Goods lattice positioning data automatic correction system of wafer box storage library

Abstract

The utility model discloses an automatic correction system for lattice positioning data of a wafer cassette storage library, which relates to the field of lattice positioning systems for wafer cassette storage, and comprises a shelf and a carrying mechanical arm which are arranged oppositely, the carrying mechanical arm is controlled by a PLC (programmable logic controller), and the PLC is connected with the shelf and the carrying mechanical arm. Multiple layers of goods grids are arranged on one side of the goods shelf from top to bottom; according to the automatic correction system for the goods lattice positioning data of the wafer box storage library, the distance measuring sensor is introduced, the distance value from the sensor to the goods lattice can be measured, the Y-direction positioning data is calculated and corrected through a control program, accurate determination of the Y-direction positioning data of a carrying mechanical arm is achieved, efficiency is high, stability and reliability are achieved, and the automatic correction system is suitable for large-scale popularization and application. And it can be guaranteed that the carrying mechanical arm extends to the target position of goods taking and placing in each goods lattice accurately, and the situations that goods taking and placing are not stable, vibration exceeds the standard and the like due to the improper position are avoided.

Description

Technical Field

[0001] The utility model relates to the field of wafer box storage grid positioning systems, in particular to an automatic correction system for grid positioning data of a wafer box storage library. Background Art

[0002] The wafer cassette storage areas are located on either side of the robotic arm, with each side housing approximately 30 rows of 10-tiered shelves. The robotic arm precisely handles the wafer cassettes through multi-dimensional movement, requiring the storage of positioning data for each shelf, particularly in the Y-axis (extended position). Upon receiving commands from the upper level, the controller transmits this positioning data to the robotic arm, enabling coordinated movement of all axes to the designated shelf, accurately placing and retrieving the wafer cassette.

[0003] According to the mechanical design, the Y-axis positioning data for all shelves on one side of the wafer cassette storage system is theoretically identical. However, during on-site installation, the shelves are mounted using profiles, to which the shelves are fixed. Furthermore, the shelves on each side are approximately 5 meters high and 30 meters long, covering an area of ​​150 square meters. For such a large area, using profiles is more suitable and cost-effective, with a typical ±2mm planar installation accuracy error. Eliminating this ±2mm installation error requires replacing mounting materials and equipment, which is costly.

[0004] Wafer cassette storage systems differ from conventional high-bay warehouses, where an error of ±2mm is acceptable and does not affect the loading and unloading of goods. However, wafer cassette storage systems require a Y-axis positioning accuracy of ±0.5mm during loading and unloading. Wafers exceeding this accuracy cannot be placed on the shelves. Consequently, if theoretical Y-axis positioning data for all shelves on one side is used, the robotic arm's extension position will be inaccurate, leading to unstable loading and unloading and excessive vibration. Utility Model Content

[0005] In order to make up for the shortcomings of the existing technical problems, the purpose of the utility model is to provide a cargo compartment positioning data automatic correction system for a wafer box storage library, which introduces a ranging sensor to realize the accurate determination of the Y-axis positioning data of the transport robot arm, ensure that the transport robot arm extends to the target position for picking and placing goods accurately at each cargo compartment, and avoid unstable picking and placing of goods, excessive vibration, etc. due to inappropriate positioning.

[0006] In order to solve the problems of the prior art, the technical solutions of the present utility model are as follows:

[0007] A system for automatically correcting the positioning data of a cargo compartment of a wafer box storage library comprises a shelf and a transport robot arm arranged relatively to each other, wherein a plurality of layers of cargo compartments are arranged from top to bottom on one side of the shelf, wherein the cargo compartments of the plurality of layers are evenly spaced on the shelf, and the plurality of cargo compartments on each layer are evenly spaced;

[0008] A marker is fixed on the outer wall of the cargo grid, and a distance measuring sensor is fixed on the outer wall of the transport robot arm facing the shelf.

[0009] Preferably, the marker is fixed on the top surface of the cargo compartment, and the marker is a sticker. Choosing a sticker as the marker is not only low-cost and easy to replace and maintain, but also can be customized with different patterns or codes as needed so that the system can identify each cargo compartment more accurately.

[0010] Preferably, the distance measuring sensor is a laser distance measuring sensor, which is known for its high precision, fast response and long-distance measurement capability. It can help the system accurately measure the distance between the handling robot arm and the cargo grid in real time, thereby achieving precise positioning control.

[0011] Preferably, the transport robot arm is controlled by a PLC controller. PLC is a programmable logic controller, which is a digital computing and operating electronic system designed specifically for industrial environments. It has the advantages of high reliability, flexible programming, easy expansion and maintenance. Through the PLC controller, the system can achieve precise control of the transport robot arm, including the adjustment of key parameters such as moving speed and positioning accuracy, thereby ensuring that the storage and transportation process of the wafer box is efficient, accurate and safe.

[0012] Compared with the prior art, the advantages of the present invention are as follows:

[0013] The utility model can measure the distance value from the sensor to the cargo grid by introducing a distance measuring sensor, calculate it through a control program, and correct it into the Y-axis positioning data, thereby realizing accurate determination of the Y-axis positioning data of the transporting robot arm. The utility model has high efficiency, stability and reliability, and can ensure that the transporting robot arm is accurately extended to the target position for picking up and placing goods in each cargo grid, thereby avoiding unstable picking up and placing of goods, excessive vibration, and the like due to inappropriate positioning. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0015] Figure 2 This is a schematic diagram of the position relationship between the transport robot arm and the shelf of the present utility model.

[0016] Figure numerals: 1. Shelf; 2. Transport robot arm; 3. Cargo grid; 4. Marker; 5. Distance measuring sensor; 6. Wafer box. DETAILED DESCRIPTION

[0017] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0018] See also Figures 1 to 2 This embodiment provides an automatic correction system for the positioning data of a cargo compartment of a wafer box storage library, comprising a shelf 1 and a transport robot 2 arranged relatively to each other, the transport robot 2 being controlled by a PLC controller, and a plurality of layers of cargo compartments 3 being arranged from top to bottom on one side of the shelf 1, the plurality of layers of cargo compartments 3 being evenly spaced on the shelf 1, and the plurality of cargo compartments 3 on each layer being evenly spaced;

[0019] A marker 4 is fixed on the top surface of the outer wall of the cargo grid 3. The marker 4 is a sticker. A distance sensor 5 is fixed on the outer wall of the transport robot arm 2 facing the shelf 1. The distance sensor 5 is a laser distance sensor. The sticker as the marker 4 is more cost-effective and easier to maintain.

[0020] When the transport robot 2 moves to a position facing a cargo box 3, the distance to the marker 4 is measured by the distance measuring sensor 5. Then, the PLC controller is used to calculate the Y-direction distance that the transport robot 2 needs to extend, that is, the Y-direction positioning data of the transport robot 2. The specific steps of the Y-direction positioning data calibration are as follows. Take the calculation of the Y-direction positioning data ji of the cargo box 3 in the i-th column of the j-th layer as an example:

[0021] A1. The storage device theoretical value Ycji is saved as the Y-axis theoretical positioning data of the j-th layer, i-th column, and stored in the PLC controller. The Y-axis theoretical positioning data of all the cargo compartments 3 are stored in the same way.

[0022] A2. Based on the actual number of layers and columns of shelf 1, write the maximum number of layers j and the maximum number of columns i into the PLC controller;

[0023] A3: The transport robot 2 reaches the teaching position at the first level of the first row of the cargo compartment 3, aligns the distance sensor 5 with the marker 4, and records the Y-distance value from the distance sensor 5 to the marker 4 at the teaching position to obtain the reference value Yb. The data is then transmitted to the PLC controller.

[0024] A4. Start the transport robot 2 and move it to the taught position of each compartment 3 one by one. At the taught position of the compartment 3 in the i-th column on the j-th layer, the distance sensor 5 measures the Y-direction distance to the marker 4 on the corresponding compartment 3, obtaining the measured value Ydji. The data is transmitted to the PLC controller for recording.

[0025] A5, the PLC controller calculates and corrects the Y-axis positioning value ji of the cargo compartment 3 based on the reference value Yb, the theoretical value Ycji of the storage device in the cargo compartment 3 in the i-th column of the j-th layer, and the measured value Ydji of the cargo compartment 3 in the i-th column of the j-th layer;

[0026] The Y-axis positioning value ji is calculated using the following formula:

[0027] Y-axis positioning valueji =Y dji -Y b +Y cji ;

[0028] The order of automatic calibration of all shelves 3 on one side of the shelf 1 is from the first layer of the first column to the first layer of the i-th column, then from the second layer of the first column to the second layer of the i-th column, and then from the third layer of the first column to the third layer of the i-th column, until the Y-axis positioning data calibration of the shelves 3 in all columns and rows is completed;

[0029] By introducing the distance measuring sensor 5, the distance value from the sensor to the cargo grid 3 can be measured, calculated through the control program, and corrected into the Y-axis positioning data, so as to realize the accurate determination of the Y-axis positioning data of the transporting robot arm 2. This is highly efficient, stable and reliable, and can ensure that the transporting robot arm 2 is accurately extended to the target position for picking up and placing goods in each cargo grid 3, avoiding the unstable picking up and placing of goods, excessive vibration, etc. due to inappropriate positioning.

[0030] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An automatic correction system for the positioning data of the cargo compartment of a wafer box storage library, characterized in that: The invention comprises a shelf (1) and a transporting mechanical arm (2) arranged opposite to each other, wherein one side of the shelf (1) is provided with a plurality of layers of cargo compartments (3) from top to bottom; A marker (4) is fixed on the outer wall of the cargo grid (3), and a distance sensor (5) is fixed on the outer wall of the transporting mechanical arm (2) facing the shelf (1).

2. The automatic correction system for cargo compartment positioning data of a wafer box storage library according to claim 1, characterized in that: Several layers of cargo compartments (3) are distributed on the shelf (1) at equal intervals.

3. The automatic correction system for cargo compartment positioning data of a wafer box storage library according to claim 2, characterized in that: The cargo compartments (3) on each layer are distributed at equal intervals.

4. The automatic correction system for cargo compartment positioning data of a wafer box storage library according to claim 1, characterized in that: The marker (4) is fixed on the top surface of the cargo grid (3).

5. The automatic correction system for cargo compartment positioning data of a wafer box storage library according to claim 4, characterized in that: The marker (4) is a sticker.

6. The automatic correction system for cargo compartment positioning data of a wafer box storage library according to claim 1, characterized in that: The distance measuring sensor (5) is a laser distance measuring sensor.

7. The automatic correction system for cargo compartment positioning data of a wafer box storage library according to claim 6, characterized in that: The transporting mechanical arm (2) is controlled by a PLC controller.

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