Protection system applied to PECVD300 machine table gas circuit

Abstract

The utility model discloses a protection system applied to a gas circuit of a PECVD 300 machine. The protection system comprises a gas storage device, a system controller, a gas circuit protection module provided with a gaseous substance interlocking switch circuit, a gas cabinet and a gas reaction chamber, the gas storage device comprises a plurality of gas sub-devices; the system controller is electrically connected with the gas storage device and the gas circuit protection module and is used for sending a gas sub-device control command and a gaseous substance interlocking control command; a transmission pipeline connected with each gas sub-device is arranged in the gas cabinet, and the transmission pipeline is provided with a pipeline shut-off valve; the gas storage device controls the corresponding gas sub-device to convey corresponding gas into the transmission pipeline through the gas sub-device control command; the gaseous substance interlocking switch circuit comprises a plurality of relay switches which are arranged on the transmission pipeline and are used for controlling opening and closing of the pipeline shutoff valve; and the plurality of relay switches are opened and closed under a gaseous substance interlocking control command so as to adjust a gas transmission path of the transmission pipeline, so that interlocking gas is conveyed to the gas reaction chamber. The problems that when existing PECVD works, a necessary and reliable gas path protection mechanism is not needed to ensure that the supply of each gas is strictly controlled, switching can be carried out only under the safe condition, and therefore harmful gas is mixed and serious loss is caused once the conditions of system faults or misoperation and the like occur are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of gas circuit protection, in particular to a protection system applied to the gas circuit of a PECVD300 machine. Background Art

[0002] PECVD film deposition requires a variety of gas supplies. Generally, multiple channels of specialty gases are fed into the reaction chamber through a gas cabinet. The system controller controls the output of each channel within the gas cabinet by switching the channels on and off. However, since the PECVD300 machine's gas circuits primarily use toxic and hazardous specialty gases, improper control of these gases can have extremely serious consequences. It is particularly important to note that mixing certain gases is strictly prohibited, as this can lead to unpredictable and dangerous situations. Therefore, during PECVD300 machine operation, precise control of the gas output switches in the gas circuits is crucial. This is not only crucial for ensuring a smooth production process, but also essential for operator safety. The applicant has discovered in practice that existing PECVD operating methods often control gas output into the chamber through the system controller's control of gas switches. However, this approach lacks a necessary and reliable gas circuit protection mechanism to ensure that the supply of each gas is strictly controlled and that switching can only be performed under safe conditions. Consequently, in the event of a system failure or operational error, the mixing of hazardous gases can result in significant losses. Summary of the Invention

[0003] The utility model provides a protection system applied to the gas circuit of a PECVD300 machine to overcome the above technical problems.

[0004] In order to achieve the above purpose, the technical solution of the utility model is:

[0005] A gas circuit protection system for a PECVD300 machine includes a gas storage device, a system controller, a gas circuit protection module with a gaseous substance interlock switch circuit, a gas cabinet, and a gas reaction chamber.

[0006] The gas storage device includes several gas sub-devices for collecting and storing gaseous substances used in the PECVD300 tool;

[0007] The system controller is electrically connected to the gas storage device and the gas circuit protection module respectively, and is used to send gas sub-device control commands and gaseous material interlocking control commands;

[0008] The transmission pipelines connected to each gas sub-device are laid out in the gas cabinet, and the transmission pipelines are equipped with pipeline shut-off valves;

[0009] One end of the transmission pipeline is connected to the gas storage device, and the other end is connected to the gas reaction chamber;

[0010] The gas storage device controls the corresponding gas sub-device to deliver the corresponding gas to the transmission pipeline through the gas sub-device control command;

[0011] The gaseous material interlock switch circuit includes multiple relay switches arranged on the transmission pipeline for controlling the opening and closing of the pipeline shut-off valve; and under the gaseous material interlock control command, the multiple relay switches adjust the gas transmission path of the transmission pipeline by opening and closing themselves, thereby realizing the delivery of interlock gas to the gas reaction chamber.

[0012] Furthermore, the gas path protection module includes an input interface unit, a gaseous substance interlock switch circuit, and an output interface unit mounted on a PCB board;

[0013] The input interface unit includes a first D_SUB25P plug and a second D_SUB25P plug; and the input interface unit is connected to the system controller to receive the gaseous material interlock control command of the system controller to realize the control of the gaseous material interlock switch circuit;

[0014] The output interface unit includes a third D_SUB25P plug and a fourth D_SUB25P plug, and the output interface unit is connected to the gaseous substance interlock switch circuit.

[0015] Furthermore, the gas circuit protection module also includes a state feedback module and an early warning control module;

[0016] The state feedback module is connected to the gaseous material interlock switch circuit and includes a plurality of resistors and LED lights connected in sequence, which are used to provide light status indication and corresponding indication signals when the pipeline shut-off valve on the corresponding transmission pipeline is opened or closed;

[0017] The early warning control module is used to confirm whether the gas transmission path of the transmission pipeline is correct according to the indication signal, and is used to send an emergency stop control signal to the system controller when it is confirmed that the gas transmission path is wrong, so as to cut off the power of the system.

[0018] Furthermore, the gaseous substance interlock switch circuit includes a control switch circuit for each gaseous substance transmission pipeline;

[0019] And include SiH4 gas switching circuit, SiH4L gas switching circuit, SiF4 gas switching circuit, NH3 gas switching circuit, NF3 gas switching circuit, SiH4_PURGE gas switching circuit, SiH4L_PURGE gas switching circuit, SiF4_PURGE gas switching circuit, NH3_PURGE gas switching circuit and NF3_PURGE gas switching circuit.

[0020] Furthermore, the SiH4 gas switch circuit includes a first relay KA42, a second relay KA37, a third relay KA32, a fourth relay KA27, a fifth relay KA22, a sixth relay KA17, which are all initially closed, and an eighth relay KA1, which is initially open. One end of the first relay KA42 is connected to a first D_SUB25P plug. One end of the eighth relay KA1 is respectively connected to a state feedback unit and a third D_SUB25P plug.

[0021] The SiH4L gas switch circuit includes a ninth relay KA43, a tenth relay KA38, an eleventh relay KA33, a twelfth relay KA23, a thirteenth relay KA18, which are all initially closed and a fourteenth relay KA5, which is initially open. One end of the ninth relay KA43 is connected to the first D_SUB25P plug. One end of the fourteenth relay KA5 is respectively connected to the state feedback unit and the third D_SUB25P plug.

[0022] The SiF4 gas switch circuit includes a fifteenth relay KA43, a sixteenth relay KA38, a seventeenth relay KA33, an eighteenth relay KA28, a nineteenth relay KA23, a twentieth relay KA10, a twenty-first relay KA13, and a twenty-second relay KA9, all of which are initially closed and connected in sequence; one end of the fifteenth relay KA43 is connected to the first D_SUB25P plug; one end of the twenty-second relay KA9 is respectively connected to the state feedback unit and the third D_SUB25P plug;

[0023] The SiH4_PURGE gas switch circuit includes a twenty-third relay KA45, a twenty-fourth relay KA40, a twenty-fifth relay KA35, a twenty-sixth relay KA19, a twenty-seventh relay KA14, a twentieth relay KA10, a twenty-eighth relay KA6, a twenty-ninth relay KA2, which are all initially closed, and a thirtieth relay KA22, which are initially open; one end of the twenty-third relay KA45 is connected to the first D_SUB25P plug; one end of the thirtieth relay KA22 is respectively connected to the state feedback unit and the third D_SUB25P plug;

[0024] The SiH4_PURGE gas switch circuit comprises the twenty-third relay KA45, the twenty-fourth relay KA40, the twenty-fifth relay KA35, the thirty-first relay KA20, the thirty-second relay KA15, the thirty-third relay KA11, the twenty-eighth relay KA6, the twenty-ninth relay KA2, and the thirty-fourth relay KA27, all of which are initially closed; one end of the twenty-third relay KA45 is connected with the first D_SUB25P plug; one end of the thirty-fourth relay KA27 is connected with the state feedback unit and the third D_SUB25P plug, respectively.

[0025] The SiF4_PURGE gas switch circuit comprises the thirty-fifth relay KA46, the first relay KA42, the thirty-sixth relay KA30, the thirty-seventh relay KA25, the thirty-first relay KA20, the thirty-second relay KA15, the thirty-third relay KA11, the thirty-eighth relay KA7, the thirty-ninth relay KA3, and the fortieth relay KA32, all of which are initially closed; one end of the thirty-fifth relay KA46 is connected with the first D_SUB25P plug; one end of the fortieth relay KA32 is connected with the state feedback unit and the third D_SUB25P plug, respectively.

[0026] The NH3 gas switch circuit comprises the forty-first relay KA44, the forty-second relay KA39, the forty-third relay KA34, the forty-fourth relay KA29, the forty-fifth relay KA24, the forty-sixth relay KA19, the twenty-second relay KA9, and the twenty-first relay KA13, all of which are initially closed; one end of the forty-first relay KA44 is connected with the second D_SUB25P plug; one end of the twenty-first relay KA13 is connected with the state feedback unit and the fourth D_SUB25P plug, respectively.

[0027] The NF3 gas switch circuit comprises the forty-first relay KA44, the forty-seventh relay KA39, the forty-eighth relay KA34, the forty-ninth relay KA29, the fiftieth relay KA24, the fifty-first relay KA14, the twentieth relay KA10, the fifty-second relay KA5, the eighth relay KA1, and the fifty-third relay KA17, all of which are initially closed; one end of the forty-first relay KA44 is connected with the second D_SUB25P plug; one end of the fifty-third relay KA17 is connected with the state feedback unit and the fourth D_SUB25P plug, respectively.

[0028] The NH3_PURGE gas switch circuit includes a fifty-fourth relay KA46, a fifty-fifth relay KA36, a fifty-sixth relay KA30, a fifty-seventh relay KA25, a fifty-ninth relay KA21, a sixtieth relay KA16, a sixtieth relay KA12, a thirty-eighth relay KA7, and a thirty-ninth relay KA3, all of which are initially closed, and a sixty-second relay KA37, all of which are initially open; one end of the fifty-fourth relay KA46 is connected to the second D_SUB25P plug; one end of the sixty-second relay KA37 is respectively connected to the state feedback unit and the fourth D_SUB25P plug;

[0029] The NF3_PURGE gas switch circuit includes a sixty-third relay KA41, a sixty-fourth relay KA36, a sixty-fifth relay KA31, a sixty-sixth relay KA26, a fifty-ninth relay KA21, a sixtieth relay KA16, a sixty-seventh relay KA12, a sixty-eighth relay KA8, a sixty-ninth relay KA4, which are all initially closed and a first relay KA42 which is initially open; one end of the sixty-third relay KA41 is connected to the second D_SUB25P plug; one end of the first relay KA42 is respectively connected to the state feedback unit and the fourth D_SUB25P plug.

[0030] Furthermore, the normally closed contacts of the 22nd relay KA9 are the 20th relay KA10, the 33rd relay KA11 and the 61st relay KA12;

[0031] The normally closed contacts of the 40th relay KA32 are the 17th relay KA33, the 48th relay KA34, the 25th relay KA35 and the 64th relay KA36;

[0032] The normally closed contacts of the eighth relay KA1 are the twenty-ninth relay KA2, the thirty-ninth relay KA3 and the sixty-ninth relay KA4;

[0033] The normally closed contacts of the 30th relay KA22 are the 19th relay KA23, the 50th relay KA24, the 57th relay KA25 and the 66th relay KA26;

[0034] The normally closed contacts of the fifty-second relay KA5 are the twenty-eighth relay KA6, the thirty-eighth relay KA7 and the sixty-eighth relay KA8;

[0035] The normally closed contacts of the thirty-fourth relay KA27 are the eighteenth relay KA28, the forty-ninth relay KA29, the fifty-sixth relay KA30, and the sixty-fifth relay KA31;

[0036] The normally closed contacts of the 21st relay KA13 are the 51st relay KA14, the 32nd relay KA15 and the 60th relay KA16;

[0037] The normally closed contacts of the sixty-second relay KA37 are the sixteenth relay KA38, the forty-seventh relay KA39, the twenty-fourth relay KA40 and the sixty-third relay KA41;

[0038] The normally closed contacts of the fifty-third relay KA17 are the thirteenth relay KA18, the forty-sixth relay KA19, the thirty-first relay KA20 and the fifty-ninth relay KA21;

[0039] The normally closed contacts of the first relay KA42 are the fifteenth relay KA43, the forty-first relay KA44, the twenty-third relay KA45 and the fifty-fourth relay KA46.

[0040] Beneficial effects: In view of the fact that the PECVD300 machine gas circuit involves a variety of toxic, harmful and reactive gases, in order to prevent safety hazards caused by improper mixing of gases, the utility model provides a protection system for the PECVD300 machine gas circuit. By adding a gas circuit protection module provided with a gaseous substance interlocking switch circuit between the system controller and the gas cabinet control switch, interlocking control of the pipeline shut-off valves on each transmission pipeline is achieved to prevent harmful gas mixing during misoperation or system failure. This solves the problem of the original gas circuit control method in which the operator only controls the switch in the gas cabinet through a software program to achieve gas control. During the process, due to program failure or operator error when tired or with limited energy, harmful gas mixing can easily cause very serious accidents. By adding a gaseous substance interlocking switch circuit, the software and hardware combined control of the PECVD300 machine gas circuit is achieved, which can greatly reduce accidents caused by program failure or human operation errors, and significantly improve the safety of the production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0042] Figure 1This is a schematic diagram of the utility model applied to the protection system of the gas circuit of the PECVD300 machine;

[0043] Figure 2 This is the schematic diagram of the first part of the circuit of the gas path protection module in this embodiment;

[0044] Figure 3 This is a connection diagram of the corresponding relays in the circuit principle diagram of the first part of this embodiment;

[0045] Figure 4 FIG2 is a schematic diagram of the second part of the circuit of the gas path protection module in this embodiment;

[0046] Figure 5 This is a connection diagram of the corresponding relays in the second part of the circuit principle diagram of this embodiment. DETAILED DESCRIPTION

[0047] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0048] This embodiment provides a protection system for the gas circuit of a PECVD300 machine. Figure 1 As shown, it includes a gas storage device, a system controller, a gas circuit protection module with a gaseous material interlock switch circuit, a gas cabinet, and a gas reaction chamber; the gas storage device includes several gas sub-devices for collecting and storing gaseous materials used in the PECVD300 tool; wherein the gaseous materials used in the PECVD300 tool include SiH4, SiH4L, SiF4, N2, He, NH3, NF3, N2O, Ar, SiH4_PURGE, SiH4L_PURGE, SiF4_PURGE, NH3_PURGE, and NF3_PURGE;

[0049] The system controller is electrically connected to the gas storage device and the gas circuit protection module respectively, and is used to send gas sub-device control commands and gaseous material interlocking control commands;

[0050] The transmission pipeline connected to each gas sub-device is arranged in the gas cabinet, and the transmission pipeline is equipped with a pipeline shut-off valve; one end of the transmission pipeline is connected to the gas storage device, and the other end is connected to the gas reaction chamber;

[0051] The gas storage device controls the corresponding gas sub-device to deliver the corresponding gas to the transmission pipeline through the gas sub-device control command;

[0052] The gaseous material interlock switch circuit includes multiple relay switches arranged on the transmission pipeline for controlling the opening and closing of the pipeline shut-off valve; and under the gaseous material interlock control command, the multiple relay switches adjust the gas transmission path of the transmission pipeline by opening and closing themselves, thereby realizing the delivery of interlock gas to the gas reaction chamber.

[0053] In this embodiment, multiple special gases are input into the reaction chamber through the gas cabinet, and the system controller controls the output of the gas into the chamber by controlling the switch of each special gas in the gas cabinet. The deposition and film formation of PECVD requires the generation of multiple gases, most of which are toxic and harmful special gases. Improper control will have very serious consequences, especially some gases cannot mix with each other, so it is particularly important to control the output switch of the gas. The gas circuit protection module is a gas protection module provided with a gaseous material interlock switch circuit added between the system controller and the gas cabinet control switch to prevent the mixing of harmful gases in the event of misoperation or system failure. The setting of the corresponding relay of the pipeline shut-off valve is determined by the preset gaseous material interlock relationship. Table 1 is a gaseous material interlock relationship table, wherein "X" indicates that the two gases corresponding to the row and column of the table cannot be mixed, and the yellow mark indicates that the two gases corresponding to the row and column of the table can be mixed.

[0054] Table 1. Gaseous substance interlocking relationship table

[0055]

[0056]

[0057] Specifically, the gas path protection module includes an input interface unit, a gaseous substance interlock switch circuit, and an output interface unit mounted on a PCB board; the input interface unit includes a first D_SUB25P plug J1 and a second D_SUB25P plug J2; and the input interface unit is connected to the system controller to receive the gaseous substance interlock control command of the system controller to control the gaseous substance interlock switch circuit; the output interface unit includes a third D_SUB25P plug J3 and a fourth D_SUB25P plug J4, and the output interface unit is connected to the gaseous substance interlock switch circuit;

[0058] The gas circuit protection module also includes a state feedback module and an early warning control module;

[0059] The state feedback module is connected to the gaseous material interlock switch circuit, and includes a plurality of resistors and LED lights connected in sequence, which are used to provide a light status indication and a corresponding indication signal when the pipeline shut-off valve on the corresponding transmission pipeline is opened or closed, such as: when the LED light is "on", it is indeed that the pipeline shut-off valve on the corresponding transmission pipeline is opened; when the LED light is "off", it is indeed that the pipeline shut-off valve on the corresponding transmission pipeline is closed; the early warning control module is used to confirm whether the gas transmission path of the transmission pipeline is correct according to the indication signal, and to send an emergency stop control signal to the system controller when it is confirmed that the gas transmission path is wrong, so as to power off the system; wherein the early warning control module is a control chip that can realize the control function using a PLC, etc., and is a functional module that is programmed according to the requirements based on the control chip, and the method for programming the early warning control module based on the control chip is an existing well-known technical content. In this embodiment, it only uses the existing control chip to realize the setting of the required function, which is not the invention point of the present application and will not be described in detail here;

[0060] The gaseous substance interlock switch circuit includes a plurality of relay switches arranged on the transmission pipeline for controlling the opening and closing of the pipeline shut-off valve; specifically, the gaseous substance interlock switch circuit is composed of 46 relays; Figures 2 to 4As shown, the gaseous substance interlock switch circuit includes a control switch circuit for each gaseous substance transmission pipeline; and includes a SiH4 gas switch circuit, a SiH4L gas switch circuit, a SiF4 gas switch circuit, an NH3 gas switch circuit, a NF3 gas switch circuit, a SiH4_PURGE gas switch circuit, a SiH4L_PURGE gas switch circuit, a SiF4_PURGE gas switch circuit, an NH3_PURGE gas switch circuit and a NF3_PURGE gas switch circuit; in a specific embodiment, the SiH4 gas switch circuit includes a first relay KA42, a second relay KA37, a third relay KA48, which are all initially closed and connected in sequence. KA32, the fourth relay KA27, the fifth relay KA22, the sixth relay KA17 and the eighth relay KA1 which are all initially disconnected; one end of the first relay KA42 is connected to the first D_SUB25P plug; one end of the eighth relay KA1 is respectively connected to the state feedback unit and the third D_SUB25P plug; the SiH4L gas switch circuit includes a ninth relay KA43, a tenth relay KA38, an eleventh relay KA33, a twelfth relay KA23, a thirteenth relay KA18 which are initially closed and connected in sequence; and a fourteenth relay KA5 which are initially disconnected; the ninth relay KA43 One end of the fourteenth relay KA5 is connected to the state feedback unit and the third D_SUB25P plug respectively; the SiF4 gas switch circuit includes a fifteenth relay KA43, a sixteenth relay KA38, a seventeenth relay KA33, an eighteenth relay KA28, a nineteenth relay KA23, a twentieth relay KA10, a twenty-first relay KA13 and a twenty-second relay KA9, all of which are initially open and connected in sequence; one end of the fifteenth relay KA43 is connected to the first D_SUB25P plug; one end of the twenty-second relay KA9 is respectively connected to the state feedback unit and the third D_SUB25P plug; the SiF4 gas switch circuit includes a fifteenth relay KA43, a sixteenth relay KA38, a seventeenth relay KA33, an eighteenth relay KA28, a nineteenth relay KA23, a twentieth relay KA10, a twenty-first relay KA13 and a twenty-second relay KA9, all of which are initially closed and connected in sequence; one end of the fifteenth relay KA43 is connected to the first D_SUB25P plug; one end of the twenty-second relay KA9 is respectively connected to the state feedback unit and the third D_SUB25P plug feedback unit and the third D_SUB25P plug; the SiH4_PURGE gas switch circuit includes a twenty-third relay KA45, a twenty-fourth relay KA40, a twenty-fifth relay KA35, a twenty-sixth relay KA19, a twenty-seventh relay KA14, a twentieth relay KA10, a twenty-eighth relay KA6, a twenty-ninth relay KA2, which are all initially closed and a thirtieth relay KA22, which are initially open; one end of the twenty-third relay KA45 is connected to the first D_SUB25P plug; one end of the thirtieth relay KA22 is respectively connected to the state feedback unit and the third D_SUB25P plug;The SiH4L_PURGE gas switch circuit includes a twenty-third relay KA45, a twenty-fourth relay KA40, a twenty-fifth relay KA35, a thirty-first relay KA20, a thirty-second relay KA15, a thirty-third relay KA11, a twenty-eighth relay KA6, a twenty-ninth relay KA2, and a thirty-fourth relay KA27, all of which are initially closed and are connected in sequence; one end of the twenty-third relay KA45 is connected to the first D_SUB25P plug; one end of the thirty-fourth relay KA27 is connected to the state feedback unit and the third D_SUB25P plug respectively. Plug; the SiF4_PURGE gas switch circuit includes a 35th relay KA46, a first relay KA42, a 36th relay KA30, a 37th relay KA25, a 31st relay KA20, a 32nd relay KA15, a 33rd relay KA11, a 38th relay KA7, a 39th relay KA3, and a 40th relay KA32, all of which are initially closed and connected in sequence; one end of the 35th relay KA46 is connected to the first D_SUB25P plug; one end of the 40th relay KA32 is respectively connected to the state feedback unit and the The third D_SUB25P plug; the NH3 gas switch circuit includes a 41st relay KA44, a 42nd relay KA39, a 43rd relay KA34, a 44th relay KA29, a 45th relay KA24, a 46th relay KA19, a 22nd relay KA9, and a 21st relay KA13, which are all initially closed and connected in sequence; one end of the 41st relay KA44 is connected to the second D_SUB25P plug; one end of the 21st relay KA13 is respectively connected to the state feedback unit and the fourth D_SUB25P plug; the N The F3 gas switch circuit includes a 41st relay KA44, a 47th relay KA39, a 48th relay KA34, a 49th relay KA29, a 50th relay KA24, a 51st relay KA14, a 20th relay KA10, a 52nd relay KA5, an 8th relay KA1, all of which are initially closed, and a 53rd relay KA17, all of which are initially open. One end of the 41st relay KA44 is connected to the second D_SUB25P plug. One end of the 53rd relay KA17 is respectively connected to the state feedback unit and the fourth D_SUB25P plug.The NH3_PURGE gas switch circuit includes a fifty-fourth relay KA46, a fifty-fifth relay KA36, a fifty-sixth relay KA30, a fifty-seventh relay KA25, a fifty-ninth relay KA21, a sixtieth relay KA16, a sixty-first relay KA12, a thirty-eighth relay KA7, a thirty-ninth relay KA3, and a sixty-second relay KA37, all of which are initially disconnected, which are connected in sequence; one end of the fifty-fourth relay KA46 is connected to the second D_SUB25P plug; one end of the sixty-second relay KA37 is respectively connected to the state feedback unit and the fourth D_SUB25P plug The NF3_PURGE gas switch circuit includes a sixty-third relay KA41, a sixty-fourth relay KA36, a sixty-fifth relay KA31, a sixty-sixth relay KA26, a fifty-ninth relay KA21, a sixtieth relay KA16, a sixty-seventh relay KA12, a sixty-eighth relay KA8, and a sixty-ninth relay KA4, all initially closed, and a first relay KA42, all initially open. One end of the sixty-third relay KA41 is connected to the second D_SUB25P plug; one end of the first relay KA42 is respectively connected to the state feedback unit and the fourth D_SUB25P plug.

[0061] In addition, a relay normally closed contact is provided in this embodiment, such as Figures 3 to 5As shown, the normally closed contacts of the 22nd relay KA9 are the 20th relay KA10, the 33rd relay KA11 and the 61st relay KA12; the normally closed contacts of the 40th relay KA32 are the 17th relay KA33, the 48th relay KA34, the 25th relay KA35 and the 64th relay KA36; the normally closed contacts of the 8th relay KA1 are the 29th relay KA2, the 39th relay KA3 and the 69th relay KA4; the normally closed contacts of the 30th relay KA22 are the 19th relay KA23, the 50th relay KA24, the 57th relay KA25 and the 66th relay KA26; the normally closed contacts of the 52nd relay KA5 are the 28th relay KA6, the 38th relay KA7 and the 68th relay KA8; the normally closed contacts of the 34th relay KA27 are The normally closed contacts are the eighteenth relay KA28, the forty-ninth relay KA29, the fifty-sixth relay KA30, and the sixty-fifth relay KA31; the normally closed contacts of the twenty-first relay KA13 are the fifty-first relay KA14, the thirty-second relay KA15, and the sixtieth relay KA16; the normally closed contacts of the sixty-second relay KA37 are the sixteenth relay KA38, the forty-seventh relay KA39, the twenty-fourth relay KA40, and the sixty-third relay KA41; the normally closed contacts of the fifty-third relay KA17 are the thirteenth relay KA18, the forty-sixth relay KA19, the thirty-first relay KA20, and the fifty-ninth relay KA21; the normally closed contacts of the first relay KA42 are the fifteenth relay KA43, the forty-first relay KA44, the twenty-third relay KA45, and the fifty-fourth relay KA46;

[0062] In this embodiment, the working process of the relay control circuit is described by taking the SiH4 gas switch circuit as an example: if SiH4 gas needs to be transported to the gas reaction chamber, the system controller controls the corresponding SiH4 gas sub-device in the gas storage device to be opened, and at the same time sends a gaseous material interlock control command to the gas path protection module to the eighth relay KA1, and controls the normally open contact of the eighth relay KA1 to be closed, so as to open the pipeline shut-off valve on the corresponding SiH4 gas transmission pipeline, thereby allowing the SiH4 gas to be transported to the gas reaction chamber through the transmission pipeline. At the same time, the normally closed contact of the eighth relay KA1 and the twenty-ninth relay KA2, the thirty-ninth relay KA3 and the sixty-ninth relay KA4 are opened;

[0063] That is, the eighth relay KA1 in the NF3 gas switch circuit is controlled to switch from the initial closed state to the open state, so as to control the pipeline shut-off valve on the corresponding gas transmission pipeline to close, thereby preventing NF3 from being transmitted to the gas reaction chamber; the twenty-ninth relay KA2 in the SiH4_PURGE gas switch circuit is controlled to switch from the initial closed state to the open state, so as to control the pipeline shut-off valve on the corresponding gas transmission pipeline to close, thereby preventing SiH4_PURGE from being transmitted to the gas reaction chamber; the twenty-ninth relay KA2 in the SiH4L_PURGE gas switch circuit is controlled to switch from the initial closed state to the open state, so as to control the pipeline shut-off valve on the corresponding gas transmission pipeline to close, thereby preventing SiH4L_PURGE from being transmitted to the gas reaction chamber; and the third relay KA2 in the SiF4_PURGE gas switch circuit is controlled to switch from the initial closed state to the open state, so as to control the pipeline shut-off valve on the corresponding gas transmission pipeline to close, thereby preventing SiH4L_PURGE from being transmitted to the gas reaction chamber. The nineteenth relay KA3 is converted from the initial closed state to the open state to control the pipeline shut-off valve on the corresponding gas transmission pipeline to close, thereby preventing SiF4_PURGE from being transmitted to the gas reaction chamber, and controlling the thirty-ninth relay KA3 in the NH3_PURGE gas switch circuit to be converted from the initial closed state to the open state to control the pipeline shut-off valve on the corresponding gas transmission pipeline to close, thereby preventing NH3_PURGE from being transmitted to the gas reaction chamber, and controlling the eighth relay KA1 in the NF3_PURGE gas switch circuit to be converted from the initial closed state to the open state to control the pipeline shut-off valve on the corresponding gas transmission pipeline to close, thereby preventing NF3_PURGE from being transmitted to the gas reaction chamber; thereby avoiding very serious losses caused by the mixing of harmful gases due to system failure or operational errors.

[0064] Compared with the prior art, this embodiment adds a gas circuit protection module with a gaseous substance interlock switch circuit between the system controller and the gas cabinet control switch to achieve interlock control of the pipeline shut-off valves on each transmission pipeline, thereby preventing harmful gas mixing in the event of misoperation or system failure. This solves the original gas circuit control method in which the operator only controls the switch in the gas cabinet through a software program to achieve gas control, thereby avoiding the problem of very serious accidents caused by harmful gas mixing due to program failure or operator error due to fatigue or limited energy. By adding a gaseous substance interlock switch circuit, the software and hardware combined control of the PECVD300 machine gas circuit is achieved, which can greatly reduce accidents caused by program failure or human operation errors, and significantly improve the safety of the production process.

[0065] Finally, it should be noted that: the above embodiments are used to illustrate the technical solutions of the present application, but not limited to them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A protection system for the gas circuit of a PECVD300 machine, characterized in that: It includes a gas storage device, a system controller, a gas circuit protection module with a gaseous substance interlock switch circuit, a gas cabinet, and a gas reaction chamber; The gas storage device includes several gas sub-devices for collecting and storing gaseous substances used in the PECVD300 tool; The system controller is electrically connected to the gas storage device and the gas circuit protection module respectively, and is used to send gas sub-device control commands and gaseous material interlocking control commands; The transmission pipelines connected to each gas sub-device are laid out in the gas cabinet, and the transmission pipelines are equipped with pipeline shut-off valves; One end of the transmission pipeline is connected to the gas storage device, and the other end is connected to the gas reaction chamber; The gas storage device controls the corresponding gas sub-device to deliver the corresponding gas to the transmission pipeline through the gas sub-device control command; The gaseous material interlock switch circuit includes multiple relay switches arranged on the transmission pipeline for controlling the opening and closing of the pipeline shut-off valve; and under the gaseous material interlock control command, the multiple relay switches adjust the gas transmission path of the transmission pipeline by opening and closing themselves, thereby realizing the delivery of interlock gas to the gas reaction chamber.

2. A protection system for the gas circuit of a PECVD300 machine according to claim 1, characterized in that: The gas circuit protection module includes an input interface unit, a gaseous substance interlock switch circuit and an output interface unit mounted on a PCB board; The input interface unit includes a first D_SUB25P plug and a second D_SUB25P plug; and the input interface unit is connected to the system controller to receive the gaseous material interlock control command of the system controller to realize the control of the gaseous material interlock switch circuit; The output interface unit includes a third D_SUB25P plug and a fourth D_SUB25P plug, and the output interface unit is connected to the gaseous substance interlock switch circuit.

3. A protection system for the gas circuit of a PECVD300 machine according to claim 2, characterized in that: The gas circuit protection module also includes a state feedback module and an early warning control module; The state feedback module is connected to the gaseous material interlock switch circuit and includes a plurality of resistors and LED lights connected in sequence, which are used to provide light status indication and corresponding indication signals when the pipeline shut-off valve on the corresponding transmission pipeline is opened or closed; The early warning control module is used to confirm whether the gas transmission path of the transmission pipeline is correct according to the indication signal, and is used to send an emergency stop control signal to the system controller when it is confirmed that the gas transmission path is wrong, so as to cut off the power of the system.

4. A protection system for the gas circuit of a PECVD300 machine according to claim 3, characterized in that: The gaseous substance interlock switch circuit includes a control switch circuit for each gaseous substance transmission pipeline; And include SiH4 gas switching circuit, SiH4L gas switching circuit, SiF4 gas switching circuit, NH3 gas switching circuit, NF3 gas switching circuit, SiH4_PURGE gas switching circuit, SiH4L_PURGE gas switching circuit, SiF4_PURGE gas switching circuit, NH3_PURGE gas switching circuit and NF3_PURGE gas switching circuit.

5. A protection system for the gas circuit of a PECVD300 machine according to claim 4, characterized in that: The SiH4 gas switch circuit includes a first relay KA42, a second relay KA37, a third relay KA32, a fourth relay KA27, a fifth relay KA22, a sixth relay KA17, which are all initially closed, and an eighth relay KA1, which are initially open. One end of the first relay KA42 is connected to a first D_SUB25P plug. One end of the eighth relay KA1 is respectively connected to a state feedback unit and a third D_SUB25P plug. The SiH4L gas switch circuit includes a ninth relay KA43, a tenth relay KA38, an eleventh relay KA33, a twelfth relay KA23, a thirteenth relay KA18, which are all initially closed and a fourteenth relay KA5, which is initially open. One end of the ninth relay KA43 is connected to the first D_SUB25P plug. One end of the fourteenth relay KA5 is respectively connected to the state feedback unit and the third D_SUB25P plug. The SiF4 gas switch circuit includes a fifteenth relay KA43, a sixteenth relay KA38, a seventeenth relay KA33, an eighteenth relay KA28, a nineteenth relay KA23, a twentieth relay KA10, a twenty-first relay KA13, and a twenty-second relay KA9, all of which are initially closed and connected in sequence; one end of the fifteenth relay KA43 is connected to the first D_SUB25P plug; one end of the twenty-second relay KA9 is respectively connected to the state feedback unit and the third D_SUB25P plug; The SiH4_PURGE gas switch circuit includes a twenty-third relay KA45, a twenty-fourth relay KA40, a twenty-fifth relay KA35, a twenty-sixth relay KA19, a twenty-seventh relay KA14, a twentieth relay KA10, a twenty-eighth relay KA6, a twenty-ninth relay KA2, which are all initially closed, and a thirtieth relay KA22, which are initially open; one end of the twenty-third relay KA45 is connected to the first D_SUB25P plug; one end of the thirtieth relay KA22 is respectively connected to the state feedback unit and the third D_SUB25P plug; The SiH4L_PURGE gas switch circuit includes a twenty-third relay KA45, a twenty-fourth relay KA40, a twenty-fifth relay KA35, a thirty-first relay KA20, a thirty-second relay KA15, a thirty-third relay KA11, a twenty-eighth relay KA6, a twenty-ninth relay KA2, and a thirty-fourth relay KA27, all of which are initially closed and are connected in sequence; one end of the twenty-third relay KA45 is connected to the first D_SUB25P plug; one end of the thirty-fourth relay KA27 is respectively connected to the state feedback unit and the third D_SUB25P plug; The SiF4_PURGE gas switch circuit includes a 35th relay KA46, a first relay KA42, a 36th relay KA30, a 37th relay KA25, a 31st relay KA20, a 32nd relay KA15, a 33rd relay KA11, a 38th relay KA7, a 39th relay KA3, which are all initially closed, and a 40th relay KA32, which is initially open. One end of the 35th relay KA46 is connected to the first D_SUB25P plug. One end of the 40th relay KA32 is respectively connected to the state feedback unit and the third D_SUB25P plug. The NH3 gas switch circuit includes a 41st relay KA44, a 42nd relay KA39, a 43rd relay KA34, a 44th relay KA29, a 45th relay KA24, a 46th relay KA19, a 22nd relay KA9, which are all initially closed and a 21st relay KA13 which is initially open. One end of the 41st relay KA44 is connected to the second D_SUB25P plug. One end of the 21st relay KA13 is respectively connected to the state feedback unit and the fourth D_SUB25P plug. The NF3 gas switch circuit includes a 41st relay KA44, a 47th relay KA39, a 48th relay KA34, a 49th relay KA29, a 50th relay KA24, a 51st relay KA14, a 20th relay KA10, a 52nd relay KA5, an 8th relay KA1, which are all initially closed and a 53rd relay KA17, which is initially open. One end of the 41st relay KA44 is connected to the second D_SUB25P plug. One end of the 53rd relay KA17 is respectively connected to the state feedback unit and the fourth D_SUB25P plug. The NH3_PURGE gas switch circuit includes a fifty-fourth relay KA46, a fifty-fifth relay KA36, a fifty-sixth relay KA30, a fifty-seventh relay KA25, a fifty-ninth relay KA21, a sixtieth relay KA16, a sixtieth relay KA12, a thirty-eighth relay KA7, and a thirty-ninth relay KA3, all of which are initially closed, and a sixty-second relay KA37, all of which are initially open; one end of the fifty-fourth relay KA46 is connected to the second D_SUB25P plug; one end of the sixty-second relay KA37 is respectively connected to the state feedback unit and the fourth D_SUB25P plug; The NF3_PURGE gas switch circuit includes a sixty-third relay KA41, a sixty-fourth relay KA36, a sixty-fifth relay KA31, a sixty-sixth relay KA26, a fifty-ninth relay KA21, a sixtieth relay KA16, a sixty-seventh relay KA12, a sixty-eighth relay KA8, a sixty-ninth relay KA4, which are all initially closed and a first relay KA42 which is initially open; one end of the sixty-third relay KA41 is connected to the second D_SUB25P plug; one end of the first relay KA42 is respectively connected to the state feedback unit and the fourth D_SUB25P plug.

6. A protection system for the gas circuit of a PECVD300 machine according to claim 5, characterized in that: The normally closed contacts of the 22nd relay KA9 are the 20th relay KA10, the 33rd relay KA11 and the 61st relay KA12; The normally closed contacts of the 40th relay KA32 are the 17th relay KA33, the 48th relay KA34, the 25th relay KA35 and the 64th relay KA36; The normally closed contacts of the eighth relay KA1 are the twenty-ninth relay KA2, the thirty-ninth relay KA3 and the sixty-ninth relay KA4; The normally closed contacts of the 30th relay KA22 are the 19th relay KA23, the 50th relay KA24, the 57th relay KA25 and the 66th relay KA26; The normally closed contacts of the fifty-second relay KA5 are the twenty-eighth relay KA6, the thirty-eighth relay KA7 and the sixty-eighth relay KA8; The normally closed contacts of the thirty-fourth relay KA27 are the eighteenth relay KA28, the forty-ninth relay KA29, the fifty-sixth relay KA30, and the sixty-fifth relay KA31; The normally closed contacts of the 21st relay KA13 are the 51st relay KA14, the 32nd relay KA15 and the 60th relay KA16; The normally closed contacts of the sixty-second relay KA37 are the sixteenth relay KA38, the forty-seventh relay KA39, the twenty-fourth relay KA40 and the sixty-third relay KA41; The normally closed contacts of the fifty-third relay KA17 are the thirteenth relay KA18, the forty-sixth relay KA19, the thirty-first relay KA20 and the fifty-ninth relay KA21; The normally closed contacts of the first relay KA42 are the fifteenth relay KA43, the forty-first relay KA44, the twenty-third relay KA45 and the fifty-fourth relay KA46.

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