Manipulator for wafer conveying
By setting concentric threaded holes of the same radius on the end effector of the wafer transfer robot, the problem of housing deformation during leveling was solved, enabling precise adjustment of the fingers and stable operation of the production line.
Patent Information
- Application Number
- CN202422678741.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-04
- Publication Date
- 2025-10-21
- Estimated Expiration
- 2034-11-04
AI Technical Summary
Existing robotic arms used for wafer transfer are prone to deformation or loosening of the end effector during the leveling process, affecting the safe and stable operation of the production line.
By setting adjustment point threaded holes on the housing of the end effector and distributing them concentrically with the fixed point bolt holes of the same radius, the distance between the adjustment point set screw and the fixed point is shortened. The level of the finger is adjusted by using the screw insertion depth to ensure adjustment force and avoid housing deformation.
The adjustment force was improved, the shell deformation was reduced, and the horizontal accuracy of the fingers and the safe and stable operation of the production line were ensured.
Smart Images
Figure CN223462206U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to a robot, in particular to a robot for wafer transfer. BACKGROUND
[0002] With the continuous development of industrial production lines, the precision requirements of mechanical arms or robots are also increasing. In the semiconductor processing process, the robot plays a role in the high-speed workpiece transfer of the production line. Therefore, the end effector of the robot for wafer station conversion needs very strict leveling operation.
[0003] Currently, when leveling the end effector, the inner ring is generally used for leveling, and the inner ring leveling point has a certain radial distance from the outer ring fixed point. If the end effector is an aluminum part, the material is soft, and under the premise that the torque of the fixing screw meets the requirements, during the leveling process, the whole aluminum part is prone to deformation or bending. If the torque is too small, the robot will loosen after a long time of running, which may cause safety hazards in the later period. Therefore, the robot for wafer transfer needs to improve the structure of the wrist joint of the end effector to make it easy to level and ensure the horizontal precision of the fingers, thereby improving the safe and stable operation of the production line. CONTENT OF THE INVENTION
[0004] The technical problem to be solved by the present application is to provide a robot for wafer transfer, which is easy to level through structural modification and ensures the horizontal precision of the fingers.
[0005] To solve the above technical problems, according to the embodiments of the present application, a robot for wafer transfer is provided, which comprises: an arm; an end effector comprising a shell and a finger connected to one end of the shell; and a wrist joint comprising a rotating body pivotally connected to one end of the arm, the end face of the rotating body and the connecting part on the other end of the shell of the end effector are connected face to face and have the same rotation center; at least four fixed points are arranged on a predetermined radius from the rotation center and uniformly distributed on the circumference of the predetermined radius, each of the at least four fixed points comprises a bolt hole arranged on the rotating body, a bolt hole arranged on the connecting part corresponding to the bolt hole on the rotating body, and a fastening screw fastening the rotating body and the connecting part; and a leveling point comprising a threaded hole arranged on the connecting part between two adjacent groups of fixed points, a bearing area arranged on the end face of the rotating body, and a top screw screwed into the threaded hole and abutting against the bearing area. The fixed points and the leveling points are arranged on the circumference with the same radius about the rotation center. When the finger is horizontally adjusted, the fastening screw is screwed into the screw hole with a predetermined torque to fasten the shell and the rotating body together, the top screw is screwed into the leveling point and abuts against the bearing area, the angle between the end face of the rotating body and the connecting part of the shell is changed by changing the screwing depth of the top screw, and then the levelness of the finger is changed.
[0006] According to the embodiments of the present application, the number of fixed-point bolt holes can be 4, the number of adjustment-point threaded holes can be 4, and each of the adjustment-point threaded holes can be arranged between every two adjacent fixed-point bolt holes.
[0007] According to the embodiments of the present application, the number of fixed-point bolt holes can be 6, the number of adjustment-point threaded holes can be 6, and each of the adjustment-point threaded holes can be arranged between every two adjacent fixed-point bolt holes.
[0008] According to the embodiments of the present application, the number of fixed-point bolt holes can be 8, the number of adjustment-point threaded holes can be 8, and each of the adjustment-point threaded holes can be arranged between every two adjacent fixed-point bolt holes.
[0009] According to the embodiments of the present application, the number of fixed-point bolt holes can be 8, the number of adjustment-point threaded holes can be 4, and each of the adjustment-point threaded holes can be arranged between every two adjacent fixed-point bolt holes.
[0010] According to the embodiments of the present application, each of the adjustment-point threaded holes can be arranged at the midpoint of an arc between every two adjacent fixed-point bolt holes. Alternatively, each of the adjustment-point threaded holes can be arranged at the midpoint of an arc between every two adjacent fixed-point bolt holes.
[0011] The beneficial effects of the present application compared with the prior art are as follows:
[0012] By moving the adjustment-point threaded holes on the shell of the end effector radially outward and arranging the adjustment-point threaded holes on a same-radius concentric circle with the fixed-point bolt holes and between adjacent fixed-point bolt holes, the adjustment force of the adjustment-point stud is improved due to the shortened distance between the adjustment-point stud and two adjacent fixed points, and the deformation of the shell during adjustment of the stud is avoided or reduced. In processing, the fixed-point bolt holes and the adjustment-point threaded holes are arranged on a same-radius concentric circle, which makes the relative positioning of the two easier, reduces the positioning steps, and ensures the processing precision. BRIEF DESCRIPTION OF DRAWINGS
[0013] Figure 1 is a schematic view of a wafer transfer robot and its end effector for gripping a wafer according to the embodiments of the present application.
[0014] Figure 2 is a perspective view and a plan view of the shell of an end effector of the prior art.
[0015] Figure 3 is Figure 1 is a perspective view of the shell of the end effector shown, and the positional relationship between the shell and the rotating body is schematically shown.
[0016] Figure 4 is a plan view of a housing with 4 fixed point bolt holes and 4 adjustment point threaded holes.
[0017] Figure 5 is a plan view of a housing with 6 fixed point bolt holes and 6 adjustment point threaded holes.
[0018] Figure 6 is a plan view of a housing with 8 fixed point bolt holes and 8 adjustment point threaded holes.
[0019] Figure 7 is a plan view of a housing with 8 fixed point bolt holes and 4 adjustment point threaded holes. DETAILED DESCRIPTION
[0020] In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings accompanying the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as their common meanings to those of ordinary skill in the art to which the present application belongs. The words such as “comprise” and similar words used herein mean that the elements or objects before the words encompass the elements or objects listed after the words and their equivalents, and do not exclude other elements or objects. The “connection” described herein can be direct connection or indirect connection, i.e. connection through an intermediate object, unless otherwise specified.
[0021] The embodiments of the present application will be described below with reference to the accompanying drawings.
[0022] Figure 1 is a schematic view of a robot hand for wafer transfer according to an embodiment of the present application.
[0023] As shown in Figure 1 , the robot hand for wafer transfer according to an embodiment of the present application comprises an end effector 1, a small arm 2 of the robot hand and a large arm 3 of the robot hand (herein, the small arm 2 and the large arm 3 are collectively referred to as an arm), and the end effector 1 is rotatably connected to the small arm 2 of the robot hand through a wrist joint 4. The end effector 1 comprises a housing 1a and a finger 1b, and the finger 1b can grip and release a workpiece, which is a wafer 5 in this embodiment.
[0024] Figure 2 is a perspective view and a plan view of a housing of a prior art end effector.
[0025] As shown in Figure 2As shown, the housing of the end effector includes fixed point bolt holes 11 on an outer circle and adjustment point threaded holes 12 on an inner circle, the radius of the inner circle is smaller than that of the outer circle, i.e. the distance from the center of the adjustment point threaded holes 12 is smaller than that of the fixed point bolt holes 11.
[0026] Figure 3 is Figure 1 is a perspective view of the housing of the end effector, and schematically shows the positional relationship between the housing and the rotating body.
[0027] As Figure 3 shown, the housing 1a of the end effector 1 is connected with the rotating body 4 end face to end face at its connecting portion, the fixed point bolt holes 11 on the housing 1a correspond to the bolt holes 42 in the rotating body 4, thus, they can be detachably connected with each other by bolts (not shown).
[0028] In combination with Figure 1 and Figure 3 , according to the embodiments of the present application, a mechanical hand for wafer transfer is provided, which includes: an arm including a large arm 3 and a small arm 2; an end effector 1 including a housing 1a and a finger 1b connected with one end of the housing 1a; and a wrist joint including a rotating body 4 pivotally connected with one end of the arm (as shown in Figure 3 ), the end face of the rotating body 4 is connected with the connecting portion on the other end of the housing of the end effector face to face, and has the same rotating center 41; at least four fixed points are arranged on a predetermined radius from the rotating center 41 and uniformly distributed on the circumference 13 of the predetermined radius, each of the at least four fixed points includes a bolt hole 42 arranged on the rotating body 4, a bolt hole 11 arranged on the connecting portion corresponding to the bolt hole 42 on the rotating body 4, and a fastening bolt (not shown) fastening the rotating body 4 and the connecting portion, the bolt hole 11 can be an arc-shaped long hole; and an adjustment point including a threaded hole 12 arranged on the connecting portion between two adjacent groups of fixed points, a bearing area 43 arranged on the end face of the rotating body, and a jackscrew (not shown) screwed into the threaded hole and abutting against the bearing area 43. The fixed points and the adjustment points are arranged on the circumference 13 having the same radius with respect to the rotating center 41. When the finger 1b is horizontally adjusted, the fastening bolts are screwed through the fixed points and into the bolt holes with a preset torque to fasten the housing 1a and the rotating body 4 together, the jackscrew is screwed into the adjustment point and abuts against the bearing area 43, the angle between the end face of the rotating body 4 and the connecting portion of the housing 1a is changed by changing the screwing depth of the jackscrew, and thus the horizontal degree of the finger 1b is changed.
[0029] Figure 4 is a plan view of the housing with 4 fixed point bolt holes and 4 adjustment point threaded holes. Figure 5 is a plan view of the housing with 6 fixed point bolt holes and 6 adjustment point threaded holes. Figure 6is a plan view of a housing with 8 fixed point bolt holes and 8 adjustment point threaded holes. Figure 7 is a plan view of a housing with 8 fixed point bolt holes and 4 adjustment point threaded holes.
[0030] As shown in Figure 4 , according to the embodiments of the present application, the number of fixed point bolt holes 11 can be 4, the number of adjustment point threaded holes 12 can be 4, and each of the adjustment point threaded holes 12 can be arranged between every two adjacent fixed point bolt holes 11.
[0031] As shown in Figure 5 , according to the embodiments of the present application, the number of fixed point bolt holes 11 can be 6, the number of adjustment point threaded holes 12 can be 6, and each of the adjustment point threaded holes 12 can be arranged between every two adjacent fixed point bolt holes 11.
[0032] As shown in Figure 6 , according to the embodiments of the present application, the number of fixed point bolt holes 11 can be 8, the number of adjustment point threaded holes 12 can be 8, and each of the adjustment point threaded holes 12 can be arranged between every two adjacent fixed point bolt holes 11.
[0033] As shown in Figure 7 , according to the embodiments of the present application, the number of fixed point bolt holes 11 can be 8, and the fixed point bolt holes are divided into two two-adjacent fixed point bolt hole groups, the number of adjustment point threaded holes 12 can be 4, and each of the adjustment point threaded holes 12 can be arranged between every two two-adjacent fixed point bolt hole groups.
[0034] Preferably, in the technical solutions shown in Figure 4 , Figure 5 and Figure 6 , according to the embodiments of the present application, each of the adjustment point threaded holes 12 can be arranged at the midpoint of the arc between every two adjacent fixed point bolt holes 11. In the technical solutions shown in Figure 7 , each of the adjustment point threaded holes 12 can be arranged at the midpoint of the arc between every two two-adjacent fixed point bolt hole groups.
[0035] By moving the adjustment point threaded holes on the housing of the end effector radially outward and arranging the adjustment point threaded holes on the same concentric circle with the fixed point bolt holes and between the adjacent fixed point bolt holes, the distance between the adjustment point threaded holes and the two adjacent fixed points is shortened, the adjustment force of the adjustment point threaded holes is improved, and the deformation of the housing during adjustment of the adjustment point threaded holes is avoided or reduced. In machining, the fixed point bolt holes and the adjustment point threaded holes are arranged on the same concentric circle, which makes the relative positioning of the two easier, reduces the positioning steps, and ensures the machining precision.
[0036] The above merely illustrates the specific implementation of the embodiments of the present application, but the protection scope of the embodiments of the present application is not limited to this. Any change or replacement within the technical scope disclosed by the embodiments of the present application should be covered in the protection scope of the embodiments of the present application. Therefore, the protection scope of the embodiments of the present application should be subject to the protection scope of the claims.
Claims
1. A robot for wafer transfer, characterized by, The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger.
2. The robot for wafer transfer according to claim 1, wherein The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger.
3. The robot for wafer transfer as recited in claim 1, wherein The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger.
4. The robot for wafer transfer as recited in claim 1, wherein The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger.
5. The robot for wafer transfer as recited in claim 1, wherein The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger.
6. The robot for wafer transfer according to any one of claims 2 to 4, wherein The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger.
7. The robot for wafer transfer as recited in claim 5, wherein The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. The present application relates to a wrist joint for a robot arm, and more particularly, to a wrist joint for a robot arm that can adjust the horizontality of a finger. 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