Sucking disc device for square sheet glue uniformizing

By designing the alternating ridges and grooves of the suction cup device, the problem of uneven glue coating on the square wafers was solved, the uniform distribution of the photoresist was achieved, and the processing accuracy and product yield were improved.

CN223436511UActive Publication Date: 2025-10-14SUZHOU MEMSTOOLS SEMICON TECH CO LTD
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Patent Information

Application Number
CN202422880058.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-25
Publication Date
2025-10-14
Estimated Expiration
2034-11-25

AI Technical Summary

Technical Problem

Existing photoresist coating equipment has difficulty in effectively positioning square wafers, causing photoresist to accumulate at the edges of the wafers, resulting in uneven coating and affecting processing accuracy and product yield.

Method used

A positioning mechanism including a suction cup device is designed. The suction cup is provided with a first group of convex strips and a second group of convex strips arranged alternately to form orthogonal straight grooves and grooves. Combined with the upper cover made of aluminum alloy and polypropylene, accurate positioning and stable adsorption of the square piece can be achieved to avoid uneven glue coating.

Benefits of technology

The uniformity of the photoresist on the surface of the square wafer is improved, the uniformity of the coating in the edge and sharp corner areas is improved, the processing accuracy of photolithography and etching is improved, and the yield rate of semiconductor devices is improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The suction cup device comprises a suction cup, the suction cup structurally comprises a cup body, a center hole is formed in the middle of the cup body, a containing groove is formed in the end face of the top of the cup body, and two first protruding strip sets which are arranged in a central symmetry mode along the circle center of the center hole are arranged in the containing groove. The first convex strip groups are symmetrically arranged along the center of the center of the center hole, the two second convex strip groups are symmetrically arranged along the center of the center of the center hole, a first straight groove section is formed between each first convex strip group and one adjacent second convex strip group, a second straight groove section is formed between each first convex strip group and the other adjacent second convex strip group, and the two first straight groove sections are distributed at an interval of 180 degrees and form a first straight groove; and the two second straight flutes are distributed at an interval of 180 degrees in sections to form a second straight flute. By arranging the suction cup, the square sheet can be positioned and centered, so that the thickness uniformity of photoresist on the surface of the sheet after photoresist uniformizing is improved, particularly, the gluing uniformity at the edge and the sharp corner part is remarkably improved, the processing precision of subsequent photoetching and etching is improved, and the yield of subsequent semiconductor devices is improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing equipment, in particular to a sucker device for square wafer glue spreading. Background Art

[0002] In the semiconductor manufacturing industry, spin-coating technology, a key step in the photolithography process, is crucial for achieving high-quality, high-precision semiconductor device fabrication. Spin-coating equipment is typically used to coat wafers or square wafers. The spin-coating equipment consists of a positioning mechanism and a rotation mechanism. The positioning mechanism holds the workpiece in place, while the rotation mechanism rotates the positioning mechanism, which in turn rotates the workpiece. Centrifugal force evenly distributes the photoresist droplets on the workpiece surface.

[0003] In the prior art, the positioning mechanism used to fix the workpiece in the photoresist coating equipment is usually designed for round wafers and can effectively position the wafers; however, the traditional positioning mechanism is difficult to play a positioning role for square wafers, and cannot accurately ensure that the center of the square wafer coincides with the rotation center of the positioning mechanism. Under the action of centrifugal force, the photoresist will gather to the edge of the square wafer, resulting in excessive edge glue thickness. This uneven coating thickness will directly affect the subsequent photolithography and etching processes, resulting in a decrease in processing accuracy and ultimately a decrease in product yield. Utility Model Content

[0004] In view of the shortcomings of the above-mentioned existing production technology, the applicant provides a suction cup device for square wafer glue coating, thereby solving the problem of uneven glue coating on the edge area, especially the sharp corner part, of the existing glue coating equipment during the spin coating process of the square wafer.

[0005] The technical solutions adopted in this utility model are as follows:

[0006] A suction cup device for distributing glue on a square piece, comprising a suction cup, wherein the suction cup adsorbs the square piece under the action of a negative pressure source;

[0007] The structure of the suction cup is as follows: it includes a disc body, a center hole for connecting to a negative pressure source is provided in the middle of the disc body, and a receiving groove is provided on the top end surface of the disc body. Two first rib groups are arranged symmetrically along the center of the center hole, and two second rib groups are arranged symmetrically along the center of the center hole. A single group of first rib groups and a single group of second rib groups are alternately arranged along the circumference. A first straight groove segment is formed between the single group of first rib groups and an adjacent second rib group, and a second straight groove segment is formed between the single group of first rib groups and another adjacent second rib group. The two first straight groove segments are distributed at 180° intervals and form a first straight groove. The two second straight groove segments are distributed at 180° intervals and form a second straight groove. The first straight groove and the second straight groove are orthogonally distributed and connected to the center hole at the same time.

[0008] As a further improvement of the above technical solution:

[0009] The top end face of the disc body is provided with an annular groove, so that the top end face of the disc body forms a boss, and the accommodating groove is arranged on the top end face of the boss and concentrically arranged with the boss.

[0010] The single set of first convex strip groups comprises a plurality of first convex strips arranged at intervals, and a first groove is formed between adjacent two first convex strips, and the first groove is communicated with the first straight groove.

[0011] The single set of second convex strip groups comprises a plurality of second convex strips arranged at intervals, and a second groove is formed between adjacent two second convex strips, and the second groove is communicated with the first straight groove.

[0012] The bottom end face of the disc body is provided with an annular avoiding groove.

[0013] The central hole adopts a stepped hole structure.

[0014] The disc body adopts an aluminum alloy material.

[0015] Further comprising an upper cover, the upper cover is buckled with the suction disc, so as to surround the square piece on the top of the suction disc.

[0016] The structure of the upper cover comprises a cover body, the bottom of the cover body is hollowed out to form a cavity, and a plurality of clamping strips are arranged at intervals along the circumference on the cover body around the cavity.

[0017] The top end face of the disc body is provided with an annular clamping groove, the clamping groove corresponds to the clamping strip, and the upper cover is buckled with the suction disc by clamping the clamping strip into the clamping groove.

[0018] The cover body adopts a polypropylene material.

[0019] The beneficial effects of the utility model are as follows:

[0020] The utility model discloses compact structure, reasonable, convenient operation can be to square piece for centering adsorption through setting up suction disc, has reduced the phenomenon of uneven gluing caused by square piece initial position deviation, thereby improve the evenness of square piece surface photoresist thickness after uniform gluing, especially in the edge and horn part significantly improve the uniformity of gluing, improve the processing precision of subsequent photoetching and etching, improve the yield of subsequent semiconductor devices.

[0021] The utility model also includes the following advantages:

[0022] (1) through setting up first straight groove, second straight groove, first recess, second recess, can even and stable adsorption square piece, avoid square piece to produce displacement in the rotation process, promoted the overall stability of the spin coating process, thereby avoid square piece to produce displacement, vibration in the spin coating process.

[0023] (2) By setting the first convex strip, the second convex strip, the square piece can be effectively supported, the deformation of the square piece is avoided, and the uniformity of the glue coating can be further improved.

[0024] (3) By setting the upper cover made of polypropylene, the upper cover can be buckled with the suction cup to form a relatively closed working cavity, thereby reducing airflow interference during the spin coating process, ensuring that the photoresist can be more uniformly distributed on the surface of the square piece, especially in the edge and corner areas, avoiding the phenomenon of glue accumulation or thinning, and significantly improving the uniformity of the glue coating thickness. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a structural schematic view of the utility model.

[0026] Figure 2 is a full sectional view of the suction cup in the utility model.

[0027] Figure 3 is a top view of the suction cup in the utility model.

[0028] Figure 4 is a bottom view of the suction cup in the utility model.

[0029] Figure 5 is a top view of another structure of the suction cup in the utility model.

[0030] Figure 6 is a full sectional view of the upper cover in the utility model.

[0031] Figure 7 is a bottom view of the upper cover in the utility model.

[0032] Figure 8 is a structural schematic view of the square piece in the utility model.

[0033] Among them: 1, the suction cup; 2, the upper cover; 3, the square piece;

[0034] 101, the first straight groove; 102, the second straight groove; 103, the disc body; 104, the center hole; 105, the accommodating groove; 106, the clamping groove; 107, the annular groove; 108, the boss; 109, the air hole; 110, the avoiding groove; 111, the first convex strip; 112, the second convex strip; 113, the first recess; 114, the second recess;

[0035] 201, the cover body; 202, the cavity; 203, the clamping strip. DETAILED DESCRIPTION

[0036] The specific implementation manner of the utility model will be described below in combination with the drawings.

[0037] The structure and function of the utility model are as follows:

[0038] like Figures 1-8 As shown, a suction cup device for square piece glue spreading includes a suction cup 1, which absorbs the square piece 3 under the action of a negative pressure source; the structure of the suction cup 1 is as follows: it includes a disc body 103, a central hole 104 for connecting to the negative pressure source is provided in the middle of the disc body 103, a receiving groove 105 is provided on the top end surface of the disc body 103, and two first convex strip groups arranged symmetrically along the center of the center hole 104 and two second convex strip groups arranged symmetrically along the center of the center hole 104 are provided in the receiving groove 105. The first ridge groups and the second ridge groups are arranged alternately along the circumference. A first straight groove segment is formed between the single first ridge group and an adjacent second ridge group, and a second straight groove segment is formed between the single first ridge group and another adjacent second ridge group. The two first straight groove segments are spaced 180° apart and form a first straight groove 101. The two second straight groove segments are spaced 180° apart and form a second straight groove 102. The first straight groove 101 and the second straight groove 102 are orthogonally arranged and communicate with the center hole 104. The suction cup device of the present invention includes a suction cup 1, which uses the principle of negative pressure to absorb the square piece 3, thereby fixing the square piece 3 during the glue spreading process.

[0039] like Figures 2-5 As shown, the suction cup 1 includes a disc body 103, and a center hole 104 is formed at the center of the disc body 103. The center hole 104 adopts a stepped hole structure, which is convenient for fixed connection with the rotating platform of the glue-spinning equipment;

[0040] An annular avoidance groove 110 is provided on the bottom end surface of the disc body 103 . The avoidance groove 110 is arranged around the central hole 104 and is located at the periphery of the central hole 104 for cooperating with the rotating platform of the glue-spinning device.

[0041] An annular groove 107 is formed on the top end surface of the disk body 103, thereby forming a boss 108 on the top end surface of the disk body 103. The receiving groove 105 is formed on the top end surface of the boss 108 and is arranged concentrically with the boss 108. Preferably, the top end surface of the boss 108 is square, and the receiving groove 105 is a square groove. By properly sizing the receiving groove 105, the square piece 3 can be accurately positioned so that the center of the square piece 3 coincides with the center of the center hole 4 and, at the same time, coincides with the rotation center of the suction cup 1, thereby improving the uniformity of the photoresist thickness on the surface of the square piece 3 during the spin coating process.

[0042] In addition, the accommodating groove 105 can also be set as a special-shaped groove, which can play a role in positioning the opposite piece.

[0043] The first ridge group and the second ridge group are arranged in the accommodating groove 105 to form a first straight groove 101 and a second straight groove 102 that are orthogonally distributed. A single first ridge group includes a plurality of first ridges 111 arranged at intervals, and a first groove 113 is formed between two adjacent first ridges 111. The first groove 113 is connected to the first straight groove 101. A single second ridge group includes a plurality of second ridges 112 arranged at intervals, and a second groove 114 is formed between two adjacent second ridges 112. The second groove 114 is connected to the first straight groove 101. Figure 3 As shown, the first ridge 111 and the second ridge 112 are both in the shape of a cube; or Figure 5 As shown, the first ridges 111 and the second ridges 112 are both arc-shaped. At this time, the first grooves 113 and the second grooves 114 are both connected to the second straight grooves 102. By providing the first straight grooves 101 and the second straight grooves 102 connected to the center hole 104, and the first grooves 113 and the second grooves 114 connected to the center hole 104 through the first straight grooves 101, the suction cup 1 can uniformly adsorb the square piece 3 under the action of the negative pressure source, thereby improving the adsorption stability of the square piece 3 and avoiding displacement of the square piece 3 during the spin coating process. In addition, the first ridges 111 and the second ridges 112 arranged at even intervals can support the square piece 3, thereby effectively preventing the square piece 3 from deforming.

[0044] The disc body 103 is made of aluminum alloy and is oxidized to a bright natural color, so it has good corrosion resistance and durability.

[0045] The device further includes an upper cover 2, which snaps onto the suction cup 1, thereby enclosing the square piece 3 at the top of the suction cup 1. The structure of the upper cover 2 is as follows: it includes a cover body 201, the bottom of which is hollowed out to form a cavity 202, and a plurality of retaining strips 203 are arranged on the cover body 201 at intervals along the circumference of the outer periphery of the cavity 202. When the upper cover 2 is snapped onto the suction cup 1, a relatively closed working chamber is formed between the cavity 202 and the top of the suction cup 1, with the square piece 3 located within the working chamber. The disc body 103 also has two symmetrically arranged groups of air holes, each of which includes a plurality of evenly spaced air holes 109. The provision of the air holes 109 allows external air to enter and exit the working chamber through the air holes 109, thereby effectively regulating the airflow within the working chamber and improving the uniformity of glue coating.

[0046] like Figure 1 As shown, an annular slot 106 is provided on the top end surface of the disc body 103 , and the slot 106 corresponds to the clip 203 . By inserting the clip 203 into the slot 106 , the upper cover 2 and the suction cup 1 are buckled together.

[0047] The cover 201 is made of polypropylene, which is lightweight and corrosion-resistant.

[0048] The working process of this utility model is as follows:

[0049] The negative pressure source adopts a vacuum pump, can output torque and generate negative pressure at the same time, the torque output end is connected with the rotating platform of the uniform glue equipment, so as to drive the rotating platform to rotate, and the negative pressure output end is connected with the center hole 104;

[0050] An outer threaded sleeve is installed in the center hole 104, so as to fix the suction cup 1 on the rotating platform;

[0051] The vacuum pump is started, negative pressure is generated, the suction cup 1 adsorbs the square piece 3, photoresist is added on the surface of the square piece 3, and then the upper cover 2 is buckled on the suction cup 1;

[0052] The rotating platform is driven to rotate by the vacuum pump, so as to drive the square piece 3 to rotate through the suction cup 1, and then the photoresist on the surface of the square piece 3 is uniformly distributed on the surface of the square piece 3 under the action of centrifugal force.

[0053] The above description is an explanation of the utility model, not a limitation of the utility model, the scope defined by the utility model is referred to the claims, and any form of modification can be made within the protection scope of the utility model.

Claims

1. A suction cup device for square sheet glue application, characterized in that: It comprises a suction cup (1), wherein the suction cup (1) adsorbs the square sheet (3) under the action of a negative pressure source; The structure of the suction cup (1) is as follows: it comprises a disc body (103), a central hole (104) for connecting to a negative pressure source is provided in the middle of the disc body (103), a receiving groove (105) is provided on the top end surface of the disc body (103), and two first ridge groups are arranged symmetrically along the center of the circle of the central hole (104), and two second ridge groups are arranged symmetrically along the center of the circle of the central hole (104), and a single group of the first ridge group and a single group of the second ridge group are provided in the receiving groove (105). The groups are alternately arranged along the circumference, a first straight groove segment is formed between a single first convex strip group and an adjacent second convex strip group, and a second straight groove segment is formed between the single first convex strip group and another adjacent second convex strip group, the two first straight groove segments are spaced 180 degrees apart and form a first straight groove (101), the two second straight groove segments are spaced 180 degrees apart and form a second straight groove (102), the first straight groove (101) and the second straight groove (102) are orthogonally distributed and communicate with the center hole (104).

2. A suction cup device for applying glue to a square sheet as claimed in claim 1, characterized in that: The top end surface of the disk body (103) is provided with an annular groove (107), so that the top end surface of the disk body (103) forms a boss (108), and the accommodating groove (105) is provided on the top end surface of the boss (108) and is arranged concentrically with the boss (108).

3. The suction cup device for applying glue to a square sheet as claimed in claim 1, characterized in that: A single first convex strip group comprises a plurality of first convex strips (111) arranged at intervals, a first groove (113) is formed between two adjacent first convex strips (111), and the first groove (113) is communicated with the first straight groove (101).

4. The suction cup device for applying glue to a square sheet as claimed in claim 1, characterized in that: A single second convex strip group includes a plurality of second convex strips (112) arranged at intervals, a second groove (114) is formed between two adjacent second convex strips (112), and the second groove (114) is communicated with the first straight groove (101).

5. The suction cup device for applying glue to a square sheet as claimed in claim 1, characterized in that: An annular avoidance groove (110) is provided on the bottom end surface of the disk body (103).

6. The suction cup device for applying glue to a square sheet as claimed in claim 1, characterized in that: The central hole (104) adopts a stepped hole structure.

7. The suction cup device for applying glue to a square sheet as claimed in claim 1, characterized in that: The disc body (103) is made of aluminum alloy.

8. The suction cup device for applying glue to a square sheet as claimed in claim 1, characterized in that: It also includes an upper cover (2), which is buckled with the suction cup (1) to surround the square piece (3) on the top of the suction cup (1); The structure of the upper cover (2) is as follows: it comprises a cover body (201), the bottom of the cover body (201) is hollowed out to form a cavity (202), and a plurality of clip strips (203) are arranged on the cover body (201) at intervals along the circumference outside the cavity (202).

9. The suction cup device for applying glue to a square sheet as claimed in claim 8, characterized in that: The top end surface of the disc body (103) is provided with an annular card slot (106), and the card slot (106) corresponds to the card strip (203). By inserting the card strip (203) into the card slot (106), the upper cover (2) and the suction cup (1) are buckled together.

10. The suction cup device for applying glue to a square sheet as claimed in claim 8, characterized in that: The cover (201) is made of polypropylene.