Vacuum cooling pipeline structure suitable for vacuum chamber

Abstract

The utility model relates to the field of vacuum equipment, and discloses a vacuum cooling pipeline structure suitable for a vacuum chamber, which comprises a heat source inlet vacuum pipe, a vacuum cooling pipeline and a heat source outlet vacuum pipe. Two ends of the vacuum cooling pipeline are respectively connected with the heat source inlet vacuum pipe and the heat source outlet vacuum pipe, and sealing rings are arranged at joints of the vacuum cooling pipeline and the heat source inlet vacuum pipe and the heat source outlet vacuum pipe. A circulating cooling water channel is arranged in the pipe wall of the vacuum cooling pipeline, and a cooling medium inlet and a cooling medium outlet which are connected with the circulating cooling water channel are formed in the outer wall of the vacuum cooling pipeline. The cooling water channel is processed in the vacuum pipeline, so that a cooling medium is directly introduced into the vacuum pipeline, the cooling contact area is effectively increased, heat is taken away, the temperature of the sealing ring is reduced, and the service life is prolonged. The structure is suitable for the cold air pipeline at the RPS outlet of PECVD coating equipment.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum equipment field especially a vacuum cooling pipeline structure suitable for vacuum chamber. BACKGROUND

[0002] In the vacuum equipment, according to product production process demand, need to input heat source in the vacuum chamber. Need to connect heat source inlet pipeline (such as the vacuum flange of RPS export) and heat source outlet pipeline (such as the vacuum flange outside the vacuum chamber), to ensure internal vacuum, need to add sealing ring sealing interface at the connecting place. Sealing ring is under high temperature (≥200 DEG C) environment, and sealing ring is easy to burn and melt and lead to vacuum leakage. Under specific working conditions, there are flammable and explosive medium in the vacuum interior, and the safety risk is higher.

[0003] In order to solve this problem, the market adopts the cooling pipe winding outside the connecting pipeline between heat source inlet pipeline and heat source outlet pipeline, and cooling medium is passed in the cooling pipe. The connecting pipeline is cooled by the cooling pipe, so that the temperature of the sealing ring at both ends is reduced. Although a certain effect can be obtained, the winding deviation of the cooling pipe leads to the gap between the connecting pipelines, and the contact area is limited, and the heat conduction efficiency is low, so that the temperature cannot be effectively reduced, the service life of the sealing ring is still restricted, the use reliability cannot be ensured, and the cooling pipe winding needs to spend a lot of manual work, and the operation is inconvenient. UTILITY MODEL CONTENT

[0004] The utility model aims at solving the problems in the prior art, provides a vacuum cooling pipeline structure suitable for vacuum chamber, which can not only effectively reduce the temperature of the sealing ring, prolong the service life, has higher reliability, and is simple to process, can save the step of manual winding cooling pipe.

[0005] To achieve the above object, the utility model adopts the following technical scheme:

[0006] The utility model discloses a vacuum cooling pipeline structure suitable for vacuum chamber, which comprises a heat source inlet vacuum pipe, a vacuum cooling pipeline and a heat source outlet vacuum pipe. The two ends of the vacuum cooling pipeline are connected with the heat source inlet vacuum pipe and the heat source outlet vacuum pipe respectively, and a sealing ring is arranged at the connecting position of the vacuum cooling pipeline, the heat source inlet vacuum pipe and the heat source outlet vacuum pipe. The inner wall of the vacuum cooling pipeline is provided with a circulating cooling water channel, and the outer wall of the vacuum cooling pipeline is provided with a cooling medium inlet and a cooling medium outlet connected with the circulating cooling water channel.

[0007] Further, the outer wall of the vacuum cooling pipeline is internally provided with a plurality of axial water channels, the upper and lower ends of the axial water channels are sealingly fixed with upper and lower water channel sealing plates, the upper and lower water channel sealing plates are provided with a plurality of water passing grooves for connecting the axial water channels, and the plurality of axial water channels are connected into a circulating cooling water channel in an S shape.

[0008] Further, the upper and lower ends of the vacuum cooling pipeline are provided with vacuum flanges, the connecting ends of the heat source inlet vacuum pipe and the vacuum cooling pipeline and the connecting ends of the heat source outlet vacuum pipe and the vacuum cooling pipeline are provided with vacuum flanges, and vacuum pipe clamps are arranged on the two connected vacuum flanges to clamp and fix the vacuum cooling pipeline and the heat source inlet vacuum pipe and the heat source outlet vacuum pipe.

[0009] Further, the vacuum cooling pipeline and the vacuum flanges at the two ends thereof are integrally formed.

[0010] Further, the cooling medium inlet and the cooling medium outlet are each provided with a quick pipe joint.

[0011] The utility model discloses the beneficial aspect is:

[0012] The utility model discloses the cooling water channel is processed in the vacuum pipeline, and is connected with the circulating cooling water channel through the pipe joint, realizes that the cooling medium directly passes into the vacuum pipeline, effectively improves the cooling contact area, carries away the heat, thereby reduces the temperature of the sealing ring, prolongs the service life. Simultaneously, the processing is simple and easy, can save the step of manual winding cooling pipe, and saves the artificial cost. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the following will be briefly introduced the drawing needed to be used in the embodiment, should understand, the following drawing only shows some embodiments of the utility model, therefore should not be regarded as the limitation to the range, for the ordinary skilled person in the art, under the premise of not paying the creative labor, can also obtain other related drawings according to these drawings.

[0014] Figure 1 It is the structure schematic diagram of part section of this embodiment.

[0015] Figure 2 It is the section structure schematic diagram of vacuum cooling pipeline.

[0016] Figure 3 It is the unfolded schematic diagram of circulating cooling water channel. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings of the specification. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0018] In the utility model, the orientation words such as 'up, down, left and right' are generally understood in connection with the orientation shown in the drawings and actual application without making opposite description.

[0019] In addition, the terms 'first' and'second' are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by 'first' and'second' can explicitly or implicitly include one or more features. In the description of the utility model, the meaning of'multiple' is two or more than two, unless otherwise specifically limited.

[0020] In the utility model, unless otherwise specifically specified and limited, the 'on' or 'under' of the first feature to the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly contacted through an intermediate medium. Moreover, the 'on', 'above' and 'on' of the first feature to the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The 'under', 'below' and 'under' of the first feature to the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0021] The endpoints of the ranges and any values disclosed herein are not limited to the precise values stated. The ranges and values should be construed to be approximations that can vary by a small amount. For numerical ranges, the endpoints are included in the ranges, and the endpoints and individual points within the ranges are combinable with each other to form new ranges. The terms 'optional' and 'optional' mean that the element can be included or not included (or can be included or not included).

[0022] As shown in the figure, the utility model discloses a kind of vacuum cooling pipeline structure suitable for vacuum chamber, it includes heat source inlet vacuum pipe 1, vacuum cooling pipeline 4 and heat source outlet vacuum pipe 6.

[0023] The two ends of the vacuum cooling pipeline 4 are connected with the heat source inlet vacuum pipe 1 and the heat source outlet vacuum pipe 6 respectively, and a sealing ring 3 is arranged at the connection position of the vacuum cooling pipeline 4 with the heat source inlet vacuum pipe 1 and the heat source outlet vacuum pipe 6. The upper and lower ends of the vacuum cooling pipeline 4 are provided with vacuum flanges 421, and the connection ends of the heat source inlet vacuum pipe 1 and the vacuum cooling pipeline 4 and the connection ends of the heat source outlet vacuum pipe 6 and the vacuum cooling pipeline 4 are also provided with vacuum flanges 421, and vacuum pipe clamps 2 are arranged on the two vacuum flanges 421 connected with each other. The three vacuum pipes and the vacuum flanges 421 are integrally formed. The cooling medium inlet and the cooling medium outlet are provided with quick pipe joints 5.

[0024] The inner wall of the vacuum cooling pipeline 4 is provided with a circulating cooling water channel 44, and the outer wall of the vacuum cooling pipeline 4 is provided with a cooling medium inlet and a cooling medium outlet connected with the circulating cooling water channel 44.

[0025] Specifically, the outer wall of the vacuum cooling pipeline 4 is provided with a plurality of penetrating axial water channels 441, and the upper and lower ends of the axial water channels 441 are sealingly fixed with an upper water channel sealing plate 41 and a lower water channel sealing plate 43, and a plurality of water passing grooves 442 for connecting the axial water channels 441 are arranged on the upper water channel sealing plate 41 and the lower water channel sealing plate 43, so as to connect the plurality of axial water channels 441 into a circulating cooling water channel 44 in the shape of “S”. The circulating cooling water channel 44 is not limited to the shape of “S” in the embodiment, and can also be in the shape of “Z” or other shapes that can pass through the entire vacuum cooling pipeline 4.

[0026] In the embodiment, the cooling water channel is processed in the vacuum pipeline, and is connected with the circulating cooling water channel 44 through a pipe joint, so that the cooling medium can be directly introduced into the vacuum pipeline, the cooling contact area is effectively increased, heat is taken away, the temperature of the sealing ring 3 is reduced, and the service life is prolonged. The circulating cooling water channel 44 is first drilled with a plurality of through holes, and then connected into a channel through the water passing grooves 442 of the upper and lower sealing plates, so that the processing is simple, the step of manually winding the cooling pipe can be saved, and the labor cost is saved. The cold air pipeline can be applied to the RPS outlet of the PECVD film coating equipment.

[0027] The preferred embodiments of the utility model are described in detail above, but the utility model is not limited to this. Within the technical concept range of the utility model, the technical scheme of the utility model can be subjected to various simple modifications, including the combination of various technical features in any other suitable mode, and these simple modifications and combinations should also be regarded as the disclosed content of the utility model and belong to the protection range of the utility model.

Claims

1. A vacuum cooling pipe structure suitable for a vacuum chamber, characterized by: It includes a heat source inlet vacuum tube, a vacuum cooling pipe and a heat source outlet vacuum tube; the two ends of the vacuum cooling pipe are respectively connected to the heat source inlet vacuum tube and the heat source outlet vacuum tube, and a sealing ring is provided at the connection between the vacuum cooling pipe and the heat source inlet vacuum tube and the heat source outlet vacuum tube; a circulating cooling water channel is provided inside the pipe wall of the vacuum cooling pipe, and a cooling medium inlet and a cooling medium outlet connected to the circulating cooling water channel are provided on the outer wall of the vacuum cooling pipe; a plurality of penetrating axial water channels are provided inside the outer wall of the vacuum cooling pipe, and the upper and lower ends of the axial water channels are sealed and fixed with a water channel upper sealing plate and a water channel lower sealing plate, and a plurality of water grooves for connecting the axial water channels are provided on the water channel upper sealing plate and the water channel lower sealing plate, so as to connect the plurality of axial water channels into an "S"-shaped circulating cooling water channel.

2. The vacuum cooling pipe structure suitable for a vacuum chamber according to claim 1, characterized in that: The upper and lower ends of the vacuum cooling pipe are provided with vacuum flanges, and the connecting ends of the heat source inlet vacuum pipe and the vacuum cooling pipe and the connecting ends of the heat source outlet vacuum pipe and the vacuum cooling pipe are both provided with vacuum flanges. A vacuum pipe clamp is provided on the two connected vacuum flanges for clamping the vacuum cooling pipe with the heat source inlet vacuum pipe and the heat source outlet vacuum pipe.

3. The vacuum cooling pipe structure suitable for a vacuum chamber according to claim 2, characterized in that: The vacuum cooling pipe and the vacuum flanges at both ends are formed as one piece.

4. The vacuum cooling pipe structure suitable for a vacuum chamber according to claim 1, characterized in that: The cooling medium inlet and the cooling medium outlet are both provided with quick pipe joints.

Images