Height adjusting device after addition of probe card

Abstract

The utility model discloses a height adjusting device for adding a probe card, which belongs to the technical field of chip detection, and comprises a mounting plate, a probe card body is fixedly connected in the mounting plate, an adjusting groove is arranged in the probe card body, the adjusting groove penetrates through the top of the mounting plate, and the probe card body is arranged in the adjusting groove. A device shell is fixedly connected to the bottom of the mounting plate, an adjusting structure is mounted in the device shell, the adjusting structure comprises a moving block slidably connected to the interior of the device shell, and a moving sliding groove is formed in the top of the moving block; according to the utility model, when the moving block moves leftwards and rightwards, the lifting block is driven to lift up and down due to the upper and lower inclined surfaces of the moving sliding strip and the moving sliding groove, so that the supporting column and the concave end cover are further driven to lift up and down, and the internal depth of the probe card body can be adjusted conveniently; the adaptability to chips with different thicknesses is greatly improved, and the use of workers is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model belongs to chip detection technical field, concretely relates to a kind of probe card rear height adjustment device of increase. BACKGROUND

[0002] Probe card is a kind of test interface, mainly used for the electrical performance test of semiconductor chip, in the chip testing process, probe card is installed on test equipment, and contacts with the pad or electrode of chip, and test equipment applies electrical signal to chip through probe card, then measures the response of chip, to determine whether the electrical performance of chip meets the requirements.

[0003] But the rear height of existing probe card inside is limited, and the thickness of different semiconductor chips is also different, for thicker semiconductor chip, probe card cannot contact with the pad or electrode of chip, so that detection operation cannot be normally carried out. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of probe card rear height adjustment device of increase, to solve the problems presented in the above background.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of probe card rear height adjustment device of increase, including mounting plate, the inside fixedly connected with probe card body of mounting plate, the inside of probe card body is equipped with adjusting groove, adjusting groove penetrates the top of mounting plate, the bottom of mounting plate is fixedly connected with device housing, adjusting structure is installed in the inside of device housing, the adjusting structure includes the moving block of sliding connection in the inside of device housing, the top of moving block is equipped with moving sliding slot, the top of moving block is slidingly connected with lifting block, the bottom of lifting block is fixedly connected with moving slide, the top of lifting block is fixedly connected with support column, support column penetrates the inside of the top of device housing and is located in the inside of adjusting groove, the top of support column is fixedly connected with concave end cap, the top of lifting block is fixedly installed with laser range finder.

[0006] As a preferred implementation, the lower surface of the inside of device housing is equipped with limit sliding slot, moving structure is installed in the inside of limit sliding slot, the limit sliding slot includes screw rod rotationally connected in the inside of limit sliding slot and limit slider fixedly connected at the bottom of moving block.

[0007] As a preferred implementation, the inside of limit slider is equipped with screw hole, the screw hole is screw-connected with screw rod, the limit slider is matched with limit sliding slot, the front of device housing is fixedly connected with connecting block.

[0008] As a preferred implementation form, one end of the threaded rod penetrates through the connecting block, the right side of the connecting block is fixedly connected with the protective shell, and the contact surface of the connecting block and the protective shell is provided with the connecting structure.

[0009] As a preferred implementation form, the connecting structure comprises a rubber pad fixedly connected to the front end of the connecting block and a bolt hole two formed in the left side of the protective shell, a bolt hole one is formed in the rubber pad, the bolt hole one penetrates through the inner wall of the front end of the connecting block, and the interior of the protective shell is fixedly connected with the rotating motor, and the output end of the rotating motor is fixedly connected with one end of the threaded rod.

[0010] As a preferred implementation form, the front end of the protective shell is fixedly connected with the rear cover, the interior of the rear cover is provided with the heat dissipation groove, and the interior of the heat dissipation groove is fixedly connected with the strip-shaped grid in parallel from top to bottom.

[0011] Compared with the prior art, the utility model has the advantages that:

[0012] The utility model discloses, the installation of adjusting structure and mobile structure makes the threaded rod drive the moving block to move left or right in the process of rotating, and the moving block will drive the lifting block to go up and down in the process of moving left and right due to the upper and lower inclined surfaces of the moving slide strip and the moving slide groove, thereby further drive the support column and the concave end cover to go up and down, and the adjustment of the depth of the probe card body interior is completed at random, the adaptability to different thickness chips is greatly increased, and the use of the staff is facilitated.

[0013] The utility model discloses the installation of laser range finder can detect the height of lifting block ascending and descending in real time, thereby facilitating the staff to control the switch of rotating motor, effectively increasing the accuracy of lifting block ascending and descending, and facilitating the use of the staff. ACCURATE DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the overall three-dimensional schematic view of the utility model structure;

[0015] Figure 2 It is the local overall three-dimensional schematic view of the utility model structure;

[0016] Figure 3 It is the three-dimensional schematic view of the protective shell of the utility model structure;

[0017] Figure 4 It is the three-dimensional schematic view of the device shell body side cut open of the utility model structure;

[0018] Figure 5 It is the three-dimensional schematic view of the lifting block and the moving block of the utility model structure.

[0019] In the figure: 1, mounting plate; 2, probe card body; 3, adjusting groove; 4, device housing; 5, connecting block; 6, protective shell; 7, rotary motor; 8, rear cover; 9, heat dissipation groove; 10, strip-shaped grid; 11, limiting sliding groove; 41, moving block; 42, moving sliding groove; 43, lifting block; 44, moving sliding bar; 45, support column; 46, laser range finder; 47, concave end cover; 51, rubber pad; 52, bolt hole one; 53, bolt hole two; 111, threaded rod; 112, limiting sliding block; 113, threaded hole. DETAILED DESCRIPTION

[0020] The utility model will be further described below in combination with examples.

[0021] The following examples are used to illustrate the utility model, but cannot be used to limit the protection scope of the utility model. The conditions in the examples can be further adjusted according to specific conditions, and simple improvements of the method of the utility model under the concept of the utility model all belong to the range required to be protected by the utility model.

[0022] Please refer to Figures 1-5 The utility model provides a kind of increase probe card rear height adjustment device, including mounting plate 1, the inside fixed connection of mounting plate 1 is connected with probe card body 2, adjusting groove 3 is set in the inside of probe card body 2, adjusting groove 3 penetrates the top of mounting plate 1, the bottom of mounting plate 1 is fixedly connected with device housing 4, adjusting structure is installed in the inside of device housing 4, adjusting structure includes the moving block 41 of sliding connection in the inside of device housing 4, moving sliding groove 42 is set in the top of moving block 41, the top of moving block 41 is slidingly connected with lifting block 43, the bottom of lifting block 43 is fixedly connected with moving sliding bar 44, the top of lifting block 43 is fixedly connected with support column 45, support column 45 penetrates the inside of the top of device housing 4 and is located in the inside of adjusting groove 3, the top of support column 45 is fixedly connected with concave end cover 47, laser range finder 46 is fixedly installed on the top of lifting block 43;

[0023] The installation of laser range finder 46 can detect the height of lifting block 43 rising and falling in real time, so as to facilitate staff to control the switch of rotary motor 7, effectively increase the accuracy of lifting block 43 lifting, the top of moving block 41 and the bottom of lifting block 43 are inclined, moving sliding bar 44 and moving sliding groove 42 are matched;During moving left and right, moving block 41 will drive lifting block 43 to rise and fall due to the upper and lower inclined surfaces of moving sliding bar 44 and moving sliding groove 42, so as to further drive support column 45 and concave end cover 47 to rise and fall, to complete the adjustment of the depth of probe card body 2 inside.

[0024] Specifically, as Figure 4 And Figure 5As shown, the lower surface inside the device housing 4 is provided with a limiting sliding groove 11, the inside of the limiting sliding groove 11 is provided with a moving structure, the limiting sliding groove 11 comprises a threaded rod 111 rotatably connected inside the limiting sliding groove 11 and a limiting sliding block 112 fixedly connected at the bottom of the moving block 41;

[0025] The inside of the limiting sliding block 112 is provided with a threaded hole 113, the threaded hole 113 is threadedly connected with the threaded rod 111, the limiting sliding block 112 is matched with the limiting sliding groove 11, and the front surface of the device housing 4 is fixedly connected with a connecting block 5;

[0026] By rotating the threaded rod 111, the threaded rod 111 is uniformly and stably moved to the left or right in the rotating process due to the threaded connection of the threaded hole 113 and the threaded rod 111 and the matching of the limiting sliding block 112 and the limiting sliding groove 11.

[0027] Specifically, as shown in Figure 3 One end of the threaded rod 111 penetrates through the connecting block 5, the right side of the connecting block 5 is fixedly connected with a protective shell 6, and the contact surface of the connecting block 5 and the protective shell 6 is provided with a connecting structure;

[0028] The installation of the protective shell 6 can not only protect and dust-proof the rotating motor 7.

[0029] Specifically, as shown in Figure 4 And Figure 5 The connecting structure comprises a rubber pad 51 fixedly connected to the front end of the connecting block 5 and a bolt hole two 53 provided in the left side of the protective shell 6, the inside of the rubber pad 51 is provided with a bolt hole one 52, the bolt hole one 52 penetrates through the inner wall of the front end of the connecting block 5, the inside of the protective shell 6 is fixedly connected with the rotating motor 7, and one end of the threaded rod 111 is fixedly connected with the output end of the rotating motor 7; by starting the rotating motor 7, the threaded rod 111 at the transmission end of the rotating motor 7 is rotated.

[0030] Specifically, as shown in Figure 1 The front end of the protective shell 6 is fixedly connected with a rear cover 8, the inside of the rear cover 8 is provided with a heat dissipation groove 9, and the inside of the heat dissipation groove 9 is fixedly connected with a strip-shaped grid 10 in parallel from top to bottom.

[0031] The working principle and use process of the utility model are as follows: in the process of use, the staff first installs the device housing 4 at the bottom of the mounting plate 1, so that the supporting column 45 at the top of the device housing 4 penetrates in the adjusting groove 3;

[0032] Then in use, the staff can adjust the depth of the adjusting groove 3 according to the rear matching height of the product; only need to start the rotating motor 7, so that the threaded rod 111 at the transmission end of the rotating motor 7 is rotated;

[0033] The threaded rod 111 is in rotation due to the threaded connection of the threaded hole 113 and the threaded rod 111 and the matching of the limiting sliding block 112 and the limiting sliding groove 11, so that the moving block 41 can uniformly and stably move left or right;

[0034] While the moving block 41 moves left and right, the moving sliding bar 44 and the upper and lower inclined surfaces of the moving sliding groove 42 drive the lifting block 43 to move up and down, further driving the support column 45 and the concave end cover 47 to move up and down, thereby adjusting the height of the rear part of the probe card body 2.

[0035] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A height adjustment device for adding a probe card, comprising a mounting plate (1), characterized in that: The interior of the mounting plate (1) is fixedly connected to a probe card body (2), an adjustment slot (3) is provided inside the probe card body (2), the adjustment slot (3) passes through the top of the mounting plate (1), the bottom of the mounting plate (1) is fixedly connected to a device shell (4), an adjustment structure is installed inside the device shell (4), the adjustment structure includes a moving block (41) slidably connected to the interior of the device shell (4), a moving slide slot (42) is provided on the top of the moving block (41), a lifting block (43) is slidably connected to the top of the moving block (41), a moving slide bar (44) is fixedly connected to the bottom of the lifting block (43), a support column (45) is fixedly connected to the top of the lifting block (43), the support column (45) passes through the top of the interior of the device shell (4) and is located inside the adjustment slot (3), a concave end cover (47) is fixedly connected to the top of the support column (45), and a laser rangefinder (46) is fixedly installed on the top of the lifting block (43).

2. The height adjustment device for adding a probe card according to claim 1, characterized in that: A limiting slide groove (11) is provided on the lower surface of the interior of the device housing (4), and a movable structure is installed inside the limiting slide groove (11). The limiting slide groove (11) includes a threaded rod (111) rotatably connected to the interior of the limiting slide groove (11) and a limiting slider (112) fixedly connected to the bottom of the movable block (41).

3. The height adjustment device for adding a probe card according to claim 2, characterized in that: A threaded hole (113) is provided inside the limiting slider (112), the threaded hole (113) is threadedly connected to the threaded rod (111), the limiting slider (112) is adapted to the limiting slide groove (11), and a connecting block (5) is fixedly connected to the front of the device housing (4).

4. The height adjustment device for adding a probe card according to claim 3, characterized in that: One end of the threaded rod (111) passes through the connecting block (5), the right side of the connecting block (5) is fixedly connected to a protective shell (6), and a connecting structure is installed on the contact surface between the connecting block (5) and the protective shell (6).

5. The height adjustment device after adding a probe card according to claim 4, characterized in that: The connection structure comprises a rubber pad (51) fixedly connected to the front end of the connection block (5) and a second bolt hole (53) opened on the left side of the protective shell (6); a first bolt hole (52) is opened inside the rubber pad (51); the first bolt hole (52) passes through the inner wall of the rubber pad (51) located at the front end of the connection block (5); a rotating motor (7) is fixedly connected to the inside of the protective shell (6); and the output end of the rotating motor (7) is fixedly connected to one end of the threaded rod (111).

6. The height adjustment device for adding a probe card according to claim 4, characterized in that: The front end of the protective shell (6) is fixedly connected to a rear cover (8), a heat dissipation groove (9) is provided inside the rear cover (8), and a bar grid (10) is fixedly connected in parallel up and down inside the heat dissipation groove (9).

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