Laser-induced modification equipment for preparing glass micropores

Abstract

The utility model discloses laser-induced modification equipment for preparing glass micropores, which belongs to the technical field of glass micropore processing equipment and comprises a movement mechanism, a carrying table mechanism and a laser processing mechanism. An air floating type non-contact type guiding X-axis movement assembly and an air floating type non-contact type guiding Y-axis movement assembly are arranged in a movement mechanism so as to drive a laser machining assembly and a carrying table mechanism to move along the X axis and the Y axis respectively, and laser machining of products is achieved. And meanwhile, the adsorption plate is arranged in the carrying table mechanism, so that the warped product is tightly attached to the upper surface of the adsorption plate under the action of vacuum suction force, the warpage of the product is corrected, the flatness of the product in the machining process is improved, and then the machining precision of the equipment is improved. The laser-induced modification equipment for preparing the glass micropores is reasonable in structural arrangement, realizes automatic loading and unloading, processing, detection, repair and the like of products, effectively improves the processing efficiency and the processing precision of the equipment, and has better application prospect and popularization value.

Description

TECHNICAL FIELD

[0001] The utility model belongs to glass micropore processing equipment technical field, concretely relates to a laser induced modification equipment for glass micropore preparation. BACKGROUND

[0002] With the development of semiconductor technology, glass substrates are increasingly applied in display and packaging fields. Glass via interconnection technology has excellent high-frequency electrical characteristics, low cost of large-size ultra-thin glass substrates, simple process flow, strong mechanical stability and other advantages. It can be applied to 2.5D / 3D wafer-level packaging, chip stacking, 3D integration of MEMS sensors and semiconductor devices, radio frequency components and modules, CMOS image sensors (CIS), automotive radio frequency and camera modules, etc.

[0003] At present, glass via processing is generally laser-induced etching, that is, laser-induced glass modification is used, and then an etching liquid is used for selective etching to form a via hole, which has the advantages of low cost and high efficiency. However, the laser-induced modification equipment of the prior art has poor stability when using laser to modify glass, and when processing large-size products at the board level, the large-size products have problems such as warping and poor flatness consistency, which affects the processing precision. SUMMARY

[0004] In view of one or more of the above defects or improvement needs of the prior art, the utility model provides a laser-induced modification equipment for glass micropore preparation, which can solve the problems of poor stability of the prior art equipment and warping and poor flatness consistency of the product during processing, and improve the processing precision of the product.

[0005] To achieve the above purpose, the utility model provides a laser-induced modification equipment for glass micropore preparation, which comprises a motion mechanism, a stage mechanism and a laser processing mechanism.

[0006] As a further improvement of the utility model, the laser processing assembly comprises a focusing motion unit and a laser processing unit; the focusing motion unit is arranged on the X-axis motion assembly and is a Z-axis motion assembly; the laser processing unit is connected and arranged on the focusing motion unit and moves vertically under the driving of the focusing motion unit.

[0007] As a further improvement of the utility model, the laser processing mechanism further comprises a laser measurement assembly, which is connected and arranged on the focusing motion unit to measure the flatness of the product.

[0008] As a further improvement of the utility model, it further comprises a detection mechanism, which is connected and arranged on the focusing motion unit, and can position the product and detect whether the product has missed processing or misprocessing.

[0009] As a further improvement of the utility model, the X-axis movement assembly comprises an air floating support beam, a first air floating support unit, a first motor fixing unit and a first motor movement unit.

[0010] The air floating support beam extends along the X-axis direction, and both ends thereof are fixed on the support platform through support columns respectively; the first air floating support unit is arranged on the air floating support beam and can be suspended relative to the air floating support beam after air supply; the laser processing assembly is arranged on the first air floating support unit.

[0011] The first motor fixing unit is fixedly arranged on the air floating support beam and extends along the X-axis direction; the first motor movement unit is connected and arranged on the first air floating support unit, and can generate electromagnetic force between the first motor fixing unit after electrification; the first motor movement unit drives the first air floating support unit to move along the X-axis direction under the action of electromagnetic force; and the laser processing assembly is arranged on the first air floating support unit.

[0012] As a further improvement of the utility model, the laser processing mechanism further comprises an optical path assembly; the optical path assembly comprises a laser, a laser shaping unit and a light receiving unit; the laser is fixed on a first carrier plate, the laser shaping unit is arranged correspondingly to the laser and is fixed on the first carrier plate through a second carrier plate; and the light receiving unit is arranged correspondingly to the laser shaping unit and is connected and arranged on the first air floating support unit.

[0013] As a further improvement of the utility model, the stage mechanism further comprises a plurality of gravity balance modules, and the plurality of gravity balance modules are evenly distributed on the bottom of the adsorption plate along the ring direction; one end of the gravity balance module is fixed on the Y-axis movement assembly, and the bottom of the adsorption plate is supported by the air film generated by high-pressure air.

[0014] As a further improvement of the utility model, the Y-axis movement assembly comprises an air floating guide strip, a second air floating support unit, a second motor fixing unit and a second motor movement unit.

[0015] The air floating guide strip is arranged on the support platform and extends along the Y-axis direction; the bottom of the second air floating support unit is arranged on the air floating guide strip and can be suspended relative to the air floating guide strip after air supply; and the stage mechanism is arranged on the second air floating support unit.

[0016] The second motor fixed unit is arranged on the support platform and extends along the Y-axis direction; the second motor moving unit is arranged on the second air floating support unit and can generate electromagnetic force between the second motor fixed unit after being powered on; the second motor moving unit drives the second air floating support unit to move along the Y-axis direction under the action of the electromagnetic force; and the stage mechanism is arranged on the second air floating support unit.

[0017] As a further improvement of the utility model, one end of the gravity balance module is connected to the second air floating support unit, the upper end of which is telescopic, and the other end is fixed to the bottom of the adsorption plate, and the gravity balance module is connected to high-pressure air, and there is a small gap between one end and the other end of the gravity balance module, and the air film generated by the high-pressure air supports the bottom of the adsorption plate.

[0018] As a further improvement of the utility model, the feeding and discharging mechanism is further improved, and the feeding and discharging mechanism comprises a feeding conveying module, a carrying module, a translation module and a discharging conveying module.

[0019] The feeding conveying module is used for conveying products from an upstream device to a designated position.

[0020] The carrying module is arranged on the translation module to grasp the products and drive the products to translate under the drive of the translation module.

[0021] The discharging conveying module is used for discharging the products after processing.

[0022] As a further improvement of the utility model, the support platform comprises a marble table top, and the marble table top is installed on the rack through a vibration isolation assembly; the vibration isolation assembly comprises a plurality of elastic supporting pieces and is distributed between the rack and the marble table top.

[0023] The above improved technical features can be combined with each other as long as they do not conflict with each other.

[0024] Overall, compared with the prior art, the above technical scheme conceived by the utility model has the beneficial effects including:

[0025] (1) The laser-induced modification equipment for glass micropore preparation of the utility model drives the laser processing assembly and the stage mechanism to move along the X-axis and the Y-axis respectively by arranging the X-axis movement assembly and the Y-axis movement assembly in the movement mechanism, so as to realize laser machining of the products.

[0026] (2) The laser-induced modification equipment for glass micropore preparation of the utility model reduces the mechanical friction between the movement members by arranging the air floating non-contact guide in the X-axis movement assembly and the Y-axis movement assembly, prolongs the service life of the equipment, and ensures high movement precision.

[0027] (3) The laser-induced modification equipment for glass micropore preparation has a plurality of gravity balance modules evenly arranged in a ring direction below the adsorption plate to offset the sag of the adsorption plate due to its own gravity, so that the adsorption plate can maintain a good deformation resistance, further improve the flatness of the adsorption surface of the adsorption plate, and further ensure the machining precision.

[0028] (4) The laser-induced modification equipment for glass micropore preparation has a measuring assembly corresponding to the laser processing assembly to obtain surface contour information according to a product surface position matching algorithm and feed back to the corresponding motion unit, so that the laser processing assembly is always kept at the best machining height and can compensate for the position error caused by flatness in real time, further improving the machining precision of the equipment; the detection mechanism is arranged to check in real time whether the product has a missed machining or a wrong machining, so as to find and repair abnormal points in time, avoid rework after the next process, reduce the difficulty of rework, and improve the production and machining efficiency of the product.

[0029] (5) The laser-induced modification equipment for glass micropore preparation has a reasonable structure, realizes automatic feeding, machining, detection and repair of the product, effectively improves the machining efficiency and machining precision of the equipment, and has good application prospect and popularization value. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the drawings needed to be used in the embodiments will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained according to these drawings without creative labor for those skilled in the art.

[0031] Figure 1 It is the overall structure schematic view of the laser-induced modification equipment for glass micropore preparation in the embodiments of the utility model;

[0032] Figure 2 It is the main view structure schematic view of the laser-induced modification equipment for glass micropore preparation in the embodiments of the utility model;

[0033] Figure 3 It is the overall structure schematic view of the laser processing mechanism in the embodiments of the utility model;

[0034] Figure 4 It is the overall structure schematic view of the laser processing assembly in the embodiments of the utility model;

[0035] Figure 5 It is the main view structure schematic view of the carrier mechanism in the embodiments of the utility model;

[0036] Figure 6 Figure 1 is a bottom structure schematic diagram of a laser processing mechanism in the embodiments of the present application;

[0037] Figure 7 Figure 1 is a bottom structure schematic diagram of a laser processing mechanism in the embodiments of the present application;

[0038] In all the drawings, the same reference signs indicate the same technical features, specifically: 1, support platform; 101, rack; 102, vibration isolation assembly; 103, marble table top; 2, movement mechanism; 201, X-axis movement assembly; 2011, support column; 2012, air floating support beam; 2013, first motor fixing unit; 2014, first air floating support unit; 2015, first motor movement unit; 202, Y-axis movement assembly; 2021, air floating guide strip; 2022, second air floating support unit; 2023, second motor fixing unit; 2024, second motor movement unit; 3, laser processing mechanism; 301, light path assembly; 3011, first carrier plate; 3012, light receiving unit; 302, laser processing assembly; 3021, focusing movement unit; 3022, laser processing unit; 303, laser measurement assembly; 4, carrier table mechanism; 401, adsorption plate; 402, adapter plate; 403, DD motor; 404, gravity balance module; 5, detection mechanism; 6, feeding and discharging mechanism; 601, feeding conveying module; 602, carrying module; 603, translation module; 604, discharging conveying module. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application. In addition, the technical features involved in each embodiment of the present application described below can be combined with each other as long as they do not conflict with each other.

[0040] In the description of the present application, it should be understood that, unless otherwise specified, the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0041] In addition, unless otherwise specified, the terms "first", "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second" can be explicitly or implicitly included at least one of the features. In the description of the utility model, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0042] In the utility model, unless otherwise specifically specified and limited, the terms "installation", "connection", "connection", "fixing" and other terms should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements, unless otherwise specifically limited. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0043] In the utility model, unless otherwise specifically specified and limited, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be indirectly contacted through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be the first feature directly above or obliquely above the second feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be the first feature directly below or obliquely below the second feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0044] Embodiment:

[0045] Please refer to Figures 1-7 The laser-induced modification equipment for preparing glass microporous in the preferred embodiment of the utility model includes a support platform 1, a carrier mechanism 4, a movement mechanism 2 and a laser processing mechanism 3, the product is placed on the carrier mechanism 4, the carrier mechanism 4 is driven to move through the movement mechanism 2, and the laser processing mechanism 3 is driven to move, and the product is processed.

[0046] Specifically, as shown in Figures 2-3 The support platform 1 includes a rack 101 and a marble table top 103 arranged on the rack 101, so as to take the rack 101 as the support base of the whole equipment and take the marble table top 103 as the base surface for installing other mechanisms.

[0047] Preferably, the marble table 103 is mounted on the rack 101 through the vibration isolation assembly 102 to realize the vibration isolation effect of the marble table 103. Among them, the vibration isolation assembly 102 includes a plurality of elastic supports, which are distributed between the rack 101 and the marble table 103, and the upper and lower ends thereof are fixed on the upper surface of the rack 101 and the lower surface of the marble table 103, respectively.

[0048] The present application provides vibration isolation for the marble as the installation basis through the vibration isolation assembly 102, and provides basic stability guarantee for processing.

[0049] Further, as shown in Figure 2 The motion mechanism 2 in the preferred embodiment is arranged on the support platform 1 and includes an X-axis motion assembly 201 and a Y-axis motion assembly 202.

[0050] Among them, the X-axis motion assembly 201 includes an air floating support beam 2012, a first air floating support unit 2014, a first motor fixed unit 2013 and a first motor motion unit 2015; the air floating support beam 2012 extends along the X-axis direction, and both ends thereof are fixedly installed on the marble table 103 through support columns 2011; the first air floating support unit 2014 is arranged on the air floating support beam 2012 and can be suspended relative to the air floating support beam 2012 after being supplied with air.

[0051] Correspondingly, the first motor fixed unit 2013 is fixedly arranged on the air floating support beam 2012 and extends along the X-axis direction; the first motor motion unit 2015 is fixed on the first air floating support unit 2014, and an electromagnetic force can be generated between the first motor motion unit 2015 and the first motor fixed unit 2013 when the first motor motion unit 2015 is energized, so that the first motor motion unit 2015 can drive the first air floating support unit 2014 to move along the X-axis direction under the action of the electromagnetic force, and the movement of the first air floating support unit 2014 in the X-axis direction is guided by the air floating support beam 2012.

[0052] It can be understood that through the air floating of the first air floating support unit 2014, the non-contact guidance of the air floating support beam 2012 to the first air floating support unit 2014 is realized, the frictional resistance between the two is reduced, the service life of the equipment is prolonged, and the movement precision of the first air floating support unit guided by air floating is higher.

[0053] Furthermore, the Y-axis motion assembly 202 in the preferred embodiment includes an air-floating guide bar 2021, a second air-floating support unit 2022, a second motor fixing unit 2023 and a second motor motion unit 2024; wherein, the air-floating guide bar 2021 is fixedly set on the marble table 103 and extends along the Y-axis direction; the second air-floating support unit 2022 is embraced by the air-floating guide bar 2021 and can be suspended relative to the air-floating guide bar 2021 after air is supplied to it, so as to perform non-contact guidance on the movement of the second air-floating support unit 2022 in the Y-axis direction through the air-floating guide bar 2021.

[0054] Correspondingly, the second motor fixing unit 2023 is fixed on the marble table top 103 and extends along the Y-axis direction; the second motor movement unit 2024 is arranged relative to the second motor fixing unit 2023 and is fixedly arranged on the second air-floating support unit 2022. When powered on, it can generate electromagnetic force between it and the second motor fixing unit 2023, so that the second motor movement unit 2024 drives the second air-floating support unit 2022 to move along the Y-axis direction under the action of the electromagnetic force.

[0055] Preferably, two air-floating guide strips 2021 are arranged on the marble table top 103 at intervals and in matching manner along the X-axis direction, and the bottom of the second air-floating support unit 2022 is simultaneously embraced by the two air-floating guide strips 2021; accordingly, two second motor fixing units 2023 are also provided, and are respectively provided on the outer sides of the two air-floating guide strips 2021 along the X-axis direction; two second motor motion units 2024 corresponding to the second motor fixing units 2023 are also provided, and are provided at both ends of the bottom of the second air-floating support unit 2022, so that the second air-floating support unit 2022 can be driven simultaneously by the two second motor motion units 2024.

[0056] The air floating of the second air floating support unit 2022 enables the air floating guide strip 2021 to guide the second air floating support unit 2022 in a non-contact manner, thereby reducing the friction resistance between the two and extending the service life of the equipment. In addition, the second air floating support unit guided by air floating has higher movement accuracy.

[0057] The X-axis direction and the Y-axis direction are preferably two directions perpendicular to each other on a horizontal plane. Figure 1, the X-axis direction is the left-right direction, and the Y-axis direction is the front-rear direction. The first air floating support unit 2014 is arranged on the air floating support beam 2012, and the air floating support beam 2012 is installed through a column, so that the first air floating support unit 2014 is located above the second air floating support unit 2022. The stage mechanism 4 is arranged on the second air floating support unit 2022, and the laser processing assembly 302 of the laser processing mechanism 3 is arranged on the first air floating support unit 2014. The laser processing assembly 302 moves in the X-axis direction, and the stage mechanism 4 moves in the Y direction, so that the laser processing assembly 302 can process the entire range of the product. The arrangement of the first air floating support unit 2014 and the second air floating support unit 2022 improves the movement accuracy of the laser processing assembly 302 and the stage mechanism 4, and further improves the laser processing accuracy. Further, as shown in Figure 3 , the laser processing mechanism 3 in the preferred embodiment includes an optical path assembly 301 and at least one laser processing assembly 302.

[0058] The optical path assembly 301 includes a laser (not shown in the figure), a laser shaping unit (not shown in the figure), and a light receiving unit 3012. The laser is fixed on the two support columns 2011 through a first carrier plate 3011. The laser shaping unit is arranged corresponding to the laser and is fixed on the first carrier plate 3011 through a second carrier plate. The light receiving unit 3012 is arranged corresponding to the laser shaping unit and is fixedly connected to the first air floating support unit 2014, so that the laser emitted by the laser enters from one end of the laser shaping unit and exits from the other end of the laser shaping unit to the light receiving unit 3012, forming a flight optical path.

[0059] Correspondingly, as shown in Figure 4 , the laser processing assembly 302 includes a focusing movement unit 3021 and a laser processing unit 3022. The focusing movement unit 3021 is connected to the first air floating support unit 2014 and can move vertically. The laser processing unit 3022 is arranged relative to the light receiving unit 3012 to perform laser processing on the product through the laser processing unit 3022, and the laser processing unit 3022 is connected to the focusing movement unit 3021 to move the laser processing unit 3022 vertically through the focusing movement unit 3021 to adjust the appropriate processing distance. As an implementable manner, the focusing movement unit 3021 is a Z-axis movement assembly, which can be a lead screw and block module, and the laser processing unit 3022 is connected to the block, so as to realize the vertical movement of the processing unit 3022.

[0060] The light path assembly 301 and the laser processing assembly 302 are arranged separately in the application, the light path assembly 301 is fixedly arranged on the carrier plate, and the laser processing assembly 302 is arranged on the first air floating support unit 2014, so that the load of the first air floating support unit 2014 is reduced, and the precision control of the air floating support unit driving the movement of the laser processing assembly 302 is facilitated.

[0061] In actual arrangement, the laser processing assembly 302 can be arranged in one or multiple along the X axis, so that the product is processed by multiple laser processing assemblies 302 at the same time, and the processing efficiency is improved.

[0062] Preferably, the laser processing mechanism 3 further comprises a laser measurement assembly 303, which is connected and arranged on the focusing movement unit 3021, so as to detect the upper surface position of the product to be processed by the laser measurement assembly 303, judge the flatness data of the product, and feed back to the focusing movement unit 3021, and the focusing movement unit 3021 adjusts the laser processing unit 3022 to the appropriate processing distance through the feedback data, and compensates the position error caused by the flatness error of the product in real time through the feedback of the flatness information of the product, adjusts the processing distance of the laser processing unit 3022 in time, and further improves the processing precision.

[0063] Preferably, the detection mechanism 5 is connected and arranged on the focusing movement unit 3021, and specifically, the detection mechanism 5 is a CCD camera, which can position the product by recognizing the outer contour of the product, and check whether there is missed processing or wrong processing by recognizing the characteristics after the product is processed, so that the equipment has a self-checking function, and is used together with a monitoring program to check whether there is a false triggering or missed triggering of the processing instruction, form a closed loop, and accurately position the missed processing or wrong processing point, so that the equipment itself has the ability to repair abnormal points, avoids unqualified products from flowing into the next process and then being found and repaired, reduces the difficulty of repair, and improves the repair efficiency.

[0064] Further, the carrier mechanism 4 in the preferred embodiment is arranged on the second air floating support unit 2022, so as to move the carrier mechanism 4 along the Y axis direction by the second motor movement unit 2024.

[0065] Specifically, as shown in Figures 5-6 The carrier mechanism 4 comprises a suction plate 401, an adapter plate 402 and a DD motor 403; wherein the suction plate 401 is provided with suction holes and is used in cooperation with a vacuum pump to generate suction force, so as to adsorb and fix the product on the upper surface of the suction plate 401; at this time, if the product has a warped state, it will be close to the upper surface of the suction plate 401 under the action of the vacuum suction force, and the warping is corrected;

[0066] Correspondingly, the lower surface of the adsorption plate 401 is connected to the adapter plate 402 , and the adapter plate 402 is connected and set on the DD motor 403 , and the DD motor 403 is connected and set on the second air-floating support unit 2022 .

[0067] Preferably, the carrier mechanism 4 also includes a plurality of gravity balancing modules 404, and the plurality of gravity balancing modules 404 are evenly distributed along a ring at the bottom of the adsorption plate 401. Specifically, one end of the gravity balancing module 404 is connected to the second air-floating support unit 2022, and its upper end can be retracted, and the other end is fixed to the bottom of the adsorption plate 401, which is connected to high-pressure air. There is a small gap between one end and the other end of the gravity balancing module 404, and the air film generated by the high-pressure air supports the bottom of the adsorption plate 401 to offset the sagging of the adsorption plate 401 due to its own gravity, so that the adsorption plate 401 can maintain a good anti-deformation ability, thereby further improving the flatness of the adsorption surface of the adsorption plate 401, so that the product can be adsorbed on the adsorption plate 401 more flatly, avoiding the influence of insufficient flatness on the processing accuracy.

[0068] Through the above technical solution, this application has good processing accuracy, the processing hole spacing accuracy can be controlled at ≤±4μm, the positioning accuracy can reach ≤±3μm, and can be maintained for a long time, effectively improving the processing accuracy and applicability of the equipment.

[0069] Furthermore, the loading and unloading mechanism 6 in the preferred embodiment is used to load and transport the product from the upstream equipment and place it on the carrier mechanism 4, and unload the product to the downstream equipment after processing is completed, thereby realizing the automatic loading and unloading function of the product and reducing the risk of fragmentation of brittle products due to human operational errors.

[0070] like Figure 7 As shown in FIG, the loading and unloading mechanism 6 in the preferred embodiment includes a loading and unloading conveyor module 601, a transport module 602, a translation module 603, and a unloading and unloading conveyor module 604. The loading and unloading conveyor module 601 interfaces with upstream equipment to transport products to a designated location within the equipment; the unloading and unloading conveyor module 604 interfaces with downstream equipment to unload processed products. Preferably, the loading and unloading conveyor module 601 and the unloading conveyor module 604 are conveyor roller lines, but they can also be air-floating pallets or wafer loading devices (loadports) in conjunction with material boxes.

[0071] At the same time, the transport module 602 is connected to the translation module 603 to grab the product and move the product in translation under the drive of the translation module 603.

[0072] like Figure 1As shown in the middle, the upper feeding conveying module 601 and the lower feeding conveying module 604 are arranged on both sides of the table mechanism 4 along the X axis, and the translation module 603 is arranged along the X axis to drive the carrying module 602 to move between the upper feeding conveying module 601, the table mechanism 4 and the lower feeding conveying module 604.

[0073] Of course, the feeding and discharging mechanism 6 can also be a wafer robot or a four-axis, six-axis robot, etc., so as to feed the product from the upstream equipment to the table mechanism 4 through the robot, and then discharge the product to the downstream equipment through the robot after the product is processed.

[0074] Further, the operation process of processing the product by using the above-mentioned glass via processing equipment is as follows:

[0075] (1) The upper feeding conveying module 601 conveys the product conveyed by the upstream equipment to the specified position, the carrying module 602 is driven by the translation module 603 to grab the product and translate to the upper side of the table mechanism 4, and then placed on the adsorption plate 401;

[0076] (2) The table mechanism 4 is driven by the second air floating support unit 2022 to move to the lower side of the laser processing assembly 302;

[0077] (3) The laser measuring assembly 303 measures the flatness of the product, the focusing motion unit 3021 drives the laser processing unit 3022 to adjust the processing distance, the laser processing unit 3022 processes the product, and the first air floating support unit 2014 drives the laser processing unit 3022 to adjust the position of the product in the X axis direction, and cooperates with the second motor fixing unit 2023 to adjust the position of the product in the Y axis direction relative to the laser processing unit 3022, so as to realize the laser drilling processing of the whole product;

[0078] (4) The detection mechanism 5 detects the quality of the product, when the product quality is unqualified, the detection mechanism 5 positions the abnormal point, and the laser processing unit 3022 repairs the abnormal point to complete the processing of the product;

[0079] (5) The table mechanism 4 moves to the upper side of the carrying module 602, the carrying module 602 grabs the product, and moves and places the product on the lower feeding conveying module 604 under the driving of the translation module 603.

[0080] The laser-induced modification equipment for glass micropore preparation in the utility model has reasonable structure, realizes automatic feeding, processing, detection and repair of the product, effectively improves the processing efficiency and processing precision of the equipment, and has good application prospect and popularization value.

[0081] Those skilled in the art can understand that the above description is only preferred embodiments of the present application, and is not intended to limit the present application, and any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A laser-induced modification device for preparing glass micropores, characterized in that: Including motion mechanism, stage mechanism and laser processing mechanism; The motion mechanism is arranged on the supporting platform and includes an X-axis motion component and a Y-axis motion component; The carrier mechanism is arranged on the Y-axis motion component and includes an adsorption plate. The adsorption plate fixes the product by adsorption and can move back and forth along the Y-axis direction driven by the Y-axis motion component. The laser processing mechanism includes at least one laser processing component, which is arranged on the X-axis motion component to reciprocate along the X-axis direction under the drive of the X-axis motion component to perform laser processing on the product.

2. The laser-induced modification equipment for preparing glass micropores according to claim 1, characterized in that: The laser processing assembly includes a focusing motion unit and a laser processing unit; the focusing motion unit is arranged on the X-axis motion assembly and is a Z-axis motion assembly; the laser processing unit is connected to the focusing motion unit and moves vertically driven by the focusing motion unit.

3. The laser-induced modification equipment for preparing glass micropores according to claim 2, characterized in that: The laser processing mechanism further includes a laser measuring component, which is connected to the focusing motion unit to measure the flatness of the product.

4. The laser-induced modification equipment for preparing glass micropores according to claim 2, characterized in that: It also includes a detection mechanism, which is connected to the focusing motion unit and can position the product and detect whether the product has been missed or misprocessed.

5. The laser-induced modification equipment for preparing glass micropores according to claim 2, characterized in that: The X-axis motion assembly includes an air-floating support beam, a first air-floating support unit, a first motor fixing unit and a first motor motion unit; The air-floating support beam extends along the X-axis, and its two ends are fixed to the support platform via support columns; the first air-floating support unit is mounted on the air-floating support beam and can be suspended relative to the air-floating support beam after air is supplied to it, and the laser processing assembly is mounted on the first air-floating support unit; The first motor fixing unit is fixedly arranged on the air-floating support beam and extends along the X-axis direction; the first motor motion unit is connected to the first air-floating support unit, and can generate electromagnetic force between it and the first motor fixing unit after being powered on. The first motor motion unit drives the first air-floating support unit to move along the X-axis direction under the action of the electromagnetic force, and the laser processing component is arranged on the first air-floating support unit.

6. The laser-induced modification equipment for preparing glass micropores according to claim 5, characterized in that: The laser processing mechanism also includes an optical path component; the optical path component includes a laser, a laser shaping unit and a light receiving unit; the laser is fixed on a first carrier plate, the laser shaping unit is set corresponding to the laser, and is fixed to the first carrier plate through a second carrier plate; the light receiving unit is set corresponding to the laser shaping unit and is connected to the first air-floating support unit.

7. The laser-induced modification equipment for preparing glass micropores according to claim 1, characterized in that: The carrier mechanism also includes multiple gravity balance modules, which are evenly distributed in the circumferential direction at the bottom of the adsorption plate; one end of the gravity balance module is fixed to the Y-axis motion component, and the bottom of the adsorption plate is supported by an air film generated by high-pressure air.

8. The laser-induced modification equipment for preparing glass micropores according to claim 7, characterized in that: The Y-axis motion assembly includes an air-floating guide bar, a second air-floating support unit, a second motor fixing unit and a second motor motion unit; The air-floating guide bar is arranged on the support platform and extends along the Y-axis direction; the bottom of the second air-floating support unit is arranged on the air-floating guide bar and can be suspended relative to the air-floating guide bar after air is supplied to it; the stage mechanism is arranged on the second air-floating support unit; The second motor fixing unit is arranged on the support platform and extends along the Y-axis direction; the second motor movement unit is arranged on the second air-floating support unit, and can generate electromagnetic force between it and the second motor fixing unit after being powered on. The second motor movement unit drives the second air-floating support unit to move along the Y-axis direction under the action of the electromagnetic force, and the platform mechanism is arranged on the second air-floating support unit.

9. The laser-induced modification equipment for preparing glass micropores according to claim 8, characterized in that: One end of the gravity balance module is connected to the second air floating support unit, its upper end is retractable, and the other end is fixed to the bottom of the adsorption plate, which is connected to high-pressure air. There is a small gap between one end and the other end of the gravity balance module, and the air film generated by the high-pressure air supports the bottom of the adsorption plate.

10. The laser-induced modification equipment for preparing glass micropores according to any one of claims 1 to 9, characterized in that: It also includes a loading and unloading mechanism, which includes a loading and unloading conveying module, a transport module, a translation module and a unloading conveying module; The loading and conveying module is used to transport products from upstream equipment to a designated location; The transport module is arranged on the translation module to grab the product and move the product in translation under the drive of the translation module; The blanking and conveying module is used to blank the processed products.

11. The laser-induced modification equipment for preparing glass micropores according to any one of claims 1 to 9, characterized in that: The supporting platform includes a marble table top, which is mounted on a frame via a vibration isolation assembly; the vibration isolation assembly includes a plurality of elastic support members, which are distributed at intervals between the frame and the marble table top.

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