Static test sensor probe and static test device

Abstract

The utility model discloses an electrostatic test sensor probe and an electrostatic test device, the electrostatic test sensor probe comprises a sampling resistor, a high-voltage resistor, an electrostatic input induction piece and a metal shielding piece, and the electrostatic input induction piece, the high-voltage resistor and the sampling resistor are sequentially connected in series. The metal shielding piece is of a hollow pipe body structure, the high-voltage resistor is located in a hollow cavity of the metal shielding piece, and the static input induction piece is located at one end of the metal shielding piece and is isolated from the metal shielding piece. As the static input sensing piece is located at one end of the metal shielding piece, the high-voltage resistor is located in the hollow cavity of the metal shielding piece, and distributed capacitance around the high-voltage resistor is shielded through the metal shielding piece, static overflow and loss in the testing process are effectively avoided, and the influence of peripheral charged objects on the testing result of the static testing device can be reduced. The test accuracy of the static test sensor probe provided by the utility model is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of electrostatic testing, in particular to an electrostatic testing sensor probe and an electrostatic testing device. Background Art

[0002] Static electricity is the result of the imbalance of positive and negative charges in a local area. Therefore, static electricity is not a stable charge.

[0003] During the electrostatic test process, the electrostatic test sensor probe often has low test accuracy due to the overflow of the sensor probe's own charge or the influence of surrounding charged objects.

[0004] Therefore, how to improve the test accuracy of the electrostatic test sensor probe is a technical problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0005] The utility model aims to provide an electrostatic test sensor probe and an electrostatic test device, wherein the test accuracy of the electrostatic test sensor probe is improved.

[0006] The electrostatic test sensor probe provided in this application includes:

[0007] Sampling resistor;

[0008] High voltage resistors;

[0009] An electrostatic input induction component, wherein the electrostatic input induction component, the high-voltage resistor and the sampling resistor are sequentially connected in series;

[0010] The metal shielding member is a hollow tube structure, and the high-voltage resistor is located in the hollow cavity of the metal shielding member; the electrostatic input induction member is located at one end of the metal shielding member and is isolated from the metal shielding member.

[0011] Optionally, the electrostatic test sensor probe further includes an insulating isolator, which is a hollow tube structure. The metal shielding member is sleeved on the outer periphery of the insulating isolator, and the high-voltage resistor is located in the hollow cavity of the insulating isolator.

[0012] Optionally, in the above-mentioned electrostatic test sensor probe, the sampling resistor is located in the hollow cavity of the insulating isolation piece, and the sampling resistor is connected to the inner wall of the insulating isolation piece through a support piece.

[0013] Optionally, in the above-mentioned electrostatic test sensor probe, the support member is an insulating member, the support member is a ring structure, the sampling resistor passes through a hole of the support member, and the outer periphery of the support member is connected to the inner wall of the insulating isolation member.

[0014] Optionally, in the above-mentioned electrostatic test sensor probe, the electrostatic input induction component includes:

[0015] an induction plate, the induction plate being sealed between the insulating spacer and one end of the metal shielding member, and the induction plate being connected to the high-voltage resistor;

[0016] A connecting sleeve is connected to one end of the induction plate and is sleeved on the outer periphery of the high-voltage resistor.

[0017] Optionally, in the above-mentioned electrostatic test sensor probe, the sensing plate is a circular plate, the connecting sleeve is a circular ring, and the sensing plate and the connecting sleeve are integrally formed.

[0018] Optionally, in the above electrostatic test sensor probe, the sensing plate is connected to the high-voltage resistor through the connecting sleeve, or an end of the high-voltage resistor is connected to the sensing plate.

[0019] Optionally, the electrostatic test sensor probe further includes an insulating protective layer, which is adhered to the outer periphery of the metal shielding component.

[0020] Optionally, in the above-mentioned electrostatic test sensor probe, the resistance value of the high-voltage resistor is greater than or equal to 10 TΩ, and the withstand voltage level is 28kV-32kV; the resistance value of the sampling resistor is 95Ω-105Ω.

[0021] An electrostatic testing device includes an electrostatic testing sensor probe and a data processor, wherein the electrostatic testing sensor probe is any of the electrostatic testing sensor probes described above, the data processor is connected to the sampling resistance signal of the electrostatic testing sensor probe, and the data processor is used to calculate the electrostatic voltage of the object under test.

[0022] In the above technical solution, the electrostatic test sensor probe provided by the present invention includes a sampling resistor, a high-voltage resistor, an electrostatic input induction component, and a metal shielding component, wherein the electrostatic input induction component, the high-voltage resistor, and the sampling resistor are connected in series in sequence. The metal shielding component is a hollow tube structure, the high-voltage resistor is located in the hollow cavity of the metal shielding component, and the electrostatic input induction component is located at one end of the metal shielding component and is isolated from the metal shielding component. During specific use, the electrostatic input induction component is close to the object to be measured, and the static electricity in the object to be measured is induced to the electrostatic input induction component, which passes through the high-voltage resistor and the sampling resistor in sequence, forming a measurable voltage on the sampling resistor. Subsequently, the actual electrostatic voltage of the object to be measured is calculated by the data processor of the electrostatic testing device.

[0023] From the above description, it can be seen that in the electrostatic test sensor probe provided by the present application, the electrostatic input sensing component is located at one end of the metal shielding component, and the high-voltage resistor is located in the hollow cavity of the metal shielding component. The distributed capacitance around the high-voltage resistor is shielded by the metal shielding component, which effectively avoids the leakage of static electricity during the test process, and can reduce the influence of surrounding charged objects on the test results of the electrostatic testing device. Therefore, the test accuracy of the electrostatic test sensor probe provided by the present application is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0025] Figure 1 A schematic diagram of a portion of the structure of an electrostatic test sensor probe provided by an embodiment of the present utility model;

[0026] Figure 2 A cross-sectional view of an electrostatic test sensor probe provided by an embodiment of the present utility model;

[0027] Figure 3 A schematic structural diagram of an electrostatic input induction element provided by an embodiment of the present utility model;

[0028] Figure 4 for Figure 3 A right side view of the electrostatic input induction component shown;

[0029] Figure 5 A schematic structural diagram of a support member provided in an embodiment of the present utility model;

[0030] Figure 6 A side view of an electrostatic test sensor probe provided by an embodiment of the present utility model;

[0031] Figure 7 A side view of another electrostatic test sensor probe provided by an embodiment of the present utility model;

[0032] Figure 8 This is a schematic structural diagram of the insulating spacer provided in an embodiment of the present utility model.

[0033] in Figures 1-8 middle:

[0034] 1- electrostatic input induction component, 11- induction plate, 12- connecting sleeve;

[0035] 2- High voltage resistor;

[0036] 3-insulating spacer, 31-installation space, 32-limiting platform;

[0037] 4-Metal shield;

[0038] 5-Insulation protective layer;

[0039] 6- sampling resistor;

[0040] 7- support member;

[0041] 8-Data processor. DETAILED DESCRIPTION

[0042] The core of the utility model is to provide an electrostatic test sensor probe and an electrostatic test device, and the test accuracy of the electrostatic test sensor probe is improved.

[0043] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and implementation methods.

[0044] Please refer to Figure 1 and Figure 8 .

[0045] In a specific embodiment, the electrostatic test sensor probe provided by the specific embodiment of the present invention includes a sampling resistor 6, a high-voltage resistor 2, an electrostatic input induction component 1 and a metal shielding component 4. The electrostatic input induction component 1, the high-voltage resistor 2 and the sampling resistor 6 are connected in series in sequence. Among them, the electrostatic input induction component 1, the high-voltage resistor 2 and the sampling resistor 6 are connected in series in sequence. The high-voltage resistor 2 and the sampling resistor 6 are connected using a data processing circuit. Specifically, the resistance value of the sampling resistor 6 is small. When connected in series with the high-voltage resistor 2, the voltage division is small, which facilitates circuit sampling. The high-voltage resistor 2 has a high resistance value and a high voltage division, which prevents the electrostatic voltage from being too high and breaking down the sampling circuit.

[0046] The resistance value of the high-voltage resistor 2 is greater than or equal to 10 TΩ, and the withstand voltage rating is 28 kV-32 kV. For example, the resistance value of the high-voltage resistor 2 is 10 TΩ, and the withstand voltage rating is 30 kV. Of course, in a specific design, the resistance value and withstand voltage rating of the high-voltage resistor 2 are not limited to the above. For example, the resistance value of the high-voltage resistor 2 can be less than 10 TΩ, or greater than 10 TΩ; and the withstand voltage rating of the high-voltage resistor 2 can be less than 28 kV, or greater than 32 kV.

[0047] The resistance value of the sampling resistor 6 is 95Ω-105Ω, for example, the resistance value of the sampling resistor 6 is 100Ω. Of course, in a specific design, the resistance value of the sampling resistor 6 is not limited to the above situation, for example, the resistance value of the sampling resistor 6 is less than 95Ω, or greater than 105Ω.

[0048] likeFigure 2 As shown, the metal shield 4 is a hollow tube structure, the high voltage resistor 2 is located in the hollow cavity of the metal shield 4, and preferably, the sampling resistor 6 is also located in the hollow cavity of the metal shield 4. The electrostatic input induction component 1 is located at one end of the metal shield 4, as shown in FIG. Figure 2 As shown, the electrostatic input induction component 1 is located at the left end of the metal shielding component 4. The electrostatic input induction component 1 is isolated from the metal shielding component 4, for example, the two are connected by an insulating structure to achieve the fixation of the electrostatic input induction component 1.

[0049] During use, the electrostatic input sensing element 1 is placed near the object under test. Static electricity in the object is sensed by the electrostatic input sensing element 1, and then flows through the high-voltage resistor 2 and the sampling resistor 6, forming a measurable voltage on the sampling resistor 6. The actual electrostatic voltage of the object under test is then calculated by the data processor 8 of the electrostatic testing device. Specifically, the actual electrostatic voltage of the object under test is calculated by the data processing circuit of the data processor 8.

[0050] From the above description, it can be seen that in the electrostatic test sensor probe provided in the specific embodiment of the present application, the electrostatic input induction component 1 is located at one end of the metal shielding component 4, and the high-voltage resistor 2 is located in the hollow cavity of the metal shielding component 4. The distributed capacitance around the high-voltage resistor 2 is shielded by the metal shielding component 4, which effectively avoids the leakage of static electricity during the test process, and can reduce the influence of surrounding charged objects on the test results of the electrostatic testing device. Therefore, the test accuracy of the electrostatic test sensor probe provided by the present application is improved.

[0051] In one embodiment, the electrostatic test sensor probe further includes an insulating spacer 3 having a hollow tubular structure. A metal shield 4 is sleeved around the insulating spacer 3, and a high-voltage resistor 2 is located within the hollow cavity of the insulating spacer 3. Specifically, the insulating spacer 3 is formed by filling a space between the high-voltage resistor 2 and the metal shield 44 with a material having high insulation properties. The insulating spacer 3 is made of organic glass with excellent insulating and mechanical properties, and is used to provide high-voltage insulation between the metal shield 4 and the high-voltage resistor 2.

[0052] like Figure 8 As shown, in order to achieve the isolation of the electrostatic input induction component 1 and the metal shielding component 4, the insulating isolation component 3 is provided with a limit platform 32, and the electrostatic input induction component 1 and the metal shielding component 4 are respectively abutted against the two side surfaces of the limit platform 32 that are arranged opposite to each other. Specifically, the outer peripheral surface of the insulating isolation component 3 and the side surface of the limit platform 32 form an installation space 31 for the metal shielding component 4.

[0053] like Figure 7As shown, the sampling resistor 6 is located in the hollow cavity of the insulating spacer 3 and is connected to the inner wall of the insulating spacer 3 via a support member 7. Specifically, the support member 7 can be a rod, with multiple rods distributed sequentially around the outer circumference of the sampling resistor 6. One end of the support member 7 is connected to the sampling resistor 6, and the other end is connected to the insulating spacer 3.

[0054] In a specific embodiment, the support member 7 is an insulating member. Since the support member 7 is an insulating structure, it can support the sampling resistor 6 while also achieving insulation isolation of the sampling resistor 6.

[0055] like Figure 5 and Figure 6 As shown, in one specific embodiment, the support member 7 has an annular structure, and the sampling resistor 6 passes through the hole of the support member 7. Specifically, the support member 7 is a plate structure arranged in an annular shape, with the two ends of the sampling resistor 6 protruding from the opposite ends of the support member 7. The outer periphery of the support member 7 is connected to the inner wall of the insulating spacer 3. The annular structure of the support member 7 further improves the support stability of the sampling resistor 6.

[0056] In one embodiment, the electrostatic input induction element 1 includes an induction plate 11 and a connecting sleeve 12. The induction plate 11 is sealed between the insulating spacer 3 and one end of the metal shield 4 and is connected to the high-voltage resistor 2. The connecting sleeve 12 is connected to one end of the induction plate 11 and is positioned around the outer periphery of the high-voltage resistor 2. The provision of the connecting sleeve 12 improves the installation stability of the electrostatic input induction element 1 and increases the contact area between the electrostatic input induction element 1 and the high-voltage resistor 2.

[0057] The sensing plate 11 can be a circular plate, or more specifically, a flat plate. The connecting sleeve 12 is a circular ring, and more specifically, the thickness of the sensing plate 11 can be the same as that of the connecting sleeve 12. The sensing plate 11 is connected to the high-voltage resistor 2 via the connecting sleeve 12. Alternatively, the end of the high-voltage resistor 2 can be connected to the sensing plate 11, or both the connecting sleeve 12 and the sensing plate 11 can be connected to the high-voltage resistor 2.

[0058] The sensing plate 11 and the connecting sleeve 12 can be connected by bonding. In order to improve assembly efficiency, preferably, the sensing plate 11 and the connecting sleeve 12 are integrally formed.

[0059] In one embodiment, the electrostatic test sensor probe further includes an insulating protective layer 5, which is attached to the outer periphery of the metal shield 4. During assembly, the insulating protective layer 5 is wrapped around the electrostatic test sensor and is preferably made of nylon to provide the electrostatic test sensor with good insulation and mechanical strength.

[0060] This application provides an electrostatic testing device comprising an electrostatic test sensor probe and a data processor 8. The electrostatic test sensor probe is any of the aforementioned electrostatic test sensor probes. The data processor 8 is signal-connected to the sampling resistor 6 of the electrostatic test sensor probe and is configured to calculate the electrostatic voltage of the object under test. The specific structure of the electrostatic test sensor probe has been described above. This application also includes the aforementioned electrostatic test sensor probe and achieves the aforementioned technical effects.

[0061] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0062] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An electrostatic test sensor probe, characterized in that: include: Sampling resistor (6); High voltage resistor (2); An electrostatic input induction element (1), wherein the electrostatic input induction element (1), the high-voltage resistor (2) and the sampling resistor (6) are sequentially connected in series; The metal shielding member (4) is a hollow tube structure, and the high-voltage resistor (2) is located in the hollow cavity of the metal shielding member (4); the electrostatic input induction member (1) is located at one end of the metal shielding member (4) and is isolated from the metal shielding member (4).

2. The electrostatic test sensor probe according to claim 1, characterized in that: It also includes an insulating isolator (3), which is a hollow tube structure. The metal shielding member (4) is sleeved on the outer periphery of the insulating isolator (3), and the high-voltage resistor (2) is located in the hollow cavity of the insulating isolator (3).

3. The electrostatic test sensor probe according to claim 2, characterized in that: The sampling resistor (6) is located in the hollow cavity of the insulating isolation member (3), and the sampling resistor (6) is connected to the inner wall of the insulating isolation member (3) via a support member (7).

4. The electrostatic test sensor probe according to claim 3, characterized in that: The support member (7) is an insulating member and has a ring structure. The sampling resistor (6) passes through a hole in the support member (7). The outer periphery of the support member (7) is connected to the inner wall of the insulating isolation member (3).

5. The electrostatic test sensor probe according to claim 2, characterized in that: The electrostatic input induction component (1) comprises: an induction plate (11), the induction plate (11) being sealed at one end of the insulating spacer (3) and the metal shielding member (4), and the induction plate (11) being connected to the high-voltage resistor (2); A connecting sleeve (12) is connected to one end of the induction plate (11), and the connecting sleeve (12) is sleeved on the outer periphery of the high-voltage resistor (2).

6. The electrostatic test sensor probe according to claim 5, characterized in that: The induction plate (11) is a circular plate, the connecting sleeve (12) is a circular ring, and the induction plate (11) and the connecting sleeve (12) are integrally formed.

7. The electrostatic test sensor probe according to claim 6, characterized in that: The induction plate (11) is connected to the high-voltage resistor (2) via the connecting sleeve (12), or the end of the high-voltage resistor (2) is connected to the induction plate (11).

8. The electrostatic test sensor probe according to claim 1, characterized in that: It also includes an insulating protective layer (5), which is arranged on the outer periphery of the metal shielding component (4).

9. The electrostatic test sensor probe according to claim 1, characterized in that: The resistance value of the high-voltage resistor (2) is greater than or equal to 10 TΩ, and the withstand voltage level is 28 kV-32 kV; the resistance value of the sampling resistor (6) is 95 Ω-105 Ω.

10. An electrostatic testing device, comprising an electrostatic testing sensor probe and a data processor (8), characterized in that: The electrostatic test sensor probe is an electrostatic test sensor probe as described in any one of claims 1 to 9, the data processor (8) is connected to the sampling resistor (6) of the electrostatic test sensor probe, and the data processor (8) is used to calculate the electrostatic voltage of the object under test.

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