Photomask cartridge
By adopting a composite layer structure in the mask box, including a conductive layer and a non-metallic outer and inner layer, and using the conductive layer to remove static electricity, the problem of static electricity accumulation in the mask box during transportation is solved, ensuring the safety and integrity of the mask.
Patent Information
- Application Number
- CN202421965893.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-14
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2034-08-14
AI Technical Summary
Existing photomask boxes are prone to photomask pattern breakdown due to static electricity accumulation during transportation or storage, resulting in photomask defects or scrap. Current technology cannot effectively prevent the hazards of static electricity.
The photomask box adopts a composite layer structure, which includes a conductive layer, an outer layer, and an inner layer. The conductivity of the conductive layer is higher than that of the outer and inner layers. The outer and inner layers are non-metallic layers. By setting the conductive layer inside the box and cover, static electricity is dissipated using the conductive layer, preventing static electricity from entering and damaging the photomask pattern lines.
It effectively prevents the accumulation of static electricity, prevents static electricity from damaging the photomask, ensures that the photomask is not damaged by static electricity during transportation, and maintains the integrity of the photomask.
Smart Images
Figure CN223450313U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor, especially relates to a mask box. BACKGROUND
[0002] The mask (Mask Reticle) is also called as the photolithography mask plate, and is simply called as the mask plate, and is the pattern master plate used in the photolithography process of the micro-nano processing technology.
[0003] If the mask is contacted with the outside environment during the conveying process, the mask is easily polluted by the external dust particles.
[0004] Therefore, the mask box is usually needed during the conveying process of the mask, the mask is placed in the mask box to isolate the external environment, so that the mask is not polluted by the external environment.
[0005] The existing mask box is usually made of insulating material.
[0006] The existing insulating mask box is easily accumulated with static electricity due to the friction or storage environment during the conveying, the static electricity cannot be removed in time, and after the static electricity is accumulated, the mask pattern in the mask box is easily damaged by the breakdown, so that the mask is defective or even scrapped.
[0007] Therefore, based on the above technical problems, a mask box is needed to improve the static electricity accumulation phenomenon, so as to effectively prevent and control the harm of static electricity to the mask. UTILITY MODEL CONTENTS
[0008] The utility model aims at providing a mask box, which improves the static electricity accumulation phenomenon, so as to effectively prevent and control the harm of static electricity to the mask.
[0009] The utility model provides a mask box, which comprises a box body and a cover body covering the box body.
[0010] At least a part of at least one of the box body and the cover body is made of a composite layer.
[0011] The composite layer comprises an electrically conductive layer, an outer layer and an inner layer, the electrically conductive layer is located between the outer layer and the inner layer, the electrically conductive layer has a larger electrical conductivity than the outer layer and the inner layer, and the outer layer and the inner layer are non-metal layers.
[0012] Optionally, the conductive layer is a metal mesh.
[0013] Optionally, the material of the conductive layer is copper.
[0014] Optionally, the material of the outer layer and the inner layer is antistatic polypropylene.
[0015] Optionally, the box body and the cover body are both provided with a composite layer, and the conductive layer in the box body is connected with the conductive layer in the cover body when the cover body covers the box body.
[0016] Optionally, the photomask box further comprises a conducting member, the conducting member is arranged on the box body and / or the cover body, and the conducting member is in contact with the conductive layer in the box body and the conductive layer in the cover body when the cover body covers the box body.
[0017] Optionally, the conducting member is arranged on the box body, the conducting member is connected with the conductive layer in the box body, a part of the conducting member is exposed in the inner cavity of the box body, and a part of the conductive layer of the cover body is exposed, the exposed conductive layer of the cover body is in contact with the conducting member when the cover body covers the box body.
[0018] Optionally, the conducting member is arranged at the bottom of the inner cavity of the box body.
[0019] Optionally, the conducting member is flush with the surface of the bottom of the inner cavity of the box body, or the contact surfaces of the conducting member and the exposed conductive layer of the cover body are respectively a convex surface and a concave surface arranged in cooperation.
[0020] Optionally, the thickness of the conductive layer is the same as the thickness of the outer layer, and / or the thickness of the conductive layer is the same as the thickness of the inner layer.
[0021] In summary, the photomask box comprises a box body and a cover body covering the box body, at least a part of at least one of the box body and the cover body is made of a composite layer, the composite layer comprises a conductive layer, an outer layer and an inner layer, the conductive layer is located between the outer layer and the inner layer, the conductivity of the conductive layer is greater than the conductivity of the outer layer and the inner layer, and the outer layer and the inner layer are non-metal layers.
[0022] In this way, by arranging the conductive layer in the box body and the cover body, static electricity can be discharged, static electricity can be prevented from entering and breaking the photomask pattern line, the accumulation of static electricity can be improved, and the harm of static electricity to the photomask can be effectively prevented and treated.
[0023] The outer layer and the inner layer of the mask box are non-metal layers, so as not to affect the installation of the wireless identification device. The outer layer and the inner layer are non-metal layers, so that the surface (outer wall or inner wall) of the box body and / or the cover body is of non-metal material. This can avoid the interference of the signal reflected by the metal luster on the wireless identification device. Therefore, the mask box can be equipped with a wireless identification device for identifying the mask inside the mask box.
[0024] The conductive layer is made of metal copper mesh, and the outer layer and the inner layer are made of anti-static polypropylene, so that better mechanical strength and corrosion resistance can be ensured, and light weight design can be realized, and better conductive performance can be ensured for a long time, and the phenomenon that the conductive performance and the anti-static performance are reduced or even lost due to corrosion of the material after long time use can be improved. BRIEF DESCRIPTION OF DRAWINGS
[0025] Figure 1 It is a structure schematic view of the mask box of an embodiment of the utility model;
[0026] Figure 2 It is a structure schematic view of the composite layer of an embodiment of the utility model.
[0027] In the drawings:
[0028] 10 - box body; 11 - conductive layer; 12 - outer layer; 13 - inner layer;
[0029] 111 - first conductive layer; 121 - first outer layer; 131 - first inner layer;
[0030] 20 - cover body; 211 - second conductive layer; 221 - second outer layer; 231 - second inner layer;
[0031] 30 - conductive piece. DETAILED DESCRIPTION
[0032] The mask box of the utility model will be further described in detail in combination with the drawings and specific embodiments. According to the following description, the advantages and characteristics of the utility model will be more clear. It should be noted that the drawings are very simplified and use non-precise proportions, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the utility model.
[0033] As used in the present application, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense including "and / or" unless the context clearly dictates otherwise. The term "at least two" or "a plurality of" is generally employed in its sense including "two or more" unless the context clearly dictates otherwise. In addition, the terms "first," "second," "third," etc. are used only to describe a particular feature and do not imply relative importance or a number of the indicated features. Thus, features defined with "first," "second," or "third" can explicitly or implicitly include one or at least two of the features. In addition, as used in the present application, "mounting," "connected," "connection," an element "disposed" in another element should be interpreted broadly, and generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the two elements can be directly or indirectly connected, coupled, cooperated or transmitted, and cannot be understood as indicating or implying the spatial position relationship between the two elements, i.e. one element can be in any direction inside, outside, above, below or one side of another element, unless the context clearly indicates otherwise. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, directional terms such as upper, lower, up, down, left, right, etc. are used with respect to the exemplary embodiments as they are shown in the figures, upward or upward direction is toward the top of the corresponding drawing, and downward or downward direction is toward the bottom of the corresponding drawing.
[0034] The present embodiment provides a reticle box for placing a reticle (mask).
[0035] The reticle box comprises a box body 10 and a cover 20 covering the box body 10.
[0036] As shown in Figure 1 The box body 10 and the cover 20 are cuboids as a whole, the box body 10 has an upwardly open inner cavity, the cover 20 has a downwardly open inner cavity, the cover 20 is downwardly covered on the box body 10, and a lower part of the cover 20 is inserted into the inner cavity of the box body 10.
[0037] Please continue to refer to Figure 1 In the present embodiment, the box body 10 and the cover 20 are both made of a composite layer.
[0038] As shown in Figure 2 The composite layer comprises a conductive layer 11, an outer layer 12 and an inner layer 13, the conductive layer 11 is located between the outer layer 12 and the inner layer 13, and the conductivity of the conductive layer 11 is greater than that of the outer layer 12 and the inner layer 13.
[0039] The outer layer 12 and the inner layer 13 are non-metal layers, so as not to affect the installation of the wireless identification device. The outer layer 12 and the inner layer 13 are non-metal layers, so that the surface (outer wall or inner wall) of the box body 10 and the cover body 20 are non-metal materials. This can avoid the interference of the signal reflected by the metal gloss on the wireless identification device. Therefore, the mask box can be equipped with a wireless identification device for identifying the mask inside the mask box.
[0040] As shown in Figure 1 For the convenience of distinguishing the composite layers of the box body 10 and the cover body 20, in the embodiment, the conductive layer 11 of the box body 10 is referred to as the first conductive layer 111, the outer layer of the box body 10 is referred to as the first outer layer 121, and the inner layer of the box body 10 is referred to as the first inner layer 131, wherein the first outer layer 121 corresponds to the outer wall of the box body 10, and the first inner layer 131 corresponds to the inner wall of the box body 10; the conductive layer 11 of the cover body 20 is referred to as the second conductive layer 211, the outer layer of the cover body 20 is referred to as the second outer layer 221, and the inner layer of the cover body 20 is referred to as the second inner layer 231, wherein the second outer layer 221 corresponds to the outer wall of the cover body 20, and the second inner layer 231 corresponds to the inner wall of the cover body 20.
[0041] Generally, the product with a resistance value less than 10 11 Ω is an anti-static product, and the product with a resistance value greater than 10 12 Ω is an insulating product. In the embodiment, the conductive layer 11 specifically refers to a layer made of a material with a resistance value less than 10 11 Ω.
[0042] In the embodiment, by arranging the conductive layer 11 inside the box body 10 and the cover body 20, static electricity can be discharged, and static electricity can be prevented from entering and breaking the mask pattern line, so as to improve the static electricity accumulation phenomenon and effectively prevent the harm of static electricity to the mask.
[0043] In the embodiment, the conductive layer 11 is a metal copper mesh. The grid shape of the metal copper mesh is preferably a non-square rhombus, so that the flat shape of the rhombus is more conducive to capturing static electricity and discharging static electricity. Moreover, the copper mesh with a rhombus shape has good conductivity and strong structural strength.
[0044] The material of the outer layer 12 and the inner layer 13 is anti-static polypropylene (anti-static PP plastic).
[0045] Polypropylene can be made into conductive polypropylene (Conductive Polypropylene) by compounding with conductive fillers. This material has good conductivity and anti-static ability, so it is also called anti-static polypropylene, which can effectively prevent the generation and accumulation of static electricity. This material also has excellent thermal stability, chemical corrosion resistance and mechanical strength, so it can stably operate in various harsh environments.
[0046] The conductive layer 11 is made of copper mesh, and the outer layer 12 and the inner layer 13 are made of anti-static polypropylene, which can ensure good mechanical strength and corrosion resistance, and is conducive to lightweight design; at the same time, it is helpful to ensure good conductivity for a long time, and can improve the phenomenon that the conductivity and anti-static performance are reduced or even lost due to corrosion of the material after long-term use.
[0047] In the embodiment, the box body 10 and the cover body 20 are made of composite layers to achieve all-round anti-static. In other alternative embodiments, the box body 10 and the cover body 20 can also be made of composite layers in part and made of conventional materials in part. For example, certain local areas are more difficult to be formed by composite layers due to the limitation of their structure, and therefore, the local areas can be made of conventional materials.
[0048] In other alternative embodiments, one of the box body 10 and the cover body 20 can be made of composite layers. For example, the cover body 20 is made of composite layers, and the box body 10 is made of conductive metal materials or conductive non-metal materials.
[0049] In the embodiment, the conductive layer is wrapped by anti-static polypropylene, which can capture static electricity through the conductive layer 11 and discharge static electricity by using the conductivity of anti-static polypropylene to prevent local static accumulation in the mask box. During normal transportation of the mask box, static electricity is naturally discharged by grounding through contact between the mask box and the outside. In other alternative embodiments, the outer layer 12 and the inner layer 13 can be set as insulating layers, and then a connecting piece can be externally connected to the mask box to discharge static electricity by grounding through the connecting piece.
[0050] Please refer to Figure 2 As shown in the figure, the thicknesses of the conductive layer 11, the outer layer 12 and the inner layer 13 are the same, for example, the thickness L of each of the three layers is set to 1mm. By setting a reasonable thickness, the mechanical strength and anti-static performance of the composite layer are taken into account, and the conductive layer 11 can also be well protected.
[0051] Please refer to Figure 1 As shown in the figure, in the embodiment, when the cover body 20 covers the box body 10, the first conductive layer 111 (the conductive layer in the box body 10) and the second conductive layer 211 (the conductive layer in the cover body 20) are connected. At this time, the first conductive layer 111 in the box body 10 and the second conductive layer 211 in the cover body 20 are in communication, which is more conducive to the conduction and discharge of static electricity.
[0052] In the embodiment, the connection between the first conductive layer 111 in the box body 10 and the second conductive layer 211 in the cover body 20 is realized by the addition of the conductive piece 30. The conductive piece 30 is a conductor, and the material of the conductive piece 30 is preferably the same as that of the first conductive layer 111 and the second conductive layer 211.
[0053] like Figure 1 As shown, the conductive member 30 is arranged at the bottom of the inner cavity of the box body 10, one end of the conductive member 30 is embedded in the first inner layer 131 of the box body 10 and connected to the first conductive layer 111 in the box body 10, and the other end of the conductive member 30 is exposed.
[0054] The second conductive layer 211 in the cover body 20 is exposed at the lower edge of the cover body 20. When the cover body 20 covers the box body 10, the second conductive layer 211 exposed at the lower edge of the cover body 20 contacts the conductive member 30, so that the first conductive layer 111 in the box body 10 and the second conductive layer 211 in the cover body 20 are connected.
[0055] In this embodiment, considering the reliability of the conductive member 30, the conductive member 30 is disposed in the inner cavity of the box body 10. A portion of the conductive member 30 is exposed in the inner cavity of the box body 10. When the cover 20 is placed on the box body 10, the conductive member 30 is shielded from the outside world by the cover 20, ensuring the cleanliness of the conductive member 30. This effectively prevents the conductive member 30 from being contaminated by foreign particles, which could compromise the conductive effect.
[0056] Please refer to Figure 1 As shown, the conductive member 30 is disposed at the bottom of the inner cavity of the box body 10, so that the cover body 20 is naturally pressed on the conductive member 30 by its own weight to achieve conductivity. In addition, the conductive member 30 is flush with the bottom surface of the inner cavity of the box body 10, so that the bottom of the inner cavity of the box body 10 is flat and has no protrusions. On the one hand, this ensures that the bottom surface of the inner cavity of the box body 10 is simple and easy to clean. On the other hand, since the connection between the conductive member 30 and the bottom of the inner cavity of the box body 10 is relatively flat, it can also reduce the phenomenon of particulate matter gathering at this connection position, thereby ensuring the reliable conductivity performance of the conductive member 30.
[0057] In this embodiment, the conductive member 30 is cylindrical and is disposed at equal intervals at the bottom of the inner cavity of the box body 10. Accordingly, the second conductive layer 211 in the cover 20 has multiple exposed areas at locations corresponding to the conductive members 30, so that the second conductive layer 211 in the cover 20 forms multiple points of contact with the first conductive layer 111 in the box body 10 through the multiple conductive members 30.
[0058] In other alternative embodiments, the conductive member 30 can be a continuous closed-loop rectangular frame, and the second conductive layer 211 in the cover body 20 adaptively forms a frame-shaped continuous exposed area at the lower edge of the cover body 20, so that the lower edge of the cover body 20 is circumferentially connected to the first conductive layer 111 in the box body 10 through the conductive member 30.
[0059] In the embodiment, the connection between the first conductive layer 111 in the box body 10 and the second conductive layer 211 in the cover body 20 is realized by the conductive member 30 arranged in the box body 10. In other alternative embodiments, the conductive member can be arranged on both the box body 10 and the cover body 20. For example, the conductive member is embedded in the lower edge of the cover body 20, and the conductive member is connected with the second conductive layer 211 in the cover body 20, and the conductive member is flush with the lower edge of the cover body 20. When the cover body 20 is covered on the box body 10, the conductive member on the box body 10 and the conductive member on the cover body 20 are in contact, thereby realizing the communication between the first conductive layer 111 and the second conductive layer 211. In addition, the conductive member 30 can also be arranged on the side wall of the inner cavity of the box body 10 and the outer side wall of the cover body 20, respectively, to realize the communication between the first conductive layer 111 and the second conductive layer 211.
[0060] In other alternative embodiments, the first conductive layer 111 and the second conductive layer 211 can be directly in contact to realize the conduction.
[0061] In other alternative embodiments, the conductive member 30 can be slightly protruded from the bottom of the inner cavity of the box body 10. For example, the conductive member 30 is arranged as a slightly protruded spherical structure, and the corresponding second conductive layer 211 is formed with an inner concave structure matching the protrusion at the exposed position of the lower edge of the cover body 20, that is, the contact surfaces of the conductive member 30 and the exposed conductive layer (the second conductive layer 211) of the cover body 20 are respectively the matching protrusion surface and the inner concave surface, and the matching structure is used to ensure good conduction performance, and the matching of the protrusion surface and the inner concave surface also has a positioning function for positioning the box body 10 and the cover body 20. The conductive member 30 can be integrally injection molded with the first inner layer 131, and the conductive member 30 is connected with the bottom of the inner cavity of the box body 10 through a circular arc transition, so that the bottom of the inner cavity of the box body 10 remains relatively flat through the small protrusion structure, facilitating the overall cleaning of the bottom of the inner cavity of the box body 10; at the same time, the circular arc transition structure also has a certain effect of preventing the accumulation of particulate matter. In addition, the conductive member 30 can not only be protruded from the bottom of the inner cavity of the box body 10, but also can be protruded from the inner side wall of the box body 10, and the corresponding second conductive layer 211 is exposed at the position of the outer side wall of the cover body 20 and is formed with an inner concave structure matching the protrusion, at this time, the matching of the protrusion and the inner concave structure can also be used as a locking structure to realize the locking of the box body 10 and the cover body 20.
[0062] The various embodiments in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same or similar parts between the various embodiments can be referred to each other.
[0063] The above description is only the description of the preferred embodiment of the utility model, and does not limit the utility model in any way, and any change and modification of the utility model according to the above disclosure by the ordinary skilled in the art of the utility model belongs to the protection scope of the claims.
Claims
1. A mask box, characterized in that: include: A box body, a cover covering the box body, and a conductive member; The box body and the cover body are both made of composite layers; The composite layer includes a conductive layer, an outer layer and an inner layer, the conductive layer is located between the outer layer and the inner layer, the conductivity of the conductive layer is greater than the conductivity of the outer layer and the inner layer, and the outer layer and the inner layer are non-metallic layers; The conductive member is provided in the box body, the conductive member is connected to the conductive layer in the box body, and a portion of the conductive member is exposed in the inner cavity of the box body; A portion of the conductive layer of the cover is exposed. When the cover is placed on the box, the exposed conductive layer of the cover contacts the conductive component, so that the conductive layer in the box is connected to the conductive layer in the cover.
2. The reticle box according to claim 1, wherein: The conductive layer is a metal mesh.
3. The reticle box according to claim 1, wherein: The conductive layer is made of copper.
4. The reticle box according to claim 1, wherein: The outer layer and the inner layer are made of antistatic polypropylene.
5. The reticle box according to claim 1, wherein: The conducting member is arranged at the bottom of the inner cavity of the box body.
6. The reticle box according to claim 5, wherein: The conductive member is flush with the surface of the bottom of the inner cavity of the box body; or, the contact surface of the conductive member and the exposed conductive layer of the cover body are respectively a convex surface and an inner concave surface arranged in a matching manner.
7. The reticle box according to claim 1, wherein: The thickness of the conductive layer is the same as the thickness of the outer layer; and / or the thickness of the conductive layer is the same as the thickness of the inner layer.