Photomask protective film dismounting device

Abstract

The utility model relates to a photomask protective film dismounting device which comprises an object placing table, and a limiting piece, a dismounting assembly and a first temperature sensor are fixed on the object placing table; the upper surface of the storage table is coated with a teflon coating; and a cooling device is arranged in the object placing table and is used for maintaining the temperature of the upper surface of the object placing table at 5-10 DEG C, so that the adhesive between the photomask and the photomask protective film is hardened for subsequent analysis of the photomask protective film. The photomask protective film dismounting device designed by the utility model can be used for solving the problems that an adhesive is easy to splash and pollute the surface of a photomask when a heating method is used for dismounting, fogging spots are possibly caused during cleaning, and the cleanliness and the precision of the photomask are influenced; and damage is easily caused by direct tool dismounting, so that the cost is increased, and the service life of the photomask is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, specifically relates to a photomask protective film dismounting device. BACKGROUND

[0002] The protective film of the photomask is the key component to ensure the photomask from being polluted and damaged. However, when removing the protective film, the traditional method usually has the following problems: heating method removal: the protective film is heated by a heating plate to make the adhesive soften or liquefy to realize removal. However, this method is easy to cause the adhesive to splash, pollute the surface of the photomask, and may cause fog spots during cleaning, affecting the cleanliness and precision of the photomask; direct tool removal: the protective film is directly removed by a tool. However, due to the fine structure and easy damage of the photomask, direct force removal is easy to cause damage, resulting in increased cost and shortened service life of the photomask.

[0003] Therefore, the prior art has defects and needs to be improved and developed. SUMMARY

[0004] The utility model discloses a photomask protective film dismounting device, which is used to solve the problems in the prior art that the use of the heating method for removal is easy to cause the adhesive to splash, pollute the surface of the photomask, and may cause fog spots during cleaning, affecting the cleanliness and precision of the photomask; and direct tool removal is easy to cause damage, resulting in increased cost and shortened service life of the photomask.

[0005] The utility model discloses a photomask protective film dismounting device, which is used to solve the problems in the prior art that the use of the heating method for removal is easy to cause the adhesive to splash, pollute the surface of the photomask, and may cause fog spots during cleaning, affecting the cleanliness and precision of the photomask; and direct tool removal is easy to cause damage, resulting in increased cost and shortened service life of the photomask.

[0006] Further, the limiting piece comprises a fixed end fixed on the upper surface of the object table, and a rotating end rotatably connected to the fixed end, and a baffle piece is fixed on the rotating end, and the rotating end is used to rotate the baffle piece to shield the upper surface of the photomask when the photomask is placed on the object table.

[0007] Further, the dismounting assembly comprises four vertical columns fixed on the upper surface of the object table, and the four vertical columns are defined as a first vertical column, a second vertical column, a third vertical column and a fourth vertical column in a counterclockwise direction.

[0008] The first vertical column and the second vertical column are connected by a first sliding rod, one end of the first sliding rod close to the first vertical column is slidably connected with a first fixed rod, one end of the first fixed rod away from the first sliding rod is fixed with a first rotating piece, one end of the first sliding rod close to the second vertical column is slidably connected with a second fixed rod, one end of the second fixed rod away from the first sliding rod is fixed with a second rotating piece.

[0009] The third vertical column and the fourth vertical column are connected by a second sliding rod, one end of the second sliding rod close to the third vertical column is slidably connected with a third fixed rod, one end of the third fixed rod away from the second sliding rod is fixed with a third rotating piece, one end of the second sliding rod close to the fourth vertical column is slidably connected with a fourth fixed rod, one end of the fourth fixed rod away from the second sliding rod is fixed with a fourth rotating piece.

[0010] The first rotating piece and the fourth rotating piece are rotatably connected by a first prying piece, the first prying piece comprises a rotating rod, a handle and a thimble, one end of the rotating rod is rotatably connected to the first rotating piece, the other end of the rotating rod is rotatably connected to the second rotating piece, the thimble is fixed on the rotating rod, the needle head of the thimble faces the outer frame insertion hole of the photomask protective film, the handle is fixed on the rotating rod and faces away from the needle head of the thimble, and the handle is used to separate the photomask protective film from the photomask after being pressed when the needle head of the thimble is inserted into the outer frame insertion hole of the photomask protective film, the second rotating piece and the third rotating piece are rotatably connected by a second prying piece, and the first prying piece and the second prying piece are the same in structure.

[0011] Further, two limiting blocks are fixed on the first sliding rod, one of the limiting blocks is between the first vertical column and the first fixed rod, and the other limiting block is between the second vertical column and the second fixed rod, and two limiting blocks are also fixed on the second sliding rod, one of the limiting blocks is between the third vertical column and the third fixed rod, and the other limiting block is between the fourth vertical column and the fourth fixed rod.

[0012] Further, the first column, the second column, the third column and the fourth column are columns with external threads, two bolts are respectively threadedly connected on the first column, the second column, the third column and the fourth column, one end of the first slide rod is slidably connected to the first column and between the two bolts, the other end of the first slide rod is slidably connected to the second column and between the two bolts; one end of the second slide rod is slidably connected to the third column and between the two bolts, the other end of the second slide rod is slidably connected to the fourth column and between the two bolts.

[0013] Further, the water pipes are uniformly laid in the storage table, at least three temperature sensors are fixed between the first flow electric control valve and the second flow electric control valve, and are sequentially defined as a second temperature sensor, a third temperature sensor and a fourth temperature sensor according to the water inlet sequence, the second temperature sensor is close to the first flow electric control valve, the third temperature sensor is located at the midpoint of the pipe length of the water pipe, and the fourth temperature sensor is close to the second flow electric control valve.

[0014] Further, the coating area of the Teflon coating is at least equal to the area of the lower surface of the photomask, and the thickness of the Teflon coating is 10-15 μm.

[0015] Further, the remaining inner surfaces of the storage table except the upper inner surface of the storage table are pasted with a thermal insulation layer, and the thermal insulation layer is at least one of rock wool thermal insulation layer, glass wool thermal insulation layer and polyurethane foam thermal insulation layer.

[0016] Beneficial effects:

[0017] From the above technical scheme, the utility model provides a photomask protection film dismounting device, through cooling device makes the adhesive low temperature solidification, thereby effectively reduces the adhesion, and combines accurate mechanical dismounting component design, makes photomask protection film can be in low temperature environment easily, safely and peels, not only avoids the pollution problem when heating and removing, also greatly reduces the damage risk to photomask.

[0018] It should be understood that all combinations of the aforementioned concepts and additional concepts described in greater detail below can be seen as part of the subject matter of the present disclosure as long as such concepts are not mutually contradictory.

[0019] The foregoing and other aspects, embodiments and features of the present teachings can be better understood from the following detailed description taken in conjunction with the drawings wherein: BRIEF DESCRIPTION OF DRAWINGS

[0020] The drawings are not drawn to scale. In the drawings, each identical or nearly identical component that is illustrated in various figures is represented with a like numeral for clarity. For purposes of clarity, not every component is called out in every drawing. Embodiments of various aspects of the present teachings will now be described, by way of example only, with reference to the accompanying drawings in which:

[0021] Figure 1 A front view of a photo mask protective film dismounting device according to an embodiment of the present application.

[0022] Figure 2 A top view of a photo mask protective film dismounting device according to an embodiment of the present application.

[0023] Figure 3 A left view of a photo mask protective film dismounting device according to an embodiment of the present application.

[0024] Figure 4 A right view of a photo mask protective film dismounting device according to an embodiment of the present application.

[0025] Figure 5 An internal structure diagram of a placement table of a photo mask protective film dismounting device according to an embodiment of the present application.

[0026] Figure 6 A screenshot of a heating plate heating method with residual adhesive.

[0027] Figure 7 A screenshot of an embodiment of the present application without residual adhesive.

[0028] Figure 8 A screenshot of a heating plate heating method with glue spraying.

[0029] Figure 9 A screenshot of an embodiment of the present application without glue spraying.

[0030] BRIEF DESCRIPTION OF DRAWINGS

[0031] Storage platform 1; water inlet 101; water outlet 102; water pipe 103; first flow electric control valve 104; second flow electric control valve 105; second temperature sensor 106; third temperature sensor 107; fourth temperature sensor 108; photomask 2; limiting piece 3; first vertical column 401; second vertical column 402; third vertical column 403; fourth vertical column 404; first sliding rod 501; second sliding rod 502; first fixed rod 601; second fixed rod 602; third fixed rod 603; fourth fixed rod 604; first rotating piece 701; second rotating piece 702; third rotating piece 703; fourth rotating piece 704; limiting block 8; rotating rod 9; handle 10; thimble 11; photomask protective film 12. DETAILED DESCRIPTION

[0032] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions of the embodiments of the present application will be described clearly and completely below with reference to the drawings of the embodiments of the present application. Obviously, the described embodiments are some, but not all of the embodiments of the present application. Based on the described embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort belong to the scope of protection of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should have the usual meanings understood by those of ordinary skill in the art to which the present application belongs.

[0033] The terms "first", "second", and similar terms used in the patent application specification and claims of the present application do not denote any order, number or importance, but are only used to distinguish different components. Similarly, the singular form "a", "an" and "the" does not exclude the plural form unless the context clearly indicates otherwise.

[0034] The terms "one" or "the" and similar terms do not denote a quantity limitation, but denote the existence of at least one.

[0035] The terms "include" or "contain" and similar terms mean that the elements or objects appearing before "include" or "contain" cover the features, whole, steps, operations, elements and / or components listed after "include" or "contain", and do not exclude the existence or addition of one or more other features, whole, steps, operations, elements, components and / or their collections. "Up", "down", "left", "right" and the like are only used to represent relative positional relationships, which may change accordingly when the absolute position of the described object changes.

[0036] In the prior art, the use of heating method for disassembly can easily cause adhesive splashing, pollute the surface of the photomask, and cause fog spots during cleaning, affecting the cleanliness and precision of the photomask. Direct tool disassembly is extremely easy to cause damage, resulting in increased cost and shortened service life of the photomask.

[0037] In view of this, the utility model discloses a photomask protection film dismounting device, refer to Figures 1-4 , including the table 1, the upper surface of table 1 is fixed with the limiting part 3, limiting part 3 is used for fixing the photomask 2 on the upper surface of table 1;The upper surface of table 1 is coated with Teflon coating;The upper surface of table 1 is also fixed with dismounting assembly, when photomask 2 is fixed on table 1, dismounting assembly is used for separating the photomask protection film 12 bonded on the upper surface of photomask 2;The upper surface of table 1 is also fixed with the first temperature sensor;Table 1 is installed with cooling device, refer to Figure 5 , cooling device includes water pipe 103, when water pipe 103 is water, it is used for maintaining the temperature of the upper surface of table 1 at 5~10 ℃;The water inlet 101 of water pipe 103 is located at one side of table 1, and the water outlet 102 of water pipe 103 is located at the other side opposite to the water inlet 101;The end of water pipe 103 close to water inlet 101 is airtight connection with the first flow electric control valve 104, and the end of water pipe 103 close to water outlet 102 is airtight connection with the second flow electric control valve 105.

[0038] Through limiting part 3 fixed photomask 2, ensure the stability and safety during dismounting process.Simultaneously, the Teflon coating on the upper surface of table 1 can keep smooth and increase the conduction ability of cooling, harden the adhesive and reduce the adhesion between the adhesive and photomask 2, photomask protection film 12.On the other hand, it reduces the difficulty of cleaning and prolongs the service life of table 1.Through the installed cooling device, the temperature of table 1 can be kept in the low temperature interval of 5~10 ℃, and the adhesive solidification in the low temperature interval facilitates the subsequent separation of photomask protection film 12 and photomask 2.The overall design improves the cleanliness and safety of the dismounting process, ensures that photomask 2 is not contaminated, and avoids the disadvantages of direct heating and tool removal.

[0039] In some embodiments, refer to Figures 1-4 , limiting part 3 includes a fixed end fixed on the upper surface of table 1, limiting part 3 also includes a rotating end rotatably connected to the fixed end, and a baffle is fixed on the rotating end, and the rotating end is used to rotate the baffle to shield the upper surface of photomask 2 when photomask 2 is placed on table 1.

[0040] Limiting part 3 can rotate flexibly, and photomask 2 will not be shielded during placement and dismounting, and photomask 2 is fixed by the baffle during cooling of photomask 2, which reduces unnecessary movement during dismounting process through fixing and limiting design, realizes stable photomask 2, and prevents sliding or misplacement.The design of limiting part 3 ensures accurate positioning of photomask 2, which helps to improve the safety and efficiency of dismounting.

[0041] In some embodiments, with reference to Figures 1-4 , the dismounting assembly comprises 4 columns fixed on the upper surface of the table 1, and the 4 columns are defined as the first column 401, the second column 402, the third column 403 and the fourth column 404 in counterclockwise direction.

[0042] The first column 401 and the second column 402 are connected by a first sliding rod 501, the first sliding rod 501 is slidingly connected with a first fixed rod 601 at one end close to the first column 401, the first fixed rod 601 is fixed with a first rotating part 701 at the end away from the first sliding rod 501, the first sliding rod 501 is slidingly connected with a second fixed rod 602 at one end close to the second column 402, the second fixed rod 602 is fixed with a second rotating part 702 at the end away from the first sliding rod 501.

[0043] The third column 403 and the fourth column 404 are connected by a second sliding rod 502, the second sliding rod 502 is slidingly connected with a third fixed rod 603 at one end close to the third column 403, the third fixed rod 603 is fixed with a third rotating part 703 at the end away from the second sliding rod 502, the second sliding rod 502 is slidingly connected with a fourth fixed rod 604 at one end close to the fourth column 404, the fourth fixed rod 604 is fixed with a fourth rotating part 704 at the end away from the second sliding rod 502.

[0044] The first rotating part 701, the second rotating part 702, the third rotating part 703 and the fourth rotating part 704 are the same rotating part, which can be selected as a rotating bearing, or can be made into a concave semicircular body, and the two ends of the rotating rod 9 are made into the shape of the semicircular body groove, so that the rotating shaft can rotate freely.

[0045] The first rotating part 701 and the fourth rotating part 704 are rotatably connected by a first prying part, the first prying part comprises a rotating rod 9, a handle 10 and a thimble 11, one end of the rotating rod 9 is rotatably connected to the first rotating part 701, the other end of the rotating rod 9 is rotatably connected to the second rotating part 702; the thimble 11 has 2 and is fixed on the rotating rod 9, the needle head of the thimble 11 faces the outer frame insertion hole of the photomask protective film 12, the arrangement position of the thimble 11 corresponds to the outer frame insertion hole of the photomask protective film 12 one by one; the handle 10 is fixed on the rotating rod 9 and faces away from the needle head of the thimble 11, when the needle head of the thimble 11 is inserted into the outer frame insertion hole of the photomask protective film 12, the handle 10 is used to separate the photomask protective film 12 from the photomask plate 2 after pressing; the second rotating part 702 and the third rotating part 703 are rotatably connected by a second prying part, the first prying part and the second prying part are the same structure.

[0046] The disassembly assembly is composed of 4 columns, and flexibility and adjustability are provided by the slide rods and fixed rods arranged between the columns. The appearance of the photomask protection film 12 itself has a jack, and the height of the slide rod is adjusted to enable the needle of the ejector pin 11 to be accurately inserted into the jack of the outer frame of the photomask protection film 12, and the alignment is completed. At the same time, the design of the first and second pry pieces enables the ejector pin 11 to pry at an appropriate angle, and by using the principle of leverage, the photomask protection film 12 can be easily separated after the adhesive cools in the low temperature range, thereby avoiding damage to the photomask 2 caused by direct pulling and improving the controllability and safety of the overall disassembly.

[0047] In some embodiments, with reference to Figure 1 Two limiting blocks 8 are fixed on the first slide rod 501, and the limiting blocks 8 can be made of the same material as the first slide rod and serve as a barrier. One of the limiting blocks 8 is located between the first column 401 and the first fixed rod 601, and the other limiting block 8 is located between the second column 402 and the second fixed rod 602. Two limiting blocks 8 are also fixed on the second slide rod 502, one of which is located between the third column 403 and the third fixed rod 603, and the other is located between the fourth column 404 and the fourth fixed rod 604.

[0048] The limiting blocks 8 arranged on the slide rods effectively prevent the fixed rods from exceeding the predetermined range during sliding. The reasonable arrangement of the limiting blocks 8 can accurately control the sliding distance, avoid the displacement of the pry piece due to excessive sliding distance, and ensure that the ejector pin 11 can accurately act on the jack position of the photomask protection film 12. Through this design, the precision of the operation and the pry-off effect of the protection film are further improved.

[0049] In some embodiments, the first column 401, the second column 402, the third column 403, and the fourth column 404 are columns with external threads, and two bolts are threadedly connected to each of the first column 401, the second column 402, the third column 403, and the fourth column 404. One end of the first slide rod 501 is slidably connected to the first column 401 and located between the two bolts, and the other end of the first slide rod 501 is slidably connected to the second column 402 and located between the two bolts. One end of the second slide rod 502 is slidably connected to the third column 403 and located between the two bolts, and the other end of the second slide rod 502 is slidably connected to the fourth column 404 and located between the two bolts.

[0050] The column is designed as an external thread structure, and two bolts are arranged on the column to stabilize the slide rod at a specific height. This structure can achieve precise height control and prevent the slide rod from sliding due to external forces during disassembly, thereby ensuring the stability of the disassembly operation. The design allows free adjustment of the height of the slide rod, enabling the needle of the ejector pin 11 to be accurately inserted into the outer frame insertion hole of the photomask protective film 12, achieving precise alignment. In addition, the two-way positioning of the bolts can further limit the degrees of freedom of the slide rod, reducing the operation error caused by the displacement of the slide rod during disassembly, thereby increasing the safety of the disassembly operation and the protection level of the photomask plate 2.

[0051] In some embodiments, with reference to Figure 5 The water pipes 103 are uniformly laid in the workbench 1, and at least three temperature sensors are fixed between the first flow control valve 104 and the second flow control valve 105. According to the order of water inflow, they are defined as the second temperature sensor 106, the third temperature sensor 107, and the fourth temperature sensor 108. The second temperature sensor 106 is close to the first flow control valve 104, the third temperature sensor 107 is located at the midpoint of the water pipe 103, and the fourth temperature sensor 108 is close to the second flow control valve 105.

[0052] The water pipes 103 are uniformly laid in the workbench 1, and multiple temperature sensors are arranged, effectively achieving precise control of the temperature of the workbench 1. By adjusting the water flow through the first flow control valve 104 and the second flow control valve 105, the temperature of the upper surface of the workbench 1 can be maintained at 5℃-10℃, providing a low-temperature environment for the adhesive, which helps to quickly cool and solidify the adhesive. The arrangement of multiple temperature sensors further improves the accuracy of temperature control, ensuring uniform distribution of cooling effect and avoiding problems such as difficulty in separating the adhesive caused by uneven temperature. In some embodiments, the water pipes 103 can also be designed to be laid in a spiral shape, achieving more uniform cooling effect.

[0053] In some embodiments, the area of the Teflon coating is at least equal to the area of the lower surface of the photomask plate 2, and the thickness of the Teflon coating is between 10μm and 15μm.

[0054] The Teflon coating has good hydrophobicity and corrosion resistance, so the surface of the workbench 1 will not be corroded by the cooling liquid and disassembly tools, further improving the service life of the workbench 1. By using Teflon coating and controlling its thickness between 10μm and 15μm, the conduction of cooling is effectively improved. The thickness of the Teflon coating should not be too thick, as it will reduce the cooling effect, so the thickness is set between 10μm and 15μm.

[0055] In some embodiments, the inner surfaces of the rest table 1, except for the upper inner surface of the rest table 1, are pasted with a thermal insulation layer, which is at least one of a rock wool thermal insulation layer, a glass wool thermal insulation layer, and a polyurethane foam thermal insulation layer.

[0056] The design of the thermal insulation layer effectively improves the temperature control effect of the cooling device, ensuring that the temperature in the rest table 1 can be continuously maintained within the low temperature range of 5°C to 10°C. Through the rock wool thermal insulation layer, the glass wool thermal insulation layer, or the polyurethane foam thermal insulation layer, the heat loss during cooling is reduced, the energy consumption is reduced, and the overall temperature control of the rest table 1 is more accurate and efficient, which helps to improve the stability and cleanliness of the disassembly effect.

[0057] In some embodiments, a disassembly method for a photomask protective film disassembly device is provided, comprising:

[0058] Step one: Place the photomask plate 2 with the photomask protective film 12 on the rest table 1, and use the limiting piece 3 to fix the photomask plate 2 on the rest table 1.

[0059] Step two: Turn the bolts on the first vertical column 401, the second vertical column 402, the third vertical column 403, and the fourth vertical column 404, adjust the height of the first sliding rod 501 and the second sliding rod 502, so that the needle of the ejector pin 11 on the rotating rod 9 can be inserted into the outer frame insertion hole of the photomask protective film 12.

[0060] Step three: Water is introduced into the water pipe 103, the opening of the first flow control valve 104 and the second flow control valve 105 is maintained, and the temperature value detected by the first temperature sensor is maintained between 5°C and 10°C.

[0061] The temperature of the water introduced into the water pipe 103 is between 5°C and 10°C.

[0062] Step four: When the temperature value detected by the first temperature sensor is between 5°C and 10°C and is maintained for at least 1 min, hold both hands on the two handles 10 respectively, slide the rotating rod 9 to approach the photomask protective film 12, until the ejector pin 11 abuts against the outer frame insertion hole of the photomask protective film 12.

[0063] The temperature sensor can be designed to be received by a signal receiver outside the device, and processed by a control system, so as to control the opening of the first flow control valve 104 and the second flow control valve 105 to achieve water flow control. The control combination between the temperature sensor and the flow control valve uses existing technical methods, such as using PID, i.e. "proportional-integral-derivative" control algorithm.

[0064] Step five: Press the two handles 10 so that the ejector pin 11 prys the outer frame insertion hole of the photomask protective film 12, thereby driving the photomask protective film 12 to separate from the upper surface of the photomask plate 2.

[0065] In some embodiments, the method of maintaining the temperature value detected by the first temperature sensor between 5-10℃ comprises:

[0066] If the temperature value detected by the first temperature sensor is not between 5-10℃, the temperature values of the second temperature sensor 106, the third temperature sensor 107 and the fourth temperature sensor 108 are extracted;

[0067] If the temperature values detected by the second temperature sensor 106 and the fourth temperature sensor 108 are both greater than 10℃, the opening of the first flow control valve 104 is reduced and the opening of the second flow control valve 105 is increased. When the temperature value detected by the third temperature sensor 107 is between 5-10℃ and remains for at least 1 min, the opening of the second flow control valve 105 is adjusted to be the same as the opening of the first flow control valve 104;

[0068] If the temperature values detected by the second temperature sensor 106 and the fourth temperature sensor 108 are both less than 5℃, the opening of the first flow control valve 104 is increased and the opening of the second flow control valve 105 is reduced. When the temperature value detected by the third temperature sensor 107 is between 5-10℃ and remains for at least 1 min, the opening of the first flow control valve 104 is adjusted to be the same as the opening of the second flow control valve 105;

[0069] If the temperature value detected by the second temperature sensor 106 is greater than 10℃ and the temperature value detected by the fourth temperature sensor 108 is less than 5℃, the openings of the first flow control valve 104 and the second flow control valve 105 are adjusted according to the temperature value detected by the third temperature sensor 107. If the temperature value detected by the third temperature sensor 107 is greater than 10℃, the opening of the first flow control valve 104 is reduced and the opening of the second flow control valve 105 is increased. When the temperature value detected by the third temperature sensor 107 is between 5-10℃ and remains for at least 1 min, the opening of the second flow control valve 105 is adjusted to be the same as the opening of the first flow control valve 104. If the temperature value detected by the third temperature sensor 107 is less than 10℃, the opening of the first flow control valve 104 is increased and the opening of the second flow control valve 105 is reduced. When the temperature value detected by the third temperature sensor 107 is between 5-10℃ and remains for at least 1 min, the opening of the first flow control valve 104 is adjusted to be the same as the opening of the second flow control valve 105.

[0070] In the implementation process of the dismounting method of the photomask protective film dismounting device, in order to facilitate and accurately control, a temperature controller and a timer can be added. The temperature controller is used to control the temperature in the water pipe 103 to be maintained at 5-10℃, and the timer is used to detect the temperature maintaining time.

[0071] After the photomask protective film 12 is removed by using a removal method using a photomask protective film removal device, it is finally cleaned without sulfuric acid.

[0072] This method was compared with heating on a heating plate and direct removal with a removal tool in an experiment. The heating temperature of the heating plate was between 50°C and 150°C. The area covered by the adhesive remaining on the photomask 2 during the removal process or the area damaged by the photomask 2 was set as A, and the total area of ​​the photomask 2 was set as B. The value of A / B was used as the experimental result data. A total of three experiments were conducted. In each experiment, 20 samples were randomly selected for each method, and the average value of A / B was taken and expressed in percentage. The smaller the A / B value, the better the removal effect, the better the obtained photomask 2, and the more convenient the subsequent processing. The comparative experiment table is shown below:

[0073] Table 1 Comparison of photomask protective film removal effects

[0074]

[0075] It can be seen from the above table that the method of the embodiment of the utility model has the best removal effect.

[0076] Reference Figures 6-7 , Figure 6 The photomask is heated by a heating plate in the prior art. Figure 6 In the middle part, it can be seen that there is adhesive residue on the photomask; Figure 7 In the embodiment of the present invention, no adhesive residue is left on the photomask obtained by the method of the embodiment of the present invention. Figures 8-9 ,exist Figure 8 There are yellow dots in the green box in the lower left corner. The yellow dots are the adhesive splashed on the photomask after the heating method of the heating plate is used in the prior art. Figure 9 The photomask obtained by the method of the embodiment of the present invention will not be sprayed with adhesive.

[0077] In summary, the present invention provides a photomask protective film removal device that uses a cooling device to cure the adhesive at low temperatures, effectively reducing adhesion. Combined with a precise mechanical removal component design, the photomask protective film 12 can be easily and safely removed in a low-temperature environment. This not only avoids contamination during heated removal but also significantly reduces the risk of damage to the photomask 2. This design provides excellent results in precise temperature control, convenient removal, and protection of the photomask 2.

[0078] While the application has been described by way of example with reference to preferred embodiments, it is to be understood that this application is not limited to the embodiments disclosed, but is intended to cover various arrangements or modifications thereof. Therefore, other modifications and embodiments of the application will occur to those skilled in the art upon reading the above description and which are intended to be within the scope of the application. It is intended that the scope of the application be defined by the following claims.

Claims

1. A photomask protective film removal device, characterized in that: It includes a storage table, the upper surface of which is fixed with a limiting member, which is used to fix the photomask on the upper surface of the storage table; the upper surface of the storage table is coated with a Teflon coating; the upper surface of the storage table is also fixed with a disassembly component, which is used to separate the photomask protective film adhered to the upper surface of the photomask when the photomask is fixed on the storage table; the upper surface of the storage table is also fixed with a first temperature sensor; a cooling device is installed in the storage table, and the cooling device includes a water pipe, which is used to maintain the temperature of the upper surface of the storage table at 5°C to 10°C when water is passed through the water pipe; the water inlet of the water pipe is located on one side of the storage table, and the water outlet of the water pipe is located on the other side opposite to the water inlet; the end of the water pipe close to the water inlet is air-tightly connected to a first flow electric control valve, and the end of the water pipe close to the water outlet is air-tightly connected to a second flow electric control valve.

2. The photomask protective film removal device according to claim 1, characterized in that: The limiting member includes a fixed end fixed to the upper surface of the storage platform, and the limiting member also includes a rotating end rotatably connected to the fixed end, and a blocking piece is fixed on the rotating end. When the photomask is placed on the storage platform, the rotating end is used to rotate the blocking piece to block the upper surface of the photomask.

3. The photomask protective film removal device according to claim 2, characterized in that: The disassembly assembly includes four columns fixed to the upper surface of the storage table, and the four columns are defined as a first column, a second column, a third column and a fourth column in a counterclockwise direction; A first sliding rod is connected between the first column and the second column, an end of the first sliding rod close to the first column is slidably connected to a first fixed rod, an end of the first fixed rod away from the first sliding rod is fixed to a first rotating member, an end of the first sliding rod close to the second column is slidably connected to a second fixed rod, and an end of the second fixed rod away from the first sliding rod is fixed to a second rotating member; A second sliding rod is connected between the third column and the fourth column, an end of the second sliding rod close to the third column is slidably connected to a third fixed rod, an end of the third fixed rod away from the second sliding rod is fixed to a third rotating member, an end of the second sliding rod close to the fourth column is slidably connected to a fourth fixed rod, and an end of the fourth fixed rod away from the second sliding rod is fixed to a fourth rotating member; A first prying member is rotatably connected between the first rotating member and the fourth rotating member, and the first prying member includes a rotating rod, a handle and a ejector pin, one end of the rotating rod is rotatably connected to the first rotating member, and the other end of the rotating rod is rotatably connected to the second rotating member; there are two ejector pins and both are fixed on the rotating rod, the needle heads of the ejector pins face the photomask protective film, and the arrangement positions of the ejector pins correspond one-to-one with the outer frame insertion holes of the photomask protective film; the handle is fixed on the rotating rod and faces away from the needle heads of the ejector pins, and when the needle heads of the ejector pins are inserted into the outer frame insertion holes of the photomask protective film, the handle is used to separate the photomask protective film from the photomask plate after being pressed; a second prying member is rotatably connected between the second rotating member and the third rotating member, and the first prying member and the second prying member have the same structure.

4. The photomask protective film removal device according to claim 3, characterized in that: Two limit blocks are fixed on the first sliding rod, one of which is between the first column and the first fixed rod, and the other is between the second column and the second fixed rod; two limit blocks are also fixed on the second sliding rod, one of which is between the third column and the third fixed rod, and the other is between the fourth column and the fourth fixed rod.

5. The photomask protective film removal device according to claim 4, characterized in that: The first column, the second column, the third column and the fourth column are columns with external threads, and two bolts are threaded on the first column, the second column, the third column and the fourth column respectively. One end of the first sliding rod is slidably connected to the first column and is between the two bolts, and the other end of the first sliding rod is slidably connected to the second column and is between the two bolts; one end of the second sliding rod is slidably connected to the third column and is between the two bolts, and the other end of the second sliding rod is slidably connected to the fourth column and is between the two bolts.

6. The photomask protective film removal device according to claim 5, characterized in that: The water pipe is evenly laid in the storage table. At least three temperature sensors are fixed on the water pipe between the first flow electric control valve and the second flow electric control valve. They are defined as the second temperature sensor, the third temperature sensor and the fourth temperature sensor in order of water inlet. The second temperature sensor is close to the first flow electric control valve, the third temperature sensor is located at the midpoint of the length of the water pipe, and the fourth temperature sensor is close to the second flow electric control valve.

7. The photomask protective film removal device according to claim 1, characterized in that: The coating area of ​​the Teflon coating is at least equal to the lower surface area of ​​the photomask, and the thickness of the Teflon coating is between 10 μm and 15 μm.

8. The photomask protective film removal device according to claim 1, characterized in that: The inner surfaces of the storage table except the upper inner surface are all pasted with an insulation layer, and the insulation layer is at least one of a rock wool insulation layer, a glass wool insulation layer, and a polyurethane foam insulation layer.

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