Heating device and single crystal furnace

Abstract

The utility model relates to the technical field of monocrystalline silicon manufacturing, in particular to a heating device and a single crystal furnace, and the heating device comprises a bottom heating part and a side heating part; wherein the bottom heating part is connected with the side heating part, and the bottom heating part and the side heating part define a bowl-shaped structure which is hollow inside and provided with an opening in the top in the preset direction. According to the heating device provided by the invention, the side heating part is additionally arranged, and the side heating part is closer to the pot support, so that when the heating device is not used for heating, more heat radiated by the pot support and the bottom of the pot upper can be conducted away, the temperature of the lower part of the quartz crucible is quickly reduced, and the oxygen content in monocrystalline silicon is more favorably reduced; during heating, heat can be accumulated, and the material melting time can be shortened.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of single crystal silicon manufacturing, in particular to a heating device and a single crystal furnace. BACKGROUND

[0002] At present, with the rapid development of the photovoltaic industry under the background of "carbon peak and carbon neutralization", the growth of large-diameter N-type single crystal silicon will become the mainstream technology in the coming years. During the crystal pulling stage in the production process, the upper main heater is turned on and the lower bottom heater is turned off, so the bottom heater is cooler than the upper main heater. It will take away part of the heat of the lower part of the crucible holder and the silicon solution, reduce the temperature of the lower half of the crucible, weaken the reaction degree of the silicon liquid and the quartz crucible, and then reduce the oxygen content in the single crystal silicon. However, the mainstream solar silicon wafer factory currently uses a sheet snake type bottom heater, which only contacts the bottom of the crucible holder, has poor heat conduction effect, and thus leads to high oxygen content in the single crystal silicon. Moreover, the heat of this bottom heater is relatively dispersed during the melting stage, resulting in a long melting time. CONTENT OF THE UTILITY MODEL

[0003] The purpose of the present application is to provide a heating device and a single crystal furnace, which solves the technical problem that the bottom of the single crystal furnace in the prior art generally uses a sheet snake type bottom heater, which only contacts the pot holder of the crucible, has poor heat conduction effect, and thus leads to high oxygen content in the single crystal silicon, and the heat of this bottom heater is relatively dispersed during the melting stage, resulting in a long melting time.

[0004] The present application provides a heating device, comprising: a bottom heating part and a side heating part; wherein the bottom heating part is connected with the side heating part and surrounds a bowl-shaped structure with an internal cavity and an open top along a predetermined direction.

[0005] In the above technical solution, further, the number of the side heating parts is multiple, and they are sequentially and spacedly arranged along the circumferential edge of the bottom heating part.

[0006] In any of the above technical solutions, further, the side heating part is formed with a side cutout penetrating through the inner side and the outer side thereof, and one end of the side cutout penetrates one end of the side heating part close to the bottom heating part, and the opposite end of the side cutout does not penetrate the side heating part.

[0007] In any of the above technical solutions, further, the bottom heating part is formed with an avoidance through hole penetrating through the inner side and the outer side thereof; the bottom heating part is formed with a bottom cutout penetrating through the inner side and the outer side thereof, and the two ends of the bottom cutout are respectively communicated with the avoidance through hole and the side cutout.

[0008] In any of the above technical solutions, further, the bottom heating part is formed with an avoiding gap penetrating through the inner side and the outer side thereof, and the avoiding gap extends and penetrates through the outer peripheral edge of the bottom heating part.

[0009] In any of the above technical solutions, further, the bottom heating part comprises a long bottom heating part and a short bottom heating part; wherein the long bottom heating part and the short bottom heating part are arranged alternately along the outer periphery of the avoiding through hole, and the two adjacent long bottom heating parts and the short bottom heating part arranged therebetween enclose the avoiding gap; any long bottom heating part and any short bottom heating part are provided with the side heating part.

[0010] In any of the above technical solutions, further, at least two of the long bottom heating parts arranged oppositely are in the shape of a fan ring.

[0011] In any of the above technical solutions, further, at least one of the long bottom heating parts is in the shape of a rectangle.

[0012] In any of the above technical solutions, further, at least one of the short bottom heating parts is in the shape of an arch.

[0013] In any of the above technical solutions, further, at least one of the short bottom heating parts is in the shape of a fan ring, and the outer peripheral edge thereof is provided with an outwardly opened arc cutout.

[0014] In any of the above technical solutions, further, the side heating part is formed with an auxiliary through hole penetrating through the inner side and the outer side thereof.

[0015] In any of the above technical solutions, further, the heating device further comprises a positive electrode and a negative electrode, the bottom heating part is formed with a positive electrode mounting through hole and a negative electrode mounting through hole penetrating through the inner side and the outer side thereof and arranged at intervals, and the positive electrode is mounted in the positive electrode mounting through hole, and the negative electrode is mounted in the negative electrode mounting through hole.

[0016] In any of the above technical solutions, further, the material of the bottom heating part and the side heating part is graphite.

[0017] The application also provides a single crystal furnace comprising a furnace body and the heating device of any of the above technical solutions, and the heating device is arranged at the bottom of the furnace body. Thus, the heating device has all the beneficial technical effects, which are not described here again.

[0018] Compared with the prior art, the application has the following beneficial effects:

[0019] The heating device provided by the application adds a side heating part, which is closer to the pot support, so that when it is not heated, it can conduct more heat radiated by the pot support and the bottom of the pot to quickly reduce the temperature of the lower part of the quartz crucible, which is more conducive to reducing the oxygen content in the single crystal silicon, and the heating device is in the shape of a bowl, which can accumulate heat when it is heated, which is conducive to shortening the melting time. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the specific embodiments or prior art of the present application, the drawings needed to be used in the specific embodiments or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0021] Figure 1 The structure schematic diagram of the heating device provided by the embodiment of the present application is shown in the figure.

[0022] Figure 2 Another structure schematic diagram of the heating device provided by the embodiment of the present application is shown in the figure.

[0023] Figure 3 The structure schematic diagram of the bottom of the single crystal furnace provided by the embodiment of the present application is shown in the figure.

[0024] Reference signs:

[0025] 1-bottom heating part, 11-long bottom heating part, 111-fan ring-shaped long bottom heating part, 112-rectangular long bottom heating part, 113-avoiding through hole, 114-bottom cutout, 115-avoiding notch, 116-positive electrode mounting through hole, 117-negative electrode mounting through hole, 12-short bottom heating part, 121-arch-shaped short bottom heating part, 122-fan ring-shaped short bottom heating part, 2-side heating part, 21-side cutout, 22-assisting through hole. DETAILED DESCRIPTION

[0026] The technical solutions of the present application will be described in detail below with reference to the drawings. Obviously, the described embodiments are some embodiments of the present application, not all embodiments.

[0027] The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed application, but only represents selected embodiments of the present application.

[0028] All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative labor fall within the scope of the present application.

[0029] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0030] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0031] The following refers to Figures 1 to 3 The heating device and the single crystal furnace according to some embodiments of the present application are described.

[0032] Embodiment one

[0033] Referring to Figures 1 to 3 As shown in the drawings, the embodiments of the present application provide a heating device, comprising a bottom heating part 1 and a side heating part 2; wherein the bottom heating part 1 is connected with the side heating part 2, and surrounds a bowl-shaped structure with an inner cavity and an open top along a predetermined direction.

[0034] According to the above-described structure, the heating device provided by the present application adds a side heating part 2, which is closer to the pot support, so that when it is not heated, it can conduct more heat radiated by the pot support and the bottom of the pot help to quickly reduce the temperature of the lower part of the quartz crucible, which is more conducive to reducing the oxygen content in the single crystal silicon. Moreover, the heating device is in a bowl shape, which can accumulate heat when it is heated, which is conducive to shortening the melting time.

[0035] In this embodiment, preferably, as Figure 1 and Figure 2 As shown in the drawings, the number of side heating parts 2 is multiple, and is sequentially and spacedly arranged along the circumferential edge of the bottom heating part 1.

[0036] According to the above-described structure, the plurality of side heating portions 2 are designed, which is helpful to provide more heat conduction structure in the crystal pulling stage, i.e. the state without heating, to heat the heat conduction rate, and thus to quickly reduce the temperature of the lower part of the crucible. In addition, in the melt stage, i.e. when the heating device is heated, more heat sources are provided to quickly heat, thereby shortening the melting time.

[0037] It should be noted that the number of side heating portions 2 is not limited to multiple, but can also be one, for example, it can be part of a ring structure, or a complete ring structure, which is arranged on the outer peripheral edge of the bottom heating portion 1.

[0038] In this embodiment, preferably, as shown in Figure 1 and Figure 2 , the materials of the bottom heating portion 1 and the side heating portion 2 are graphite, and the heating device further includes a positive electrode and a negative electrode. The bottom heating portion 1 is formed with positive electrode mounting through holes 116 and negative electrode mounting through holes 117 penetrating the inner side and the outer side and arranged at intervals, and the positive electrode is mounted in the positive electrode mounting through hole 116, and the negative electrode is mounted in the negative electrode mounting through hole 117.

[0039] According to the above-described structure, the positive electrode and the negative electrode are in conduction with the external power supply, so that the resistance of the bottom heating portion 1 and the side heating portion 2 made of graphite generates heat, thereby playing a role of heating. It can be seen that the heating device belongs to a graphite heater, of course, not limited to this, the materials of the bottom heating portion 1 and the side heating portion 2 are not limited to graphite, but also can be other materials with resistance, that is, the heating device is not limited to a graphite heater.

[0040] In this embodiment, preferably, as shown in Figure 1 and Figure 2 , the side heating portion 2 is formed with a side cutout 21 penetrating the inner side and the outer side thereof, and one end of the side cutout 21 penetrates one end of the side heating portion 2 close to the bottom heating portion 1, and the opposite end of the side cutout 21 does not penetrate the side heating portion 2.

[0041] On this basis, preferably, as shown in Figure 1 and Figure 2 , the bottom heating portion 1 is formed with an avoidance through hole 113 penetrating the inner side and the outer side thereof; the bottom heating portion 1 is formed with a bottom cutout 114 penetrating the inner side and the outer side thereof, and the two ends of the bottom cutout 114 are respectively communicated with the avoidance through hole 113 and the side cutout 21.

[0042] According to the above-described structure, the bottom cutout 114 and the side cutout 21 are sequentially connected and extend to the avoiding through hole 113 to form a complete strip-shaped total cutout, so that the outer periphery of the total cutout forms a U-shaped structure. When the number of the total cutouts is multiple, the structure located outside the total cutouts forms a curved snake-shaped structure. When the device is powered on, the current can flow along the curved snake-shaped structure, that is, the resistance value is increased, the heat production is increased, and the rapid heating effect can be achieved.

[0043] It should be noted that the structure is not limited to the above, and the cutout can also not be provided on the bottom heating part 1 and the side heating part 2, which is selected according to actual needs.

[0044] In this embodiment, preferably, as shown in Figure 1 and Figure 2 , the side heating part 2 is formed with an auxiliary through hole 22 penetrating the inner side and the outer side thereof, which can further increase the current flow distance, that is, further increase the resistance value, improve the heat production, and thus help to improve the heating rate. Of course, it is not limited to this, and the auxiliary through hole 22 can also not be provided.

[0045] In this embodiment, preferably, as shown in Figure 1 and Figure 2 , the bottom heating part 1 is formed with an avoiding notch 115 penetrating the inner side and the outer side thereof, and the avoiding notch 115 extends and penetrates the outer peripheral edge of the bottom heating part 1.

[0046] According to the above-described structure, the foregoing avoiding notch 115 plays a role in avoiding other components of the single crystal furnace bottom.

[0047] In this embodiment, preferably, as shown in Figure 1 and Figure 2 , the bottom heating part 1 includes a long bottom heating part 11 and a short bottom heating part 12; wherein the long bottom heating part 11 and the short bottom heating part 12 are sequentially and alternately arranged along the outer periphery of the avoiding through hole 113, and the adjacent two long bottom heating parts 11 and the short bottom heating part 12 arranged therebetween surround the avoiding notch 115; any long bottom heating part 11 and any short bottom heating part 12 are provided with a side heating part 2.

[0048] According to the above-described structure, the bottom heating part 1 is composed of the long bottom heating part 11 and the short bottom heating part 12, so that the avoiding notch 115 can be formed between the adjacent two long bottom heating parts 11 and the short bottom heating part 12 arranged therebetween, thereby playing a role in avoiding other components.

[0049] In this embodiment, preferably, as shown in Figure 1 and Figure 2As shown in the drawings, two of the long bottom heating portions 11 are in a relative arrangement, and each is in a fan ring shape. In order to distinguish other long bottom heating portions 11, the two long bottom heating portions 111 in the fan ring shape are referred to as long bottom heating portions 111 in the fan ring shape, and one of the long bottom heating portions in the fan ring shape is provided with the positive electrode mounting through hole, and the other long bottom heating portion in the fan ring shape is provided with the negative electrode mounting through hole. Preferably, along the circumferential direction of the avoiding through hole 113, the width of the two long bottom heating portions 111 in the fan ring shape is greater than the width of the long bottom heating portion 11 and the short bottom heating portion 12.

[0050] According to the above-described structure, the two long bottom heating portions 11 supporting the two electrodes, i.e., the positive electrode and the negative electrode, are designed in a fan ring shape, which has a sufficient width, i.e., a sufficient supporting area, and has a good supporting effect on the positive electrode and the negative electrode, so that the positive electrode and the negative electrode are more stable.

[0051] Further, preferably, the side heating portion 2 provided for any long bottom heating portion 11 is matched with the corresponding long bottom heating portion 11, and the side heating portion 2 provided for any short bottom heating portion 12 is matched with the corresponding short bottom heating portion 12. Of course, it is not limited to this.

[0052] In this embodiment, preferably, as shown in Figure 1 and Figure 2 , at least four long bottom heating portions 11 are in a rectangular shape. In order to distinguish, they are referred to as long bottom heating portions 112 in the rectangular shape. Since the long bottom heating portion 112 does not support the electrode, it can be processed in an elongated shape, i.e., the width can be reduced, the area can be made smaller, the heat conduction efficiency is ensured, interference with other components is avoided, and the material is saved.

[0053] Further, preferably, the two long bottom heating portions 111 in the fan ring shape arranged oppositely divide the device into two side regions, and each side region is provided with two long bottom heating portions 112 in the rectangular shape.

[0054] In this embodiment, preferably, as shown in Figure 1 and Figure 2 , four short bottom heating portions 12 are in an arch shape, and in order to distinguish, they are referred to as short bottom heating portions 121 in the arch shape, and are provided with a bottom cutout 114, and finally form a U-shaped structure.

[0055] In this embodiment, preferably, as shown in Figure 1 and Figure 2As shown in the figure, two short bottom heating portions 12 are also in the shape of a fan ring, and for the sake of distinction, they are named as short bottom heating portions 122 in the shape of a fan ring, and the outer peripheral edges thereof are provided with outwardly open circular arc cutouts.

[0056] It should be noted that the number of long bottom heating portions 111 in the shape of a fan ring is not limited to two as described above, and can be greater than two, such as three or four, etc.

[0057] In addition, the number of long bottom heating portions 112 in the shape of a rectangle is not limited to four as described above, and can be less than four, such as one, two or three, or can be greater than four, such as five or six.

[0058] In addition, the number of short bottom heating portions 121 in the shape of an arch is not limited to four as described above, and can be less than four, such as one, two or three, or can be greater than four, such as five or six.

[0059] In addition, the number of short bottom heating portions 122 in the shape of a fan ring is not limited to two as described above, and can be less than two, such as one, or can be greater than two, such as three or four, etc.

[0060] In addition, it should be noted that the structure in which the long bottom heating portions 111 in the shape of a fan ring, the long bottom heating portions 112 in the shape of a rectangle, the short bottom heating portions 121 in the shape of an arch, and the short bottom heating portions 122 in the shape of a fan ring coexist is not limited to the above, and the above structures can be combined at will, such as: only the long bottom heating portions 11 and the short bottom heating portions 122 in the shape of a fan ring, or only the long bottom heating portions 111 in the shape of a fan ring and the short bottom heating portions 121 in the shape of an arch, etc., and the specific selection is based on actual needs.

[0061] It should be noted that in the embodiment, the inner side refers to the side corresponding to the inside of the bowl-shaped structure with respect to the overall bowl-shaped structure, and the side corresponding to the outside of the bowl-shaped structure is the outer side, and in the embodiment, the predetermined direction can be the vertical direction, of course, not limited thereto.

[0062] Embodiment Two

[0063] The embodiment two of the application also provides a single crystal furnace, which comprises the heating device described in the above embodiment one, and thus has all the beneficial technical effects of the heating device, and the same technical features and beneficial effects will not be described again.

[0064] In this embodiment, preferably, as Figures 1 to 3 shown, the single crystal furnace further comprises a furnace body, and the heating device is arranged at the bottom in the furnace body.

[0065] According to the above-mentioned structure, the single crystal furnace provided by the application comprises a bottom heating part 1 and a side heating part 2, especially the side heating part 2 is closer to the pot support, so that when it is not heated, it can conduct more heat radiated by the pot support and the bottom of the pot help to quickly reduce the temperature of the lower part of the quartz crucible, which is more conducive to reducing the oxygen content in the single crystal silicon. Moreover, the heating device is in a bowl shape, which can accumulate heat when it is heated, which is conducive to shortening the melting time.

[0066] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the application, but not to limit them; although the application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the application.

Claims

1. A heating device, characterized in that: include: A bottom heating portion and a side heating portion; wherein the bottom heating portion is connected to the side heating portion and is arranged to form a bowl-shaped structure with a hollow interior and an open top along a preset direction; The side heating portion is formed with a side cut that passes through the inner and outer sides thereof, and one end of the side cut passes through one end of the side heating portion close to the bottom heating portion, and the other opposite end of the side cut does not pass through the side heating portion.

2. The heating device according to claim 1, characterized in that There are a plurality of side heating parts, which are sequentially spaced apart along the circumferential edge of the bottom heating part.

3. The heating device according to claim 1, characterized in that The bottom heating portion is formed with an avoidance through-hole penetrating the inner side and the outer side thereof; the bottom heating portion is formed with a bottom incision penetrating the inner side and the outer side thereof, and both ends of the bottom incision are respectively connected with the avoidance through-hole and the side incision.

4. The heating device according to claim 3, characterized in that The bottom heating portion is formed with an escape notch penetrating the inner side and the outer side thereof, and the escape notch extends and penetrates the outer peripheral edge of the bottom heating portion.

5. The heating device according to claim 4, characterized in that The bottom heating portion includes a long bottom heating portion and a short bottom heating portion; wherein, the long bottom heating portion and the short bottom heating portion are alternately arranged in sequence along the outer circumference of the avoidance through-hole, and the two adjacent long bottom heating portions and the short bottom heating portion arranged therebetween are arranged to form the avoidance gap; any of the long bottom heating portions and any of the short bottom heating portions are equipped with the side heating portion.

6. The heating device according to claim 5, characterized in that At least two of the long bottom heating portions that are arranged opposite to each other are in a fan ring shape; and / or At least one of the long bottom heating portions is rectangular; and / or At least one of the short bottom heating portions is arched; and / or At least one of the short bottom heating parts is in a fan-shaped shape, and an arc cutout opening outward is provided on its outer peripheral edge.

7. The heating device according to claim 1, characterized in that The side heating portion is formed with auxiliary through holes penetrating the inner side and the outer side thereof; and / or The heating device also includes a positive electrode and a negative electrode. The bottom heating portion is formed with a positive electrode mounting through hole and a negative electrode mounting through hole that penetrate the inner and outer sides thereof and are arranged at intervals. The positive electrode is mounted in the positive electrode mounting through hole, and the negative electrode is mounted in the negative electrode mounting through hole.

8. The heating device according to any one of claims 1 to 7, characterized in that The bottom heating part and the side heating part are both made of graphite.

9. A single crystal furnace, characterized in that: The invention comprises a furnace body and the heating device according to any one of claims 1 to 8, wherein the heating device is arranged at the bottom of the furnace body.

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