Online gas analysis system and hydrogen production equipment

The online gas analysis system monitors the hydrogen and oxygen gas concentrations and humidity in real time, solving the problem of PEM membrane rupture that cannot be detected in time and ensuring the safe operation of the hydrogen production equipment.

CN223422781UActive Publication Date: 2025-10-10CUMMINS ENZE (GUANGDONG) HYDROGEN ENERGY TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202422767768.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-13
Publication Date
2025-10-10
Estimated Expiration
2034-11-13

AI Technical Summary

Technical Problem

In the prior art, when the pressure difference between hydrogen and oxygen exceeds the allowable range of the PEM membrane, the membrane rupture cannot be detected in time, resulting in a large amount of high-concentration hydrogen and oxygen mutual leakage, which can easily cause an explosion accident.

Method used

An online gas analysis system is designed, including an inlet, an outlet, a regulating valve, a filter, an analysis tube and a humidity sensor. By detecting gas concentration and humidity, the gas state is monitored in real time, and PEM rupture is detected in time and measures can be taken.

Benefits of technology

It realizes online, continuous and uninterrupted monitoring of hydrogen production equipment, can quickly respond to abnormal gas concentration, avoid explosion of hydrogen and oxygen mixture, and ensure equipment safety.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses an on-line gas analysis system and hydrogen production equipment, the on-line gas analysis system is applied to the hydrogen production equipment, the on-line gas analysis system comprises a sample inlet and a discharge outlet, one end of the sample inlet communicated with the discharge outlet is sequentially connected with a first regulating valve and a filter, one end of the discharge outlet communicated with the sample inlet is connected with a check valve, and the check valve is connected with a second regulating valve. A first analysis tube and a second analysis tube which are connected in parallel are arranged between the filter and the check valve, the first analysis tube is provided with an analysis unit, and the second analysis tube is provided with a humidity sensor. The hydrogen production equipment comprises at least two on-line gas analysis systems. The utility model can solve the problems that the pressure difference between hydrogen and oxygen at the two sides of the existing hydrogen production equipment exceeds the allowable range of the PEM membrane and the membrane rupture cannot be found in time, so that a large amount of high-concentration hydrogen and oxygen are mutually mixed, and the explosion accident is easy to occur.
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Description

Technical Field

[0001] The utility model belongs to the technical field of PEM water electrolysis hydrogen production, and particularly relates to an online gas analysis system and hydrogen production equipment. Background Art

[0002] In recent years, hydrogen energy technology, as one of the new energy sources, has been widely developed, especially the water electrolysis hydrogen production technology represented by PEM, which has significant advantages in safety, energy consumption, maintenance and other aspects compared with the traditional alkaline solution electrolysis hydrogen production method.

[0003] Normally, trace amounts of oxygen or hydrogen will cross the PEM membrane and enter the other pipe, but this concentration is far below the explosion limit. When the pressure difference between the two sides exceeds the allowable range, causing the membrane to rupture, large amounts of high-concentration hydrogen and oxygen will cross and mix, reaching the explosion limit. If exposed to fire, they will explode, which is extremely dangerous. Utility Model Content

[0004] The purpose of the utility model is to provide an online gas analysis system and hydrogen production equipment to solve the technical problem in the prior art that when the pressure difference between the hydrogen and oxygen sides exceeds the allowable range of the PEM membrane and the membrane ruptures, it cannot be discovered in time, resulting in a large amount of high-concentration hydrogen and oxygen mixing and easily causing explosion accidents.

[0005] The technical solutions adopted to solve the above technical problems are:

[0006] The utility model discloses an online gas analysis system, which is applied to hydrogen production equipment. The system comprises an inlet and a discharge port, wherein one end of the inlet connected to the discharge port is connected to a first regulating valve and a filter in sequence, and one end of the discharge port connected to the inlet is connected to a check valve, and a first analysis tube and a second analysis tube connected in parallel are provided between the filter and the check valve, wherein the first analysis tube is provided with an analysis unit, and the second analysis tube is provided with a humidity sensor.

[0007] The present invention has at least the following beneficial effects: a sampling port is connected to the hydrogen production equipment, gas is introduced through the sampling port, the gas flow rate is adjusted by a first regulating valve to the optimal flow rate required for detection by the analysis unit and humidity sensor, impurities are filtered out by a filter, and the gas enters the analysis unit of the first analysis tube and the humidity sensor of the second analysis tube, respectively. The analysis unit is used to detect gas concentration to obtain hydrogen concentration or oxygen concentration, and the humidity sensor detects gas humidity. The detected gas is discharged from the discharge port, and a check valve is used to prevent the detected gas or external air from flowing back from the discharge port into the online gas analysis system. If the PEM ruptures, the analysis unit can accurately detect an abnormal increase in gas concentration, allowing operators to quickly operate the hydrogen production equipment and avoid an explosion caused by a mixture of high-concentration hydrogen and oxygen.

[0008] As a further improvement of the above technical solution, when the sample inlet is connected to the oxygen pipeline, the analysis unit is a hydrogen analyzer;

[0009] And / or, when the sample inlet is connected to a hydrogen pipeline, the analysis unit is an oxygen analyzer.

[0010] As a further improvement of the above technical solution, when the analysis unit is the oxygen analyzer, the first analysis tube is provided with a four-way valve for sealing the oxygen analyzer, a nitrogen pipe is connected between the first regulating valve and the filter, one end of the nitrogen pipe is a purge port, and the nitrogen pipe is provided with a first switch valve and a second regulating valve.

[0011] As a further improvement of the above technical solution, when the sample inlet is connected to the oxygen pipeline, a dryer is provided in the first analysis tube, and the dryer is located between the filter and the analysis unit.

[0012] As a further improvement of the above technical solution, the online gas analysis system also includes a calibration tube, one end of which is a calibration port, and the other end of the calibration tube is connected to a first three-way valve, which is connected between the filter and the dryer.

[0013] As a further improvement of the above technical solution, a second switch valve is connected to the pipeline between the sampling port and the first regulating valve.

[0014] As a further improvement of the above technical solution, one end of the injection port is connected to a pressure gauge, the other end of the injection port is connected to a third regulating valve, and the other end of the third regulating valve is connected to a hydrogen production device.

[0015] As a further improvement of the above technical solution, the first analysis tube is provided with a first flow meter, and the second analysis tube is provided with a second flow meter.

[0016] As a further improvement of the above technical solution, the online gas analysis system also includes a pressure relief pipe, one end of which is connected between the first regulating valve and the filter, the other end of which is connected to the check valve, and a third flow meter is provided in the pressure relief pipe.

[0017] The utility model discloses a hydrogen production device, comprising at least two online gas analysis systems as described in any one of the above items.

[0018] The present invention has at least the following beneficial effects: at least two online gas analysis systems are respectively connected to the hydrogen pipeline and the oxygen pipeline of the hydrogen production equipment, and by detecting the oxygen concentration in the hydrogen pipeline and the hydrogen concentration in the oxygen pipeline, it is possible to promptly detect whether the PEM in the hydrogen production equipment is damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0020] Figure 1 This is a structural diagram of the online gas analysis system provided by an embodiment of the present utility model connected to a hydrogen pipeline;

[0021] Figure 2 The utility model provides an online gas analysis system connected to an oxygen pipeline.

[0022] The following are marked in the accompanying drawings:

[0023] 100, injection port; 110, first regulating valve; 120, filter; 130, pressure gauge; 140, second on-off valve;

[0024] 200, discharge port; 210, check valve;

[0025] 300, first analysis tube; 310, hydrogen analyzer; 320, oxygen analyzer; 330, dryer; 340, four-way valve; 350, first flow meter;

[0026] 400, second analysis tube; 410, humidity sensor; 420, second flow meter;

[0027] 500, nitrogen pipe; 510, purge port; 520, first switch valve; 530, second regulating valve;

[0028] 600, calibration pipe; 610, calibration port; 620, first three-way valve;

[0029] 700. Pressure relief pipe; 710. Third flow meter. DETAILED DESCRIPTION

[0030] This section will describe in detail the specific embodiments of the present invention. The preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and overall technical solution of the present invention, but it cannot be understood as a limitation on the scope of protection of the present invention.

[0031] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0032] In the description of the utility model, if there is a word such as "several" description, its meaning is one or more, the meaning of multiple is two and above, greater than, less than, exceed etc. It is understood as not including the number, above, below, within etc. It is understood as including the number. If the first, second, third is described, it is only used for distinguishing technical features for the purpose, and can not be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the sequence of indicated technical features.

[0033] In the description of the utility model, unless otherwise defined, the words such as setting, installation, connection should be understood in a broad sense, and the person skilled in the art can determine the specific meaning of the above words in the utility model according to the specific content of the technical scheme.

[0034] Referring to Figure 1 And Figure 2 , the utility model discloses an online gas analysis system and hydrogen production equipment are given several embodiments.

[0035] As Figure 1 And Figure 2 Indicated, the utility model embodiment's online gas analysis system is applied to hydrogen production equipment, and is used for monitoring hydrogen pipeline and oxygen pipeline.

[0036] It can be understood that the online gas analysis system includes sample inlet 100 and discharge port 200, the sample inlet 100 is used for connecting hydrogen production equipment, and the end of the sample inlet 100 communicated with the discharge port 200 is connected with first regulating valve 110 and filter 120 in sequence, as Figure 1 And Figure 2 Indicated, the first regulating valve 110 is used for adjusting the gas flow of hydrogen production equipment input, and the filter 120 is used for filtering the gas input by hydrogen production equipment.

[0037] It can be understood that the end of the discharge port 200 communicated with the sample inlet 100 is connected with check valve 210, as Figure 1 And Figure 2 Indicated, to avoid gas backflow to cause the gas in the online gas analysis system to meet the explosion limit.

[0038] It can be understood that the filter 120 and check valve 210 are provided with parallelly connected first analysis pipe 300 and second analysis pipe 400. The first analysis pipe 300 is provided with an analysis unit for analyzing gas concentration, and the second analysis pipe 400 is provided with a humidity sensor 410 for analyzing gas water content, as Figure 1 And Figure 2 Indicated.

[0039] With this setup, gas generated by the hydrogen production equipment is fed into the online gas analysis system through the inlet 100. The gas flow is first regulated by the first regulating valve 110 to meet the flow rate required by the analysis unit and / or humidity sensor 410. The gas then enters the filter 120 to filter out impurities. The filtered gas is then split into two, entering the first analysis tube 300 and the second analysis tube 400, respectively. Gas concentration data is obtained through the first analysis tube 300, while the water content and humidity of the gas are determined through the second analysis tube 400.

[0040] It is understandable that the online gas analysis system detects the gas concentration of the hydrogen production equipment in real time. When the PEM membrane in the hydrogen production equipment ruptures, the gas concentration detected by the analysis unit will rise abnormally. At this time, the operator can perform corresponding operations based on the rising gas concentration, such as shutting down the hydrogen production equipment, etc., to avoid further mixing of the continuously generated hydrogen and oxygen, and prevent the hydrogen production equipment from exploding.

[0041] It is understandable that the online gas analysis system can perform online, continuous and uninterrupted gas monitoring of hydrogen production equipment without the need for manual sampling by operators, providing strong guarantees for the safe production of hydrogen production equipment, and has a simple structure and easy maintenance.

[0042] It is understood that the first analysis tube 300 and the second analysis tube 400 connected in parallel can be connected to the filter 120 via a second three-way valve. Specifically, the second three-way valve includes an input end and two output ends. The input end of the second three-way valve is connected to the filter 120 pipeline, and the two output ends are connected to the first analysis tube 300 and the second analysis tube 400, respectively.

[0043] In this embodiment, the second three-way valve may be a T-type three-way valve or a Y-type three-way valve.

[0044] In this embodiment, the humidity sensor 410 is a dew point meter of model EASIDEW IS, which measures the dew point of the gas to obtain the water vapor concentration and humidity of the gas, thereby facilitating the determination of whether the hydrogen production equipment is in normal working condition.

[0045] It is understandable that when the sampling port 100 is connected to the oxygen pipeline, the analysis unit is a hydrogen analyzer 310 of model XTC-601, and the hydrogen analyzer 310 is used to detect the concentration of hydrogen that has leaked into the oxygen pipeline.

[0046] It is understandable that when the sampling port 100 is connected to the hydrogen pipeline, the analysis unit is the oxygen analyzer 320 of model GPR-1500, and the oxygen analyzer 320 is used to detect the concentration of oxygen leaking into the hydrogen pipeline.

[0047] With this arrangement, since the explosion limit range of hydrogen is 4% to 75.6% (volume concentration), the hydrogen analyzer 310 in the oxygen pipeline is used to detect the hydrogen concentration to prevent the volume concentration of hydrogen in the oxygen pipeline from being greater than or equal to 4%. The oxygen analyzer 320 in the hydrogen pipeline is used to detect the oxygen concentration to prevent the volume concentration of oxygen in the hydrogen pipeline from being greater than or equal to 24.4%, thereby preventing the mixed hydrogen and oxygen in the oxygen pipeline and hydrogen pipeline from reaching the explosion limit range of hydrogen.

[0048] It is understood that oxygen analyzer 320 generally uses electrochemical principles to detect oxygen concentration. To ensure the reliability of oxygen analyzer 320's measurements, hydrogen analyzer 310 must be continuously purged with nitrogen after shutdown and before reactivation. After the oxygen analyzer 320 is shut down, the nitrogen must be sealed to ensure that even if it is not used for a long time, the oxygen analyzer 320 will not be poisoned by excessive oxygen and cause damage to the probe.

[0049] In this regard, when the analysis unit is an oxygen analyzer 320, the first analysis tube 300 is provided with a four-way valve 340, which is used to seal the oxygen analyzer 320. Figure 1 Specifically, a first end of the four-way valve 340 is connected to the filter 120 via the first analysis tube 300, a second end of the four-way valve 340 is connected to the check valve 210 via the first analysis tube 300, and a third end and a fourth end of the four-way valve 340 are connected to the input and output pipes of the oxygen analyzer 320, respectively.

[0050] It is understood that a nitrogen pipe 500 for conveying nitrogen is connected between the first regulating valve 110 and the filter 120. One end of the nitrogen pipe 500 is a purge port 510, which is connected to a nitrogen bottle to input nitrogen. Figure 1 As shown. The nitrogen pipe 500 is provided with a first switch valve 520 to control whether nitrogen is passed in. The nitrogen pipe 500 is provided with a second regulating valve 530 to adjust the pressure of nitrogen output from the nitrogen bottle, as shown. Figure 1 shown.

[0051] With this arrangement, after shutdown, the first on-off valve 520 is opened, and nitrogen is introduced from the nitrogen bottle into the nitrogen pipe 500. After being regulated by the second regulating valve 530, it flows sequentially through the filter 120, the four-way valve 340, the oxygen analyzer 320, and the check valve 210, and finally is discharged from the discharge port 200, so that the oxygen and hydrogen in the first analysis pipe 300 and the oxygen analyzer 320 are discharged. When the nitrogen fills the oxygen analyzer 320 and the four-way valve 340, the first on-off valve 520 and the four-way valve 340 are closed, so that the nitrogen is sealed in the oxygen analyzer 320.

[0052] In the embodiment, the first switch valve 520 is an electromagnetic valve, which is opened or closed by electromagnetic control to open or close the nitrogen pipe 500. The second regulating valve 530 is a pressure reducing valve, which reduces the pressure of the nitrogen gas input from the nitrogen cylinder to the working pressure allowed by the four-way valve 340 and the oxygen analyzer 320.

[0053] It can be understood that when the sample inlet 100 is connected to the oxygen pipeline, the first analysis pipe 300 is provided with a dryer 330, which is located between the filter 120 and the hydrogen analyzer 310, as shown in Figure 2 The gas is dried by the dryer 330 before being analyzed by the hydrogen analyzer 310, so as to avoid the water in the gas affecting the detection of the hydrogen concentration by the hydrogen analyzer 310.

[0054] It can be understood that the dryer 330 can be a vacuum dryer 330, an adsorption dryer or a refrigeration dryer. In the embodiment, the dryer 330 is a drying pipe with an adsorbent.

[0055] It can be understood that the online gas analysis system comprises a calibration pipe 600, one end of the calibration pipe 600 being a calibration port 610 for inputting standard gas, the other end of the calibration pipe 600 being communicated with a first three-way valve 620, the first three-way valve 620 being communicated between the filter 120 and the analysis unit, as shown in Figure 1 and Figure 2 Specifically, the first three-way valve 620 comprises two input ends and one output end, the two input ends of the first three-way valve 620 being connected with the filter 120 and the calibration pipe 600 respectively, and the output end of the first three-way valve 620 being connected with the analysis unit. The standard gas enters through the calibration port 610, and then enters the analysis unit along the calibration pipe 600 and the first three-way valve 620 for calibration.

[0056] In the embodiment, the first three-way valve 620 can be a T-shaped three-way valve or a Y-shaped three-way valve.

[0057] It can be understood that the sample inlet 100 and the first regulating valve 110 are provided with a second switch valve 140, as shown in Figure 1 and Figure 2 The opposite ends of the second switch valve 140 are respectively connected with the sample inlet 100 and the first regulating valve 110. By controlling the opening or closing state of the second switch valve 140, whether the gas generated by the hydrogen production equipment enters the online gas analysis system is controlled.

[0058] In the embodiment, when the sample inlet 100 is connected to the oxygen pipeline, the second switch valve 140 is a ball valve, and the first regulating valve 110 is a needle valve.

[0059] In this embodiment, when the injection port 100 is connected to the hydrogen pipeline, the second switch valve 140 is a solenoid valve, and the first regulating valve 110 is a pressure stabilizing valve.

[0060] It is understood that one end of the injection port 100 is connected to a pressure gauge 130. Figure 1 and Figure 2 As shown, the other end of the injection port 100 is connected to a third regulating valve, and the other end of the third regulating valve is connected to the hydrogen production equipment. Specifically, a pressure gauge 130 is provided between the first regulating valve 110 and the filter 120 to detect the pressure of the input gas.

[0061] It is understandable that the third regulating valve is used to adjust the pressure of the gas input by the hydrogen production equipment so that the gas pressure meets the allowable working pressure of the analysis unit and the humidity sensor 410 .

[0062] With this arrangement, the operator can check the gas pressure through the pressure gauge 130 and then adjust the gas pressure by adjusting the third regulating valve. In this embodiment, the third regulating valve is a pressure reducing valve.

[0063] It is understood that the first analysis tube 300 is provided with a first flow meter 350, and the first flow meter 350 is used to detect the flow of gas entering the first analysis tube 300, such as Figure 1 and Figure 2 shown.

[0064] In this embodiment, when the sample inlet 100 is connected to the oxygen pipeline, the first flow meter 350 is located between the dryer 330 and the analysis unit. Figure 2 When the injection port 100 is connected to the hydrogen pipeline, the first flow meter 350 is located between the four-way valve 340 and the check valve 210, as shown. Figure 1 shown.

[0065] It is understood that the second analysis tube 400 is provided with a second flow meter 420, and the second flow meter 420 is used to detect the gas flow entering the second analysis tube 400. Figure 1 and Figure 2 In this embodiment, the second flow meter 420 is located between the filter 120 and the humidity sensor 410 .

[0066] It is understood that the online gas analysis system includes a pressure relief pipe 700, one end of the pressure relief pipe 700 is connected between the first regulating valve 110 and the filter 120, the other end of the pressure relief pipe 700 is connected to the check valve 210, and a third flow meter 710 is provided in the pressure relief pipe 700. Figure 1 and Figure 2Specifically, one end of the pressure relief pipe 700 is located between the pressure gauge 130 and the filter 120. The gas output from the pressure gauge 130 can be divided into two parts and input into the filter 120 and the pressure relief pipe 700 respectively. The other end of the pressure relief pipe 700 is connected to the check valve 210. The gas input into the pressure relief pipe 700 is directly discharged through the check valve 210 and the exhaust port 200.

[0067] Furthermore, the pressure relief pipe 700 is provided with a third regulating valve, which regulates the gas flow input into the pressure relief pipe 700 to prevent the gas from being directly discharged from the pressure relief pipe 700. In this embodiment, the third regulating valve is a pressure relief valve.

[0068] Furthermore, the online gas analysis system includes a controller, which is electrically connected to the analysis unit and humidity sensor 410 to collect and store data detected by the analysis unit and humidity sensor 410. The controller is electrically connected to valves such as the first regulating valve 110, the first on-off valve 520, and the second regulating valve 530 to facilitate the control of the opening and closing and adjustment of multiple valves, making it easy to operate and maintain.

[0069] It is understood that the controller can be a single-chip microcomputer or PCL controller that can simply control multiple valves such as the first regulating valve 110. It should be noted that the control method of the controller does not fall within the scope of protection of this utility model and is considered to be prior art. This utility model mainly protects the connection method of the controller.

[0070] As will be understood, the controller is equipped with a wireless communication component, which wirelessly connects the controller to the analysis panel. The operator can directly view data such as hydrogen concentration, oxygen concentration, gas pressure, and flow rate through the analysis panel. The bottom of the analysis panel is equipped with a pulley for movement, which facilitates the operator to view data and adjust multiple valves.

[0071] A hydrogen production device according to an embodiment of the present invention includes at least two online gas analysis systems, one of which is connected to an oxygen pipeline to detect the hydrogen concentration and dew point in the oxygen pipeline, and the other is connected to a hydrogen pipeline to detect the oxygen concentration and dew point in the hydrogen pipeline.

[0072] With this arrangement, the hydrogen concentration in the oxygen pipeline and the oxygen concentration in the hydrogen pipeline are monitored in real time through the online gas analysis system, which makes it easy to quickly suspend the hydrogen production equipment when the PRM membrane ruptures and perform corresponding operations to avoid further mixing of hydrogen and oxygen and causing an explosion.

[0073] The above specifically describes the preferred embodiments of the present invention, but the present invention is not limited to the embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. An online gas analysis system, characterized in that: The invention is applied to hydrogen production equipment, and includes an inlet and an outlet. One end of the inlet connected to the outlet is connected to a first regulating valve and a filter in sequence. One end of the outlet connected to the inlet is connected to a check valve. A first analysis tube and a second analysis tube connected in parallel are provided between the filter and the check valve. The first analysis tube is provided with an analysis unit, and the second analysis tube is provided with a humidity sensor.

2. The online gas analysis system according to claim 1, characterized in that: When the sample inlet is connected to an oxygen line, the analysis unit is a hydrogen analyzer; And / or, when the sample inlet is connected to a hydrogen pipeline, the analysis unit is an oxygen analyzer.

3. The online gas analysis system according to claim 2, characterized in that: When the analysis unit is the oxygen analyzer, the first analysis tube is provided with a four-way valve for sealing the oxygen analyzer, a nitrogen pipe is connected between the first regulating valve and the filter, one end of the nitrogen pipe is a purge port, and the nitrogen pipe is provided with a first switch valve and a second regulating valve.

4. The online gas analysis system according to claim 1, characterized in that: When the sample inlet is connected to the oxygen pipeline, a dryer is provided in the first analysis tube, and the dryer is located between the filter and the analysis unit.

5. The online gas analysis system according to claim 4, characterized in that: It also includes a calibration tube, one end of which is a calibration port, and the other end of which is connected to a first three-way valve, which is connected between the filter and the dryer.

6. The online gas analysis system according to claim 1, characterized in that: A second switch valve is connected to a pipeline between the injection port and the first regulating valve.

7. The online gas analysis system according to claim 1, characterized in that: One end of the injection port is connected to a pressure gauge, the other end of the injection port is connected to a third regulating valve, and the other end of the third regulating valve is connected to hydrogen production equipment.

8. The online gas analysis system according to claim 1, characterized in that: The first analysis tube is provided with a first flow meter, and the second analysis tube is provided with a second flow meter.

9. The online gas analysis system according to claim 1, characterized in that: It also includes a pressure relief pipe, one end of which is connected between the first regulating valve and the filter, the other end of which is connected to the check valve, and a third flow meter is provided in the pressure relief pipe.

10. A hydrogen production device, characterized in that: The method comprises at least two online gas analysis systems according to any one of claims 1 to 9.