Circulating cooling water bilateral channel device connected with semiconductor test equipment

Abstract

The utility model relates to the technical field of semiconductor equipment circulating cooling water shunting devices, and discloses a circulating cooling water double-side channel device connected with semiconductor test equipment, which comprises a circulating cooling water main pipe, a first connector, a shutoff valve module and a second connector, and is characterized in that the first connector is arranged at one end of the circulating cooling water main pipe, and the shutoff valve module is arranged at the other end of the circulating cooling water main pipe; a shutoff valve module is arranged on one side of the first connector, and a second connector is arranged on one side of the shutoff valve module. The pipeline butt-joint sealing device is reasonable in structure, the pipeline butt-joint sealing device module is installed, so that the pipeline butt-joint sealing device can be used for connecting pipelines needing to be in butt joint, and after connection, the pipeline butt-joint sealing device can restrain overflow of large-flow water like a pipeline butt-joint clamping plate; and the foaming agent of the pipeline butt joint sealer module can be used for plugging the narrow space in the pipeline butt joint sealer module, so that the possibility that the semiconductor test equipment is corroded due to the fact that water flows out of a gap is reduced to a certain extent.

Description

Technical Field

[0001] The utility model relates to the technical field of circulating cooling water diversion devices for semiconductor equipment, in particular to a circulating cooling water double-sided channel device connected to semiconductor testing equipment. Background Art

[0002] Circulating cooling water is an industrial water system that uses heat exchangers or direct contact heat exchange, then cools water in cooling towers before recycling to conserve water resources. Its core principle is to effectively reduce water temperature and maintain water quality through three processes: evaporation, contact, and radiation. This ensures that water meets the cooling needs of industrial production processes.

[0003] However, the existing devices still have certain disadvantages: First, the connection devices for the circulating cooling water main pipes and branches of existing semiconductor test equipment are generally single-sided straight channels. When the filter screen in the device is clogged or other abnormal conditions occur, the water supply must be cut off and the device must be shut down for cleaning or maintenance. This situation seriously reduces the working efficiency and workload of the test equipment and even affects the project progress; second, some pipe connection parts are connected by hot melt welding or pipe clamps. Although this can prevent large amounts of water from flowing out of the pipes, there may still be certain small gaps in the connection parts, causing small water flows to flow out from the welding gaps or the clamping gaps, corroding the test equipment. Utility Model Content

[0004] (1) Technical problems solved

[0005] In response to the shortcomings of the existing technology, the utility model provides a double-sided channel device for circulating cooling water connected to semiconductor testing equipment, which solves the problem that most existing devices have single-sided channels, maintenance requires suspending testing work, and there may be gaps at the joints of the pipes of the existing devices, and small water flows may flow out from the gaps to corrode the testing equipment.

[0006] (2) Technical solution

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions: a circulating cooling water bilateral channel device connecting semiconductor testing equipment, including a circulating cooling water main pipe, a first connector is provided at one end of the circulating cooling water main pipe, a shut-off valve module is provided on one side of the first connector, a second connector is provided on one side of the shut-off valve module, a liquid delivery pipe is provided on one side of the second connector, a pipe docking closure module is provided on the surface of the liquid delivery pipe, a diverter is installed on the liquid delivery pipe through the pipe docking closure module, a diverter is fixedly connected to the side of the diverter, a spherical valve module is threadedly connected to the surface of the diverter, a branch pipe is provided on one side of the spherical valve module, and a filter module is provided on the top of the spherical valve module.

[0008] Optionally, the shut-off valve module includes a shut-off valve body, a first threaded hole is provided on the left side of the shut-off valve body, a first bolt is threadedly connected to the inner wall of the first threaded hole, and the first threaded hole is threadedly connected to a first connector through the first bolt, a second threaded hole is provided on the right side of the shut-off valve body, a second bolt is threadedly connected to the inner wall of the second threaded hole, and the second threaded hole is threadedly connected to the second connector through the second bolt, the top of the shut-off valve body is fixedly connected to a valve cover base, a third threaded hole is provided on the top of the valve cover base, a third bolt is threadedly connected to the inner wall of the third threaded hole, and the third threaded hole is threadedly connected to the valve cover through the third bolt, and the top of the valve cover is fixedly connected to the valve stem base.

[0009] Optionally, a fourth threaded hole is provided at the top of the valve stem base, the inner wall of the fourth threaded hole is threadedly connected to the valve stem, a handwheel is provided at the top of the valve stem, a baffle is provided at the bottom end of the valve stem, the top of the baffle is fixedly connected to a rotating shaft base, a first hole is provided at the top of the rotating shaft base, a first rotating shaft is installed on the inner wall of the first hole, the first rotating shaft and the valve stem are adapted to each other, a second hole is provided at the top of the valve cover base, the second hole and the baffle are adapted to each other.

[0010] Optionally, the pipe docking closer module includes a top cover plate, a first injection valve is provided on the top of the top cover plate, a first assembler is fixedly connected to the top of the first assembler, a fifth threaded hole is provided on the top of the first assembler, a first foaming agent pressure tank is threadedly connected to the inner wall of the fifth threaded hole, a threaded hole base is fixedly connected to the surface of the top cover plate, a sixth threaded hole is provided on the top of the threaded hole base, a third bolt is threadedly connected to the inner wall of the sixth threaded hole, the sixth threaded hole is threadedly connected to the bottom cover plate through the third bolt, and a first foaming agent release hole is provided on the inner wall of the top cover plate.

[0011] Optionally, a first rubber pad is provided on the inner wall of the top cover plate, a second rubber pad is provided on the inner wall of the bottom cover plate, a second injection valve is provided on the bottom of the bottom cover plate, a second assembler is fixedly connected to the bottom of the second injection valve, a seventh threaded hole is provided on the bottom of the second assembler, a second foaming agent pressure tank is threadedly connected to the inner wall of the seventh threaded hole, and a second foaming agent release hole is provided on the inner wall of the bottom cover plate.

[0012] Optionally, the spherical valve module comprises a top of the spherical valve body fixedly connected with a rotating rod base, a third hole is formed in the top of the rotating rod base, a second rotating shaft is installed on the inner wall of the third hole, a rotating rod is arranged on the inner wall of the second rotating shaft, a handle is arranged on the top end of the rotating rod, an O-shaped ball is fixedly connected to the bottom end of the rotating rod, a fourth hole is formed in the surface of the O-shaped ball, and a thread is formed in the surface of one end of the spherical valve body.

[0013] Optionally, the filter module comprises a filter carrier, an eighth threaded hole is formed in one side of the filter carrier, a branch pipe is threadedly connected to the inner wall of the eighth threaded hole, a first sliding connection hole and a second sliding connection hole are sequentially formed in the top of the filter carrier from left to right, a first sliding tenon is fixedly connected to the inner wall of the first sliding connection hole, a second sliding tenon is fixedly connected to the inner wall of the second sliding connection hole, a first filter is slidingly connected to the first sliding connection hole through the first sliding tenon, and a second filter is slidingly connected to the second sliding connection hole through the second sliding tenon.

[0014] Optionally, a third sliding connection hole is formed in the side of the first filter, a first sliding groove is formed in the inner wall of the third sliding connection hole, a large-particle filter plate is slidingly connected to the inner wall of the first sliding groove, a first pull handle is fixedly connected to the top of the first filter, a fourth sliding connection hole is formed in the side of the second filter, a second sliding groove is formed in the inner wall of the fourth sliding connection hole, a fine-particle filter plate is slidingly connected to the inner wall of the second sliding groove, and a second pull handle is fixedly connected to the top of the second filter.

[0015] In conclusion, the technical effects and advantages of the present application are as follows:

[0016] 1. The device has a reasonable structure, the shunt and the shunt pipe are installed, corresponding spherical valve modules are installed on the shunt pipe to control the opening and closing of the shunt pipe, and a filter module is installed on the spherical valve module to filter impurities in water, compared with the traditional single-channel circulating water, the device is a double-channel device, even if one channel needs to be repaired or replaced due to damage or blockage of the filter screen, the corresponding spherical valve module of the channel to be repaired or replaced is closed first, and then the corresponding spherical valve module of the other channel is opened, so that the device can still be used for circulating water, and the normal operation of the semiconductor test equipment is not affected.

[0017] 2. The utility model discloses a device through the pipeline butt joint closer module installed, make the device can need butt joint pipeline connection, after connecting, the device can like pipeline butt joint clamping plate same as suppresses the large -flow water overflow, still can utilize the foaming agent of pipeline butt joint closer module to the narrow space of pipeline butt joint closer module is closed, to a certain extent, the possibility of semiconductor test equipment being corroded by water flow from the crack is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the structure schematic drawing of the utility model;

[0019] Figure 2 It is the intercepting valve module schematic drawing of the utility model;

[0020] Figure 3 It is the butt joint closer module schematic drawing of the utility model;

[0021] Figure 4 It is the spherical valve module schematic drawing of the utility model;

[0022] Figure 5 It is the filter module schematic drawing of the utility model.

[0023] In the drawing: 1, circulating cooling water main pipe; 2, first connector; 3, intercepting valve module; 301, intercepting valve main body; 302, valve cover base; 303, valve cover; 304, valve rod base; 305, valve rod; 306, hand wheel; 307, flow baffle; 308, first pivot; 4, second connector; 5, liquid delivery pipe; 6, pipeline butt joint closer module; 601, top cover plate; 602, first injection valve; 603, first assembler; 604, first foaming agent air pressure tank; 605, bottom cover plate; 606, first rubber pad; 607, second rubber pad; 608, second injection valve; 609, second assembler; 610, second foaming agent air pressure tank; 7, flow divider; 8, flow divider pipe; 9, spherical valve module; 901, spherical valve main body; 902, pivot base; 903, second pivot; 904, pivot rod; 905, steering handle; 906, O-shaped ball; 10, branch pipe; 11, filter module; 1101, filter carrier; 1102, first sliding tenon; 1103, second sliding tenon; 1104, first filter; 1105, second filter; 1106, large particle filter plate; 1107, first pull handle; 1108, fine particle filter plate; 1109, second pull handle. DETAILED DESCRIPTION

[0024] Clearly, the described embodiments are merely a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0025] Embodiment: refer to Figures 1-2 The utility model provides a kind of connecting semiconductor test equipment's circulating cooling water double-side channel device, including circulating cooling water main pipe 1, one end of circulating cooling water main pipe 1 is equipped with first connector 2, one side of first connector 2 is equipped with intercepting valve module 3, one side of intercepting valve module 3 is equipped with second connector 4, one side of second connector 4 is equipped with liquid delivery pipe 5, the surface of liquid delivery pipe 5 is equipped with pipe butt joint closer module 6, liquid delivery pipe 5 is installed with shunt 7 by pipe butt joint closer module 6, the side of shunt 7 is fixedly connected with shunt pipe 8, the surface of shunt pipe 8 is threadedly connected with spherical valve module 9, one side of spherical valve module 9 is equipped with branch pipe 10, the top of spherical valve module 9 is equipped with filter module 11.

[0026] First connector 2 is welded on circulating cooling water main pipe 1 using hot melt, shunt 7 is placed into pipe butt joint closer module 6 after pipe butt joint closer module 6 is placed on the surface of liquid delivery pipe 5, shunt pipe 8 and shunt 7 are integrally formed, spherical valve module 9 is rotated on the surface of shunt pipe 8, then branch pipe 10 is also installed on spherical valve module 9, finally filter module 11 is installed on spherical valve module 9, and installation is completed.

[0027] In use, circulating water will first pass through circulating cooling water main pipe 1 into intercepting valve module 3, and test personnel judge whether intercepting valve module 3 needs to be opened according to specific needs, when intercepting valve module 3 needs to be opened, test personnel need to open intercepting valve module 3 so that circulating cooling water flows out of intercepting valve module 3, enters liquid delivery pipe 5 and enters shunt 7 aligned with liquid delivery pipe 5 in pipe butt joint closer module 6, after passing through shunt 7, enters shunt pipe 8 and flows into spherical valve module 9, after test personnel specifically need to select which spherical valve module 9 corresponding to shunt pipe 8 to open, corresponding spherical valve module 9 is opened so that circulating cooling water enters branch pipe 10 connected to corresponding spherical valve module 9 and enters semiconductor test equipment, and filter module 11 will always filter impurities in circulating cooling water on spherical valve module 9.

[0028] The device is installed with a diverter 7 and a diverter pipe 8, and corresponding ball valve modules 9 are installed on the diverter pipe 8 to control the opening and closing of the diverter pipe 8, and a filter module 11 is installed on the ball valve module 9 to filter impurities in the water. Compared with the traditional single-sided channel of circulating water, this device is a double-sided channel. Even if one side of the channel needs to be repaired or replaced due to damage or blockage of the filter screen, the ball valve module 9 corresponding to the side that needs repair and replacement is closed first, and then the ball valve module 9 corresponding to the other side of the channel is opened, so that the device can still use circulating water without affecting the normal operation of the semiconductor testing equipment.

[0029] The shut-off valve module 3 includes a shut-off valve body 301, a first threaded hole is provided on the left side of the shut-off valve body 301, a first bolt is threadedly connected to the inner wall of the first threaded hole, and the first threaded hole is threadedly connected to the first connector 2 through the first bolt, a second threaded hole is provided on the right side of the shut-off valve body 301, a second bolt is threadedly connected to the inner wall of the second threaded hole, and the second connector 4 is threadedly connected to the second bolt, the top of the shut-off valve body 301 is fixedly connected to the valve cover base 302, the top of the valve cover base 302 is provided with a third threaded hole, a third bolt is threadedly connected to the inner wall of the third threaded hole, and the third threaded hole is threadedly connected to the third bolt. A valve cover 303 is threadedly connected, and the top of the valve cover 303 is fixedly connected to the valve stem base 304. A fourth threaded hole is provided on the top of the valve stem base 304, and the inner wall of the fourth threaded hole is threadedly connected to the valve stem 305. A handwheel 306 is provided on the top of the valve stem 305, and a baffle 307 is provided on the bottom end of the valve stem 305. The top of the baffle 307 is fixedly connected to the shaft base, and a first hole is provided on the top of the shaft base, and a first rotating shaft 308 is installed on the inner wall of the first hole. The first rotating shaft 308 and the valve stem 305 are adapted to each other. A second hole is provided on the top of the valve cover base 302, and the second hole and the baffle 307 are adapted to each other.

[0030] The first threaded hole, the second threaded hole and the shut-off valve body 301 are formed as one piece. Align the first connector 2 with the shut-off valve body 301, then screw the first bolt into the first threaded hole of the shut-off valve body 301 and continue to rotate until it is screwed into the first connector 2. Then align the second connector 4 with the shut-off valve body 301, and screw the second bolt into the second threaded hole of the shut-off valve body 301 and continue to rotate until it is screwed into the second connector 4. The valve cover base 302 and the shut-off valve body 301 are formed as one piece. Align the valve cover 303 and the valve cover base 302. Align, then pass the third bolt through the valve cover 303 and screw it into the third threaded hole of the valve cover base 302. The valve stem base 304 is welded to the valve cover 303, and the fourth threaded hole and the valve stem base 304 are integrally formed. The valve stem 305 is welded to the handwheel 306, and the rotating shaft base is welded to the baffle 307. Place the first rotating shaft 308 in the rotating shaft base on the baffle 307, screw the valve stem 305 into the fourth threaded hole of the valve stem base 304, and then insert the valve stem 305 into the first rotating shaft 308 after unscrewing it out to complete the installation.

[0031] During use, circulating cooling water enters the shut-off valve body 301. The tester rotates the handwheel 306 according to specific needs to drive the valve stem 305 to rotate in the fourth threaded hole of the valve stem base 304. The forward and reverse rotation of the valve stem 305 drives the baffle 307 to move vertically. During forward rotation, the baffle 307 moves upward, allowing the circulating cooling water to flow out. During reverse rotation, the baffle 307 moves downward, preventing the circulating cooling water from flowing out.

[0032] As a preferred implementation in this embodiment, Figure 3 As shown, the pipeline docking sealer module 6 includes a top cover plate 601, a first injection valve 602 is provided on the top of the top cover plate 601, a first assembler 603 is fixedly connected to the top of the first injection valve 602, a fifth threaded hole is provided on the top of the first assembler 603, a first foaming agent pressure tank 604 is threadedly connected to the inner wall of the fifth threaded hole, a threaded hole base is fixedly connected to the surface of the top cover plate 601, a sixth threaded hole is provided on the top of the threaded hole base, a third bolt is threadedly connected to the inner wall of the sixth threaded hole, and the sixth threaded hole is threadedly connected to the inner wall of the sixth threaded hole by the third bolt. There is a bottom cover plate 605, the inner wall of the top cover plate 601 is provided with a first foaming agent release hole, the inner wall of the top cover plate 601 is provided with a first rubber pad 606, the inner wall of the bottom cover plate 605 is provided with a second rubber pad 607, the bottom of the bottom cover plate 605 is provided with a second injection valve 608, the bottom of the second injection valve 608 is fixedly connected to the second assembler 609, the bottom of the second assembler 609 is provided with a seventh threaded hole, the inner wall of the seventh threaded hole is threadedly connected to the second foaming agent pressure tank 610, and the inner wall of the bottom cover plate 605 is provided with a second foaming agent release hole.

[0033] The first injection valve 602 is integrally connected to the top cover 601. The first assembler 603 is welded to the first injection valve 602. The first foaming agent pressure tank 604 is screwed into the fifth threaded hole of the first assembler 603. The threaded hole base is welded to the top cover 601. The first foaming agent release hole and the top cover 601 are integrally formed. The interior of the top cover 601 is hollow, which can facilitate the release of the foaming agent from the first foaming agent release hole. The first rubber pad 606 is adhered to the inner wall of the top cover 601 by adhesive. The top cover 601 and the bottom cover 605 are aligned, and then The third bolt is screwed into the sixth threaded hole of the threaded hole base and continues to rotate until it is screwed into the bottom cover plate 605. Then the second rubber pad 607 is also adhered to the bottom cover plate 605 by the adhesive. The second injection valve 608 is integrally connected to the bottom cover plate 605, and the second assembler 609 is welded to the second injection valve 608. The second foaming agent pressure tank 610 is screwed into the seventh threaded hole of the second assembler 609. The second foaming agent release hole and the bottom cover plate 605 are integrally formed, and the inside of the bottom cover plate 605 is also hollow to facilitate the release of the foaming agent from the second foaming agent release hole to complete the installation.

[0034] During use, the pipes to be docked are conveniently placed on both ends of the bottom cover plate 605 and tightly docked, and then the top cover plate 601 is placed on the bottom cover plate 605 and tightened with the third bolt so that the top cover plate 601 and the bottom cover plate 605 fix the docked pipes, and then the first injection valve 602 and the second injection valve 608 are opened so that the foaming agents in the first foaming agent pressure tank 604 and the second foaming agent pressure tank 610 will enter the top cover plate 601 and the bottom cover plate 605 and come out through the first foaming agent release hole and the second foaming agent release hole, thereby filling the gap of the entire pipe docking closure module 6.

[0035] The device is installed with a pipe docking sealer module 6, so that the device can connect the pipes that need to be docked. After the connection, the device can curb the overflow of large amounts of water like a pipe docking splint, and can also use the foaming agent of the pipe docking sealer module 6 to seal the narrow space inside the pipe docking sealer module 6, thereby reducing the possibility of water flowing out of the gap and causing corrosion to the semiconductor testing equipment to a certain extent.

[0036] like Figure 4As shown, in this embodiment, the spherical valve module 9 comprises a top of the spherical valve body 901 fixedly connected with a rotating rod base 902, the top of the rotating rod base 902 is provided with a third hole, the inner wall of the third hole is provided with a second rotating shaft 903, the inner wall of the second rotating shaft 903 is provided with a rotating rod 904, the top end of the rotating rod 904 is provided with a rotating handle 905, the bottom end of the rotating rod 904 is fixedly connected with an O-shaped ball 906, the surface of the O-shaped ball 906 is provided with a fourth hole, one end surface of the spherical valve body 901 is provided with a thread, and the surface of the spherical valve body 901 is threadedly connected with a filter module 11.

[0037] The rotating rod base 902 is welded on the spherical valve body 901, the third hole and the rotating rod base 902 are integrally formed, the second rotating shaft 903 is installed in the third hole, the O-shaped ball 906 is welded on the bottom end of the rotating rod 904, the fourth hole is integrally formed with the O-shaped ball 906, the rotating rod 904 with the O-shaped ball 906 passes through the second rotating shaft 903, and then the rotating handle 905 is installed on the rotating rod 904, and the installation is completed.

[0038] In use, when the spherical valve module 9 needs to be opened, the rotating handle 905 is rotated first so that the rotating rod 904 can rotate in the second rotating shaft 903, so as to drive the O-shaped ball 906 to rotate, when flow is needed, the rotating handle 905 is only needed to be rotated clockwise, so that the fourth hole on the O-shaped ball 906 can face the water flow, so that the water flow passes through the fourth hole and is discharged, when it needs to be closed, the rotating handle 905 is only needed to be rotated counterclockwise, so that the fourth hole of the O-shaped ball 906 faces the inner wall of the spherical valve body 901, so that the water flow is blocked on one side of the O-shaped ball 906 and cannot flow out.

[0039] As Figure 5As shown, in this embodiment, the filter module 11 includes a filter carrier 1101, an eighth threaded hole is opened on one side of the filter carrier 1101, and the inner wall of the eighth threaded hole is threadedly connected to the branch pipe 10, and the top of the filter carrier 1101 is opened from left to right with a first sliding connection hole and a second sliding connection hole, the inner wall of the first sliding connection hole is fixedly connected to a first sliding tenon 1102, and the inner wall of the second sliding connection hole is fixedly connected to a second sliding tenon 1103, the first sliding connection hole is slidably connected to the first filter 1104 through the first sliding tenon 1102, and the second sliding connection hole is slidably connected to the first filter 1104 through the second sliding tenon 110 3 is slidably connected to the second filter 1105, a third sliding connection hole is provided on the side of the first filter 1104, a first sliding groove is provided on the inner wall of the third sliding connection hole, a large particle filter plate 1106 is slidably connected to the inner wall of the first sliding groove, a first lifting handle 1107 is fixedly connected to the top of the first filter 1104, a fourth sliding connection hole is provided on the side of the second filter 1105, a second sliding groove is provided on the inner wall of the fourth sliding connection hole, a fine particle filter plate 1108 is slidably connected to the inner wall of the second sliding groove, and a second lifting handle 1109 is fixedly connected to the top of the second filter 1105.

[0040] The eighth threaded hole and the filter carrier 1101 are integrally formed, and the branch pipe 10 is screwed into the eighth threaded hole of the filter carrier 1101, and the first sliding connection hole and the second sliding connection hole are integrally formed with the filter carrier 1101, and the first sliding tenon 1102 and the second sliding tenon 1103 are welded to the first sliding connection hole and the second sliding connection hole respectively, and the first lifting handle 1107 and the second lifting handle 1109 are welded to the first filter 1104 and the second filter 1105 respectively, and the large particle filter plate 1106 and the fine particle filter plate 1108 are respectively slid into the third sliding connection hole and the fourth sliding connection hole, and then the first filter 1104 and the second filter 1105 are slid into the first sliding connection hole and the second sliding connection hole to complete the installation.

[0041] During use, when water flows into the filter carrier 1101, it first flows into the large particle filter plate 1106 of the first filter 1104 to intercept any large particles that may be present in the circulating cooling water. The filtered circulating cooling water then passes through the fine particle filter plate 1108 of the second filter 1105 and enters the branch pipe 10. The fine particle filter plate 1108 will filter out the fine particles in the circulating cooling water, thereby ensuring that the circulating cooling water enters the semiconductor testing instrument through the branch pipe 10 with as few impurities as possible, thereby protecting the instrument and reducing the possibility of damage to the instrument due to impurities in the circulating cooling water.

[0042] This utility works as follows:

[0043] The first connector 2 is welded to the circulating cooling water main 1 by hot melt welding. Align and install the shut-off valve module 3 and the first connector 2, and the second connector 4 and the liquid delivery pipe 5 are also welded together by hot melt welding. Align the welded second connector 4 and the other end of the shut-off valve module 3 and install them on the shut-off valve module 3. Place the pipeline docking closure module 6 on the surface of the liquid delivery pipe 5 first, and then place the diverter 7 into the pipeline docking closure module 6. The diverter pipe 8 and the diverter 7 are formed as one piece. Screw the spherical valve module 9 onto the surface of the diverter pipe 8, and then install the branch pipe 10 on the spherical valve module 9. Finally, install the filter module 11 on the spherical valve module 9 to complete the installation. The first threaded hole, the second threaded hole and the shut-off valve body 301 is integrally formed. Align the first connector 2 and the shut-off valve body 301, then screw the first bolt into the first threaded hole of the shut-off valve body 301 and continue to rotate until it is screwed into the first connector 2. Then align the second connector 4 with the shut-off valve body 301, and screw the second bolt into the second threaded hole of the shut-off valve body 301 and continue to rotate until it is screwed into the second connector 4. The valve cover base 302 and the shut-off valve body 301 are integrally formed. Align the valve cover 303 and the valve cover base 302, then pass the third bolt through the valve cover 303 and screw it into the third threaded hole of the valve cover base 302. The valve stem base 304 is welded to the valve cover 303, and the fourth threaded hole and the valve stem base 304 are integrally formed. The valve stem 305 is welded to the handwheel 306 The shaft base is welded to the baffle 307, the first shaft 308 is placed in the shaft base on the baffle 307, the valve stem 305 is screwed into the fourth threaded hole of the valve stem base 304, and then the valve stem 305 is inserted into the first shaft 308 after being screwed out, and the installation is completed. The first injection valve 602 and the top cover 601 are connected as one body, the first assembler 603 is welded to the first injection valve 602, the first foaming agent pressure tank 604 is screwed into the fifth threaded hole of the first assembler 603, the threaded hole base is welded to the top cover 601, and the first foaming agent release hole and the top cover 601 are integrally formed, and the interior of the top cover 601 is hollow, which can facilitate the release of the foaming agent from the first foaming agent release hole. The rubber pad 606 is bonded to the inner wall of the top cover 601 by adhesive. The top cover 601 and the bottom cover 605 are aligned, and then the third bolt is screwed into the sixth threaded hole of the threaded hole base and continued to rotate until it is screwed into the bottom cover 605. Then the second rubber pad 607 is also bonded to the bottom cover 605 by adhesive. The second injection valve 608 is integrally connected to the bottom cover 605, and the second assembler 609 is welded to the second injection valve 608. The second foaming agent pressure tank 610 is screwed into the seventh threaded hole of the second assembler 609. The second foaming agent release hole and the bottom cover 605 are integrally formed, and the inside of the bottom cover 605 is also hollow to facilitate the release of the foaming agent from the second foaming agent release hole. The installation is completed.The rotating rod base 902 is welded to the spherical valve body 901. The third hole and the rotating rod base 902 are integrally formed. The second rotating shaft 903 is installed in the third hole. The O-type ball 906 is welded to the bottom end of the rotating rod 904. The fourth hole and the O-type ball 906 are integrally formed. The rotating rod 904 with the O-type ball 906 is passed through the second rotating shaft 903, and then the turning handle 905 is installed on the rotating rod 904 to complete the installation. The eighth threaded hole and the filter carrier 1101 are integrally formed. The branch pipe 10 is screwed into the eighth threaded hole of the filter carrier 1101, and the first sliding connection hole and the second The sliding connection hole is integrally formed with the filter carrier 1101. The first sliding tenon 1102 and the second sliding tenon 1103 are welded into the first and second sliding connection holes, respectively. The first lifting handle 1107 and the second lifting handle 1109 are welded to the first filter 1104 and the second filter 1105, respectively. The large particle filter plate 1106 and the fine particle filter plate 1108 are slid into the third and fourth sliding connection holes, respectively. Then, the first filter 1104 and the second filter 1105 are slid into the first and second sliding connection holes to complete the installation.

[0044] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A circulating cooling water bilateral channel device for connecting semiconductor testing equipment, comprising a circulating cooling water main pipe (1), characterized in that: A first connector (2) is provided at one end of the circulating cooling water main pipe (1), a shut-off valve module (3) is provided on one side of the first connector (2), a second connector (4) is provided on one side of the shut-off valve module (3), a liquid delivery pipe (5) is provided on one side of the second connector (4), a pipe docking sealer module (6) is provided on the surface of the liquid delivery pipe (5), a diverter (7) is installed on the liquid delivery pipe (5) through the pipe docking sealer module (6), a diverter pipe (8) is fixedly connected to the side of the diverter (7), a spherical valve module (9) is threadedly connected to the surface of the diverter pipe (8), a branch pipe (10) is provided on one side of the spherical valve module (9), and a filter module (11) is provided on the top of the spherical valve module (9).

2. The device for connecting a circulating cooling water double channel of semiconductor testing equipment according to claim 1, characterized in that: The shut-off valve module (3) comprises a shut-off valve body (301), a first threaded hole is provided on the left side of the shut-off valve body (301), a first bolt is threadedly connected to the inner wall of the first threaded hole, and the first threaded hole is threadedly connected to the first connector (2) via the first bolt, a second threaded hole is provided on the right side of the shut-off valve body (301), a second bolt is threadedly connected to the inner wall of the second threaded hole, and the second threaded hole is threadedly connected to the second connector (4) via the second bolt, the top of the shut-off valve body (301) is fixedly connected to a valve cover base (302), a third threaded hole is provided on the top of the valve cover base (302), a third bolt is threadedly connected to the inner wall of the third threaded hole, the third threaded hole is threadedly connected to the valve cover (303) via the third bolt, and the top of the valve cover (303) is fixedly connected to a valve stem base (304).

3. The device for connecting a circulating cooling water double channel of semiconductor testing equipment according to claim 2, characterized in that: A fourth threaded hole is provided at the top of the valve stem base (304), and a valve stem (305) is threadedly connected to the inner wall of the fourth threaded hole. A handwheel (306) is provided at the top of the valve stem (305), and a baffle (307) is provided at the bottom of the valve stem (305). The top of the baffle (307) is fixedly connected to a rotating shaft base, and a first hole is provided at the top of the rotating shaft base. A first rotating shaft (308) is installed on the inner wall of the first hole, and the first rotating shaft (308) and the valve stem (305) are adapted to each other. A second hole is provided at the top of the valve cover base (302), and the second hole and the baffle (307) are adapted to each other.

4. The double-sided channel device for circulating cooling water connected to semiconductor testing equipment according to claim 1, characterized in that: The pipeline docking sealer module (6) includes a top cover plate (601), a first injection valve (602) is provided on the top of the top cover plate (601), a first assembler (603) is fixedly connected to the top of the first injection valve (602), a fifth threaded hole is provided on the top of the first assembler (603), a first foaming agent pressure tank (604) is threadedly connected to the inner wall of the fifth threaded hole, a threaded hole base is fixedly connected to the surface of the top cover plate (601), a sixth threaded hole is provided on the top of the threaded hole base, a third bolt is threadedly connected to the inner wall of the sixth threaded hole, and the sixth threaded hole is threadedly connected to the bottom cover plate (605) through the third bolt, and a first foaming agent release hole is provided on the inner wall of the top cover plate (601).

5. The device for connecting a circulating cooling water double channel of semiconductor testing equipment according to claim 4, characterized in that: The inner wall of the top cover plate (601) is provided with a first rubber pad (606), the inner wall of the bottom cover plate (605) is provided with a second rubber pad (607), the bottom of the bottom cover plate (605) is provided with a second injection valve (608), the bottom of the second injection valve (608) is fixedly connected to a second assembler (609), the bottom of the second assembler (609) is provided with a seventh threaded hole, the inner wall of the seventh threaded hole is threadedly connected to a second foaming agent pressure tank (610), and the inner wall of the bottom cover plate (605) is provided with a second foaming agent release hole.

6. The circulating cooling water double-sided channel device for connecting semiconductor testing equipment according to claim 1, characterized in that: The spherical valve module (9) comprises a spherical valve body (901) whose top is fixedly connected to a rotating rod base (902), a third hole is provided on the top of the rotating rod base (902), a second rotating shaft (903) is installed on the inner wall of the third hole, a rotating rod (904) is provided on the inner wall of the second rotating shaft (903), a rotating rod (904) is provided on the inner wall of the second rotating shaft (903), a rotating handle (905) is provided on the top of the rotating rod (904), an O-type ball (906) is fixedly connected to the bottom end of the rotating rod (904), a fourth hole is provided on the surface of the O-type ball (906), a thread is provided on one end surface of the spherical valve body (901), and a filter module (11) is threadedly connected to the surface of the spherical valve body (901).

7. The circulating cooling water double channel device for connecting semiconductor testing equipment according to claim 1, characterized in that: The filter module (11) comprises a filter carrier (1101), an eighth threaded hole is provided on one side of the filter carrier (1101), a branch pipe (10) is threadedly connected to the inner wall of the eighth threaded hole, a first sliding connection hole and a second sliding connection hole are provided in sequence from left to right on the top of the filter carrier (1101), a first sliding tenon (1102) is fixedly connected to the inner wall of the first sliding connection hole, a second sliding tenon (1103) is fixedly connected to the inner wall of the second sliding connection hole, the first sliding connection hole is slidingly connected to the first filter (1104) via the first sliding tenon (1102), and the second sliding connection hole is slidingly connected to the second filter (1105) via the second sliding tenon (1103).

8. The double-sided channel device for circulating cooling water connected to semiconductor testing equipment according to claim 7, characterized in that: A third sliding connection hole is provided on the side of the first filter (1104), a first sliding groove is provided on the inner wall of the third sliding connection hole, a large particle filter plate (1106) is slidably connected to the inner wall of the first sliding groove, a first lifting handle (1107) is fixedly connected to the top of the first filter (1104), a fourth sliding connection hole is provided on the side of the second filter (1105), a second sliding groove is provided on the inner wall of the fourth sliding connection hole, a fine particle filter plate (1108) is slidably connected to the inner wall of the second sliding groove, and a second lifting handle (1109) is fixedly connected to the top of the second filter (1105).

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