Silicon material drying oven capable of being layered inside

Abstract

The utility model discloses an internal layered silicon material oven, which relates to the technical field of monocrystalline silicon production and comprises an oven body, a mounting rack is slidably arranged in the oven body, insertion holes are formed in the inner side of the mounting rack, a mounting seat is slidably arranged on the inner side of the mounting rack between the insertion holes, and insertion blocks are slidably arranged at two ends of the mounting seat. An inhaul cable is fixedly arranged at the end, located in the mounting base, of the inserting block, the other end of the inhaul cable is fixedly connected with a rotating shaft, the rotating shaft is located in the middle of the mounting base and rotationally connected with the mounting base at the same time, and springs are fixedly arranged at the positions, located between the inserting block and the mounting base, of the periphery of the inhaul cable. Compared with an existing common silicon material drying oven, the silicon material drying oven with the interior capable of being layered has the advantages that before monocrystalline silicon is placed, the rotating shaft is screwed to enable the inserting blocks at the two ends of the rotating shaft to be pulled inwards through the inhaul cables, the silicon material drying oven is placed on the appropriate inserting hole side, the rotating shaft is loosened, the inserting blocks are reset under the action of the springs, and therefore the installation base can be rapidly installed on the installation frame.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal silicon production technical field, concretely is the silicon material oven that internal layering is available. BACKGROUND

[0002] With the continuous development of semiconductor and solar industry, the demand of silicon material is more and more large. The purity of silicon material is very important to the quality of final product. Some silicon material surface is attached with many impurities, and the surface impurities must be removed by pickling method, and then cleaned. The cleaned silicon material must be dried before being put into the furnace to remove the water attached to the silicon material.

[0003] For example, application No. 201020022307.9, a special oven for silicon material and a movable material rack for drying silicon material, comprises a heat preservation shell, an inner container, a high temperature gas cavity, a hot air duct, a heater, a circulating fan, a dehumidifying fan, a dehumidifying pipe, a humidity sensor, a temperature sensor, a frame body, a roller and a silicon material box. The high temperature gas cavity is arranged on the top of the inner container, the hot air duct is arranged around the inner container, the heater is arranged in the hot air duct, the circulating fan is arranged between the high temperature gas cavity and the hot air duct, and the dehumidifying fan is communicated with the inner cavity of the inner container. The establishment of the temperature sensor and the humidity sensor realizes the automatic control of the silicon material oven. The movable material rack can conveniently load and unload the silicon material and save the drying preparation time. It not only has high drying efficiency and low energy consumption, but also can directly move the whole box of silicon material into the oven for drying, which greatly compresses the process preparation time and reduces the labor intensity of the operator. However, when the silicon material oven is used to dry the silicon material, it is difficult to avoid uneven heating of the silicon material by changing the air duct only, and it is not convenient to quickly install or remove the tray containing the silicon material, and it is not convenient to limit the movable rack when moving.

[0004] Therefore, in view of the above problems, the internal layering silicon material oven is improved. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing an internal layering silicon material oven to solve the problems in the background art.

[0006] To achieve the above purpose, the utility model provides the following technical scheme: an internal layering silicon material oven, comprising a box body, a mounting rack is slidably arranged in the box body, and a jack is slidably arranged between the jacks on the inner side of the mounting rack, and a mounting seat is slidably arranged between the jacks on the inner side of the mounting rack, and a mounting seat is slidably arranged at both ends of the mounting seat, and a jack is fixedly arranged at one end of the jack in the mounting seat.

[0007] Preferably, the other end of the cable is fixedly connected with a rotating shaft, the rotating shaft is located at the middle of the mounting base and is rotatably connected with the mounting base, and springs are fixedly arranged between the mounting base and the cable around the cable.

[0008] Preferably, the two mounting bases are arranged in a group and symmetrically, a tray is slidably arranged between the two mounting bases, and a fixed shaft is fixedly arranged outside the tray, and a slot is formed in the fixed shaft.

[0009] Preferably, a rotating plate is rotatably arranged around the fixed shaft, elastic assemblies one are fixedly arranged at both sides of the rotating plate inside the fixed shaft, and the elastic assemblies one are slidably connected with the slot.

[0010] Preferably, a slide rail is formed in the box below the mounting frame, the slide rail is symmetrically arranged along the center line of the mounting frame, limit blocks are arranged between the slide rails, and a limit slot is formed in the mounting frame above the limit blocks.

[0011] Preferably, the limit blocks are slidably connected with the box, elastic assemblies two are fixedly arranged between the limit blocks and the box, a top block is slidably arranged at the lower end of the limit block, and a friction block is fixedly arranged at the other end of the top block outside the box.

[0012] Preferably, the friction block is slidably connected with the box, and elastic assemblies three are arranged at one side of the box.

[0013] Compared with the prior art, the utility model has the advantages that:

[0014] 1. The utility model discloses a box, a mounting frame, a jack, a mounting base, a plug, a cable, a rotating shaft and a spring are arranged, before placing monocrystalline silicon, first, the rotating shaft is screwed to make it pass through the cable and pull the plug at both ends inwards, place it to the appropriate jack side, loosen the rotating shaft under the action of the spring and make the plug reset, so that the mounting base can be quickly installed to the mounting frame.

[0015] 2. The utility model discloses a tray, a fixed shaft, a slot, a rotating plate and an elastic assembly one are arranged, after the mounting base is completely installed, directly insert the tray, rotate the rotating plate after being in place and make it enter the slide groove on the one side of the mounting frame, so that the tray can be limited, and the elastic assembly one can enter the slot when rotating, so that the tray can be fixed more quickly.

[0016] 3. The utility model discloses a through the setting of limiting groove, slide rail, limiting block, elastic component no. 2, top block, friction block and elastic component no. 3, installs the frame into the box, when closing the door, through the door panel can push the top block into the below of limiting block through the friction block, make its upshift until can be brought into limiting groove, such interface fixes the frame in the box inside, like this can avoid the frame too close to the one side of device, thereby can avoid the temperature of silicon material one side too high. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is whole three -dimensional structure schematic diagram of the utility model;

[0018] Figure 2 It is mounting seat sectional structure schematic diagram of the utility model;

[0019] Figure 3 It is the utility model Figure 2 A place enlarged structure schematic diagram in;

[0020] Figure 4 It is the utility model Figure 2 B place enlarged structure schematic diagram in;

[0021] Figure 5 It is box bottom sectional structure schematic diagram of the utility model.

[0022] In the drawing: 1, box;2, mounting frame;3, jack;4, mounting seat;5, plug-in block;6, inhaul cable;7, rotating shaft;8, spring;9, tray;10, fixed shaft;11, plug-in groove;12, rotating plate;13, elastic component no. 1;14, limiting groove;15, slide rail;16, limiting block;17, elastic component no. 2;18, top block;19, friction block;20, elastic component no. 3. DETAILED DESCRIPTION

[0023] The technical scheme in the embodiments of the utility model will be described below in a clear and complete manner in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0024] As Figures 1-3As shown, the internally layered silicon material oven comprises a box body 1, a mounting frame 2 is slidably provided inside the box body 1, and a socket 3 is opened on the inner side of the mounting frame 2, a mounting seat 4 is slidably provided between the sockets 3 on the inner side of the mounting frame 2, and plug blocks 5 are slidably provided at both ends of the mounting seat 4, and a cable 6 is fixedly provided at one end of the plug block 5 located inside the mounting seat 4. Before placing the single crystal silicon, first, the rotating shaft 7 is twisted so that the plug blocks 5 at both ends are pulled inward through the cable 6 and placed on the side of the appropriate socket 3. The rotating shaft 7 is loosened and the plug block 5 is reset under the action of the spring 8, so that the mounting seat 4 can be quickly installed on the mounting frame 2;

[0025] Furthermore, the cable 6 can enable the insert block 5 to move faster.

[0026] like Figures 4-5 As shown, the other end of the cable 6 is fixedly connected to the rotating shaft 7, the rotating shaft 7 is located in the middle of the mounting seat 4, and the rotating shaft 7 is rotatably connected to the mounting seat 4 at the same time, and a spring 8 is fixedly arranged around the cable 6 between the plug block 5 and the mounting seat 4. Two mounting seats 4 are a group, and the mounting seats 4 are symmetrically arranged. A tray 9 is slidingly arranged between the mounting seats 4, and a fixed shaft 10 is fixedly arranged on the outside of the tray 9. A slot 11 is opened inside the fixed shaft 10, and a rotating plate 12 is rotatably arranged around the fixed shaft 10. The interior of the rotating plate 12 is located on both sides of the fixed shaft 10 and an elastic component 13 is fixedly arranged, and the elastic component 13 is slidably connected to the slot 11 at the same time. A slide rail 15 is opened through the box body 1 below the mounting frame 2, and the slide rail 15 is symmetrically arranged along the center line of the mounting frame 2. A limit block 16 is set between the slide rails 15, and a limit slot 14 is opened above the limit block 16 through the mounting frame 2. The limit block 16 is slidably connected to the box body 1 and is fixed between the limit block 16 and the box body 1. There is an elastic component 2 17, and the lower end of the limit block 16 is slidably provided with a top block 18, and the other end of the top block 18 is located on the outside of the box body 1 and is fixedly provided with a friction block 19. The friction block 19 is slidably connected to the box body 1, and the friction block 19 is located on one side of the elastic component 3 20 inside the box body 1. There are two elastic components 3 20 symmetrically provided along the center line of the friction block 19. After the mounting seat 4 is fully installed, the tray 9 is directly inserted. After it is in place, the rotating plate 12 is rotated to enter the slide groove on one side of the mounting frame 2, so that the tray 9 can be restricted, and the elastic component 1 13 can enter the slot 11 during rotation, so that the tray 9 can be fixed faster; after the mounting frame 2 is installed in the box body 1, when the door is closed, the top block 18 can be pushed into the bottom of the limit block 16 through the friction block 19 through the door panel, so that it can move up until it can be included in the limit groove 14, so that the interface fixes the mounting frame 2 inside the box body 1, which can prevent the mounting frame 2 from being too close to one side of the device, thereby preventing the silicon material from having too high a temperature on one side.

[0027] Further, the elastic component 13 can provide a limit for the rotating plate 12, so that it can switch between horizontal state and vertical state, that is, it can limit the tray 9, and also can facilitate workers to take it.

[0028] Working principle: when using the internal layered silicon material oven, first, before placing the single crystal silicon, first twist the rotating shaft 7 to make it through the cable 6 to pull the two end blocks 5 inward, and place them to the appropriate side of the insertion hole 3, then loosen the rotating shaft 7 to reset the block 5 under the action of the spring 8, so that the mounting seat 4 can be quickly installed to the mounting frame 2; secondly, after the mounting seat 4 is completely installed, directly insert the tray 9, after positioning, rotate the rotating plate 12 to make it enter the sliding slot on one side of the mounting frame 2, so that the tray 9 can be limited, and the elastic component 13 can enter the insertion slot 11 when rotating, so that the tray 9 can be fixed faster; finally, after the mounting frame 2 is installed into the box body 1, when closing the door, the top block 18 can be pushed into the limit block 16 below through the friction block 19 through the door plate, so that it moves upward until it can be put into the limit slot 14, so that the interface can fix the mounting frame 2 in the box body 1, so that the mounting frame 2 can be avoided to be too close to one side of the device, so that the temperature of the silicon material on one side can be avoided to be too high. This is the working principle of the internal layered silicon material oven.

Claims

1. A silicon material drying oven with internal stratification, comprising a box body (1), characterized in that: The box body (1) is provided with a mounting frame (2) for sliding inside, and a socket (3) is provided on the inner side of the mounting frame (2). A mounting seat (4) is provided for sliding inside the mounting frame (2) between the sockets (3), and plug blocks (5) are provided for sliding at both ends of the mounting seat (4). A cable (6) is fixedly provided at one end of the plug block (5) located inside the mounting seat (4), and the other end of the cable (6) is fixedly connected to a rotating shaft (7). The rotating shaft (7) is located in the middle of the mounting seat (4), and the rotating shaft (7) is simultaneously connected to the mounting seat (4) for rotation. A spring (8) is fixedly provided around the cable (6) between the plug block (5) and the mounting seat (4). The mounting seats (4) are grouped into two, and the mounting seats (4) are symmetrically provided. A tray (9) is provided for sliding between the mounting seats (4), and a fixed shaft (10) is fixedly provided on the outer side of the tray (9), and a slot (11) is provided inside the fixed shaft (10).

2. The internally stratified silicon material oven according to claim 1, characterized in that: A rotating plate (12) is rotatably provided around the fixed shaft (10), and an elastic component (13) is fixedly provided on both sides of the fixed shaft (10) inside the rotating plate (12), and the elastic component (13) is slidably connected to the slot (11) at the same time.

3. The internally layered silicon material oven according to claim 1, characterized in that: A slide rail (15) is provided below the mounting frame (2) through the box body (1), and the slide rails (15) are symmetrically arranged along the center line of the mounting frame (2). A limiting block (16) is provided between the slide rails (15), and a limiting groove (14) is provided above the limiting block (16) through the mounting frame (2).

4. The internally layered silicon material oven according to claim 3, characterized in that: The limit block (16) is slidably connected to the box body (1), and an elastic component 2 (17) is fixedly arranged between the limit block (16) and the box body (1). A top block (18) is slidably arranged at the lower end of the limit block (16), and a friction block (19) is fixedly arranged at the other end of the top block (18) on the outside of the box body (1).

5. The internally stratified silicon material oven according to claim 4, characterized in that: The friction block (19) is slidably connected to the box body (1), and the friction block (19) is located on one side of the elastic component three (20) in the box body (1), and two elastic components three (20) are symmetrically arranged along the center line of the friction block (19).

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