping plate 3, thereby improving the accuracy of clamping the nozzle 2.

[0065] The second clamping plate 5 is installed on the stepped surface 4021, which increases the contact area between the second clamping plate 5 and the sliding assembly 4, making the second clamping plate 5 more stable when subjected to force and less likely to shake or deflect, further improving the stability of the nozzle 2 clamping.

[0066] Specifically, the bottom width of the step surface 4021 can be set to match the thickness of the second clamping plate 5 to facilitate the installation of the second clamping plate 5 on the step surface 4021 while ensuring that the clamping surface of the second clamping plate 5 can fit tightly with the side of the nozzle 2.

[0067] In one embodiment, Figure 1 and Figure 3 As shown, the support portion 101 includes two inclined surfaces 1011 arranged opposite to each other, and the two inclined surfaces 1011 gradually shrink from the top of the base 1 to the bottom of the base 1.

[0068] The two gradually converging inclined surfaces 1011 can guide the placement of the nozzle 2, making it easier and more accurate to place the nozzle 2 on the support portion 101, improving the convenience and accuracy of placement and facilitating subsequent clamping operations. At the same time, the two inclined surfaces 1011 can adapt to the circumferential outer wall of the nozzle 2 of different diameters to a certain extent, allowing the circumferential outer wall of the nozzle 2 to better contact with the support portion 101, ensuring the horizontality of the nozzle 2 in the fixture, and also increasing the fixture's compatibility with nozzles 2 of different sizes.

[0069] Specifically, the two inclined surfaces 1011 can be set to have any inclined angle. In the embodiment of the present application, the inclined angle of the inclined surface 1011 is not specifically limited.

[0070] In one embodiment, Figure 1 and Figure 3 As shown, the two inclined surfaces 1011 are symmetrically arranged with respect to the central plane of the support portion 101 .

[0071] The two symmetrically arranged inclined surfaces 1011 ensure that the nozzle 2 is subjected to a more even force when placed on the support 101, thereby maintaining better stability and balance, and reducing shaking or deviation of the nozzle 2 due to uneven force. Since the nozzle 2 is placed stably and balanced, errors caused by unstable position of the nozzle 2 during machining or measurement operations can be reduced, thereby improving machining or measurement accuracy.

[0072] In one embodiment, Figure 2 As shown, the first clamping plate 3 is provided with an escape notch 301, which is used to avoid the installation groove 201 of the nozzle 2. The escape notch 301 is an arc-shaped structure.

[0073] When clamping the nozzle 2, the avoidance notch 301 can effectively avoid the installation groove 201 of the nozzle 2, prevent the first clamping plate 3 from interfering with the installation groove 201 of the nozzle 2, ensure the smooth progress of the clamping operation, and avoid the first clamping plate 3 directly contacting the installation groove 201 position of the nozzle 2 and affecting the processing of the installation groove 201.

[0074] The avoidance notch 301 of the arc-shaped structure can ensure a large clamping area between the first clamping plate 3 and the side of the nozzle 2 while avoiding the installation groove 201, thereby improving the clamping stability.

[0075] In one embodiment, Figure 1 As shown, the first clamping plate 3 and the second clamping plate 5 are arranged in parallel.

[0076] The parallel arrangement of the first and second clamping plates 3 and 5 evenly distributes the clamping force on both sides of the nozzle 2, preventing deformation or damage to the nozzle 2 due to uneven clamping force and ensuring the stability of the nozzle 2 during processing or measurement. This also helps to more accurately position the nozzle 2, making its position in the fixture more stable and precise, thereby improving the accuracy of subsequent processing or measurement.

[0077] In one embodiment, Figure 1 As shown, the axis of the sliding groove 102 is arranged perpendicular to the first clamping plate 3.

[0078] Because the axis of the chute 102 is perpendicular to the first clamping plate 3, when the sliding assembly 4 moves within the chute 102, the second clamping plate 5 can precisely move in a direction perpendicular to the first clamping plate 3, thereby better achieving parallel clamping of the opposite sides of the nozzle 2, ensuring clamping precision and stability. The vertical arrangement makes it more intuitive and convenient for the operator to adjust the position of the second clamping plate 5, allowing for faster adjustment to the appropriate position to clamp the nozzle 2, thereby improving work efficiency.

[0079] In one embodiment, Figure 3 As shown, the slide groove 102 is a "T"-shaped groove.

[0080] The shape of the “T”-shaped groove can provide good guidance for the sliding assembly 4, making it more stable and accurate during movement, reducing shaking and deviation, thereby ensuring accurate matching between the second clamping plate 5 and the nozzle 2.

[0081] The “T”-shaped slot structure can withstand greater vertical and horizontal forces, so that the sliding assembly 4 can clamp the nozzle 2 more firmly after being fixed, thereby improving the clamping reliability of the fixture.

[0082] Compared with other shapes of the slide groove 102, the "T"-shaped groove can better limit the slipping of the sliding component 4, ensuring that the sliding component 4 will not accidentally fall out of the slide groove 102 during use, thereby ensuring the normal use of the clamp.

[0083] In one embodiment, Figure 1 As shown, it also includes a screw mechanism 6 , on which a movable slider 601 is provided, and the base 1 is fixedly arranged on the slider 601 .

[0084] By rotating the screw mechanism 6, the movement of the slider 601 can be precisely controlled, thereby driving the base 1 and the nozzle 2 to be fine-tuned in the horizontal direction, and the nozzle 2 can be more accurately positioned to the required processing or measurement position, so that the operator can flexibly adjust the position of the nozzle 2 according to actual needs, facilitating multi-angle and multi-position processing or measurement operations, thereby improving work efficiency and processing quality.

[0085] The working principle of the positioning fixture for the semiconductor shower head in this embodiment is described as follows:

[0086] First, place the circumferential outer wall of the nozzle 2 on the support part 101 of the base 1. The two inclined surfaces 1011 of the support part 101 guide and position the nozzle 2. Since the inclined surfaces 1011 are symmetrical about the center plane of the support part 101, the stability and balance of the placement of the nozzle 2 can be guaranteed.

[0087] Next, one side of the nozzle 2 is aligned with the first clamping plate 3. The curved relief notch 301 on the first clamping plate 3 avoids the nozzle 2 mounting slot 201. Next, the second clamping plate 5 is aligned with the other side of the nozzle 2 by adjusting the position of the sliding assembly 4 within the "T"-shaped slot 102. During the adjustment process, the "T"-shaped slot 102 provides good guidance for the sliding assembly 4 and can withstand significant forces, ensuring smooth movement and reliable fixation. Because the first clamping plate 3 and the second clamping plate 5 are arranged parallel to each other, they ensure uniform clamping force on both sides of the nozzle 2.

[0088] When the sliding assembly 4 is adjusted to a suitable position, it is fixed to the slide groove 102 by the fastener 403 , so that the second clamping plate 5 and the first clamping plate 3 clamp the opposite sides of the nozzle 2 .

[0089] In addition, the rotation of the screw mechanism 6 drives the slider 601 to move, thereby achieving precise position adjustment of the base 1 and the nozzle 2 in the horizontal direction to meet different processing or measurement requirements.

[0090] Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations shall fall within the scope defined by the appended claims.

Claims

1. A positioning fixture for a semiconductor shower head, characterized in that: include: A base (1) is provided with a support portion (101) on the top for supporting the circumferential outer wall of the nozzle (2); the base (1) is provided with slide grooves (102) on both sides of the support portion (101), and the slide grooves (102) extend along the width direction of the base (1); A first clamping plate (3) is arranged corresponding to the sliding groove (102) and fixed on the base (1), and each first clamping plate (3) protrudes from the supporting portion (101); The sliding components (4) are arranged in a one-to-one correspondence with the slide grooves (102). Each of the sliding components (4) can be movably arranged on the corresponding slide groove (102) and is suitable for being fixed at a designated position of the corresponding slide groove (102). Each of the sliding components (4) is provided with a second clamping plate (5). The second clamping plate (5) is arranged in a one-to-one correspondence with the first clamping plate (3). The second clamping plate (5) and the first clamping plate (3) are respectively used to clamp the opposite sides of the nozzle (2).

2. The semiconductor shower head positioning fixture according to claim 1, wherein: The sliding assembly (4) comprises a first sliding member (401) and a second sliding member (402), wherein the first sliding member (401) is movably disposed in the sliding groove (102), and the second sliding member (402) is disposed on the sliding groove (102), and the first sliding member (401) and the second sliding member (402) are connected via a fastener (403); When the fastener (403) is in a relaxed state, the sliding assembly (4) is adapted to move along the sliding groove (102); When the fastener (403) is in a tightened state, the first sliding member (401) and the second sliding member (402) clamp the groove wall of the sliding groove (102) to fix the sliding assembly (4) on the sliding groove (102).

3. The semiconductor shower head positioning fixture according to claim 2, wherein: A step surface (4021) is provided at one end close to the second sliding member (402), and the second clamping plate (5) is provided on the step surface (4021).

4. The positioning fixture for a semiconductor shower head according to claim 1, wherein: The support portion (101) comprises two inclined surfaces (1011) arranged opposite to each other, and the two inclined surfaces (1011) gradually shrink from the top of the base (1) to the bottom of the base (1).

5. The positioning fixture for a semiconductor shower head according to claim 4, wherein: The two inclined surfaces (1011) are symmetrical with respect to the central plane of the support portion (101).

6. The positioning fixture for a semiconductor shower head according to any one of claims 1 to 5, characterized in that: The first clamping plate (3) is provided with a relief notch (301) for avoiding the installation groove (201) of the nozzle (2), and the relief notch (301) is an arc-shaped structure.

7. The positioning fixture for a semiconductor shower head according to any one of claims 1 to 5, characterized in that: The first clamping plate (3) and the second clamping plate (5) are arranged in parallel.

8. The positioning fixture for a semiconductor shower head according to any one of claims 1 to 5, characterized in that: The axis of the sliding groove (102) is arranged perpendicular to the first clamping plate (3).

9. The positioning fixture for a semiconductor shower head according to any one of claims 1 to 5, characterized in that: The sliding groove (102) is a "T"-shaped groove.

10. The positioning fixture for a semiconductor shower head according to any one of claims 1 to 5, characterized in that: It also includes a screw mechanism (6), wherein a movable slider (601) is provided on the screw mechanism (6), and the base (1) is fixed on the slider (601).

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