Separated sample holder capable of quickly replacing sample for low-temperature scanning tunneling microscope

Abstract

The utility model discloses a low temperature scanning tunnel microscope separating type sample support capable of rapidly replacing samples, comprising a first mother support, a second mother support and a son support, the surface of the first mother support is provided with a boss, the boss is used for fixing a to-be-tested sample, the second mother support is provided with a heating zone, the surface of the son support is used for fixing a standard sample, and the boss is used for fixing the to-be-tested sample. The surface of the first mother support and the surface of the second mother support are each provided with a screw used for fixing the son support, the first mother support, the second mother support and the son support are each provided with an extended grabbing arm, the extended grabbing arms are provided with mechanical arms, and the mechanical arms are used for transferring the son supports on the surfaces of the first mother support and the second mother support. The utility model has the advantages of high use efficiency, effective reduction of thermal drift, and more accurate imaging.

Description

TECHNICAL FIELD

[0001] The utility model relates to microscope technical field, concretely relates to a kind of quick replacement sample's separated sample holder for low-temperature scanning tunneling microscope (STM). BACKGROUND

[0002] Low-temperature STM is the testing device based on the basic principle of quantum tunneling effect to detect the structure of matter surface.In low-temperature environment, the tunneling current between the probe and sample of STM will become more stable, thereby improving the accuracy and resolution of measurement.In addition, low-temperature environment can also reduce the interference of thermal noise, so that STM can more accurately detect the subtle structural changes on the surface of sample.

[0003] Low-temperature environment is controlled and guaranteed by low-temperature vacuum cavity, sample is placed on sample holder, and detection is carried out by probe.In the working process, the probe tip will become blunt and needle collision will occur, which will affect the detection data, so it is necessary to frequently repair and calibrate the scanning probe.

[0004] In the process of using conventional sample holder, the sample holder needs to be taken out of the low-temperature cavity, and the sample to be measured is replaced with Au / Ag standard metal single crystal sample.Au / Ag standard sample generally needs to be subjected to argon ion etching and annealing process to obtain a clean and flat surface, and then the sample holder with Au / Ag sample is placed into the low-temperature cavity for tip repair.After the tip repair is completed, the sample holder is taken out of the low-temperature cavity, and the Au / Ag sample is replaced with the sample to be measured, which is placed into the low-temperature cavity for detection again.

[0005] In this process, at least the following problems exist:

[0006] 1. Since two kinds of samples need to be disassembled and installed, the replacement time is long and the efficiency is low.

[0007] 2. After the sample is replaced, the sample to be detected gradually warms up to room temperature outside the low-temperature cavity, and needs to be re-cooled for detection again, which will cause long-term thermal drift and affect the scanning imaging and scanning tunneling spectrum measurement.

[0008] 3. After the sample to be detected is disassembled, its position is also moved, and it can only be re-detected without position calibration.

[0009] 4. Part of the sample to be measured may be damaged due to adsorption on the surface in the repeated heating and cooling process caused by repairing the tip and replacing the sample holder. SUMMARY

[0010] The technical problem to be solved by the utility model is to provide a low-temperature scanning tunneling microscope with a quick replacement sample's separated sample holder, which has high use efficiency, effectively reduces thermal drift, and makes imaging more accurate.

[0011] In order to solve the above technical problems, the utility model provides a low temperature scanning tunneling microscope with quick replaceable sample's separate sample holder, including first female, second female and sub - holder, the first female surface is provided with the boss, the boss is used for fixing the sample to be measured, second female is provided with heating area, the surface of sub - holder is used for fixing standard sample, the first female and second female surface all are provided with screw for fixed sub - holder, the first female, second female and sub - holder all are provided with extension grabbing arm, the extension grabbing arm supplies mechanical hand, the mechanical hand is used to transfer sub - holder on the surface of first female and second female.

[0012] Further, the sub - holder is provided with a limiting groove, the limiting groove is matched with the side wall of the boss to limit the relative position between the sub - holder and the first female, the number of screws on the first female is 2, and the two screws are matched with the boss to limit the sub - holder.

[0013] Further, the heating area of the second female is provided with a heating through - hole, the heating through - hole is used for arranging a heating assembly, and the second female is further provided with a blocking piece, one side edge of the sub - holder abuts against the blocking piece, and the number of screws on the second female is 2, and the two screws are matched with the blocking piece to limit the sub - holder.

[0014] Further, the surface of the sub - holder is provided with two pressing plates, and the two pressing plates are used for pressing and fixing the standard sample.

[0015] Further, the screw comprises a pressing plate, the bottom of the pressing plate is provided with a screw rod, and the top of the pressing plate is provided with a bolt head.

[0016] Further, it further includes a plug - in base, the plug - in base is provided with a mounting groove, the top of the mounting groove is provided with a plug - in opening, one side surface of the mounting groove is provided with a detection port, the first female is grabbed by the mechanical hand and inserted into the mounting groove, the detection port is provided with a fixed spring on both sides in the plug - in direction, and the fixed spring is used for pressing the first female in the mounting groove.

[0017] Further, the fixed spring corresponds to the first female provided with a thin - walled frame, and an arc convex part is arranged between the side edge of the thin - walled frame and the side wall of the mounting groove.

[0018] Further, the end of the mechanical hand is provided with a piezoelectric finger.

[0019] The utility model has the advantages of:

[0020] The sub holder is used for fixing the sample of the repair probe, and the sub holder can be transferred on the first mother holder and the second mother holder, that is, the sub holder can be heated on the second mother holder and then placed on the first mother holder for probe repair, since the sample to be detected does not need to be disassembled, the first mother holder does not need to be taken out from the low-temperature vacuum cavity, the sample to be detected is kept still during the whole process, and therefore the thermal drift problem caused by the disassembly and transfer process of the sample is eliminated, and the imaging is more accurate.

[0021] In addition, the sub holder can be preheated, and when the probe needs to be repaired, the sub holder can be timely transferred to the first mother holder, so that the detection efficiency is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a bracket structure schematic diagram of the utility model;

[0023] Figure 2 is a sub holder structure schematic diagram of the utility model;

[0024] Figure 3 is a first mother holder structure schematic diagram of the utility model;

[0025] Figure 4 is a first mother holder and sub holder cooperation connection structure schematic diagram of the utility model;

[0026] Figure 5 is a second mother holder structure schematic diagram of the utility model;

[0027] Figure 6 is a second mother holder and sub holder cooperation connection structure schematic diagram of the utility model;

[0028] Figure 7 is a screw structure schematic diagram of the utility model;

[0029] Figure 8 is a first mother holder detection installation structure schematic diagram of the utility model. DETAILED DESCRIPTION

[0030] The utility model will be further described below in combination with the drawings and specific embodiments, so that the person skilled in the art can better understand the utility model and can be implemented, but the embodiment is not as the limitation of the utility model.

[0031] Reference Figures 1 to 7As shown, the embodiment of the quick-replaceable sample separation type sample holder for low-temperature scanning tunneling microscope comprises a first mother holder 1, a second mother holder 2 and a child holder 3, the first mother holder and the second mother holder are located in a low-temperature vacuum chamber for cooperation detection, the child holder is transferred on the surface of the first mother holder and the second mother holder through a mechanical hand, a boss 5 is arranged on the first mother holder, the boss is used for fixing a sample to be detected 6, a heating area 7 is arranged on the second mother holder, the child holder is used for fixing a standard sample 8, and screws 9 for fixing the child holder are arranged on the surface of the first mother holder and the second mother holder. The material of the standard sample is Au or Ag, and the repair requirement is met.

[0032] Specifically, the sample to be detected is directly bonded on the boss surface of the first mother holder through a colloid, the first mother holder with the bonded sample to be detected is placed on a machine detection position in the low-temperature vacuum chamber, the first mother holder can be vertically arranged, and a detection result is obtained through the scanning of a probe of the STM; the standard sample is fixed on the child holder, the child holder is installed on the second mother holder, and the standard sample is heated in the heating area of the second mother holder. Figure 6 As shown, specifically, the screws on the second mother holder are loosened, then the child holder is placed on the second mother holder, and the standard sample is ensured to be located in the heating area, then the screws are locked, so that the screws clamp and fix the child holder on the second mother holder; when the probe needs to be repaired, the child holder is heated on the second mother holder, after being heated to a position, the standard sample also reaches a heating temperature, then the screws are continued to be loosened, the child holder is unlocked, and then the child holder is moved to the first mother holder by the mechanical hand, the screws on the first mother holder and the screws on the second mother holder are used in the same way, the child holder is fixed on the first mother holder through the screws, and then the probe can be repaired. After the repair is completed, the child holder is immediately taken away, and then the sample to be detected is continuously measured.

[0033] The heating of the standard sample can be performed in advance, when the probe is bad, the child holder can be quickly transferred from the second mother holder to the first mother holder, which is quick and convenient, the waiting time is short, and the repair efficiency is greatly improved; and in the process, the sample to be detected is always in the low-temperature vacuum chamber, and the sample to be detected does not need to be disassembled and the position does not move.

[0034] The temperature of the heated child holder is higher than that of the sample to be detected, the heat of the child holder needs to pass through the first mother holder body and then the boss to affect the sample to be detected, the repair process is fast, the first mother holder is not heated, and therefore the heat has little effect on the sample to be detected and does not affect subsequent detection.

[0035] In order to better position the child holder, a limiting groove 10 is arranged on the corresponding position of the child holder with the aid of the boss arranged on the first mother holder, the limiting groove cooperates with the boss sidewall to limit the relative position between the child holder and the first mother holder. Figure 4As shown, since the first female holder is vertically arranged, the child holder is arranged on the boss through the limiting groove, and the child holder is limited in the downward direction of the Y axis; the number of screws on the first female holder is 2, and the two screws limit the child holder in cooperation with the boss, and the two screws fix the child holder on the first female holder through the pressing manner, and the two screws limit the child holder in the X axis direction and the Z axis direction.

[0036] A heating through hole is arranged in the heating area of the second female holder, and a heating assembly is arranged in the heating through hole. The heating assembly can be an electric heating wire, etc. The second female holder is also provided with a blocking piece 12. One side of the child holder abuts against the blocking piece. The child holder is limited in the downward direction of the Y axis. The number of screws on the second female holder is 2. The two screws limit the child holder in cooperation with the blocking piece. The two screws fix the child holder on the second female holder through the pressing manner. The two screws limit the child holder in the X axis direction and the Z axis direction.

[0037] The loosening and tightening of the above-mentioned screws are completed by the mechanical hand operation, which is not described in detail as prior art.

[0038] The child holder is provided with two pressing pieces 13, which are used to press and fix the standard sample. The operation is convenient and reliable, and there is no problem such as falling during heating and reloading. The first female holder, the second female holder and the boss are all provided with an extended grabbing arm 14 for the mechanical hand to grab. The mechanical hand can adopt a piezoelectric mechanical hand. The extended grabbing arm and the hole opened on the extended grabbing arm are cooperated to accurately drive the pressing piece to the position and also can drive the first female holder and the second female holder to displace.

[0039] Referring to Figure 7 As shown, the screw includes a pressing plate 20, the bottom of the pressing plate is provided with a screw rod 21, and the top of the pressing plate is provided with a bolt head 22. The bolt head can be a character structure or a polygonal structure for facilitating the cooperation of the tool to rotate, so as to facilitate the cooperation of the mechanical hand to rotate and lock and unlock. The pressing plate is used to press and fix the child holder on the first female holder and the second female holder.

[0040] Since the to-be-detected sample is adhered to the first female holder, after the detection is completed, the first female holder needs to be taken out from the low-temperature vacuum cavity to replace the to-be-detected sample. Therefore, a plug-in base 15 is designed. Referring to Figure 8 As shown, the plug-in base is provided with a mounting groove 16, the top of the mounting groove is provided with a plug-in opening, and the side surface of the mounting groove is provided with a detection opening. The female holder is arranged in the mounting groove. The detection opening is located on both sides of the plug-in direction and is provided with a fixed spring 17. The first female holder corresponding to the fixed spring is provided with a thin-walled frame 18. Through the cooperation of the mounting groove and the fixed spring, the first female holder can be limited in the mounting groove and will not interfere with the detection. The loading and unloading operations can be completed through the plug-in and plug-out manner, which is more convenient for the mechanical hand to grab.

[0041] The thin-wall frame can greatly reduce the weight of the first female holder, and the fixing spring can be hidden on both sides of the boss of the first female holder, so that the interference influence on the probe and the like in the detection process is reduced, and the detection quality is ensured.

[0042] An arc-shaped convex part 19 is arranged between the side edge of the thin-wall frame and the side wall of the mounting groove, the arc-shaped convex part can make the side edge of the thin-wall frame not directly abut against the side wall of the mounting groove, a gap is formed between the two, the arc-shaped convex part is used as a limiting supporting point in the gap, a small amount of contact is used to determine the positioning in the X-axis direction, the jamming problem caused by avoiding contact is avoided, and the mechanical hand is placed more accurately.

[0043] The above embodiments are only preferred embodiments for fully illustrating the present application, and the protection scope of the present application is not limited thereto. The equivalent substitutions or transformations made by the person skilled in the art on the basis of the present application are all within the protection scope of the present application.

Claims

1. A detachable sample holder for a cryogenic scanning tunneling microscope, characterized by, Including first female support, second female support and child support, the first female support is provided with boss on the surface, the boss is used for fixing the sample to be measured, the second female support is provided with heating area, the child support surface is used for fixing standard sample, the first female support and second female support surface are provided with screw for fixing child support, the first female support, second female support and child support are provided with extension grabbing arm, the extension grabbing arm is used for mechanical hand, the mechanical hand is used for child support in the first female support and second female support surface transfer loading.

2. The detachable sample holder for a cryogenic scanning tunneling microscope with quick sample exchange according to claim 1, wherein, The child support is provided with limiting slot, the limiting slot is matched with the side wall of boss to limit the relative position between child support and first female support, the number of screw on the first female support is 2, two screws are matched with boss to limit child support.

3. The detachable sample holder for a cryogenic scanning tunneling microscope with quick sample exchange of claim 1, wherein, The heating area of the second female support is provided with heating through hole, the heating through hole is used for setting heating assembly, the second female support is further provided with blocking piece, the side edge of the child support is abutted with the blocking piece, the number of screw on the second female support is 2, two screws are matched with blocking piece to limit child support.

4. The detachable sample holder for a cryogenic scanning tunneling microscope with quick sample exchange according to claim 3, wherein, The surface of the child support is provided with two pressing pieces, two pressing pieces are used for pressing standard sample.

5. The detachable sample holder for a cryogenic scanning tunneling microscope with quick sample exchange of claim 1, wherein, The screw includes pressing plate, the bottom of the pressing plate is provided with screw rod, the top of the pressing plate is provided with bolt head.

6. The detachable sample holder for a cryogenic scanning tunneling microscope with quick sample exchange of claim 1, wherein, It also includes plug-in base, the plug-in base is provided with installation slot, the top of the installation slot is provided with plug-in opening, the side surface of the installation slot is provided with detection port, the first female support is grabbed by mechanical hand and is inserted in the installation slot, the detection port is provided with fixed spring on both sides of the plug-in direction, the fixed spring is used for pressing the first female support in the installation slot.

7. The detachable sample holder for a cryogenic scanning tunneling microscope with quick sample exchange of claim 6, wherein, The corresponding first female support of the fixed spring is provided with thin wall frame, the side edge of the thin wall frame is provided with arc convex part between the side wall of the installation slot.

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