Detection system
By controlling the relative orientation change between the structured light source and the sample surface in the detection system, and combining it with a rotation and translation mechanism, multiple feedback images are acquired, solving the problem of easy missed detection of slip lines in the existing technology and achieving higher detection accuracy.
Patent Information
- Application Number
- CN202422484746.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-12
- Publication Date
- 2025-10-24
- Estimated Expiration
- 2034-10-12
AI Technical Summary
In existing technologies, the striped structured light detection method is prone to missing detections when detecting slip lines in semiconductor samples, making it difficult to ensure the accuracy of the detection.
Structured light sources project characteristic patterns onto the surface of the sample under test. By controlling the relative direction between the structured light source and the sample surface, the projected stripes change at different times or in different directions to obtain multiple feedback images. Combined with rotation and translation mechanisms, the detection accuracy is improved.
By acquiring feedback images from multiple angles and directions, all defects on the surface of the sample under test are revealed, improving the accuracy of the detection system and avoiding missed detections.
Smart Images
Figure CN223470963U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] Embodiments of the present disclosure relate to the field of optical detection, and in particular, to a detection system. BACKGROUND
[0002] In a semiconductor manufacturing process, in order to ensure the quality of semiconductor devices, defect detection needs to be performed at each link of the semiconductor manufacturing process. For example, wafer defect detection is to detect whether there are defects such as grooves, particles, scratches, etc. in the wafer and the positions of the defects. Defect detection is widely used, and the presence of defects on semiconductor materials may cause the formed devices to fail, so defect detection also needs to be performed on semiconductor materials in the semiconductor manufacturing process to ensure product yield.
[0003] In the semiconductor field, a semiconductor substrate is formed by a crystal, and in the crystal growth process, the crystal lattice may slip to form a slip line. In the semiconductor manufacturing process, in order to ensure the quality of the formed semiconductor devices, the slip line needs to be detected. Since the surface of the slip line is flat, it is difficult to detect the slip line by imaging.
[0004] Currently, a stripe light is usually used to irradiate the surface of a to-be-detected sample, and then a feedback image is acquired. However, since the detection of the stripe structured light has directionality, the slip line may be missed. UTILITARIAN CONTENT
[0005] Embodiments of the present disclosure provide a detection system, which can at least improve the detection of defects on the surface of a to-be-detected sample.
[0006] According to some embodiments of the present disclosure, the present disclosure provides a detection system, which includes: a carrying table configured to place a to-be-detected sample; a structured light source configured to provide structured light and project the structured light on the surface of the to-be-detected sample, the structured light including a plurality of stripes of light and dark alternately extending along the same direction, or the structured light including a plurality of stripes of light and dark alternately extending along a plurality of different directions respectively; the structured light source projects the stripes at different relative directions with respect to the surface of the to-be-detected sample at the same time or at different times; and an imaging device configured to acquire a feedback image formed by the structured light projected on the surface of the to-be-detected sample.
[0007] In some embodiments, the to-be-detected sample is a crystal, the extension direction of the stripe is parallel to a crystal direction of a to-be-detected surface of the to-be-detected sample or has an acute angle with the crystal direction, and the included angle of the relative directions is equal to the included angle between the crystal directions.
[0008] In some embodiments, the sample to be measured is a hexagonal close-packed crystal, or the surface of the sample to be measured is a <111> crystal surface of a face-centered cubic crystal; the number of relative directions is greater than or equal to 3; the angles between the extending directions of the fringes of the structured light projected onto the surface of the sample to be measured at different times are 60°, and the number of fringes in different extending directions is greater than or equal to 3; or the structured light comprises a plurality of fringes of light and dark alternation extending along a plurality of different directions respectively, the number of different directions is at least 3, and the angle between adjacent different directions is 60°.
[0009] In some embodiments, the surface of the sample to be measured is a <100> crystal surface or a <110> crystal surface of a face-centered cubic crystal, or the sample to be measured is a body-centered cubic crystal; the number of relative directions is greater than or equal to 2; the angles between the extending directions of the fringes of the structured light projected onto the surface of the sample to be measured at different times are 90°, and the number of fringes in different extending directions is greater than or equal to 2; or the structured light comprises a plurality of fringes of light and dark alternation extending along a plurality of different directions respectively, the number of different directions is at least 2, and the angle between adjacent different directions is 90°.
[0010] In some embodiments, if the structured light comprises a plurality of fringes of light and dark alternation extending along the same direction; the detection system further comprises a controller for controlling the relative rotation of the carrier table and the structured light source, so that the fringes projected by the structured light source at different times have two or greater than or equal to 3 different relative directions with the surface of the sample to be measured; and a rotating mechanism controlled by the controller to adjust the relative direction of the extending direction of the fringes with respect to the surface of the sample to be measured, so that the extending directions of the fringes of the structured light projected onto the surface of the sample to be measured at different times are different.
[0011] In some embodiments, the rotating mechanism comprises a first rotating mechanism connected with the carrier table and the controller, the first rotating mechanism being used to rotate the surface of the carrier table under the control of the controller; and / or a second rotating mechanism controlled by the controller to rotate the structured light source around the normal direction of the plane where the fringes are located.
[0012] In some embodiments, the structured light source comprises a screen, the fringes are patterns on the screen, and the rotating mechanism is used to control the rotation of the patterns on the screen; or the structured light source comprises a projection light source and a grating, the light emitted by the projection light source forms the structured light after passing through the grating, and the rotating mechanism is used to control the rotation of the grating.
[0013] In some embodiments, the sample to be tested further comprises a positioning mark for characterizing a crystal orientation of the sample to be tested, the positioning mark having a preset angle with the crystal orientation of the sample to be tested; the detection system further comprises a detection mechanism for acquiring a position of the positioning mark to determine the crystal orientation of the sample to be tested; and the controller is further configured to cause the extension direction of the stripe projected on the sample to be tested to be parallel to the crystal orientation of the sample to be tested based on the crystal orientation.
[0014] In some embodiments, the system further comprises a translation mechanism configured to control relative translation of the carrier table and the structured light source, and the total distance of relative translation at the same time is less than or equal to the period distance of a single stripe; and a processor configured to acquire initial images of multiple moving positions during translation of the translation mechanism, the multiple initial images constitute the feedback images, and the processor is configured to acquire defects on the sample to be tested based on the feedback images.
[0015] In some embodiments, the translation mechanism comprises a first translation mechanism connected with the carrier table to drive the carrier table to translate along a preset direction; and / or a second translation mechanism connected with the structured light source to drive the structured light source to translate along a preset direction.
[0016] In some embodiments, the structured light comprises multiple stripes of light and dark alternation extending along the same direction, and the number of relative rotations of the carrier table and the structured light source is greater than or equal to the number of crystal orientations of the sample to be tested; or the structured light comprises multiple stripes of light and dark alternation extending along multiple different directions respectively, and the number of different directions is greater than or equal to the number of crystal orientations of the sample to be tested.
[0017] In some embodiments, the system further comprises a processor configured to acquire steps on the sample to be tested based on the feedback images of different relative directions acquired by the imaging device, the steps comprising one or more of a combination of slip lines or step defects.
[0018] The technical scheme provided by the embodiment of the present disclosure has at least the following advantages: when detecting the surface defects of the to-be-detected sample, the structured light is transmitted to the surface of the to-be-detected sample by the structured light source, and the structured light has a characteristic pattern; when the structured light is a plurality of stripes of light and dark alternation extending along the same direction, the relative direction of the stripes projected by the structured light source at different times and the surface of the to-be-detected sample is different, so that a plurality of different feedback images are formed on the surface of the to-be-detected sample; the defects of the surface of the to-be-detected sample can be fully displayed through the plurality of different feedback images; when the structured light is a plurality of stripes of light and dark alternation extending along a plurality of different directions, the stripes projected by the structured light source at the same time or at different times and the to-be-detected sample are different, so that a plurality of different feedback images are also formed on the surface of the to-be-detected sample; the defects of the surface of the to-be-detected sample can also be fully displayed through the plurality of different feedback images, thereby further improving the accuracy of the detection system in detecting the to-be-detected sample. BRIEF DESCRIPTION OF DRAWINGS
[0019] One or more embodiments are illustrated by way of example in the figures that are part of this disclosure and which are illustrative, but not restrictive, of the present embodiments, unless otherwise indicated, the figures in the drawings do not constitute a proportional limitation; in order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or in the prior art, the drawings needed in the embodiments will be briefly introduced below, obviously, the drawings in the following description can only be some embodiments of the present disclosure, and those skilled in the art can also obtain other drawings according to these drawings without creating any creative labor.
[0020] Figure 1 A structural schematic diagram of a detection system provided by an embodiment of the present disclosure is provided.
[0021] Figure 2 A top view of a surface of a to-be-detected sample provided by an embodiment of the present disclosure is provided.
[0022] Figure 3 Another top view of a surface of a to-be-detected sample provided by an embodiment of the present disclosure is provided.
[0023] Figure 4 Another structural schematic diagram of a detection system provided by an embodiment of the present disclosure is provided.
[0024] Figure 5 A structural schematic diagram of a detection system provided by another embodiment of the present disclosure is provided.
[0025] Figure 6 A structural schematic diagram of a structured light projected on a surface of a to-be-detected sample provided by an embodiment of the present disclosure is provided. DETAILED DESCRIPTION
[0026] As can be known from the background art, since the detection of the stripe structured light has directionality, it is prone to cause missed detection.
[0027] The embodiment of the present disclosure provides a detection system, when detecting the surface defects of a to-be-detected sample, structured light is transmitted to the surface of the to-be-detected sample by a structured light source, and the structured light has a characteristic pattern; when the structured light is a plurality of stripes with light and dark alternation extending along the same direction, the relative directions of the stripes projected by the structured light source at different times and the surface of the to-be-detected sample are different, so that a plurality of different feedback images are formed on the surface of the to-be-detected sample; the defects of the surface of the to-be-detected sample can be fully displayed through the plurality of different feedback images; when the structured light is a plurality of stripes with light and dark alternation extending along a plurality of different directions, the stripes projected by the structured light source at the same time or at different times and the to-be-detected sample are the same, so that a plurality of different feedback images are formed on the surface of the to-be-detected sample; the defects of the surface of the to-be-detected sample can be fully displayed through the plurality of different feedback images, so that the accuracy of the detection system in detecting the to-be-detected sample is further improved.
[0028] In the description of the embodiments of the present application, the technical terms "first", "second", and the like are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly and specifically limited.
[0029] In this document, the term "embodiment" means that the specific features, structures or characteristics described in connection with the embodiment can be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily mean the same embodiment, nor is it independent or alternative to other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.
[0030] In the description of the embodiments of the present application, the technical terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application.
[0031] In the description of the embodiments of the present application, when a certain component "includes" another component, unless otherwise stated, other components are not excluded, and other components can also be further included.
[0032] In the description of the embodiments of the present application, the term "and / or" is merely an association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the three cases of existence of A, existence of A and B, and existence of B. In addition, the character " / " in this paper generally represents that the front and rear associated objects are a "or" relationship.
[0033] The terms used in the description of various embodiments described herein are only used to describe specific embodiments, and are not intended to be limiting. As used in the description of various embodiments and the appended claims, "component" is also intended to include the plural form, unless the context clearly indicates otherwise.
[0034] The embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings. However, those skilled in the art can understand that in the embodiments of the present disclosure, in order to enable the reader to better understand the present disclosure, many technical details are presented. However, the technical solutions claimed by the present disclosure can be implemented even without these technical details and various changes and modifications based on the following embodiments.
[0035] Figure 1 A structural schematic diagram of a detection system provided by an embodiment of the present disclosure.
[0036] Reference Figure 1 The detection system comprises a carrying table 100, the carrying table 100 is used for placing a sample to be detected 101; a structured light source 102, the structured light source 102 is used for providing structured light, and projecting the structured light on the surface of the sample to be detected 101, the structured light comprises a plurality of stripes of light and dark alternately extending along the same direction, or the structured light comprises a plurality of stripes of light and dark alternately extending along a plurality of different directions respectively; the stripes projected by the structured light source 102 simultaneously or at different times are different from the relative direction of the surface of the sample to be detected 101; an imaging device 104, the imaging device 104 is used for acquiring a feedback image formed by the structured light projected on the surface of the sample to be detected 101.
[0037] The embodiment of the present disclosure provides a detection system. When detecting surface defects of a to-be-detected sample 101, structured light is transmitted to the surface of the to-be-detected sample 101 by a structured light source 102, and the structured light has a characteristic pattern. When the structured light is a plurality of stripes with light and dark alternation extending along the same direction, the relative directions of the stripes projected by the structured light source 102 at different times and the surface of the to-be-detected sample 101 are different, so that a plurality of different feedback images are formed on the surface of the to-be-detected sample 101. The defects of the surface of the to-be-detected sample 101 can be fully displayed through the plurality of different feedback images. When the structured light is a plurality of stripes with light and dark alternation extending along a plurality of different directions, the stripes projected by the structured light source 102 at the same time or at different times and the to-be-detected sample 101 are different, so that a plurality of different feedback images are also formed on the surface of the to-be-detected sample 101. The defects of the surface of the to-be-detected sample 101 can also be fully displayed through the plurality of different feedback images. Therefore, the accuracy of the detection system in detecting the to-be-detected sample 101 is further improved.
[0038] The to-be-detected sample 101 is a crystal. In the embodiment, the to-be-detected sample 101 is a wafer. In other embodiments, the to-be-detected sample can be a metal or a non-crystal.
[0039] The detection system is used for detecting slip lines or step defects or target objects with steps.
[0040] The to-be-detected sample 101 is a crystal. The extension direction of the stripe is parallel to the crystal direction of the to-be-detected surface of the to-be-detected sample 101 or has an acute angle with the crystal direction. The included angle of the relative direction is equal to the included angle between the crystal directions.
[0041] It can be understood that, for the extension direction of the stripe and the crystal direction of the to-be-detected surface of the to-be-detected sample 101, when the extension direction of the stripe and the crystal direction of the to-be-detected surface of the to-be-detected sample 101 form an acute angle, the accuracy of the feedback image in feeding back the surface defects of the to-be-detected surface of the to-be-detected sample can be improved. When the extension direction of the stripe is parallel to the crystal direction of the to-be-detected surface of the to-be-detected sample 101, the accuracy of the feedback image in feeding back the surface defects of the to-be-detected surface of the to-be-detected sample is the most accurate. Therefore, the extension direction of the stripe is set to be parallel to the crystal direction of the to-be-detected surface of the to-be-detected sample 101 or to have an acute angle with the crystal direction, so as to improve the accuracy of the feedback image in feeding back the surface defects of the to-be-detected surface of the to-be-detected sample as much as possible.
[0042] For the relative direction, the included angle of the relative direction is set to be equal to the included angle between the crystal directions. The extension direction of at least part of the stripes projected on the surface of the to-be-detected sample 101 at the same time or at different times is equal to the included angle between the crystal directions. In this way, the accuracy of the feedback image in feeding back the surface defects of the to-be-detected surface of the to-be-detected sample can be improved.
[0043] In the field of semiconductor, wafers are formed by crystals, and during the growth of crystals, lattice may slip to form slip lines. In the semiconductor process, the slip lines need to be detected to ensure the quality of the formed semiconductor devices. Since the surface of the slip lines is flat, it is difficult to detect the slip lines by imaging. Therefore, the imaging device 104 in the embodiments of the present disclosure photographs the surface of the sample 101 to be detected from multiple different angles to obtain multiple different feedback images, thereby improving the accuracy of the detection system.
[0044] In the embodiments, the sample 101 to be detected is a hexagonal close-packed crystal, or the surface of the sample 101 to be detected is a <111> crystal surface of a face-centered cubic crystal; the number of opposite directions is greater than or equal to 3; the angle between the extending directions of the stripes of the structured light projected onto the surface of the sample 101 to be detected at different times is 60°, and the number of stripes in different extending directions is greater than or equal to 3; or the structured light includes multiple stripes of light and dark alternation extending along multiple different directions respectively, the number of different directions is at least 3, and the angle between adjacent different directions is 60°.
[0045] It can be understood that for hexagonal close-packed crystal materials or materials with a <111> crystal surface of a face-centered cubic crystal, the directions of the slip lines on the side surface of the sample 101 to be detected of these materials are at an angle of 60°. By controlling the angle between the extending directions of the stripes of the structured light projected onto the surface of the sample 101 to be detected at different times to be 60°, the number of stripes in different extending directions to be greater than or equal to 3, or the structured light to include multiple stripes of light and dark alternation extending along multiple different directions respectively, the number of different directions to be at least 3, and the angle between adjacent different directions to be 60°, the accuracy of the imaging device 104 in acquiring the wafer surface image can be improved, and the steps on the surface of the hexagonal close-packed crystal material or the material with a <111> crystal surface of a face-centered cubic crystal can be more completely acquired, thereby improving the accuracy of the detection system.
[0046] Specifically, in the embodiments, the material of the sample 101 to be detected is hexagonal close-packed silicon carbide, the number of crystal directions of the silicon carbide material on the surface of the sample 101 to be detected is 3, and the directions of the possible slip lines are 3. Therefore, the angle between the extending directions of the stripes of the structured light projected onto the surface of the silicon carbide material at different times is 60°, and the number of stripes in different extending directions is greater than or equal to 3; or in other embodiments of the present application, the material of the sample 101 to be detected is hexagonal close-packed silicon carbide, the structured light includes multiple stripes of light and dark alternation extending along multiple different directions respectively, the number of different directions is at least 3, and the angle between adjacent different directions is 60°. Therefore, there are at least 3 stripes at an angle of 60° on the surface of the silicon carbide material, so that all the steps on the wafer surface can be completely photographed, thereby avoiding the situation that the detection system misses detection, and the accuracy of the detection system can be improved.
[0047] In another embodiment, the surface of the sample 101 to be measured is a <100> crystal plane or a <110> crystal plane of a face-centered cubic crystal, or the sample 101 to be measured is a body-centered cubic crystal; the number of relative directions is greater than or equal to 2; the angles between the extending directions of the fringes of the structured light projected onto the surface of the sample 101 to be measured at different times are 90°, and the number of fringes in different extending directions is greater than or equal to 2; or the structured light includes a plurality of bright-dark alternating fringes extending along a plurality of different directions respectively, the number of different directions is at least 2, and the angles between adjacent different directions are 90°.
[0048] It can be understood that for a body-centered cubic crystal material, or a material with a <100> crystal plane or a <110> crystal plane of a face-centered cubic crystal, the directions of slip lines on the lattice surface of the material are 90°. By controlling the angles between the extending directions of the fringes of the structured light projected onto the surface of the sample 101 to be measured at different times to be 90°, the number of fringes in different extending directions to be greater than or equal to 2, or the structured light to include a plurality of bright-dark alternating fringes extending along a plurality of different directions respectively, the number of different directions to be at least 2, and the angles between adjacent different directions to be 90°, at least two fringes with an angle of 90° exist on the surface of the material, so that the accuracy of the imaging device 104 in acquiring the wafer surface image can be improved, and the slip lines on the surface of the body-centered cubic crystal material or the material with a <100> crystal plane or a <110> crystal plane of a face-centered cubic crystal can be more completely acquired, thereby improving the accuracy of the detection system.
[0049] In other embodiments, the material of the sample 101 to be measured can also be other materials, or when detecting other mechanisms or defects with steps, the angles between the relative directions can be other values, such as 45° or other preset angles. Therefore, the angles between the extending directions of the fringes of the structured light projected onto the surface of the sample 101 to be measured at different times can also be controlled to be the same as the extending directions of the steps on the surface of the material, or the angles between the extending directions of the fringes of the structured light are controlled to be the same as the extending directions of the steps on the surface of the material, thereby improving the accuracy of the detection system.
[0050] In this embodiment, the carrier table 100 is not only used to place the sample 101 to be measured, but also used to fix the sample 101 to be measured. For example, the sample 101 to be measured can be fixed on the surface of the carrier table 100 by adsorption, so as to avoid abnormal movement of the sample 101 to be measured in the process of controlling the relative rotation of the carrier table 100 and the structured light source 102.
[0051] In this embodiment, the structured light source 102 is a screen with an initial pattern on the screen, and the screen projects the initial pattern to the surface of the sample 101 to form a feedback image on the surface of the sample 101. In other embodiments, the structured light source can also be a combination of a projection light source and a grating, and the projection light source irradiates the grating to form a feedback image on the surface of the sample 101.
[0052] The structured light source 102 can be a plurality of bright-dark alternating stripes extending in the same direction, or a plurality of bright-dark alternating stripes extending in different directions. For the scheme in which the structured light source 102 is a plurality of bright-dark alternating stripes extending in the same direction, the structured light source 102 can facilitate irradiating the entire defect on the surface of the sample 101 in one direction; for the scheme in which the structured light source 102 is a plurality of bright-dark alternating stripes extending in different directions, the detection system can facilitate detecting defects in different directions on the surface of the sample 101. Specifically, in this embodiment, the structured light source 102 can be a plurality of bright-dark alternating stripes extending in the same direction. In other embodiments, the structured light source 102 is a plurality of bright-dark alternating stripes extending in different directions.
[0053] The structured light source 102 projects structured light to the entire surface of the sample 101, thereby facilitating improving the completeness of the acquired slip lines on the surface of the sample.
[0054] The structured light can be composed of alternating continuous light stripes and dark bands. The structured light can be sinusoidal or square light waves.
[0055] For example, the structured light source can be composed of a continuous sinusoidal light source (i.e. a non-coherent light source), a grid located between the light source and the substrate, or a coherent light source including two spherical waves, and the sinusoidal stripes are formed by the interference between the waves.
[0056] If the structured light comprises a plurality of stripes of light and dark alternately extending along the same direction, the detection system can further comprise a controller 103 configured to control the relative rotation between the carrier table 100 and the structured light source 102, so that the structured light source 102 projects the stripes of light and dark alternately at different times to the surface of the sample 101 in two or more than three different relative directions; and a rotating mechanism 107 controlled by the controller 103, so that the extending direction of the stripes of light and dark alternately is adjustable relative to the surface of the sample 101, so that the extending direction of the stripes of light and dark alternately projected to the surface of the sample 101 at different times is different. By providing the rotating mechanism 107, the relative rotation between the carrier table 100 and the structured light source 102 can be controlled when the sample 101 is detected, so that the extending direction of the stripes of light and dark alternately projected to the surface of the sample 101 at different times is different, so that the imaging device 104 can capture the surface of the sample 101 from different angles. By obtaining the defects of the surface of the sample 101 from different angles, the accuracy of the detection system can be improved, so that the imaging device 104 can avoid missing detection. For example, Figure 6 In other embodiments, the structured light source 102 comprises a plurality of stripes of light and dark alternately extending along different directions, and the detection system can not comprise the rotating mechanism.
[0057] The rotating mechanism 107 can further comprise a first rotating mechanism 105 connected with the carrier table 100 and the controller 103, and configured to rotate the surface of the carrier table 100 under the control of the controller 103. That is, the first rotating mechanism 105 controls the rotation of the carrier table 100 under the control of the controller 103, so as to realize the relative rotation between the carrier table 100 and the structured light source 102, to adjust the extending direction of the stripes of light and dark alternately projected to the surface of the sample 101, so that the feedback image obtained by the imaging device 104 changes, so as to obtain the feedback image from different angles, so as to detect all the defects of the surface of the sample 101 through the feedback images from different angles.
[0058] The structured light comprises a plurality of stripes of light and dark alternately extending along the same direction, and the number of times of relative rotation between the carrier table 100 and the structured light source 102 is greater than or equal to the number of directions of the slip lines; or the structured light comprises a plurality of stripes of light and dark alternately extending along different directions respectively, and the number of different directions is greater than or equal to the number of crystal directions of the surface of the sample 101.
[0059] In combination with reference Figures 1 to 3 , wherein Figure 2 a top view of the surface of the sample to be detected provided by an embodiment of the present disclosure; Figure 3 a structural schematic view of the extending direction of the slip lines of the surface of the sample to be detected provided by an embodiment of the present disclosure.
[0060] The positioning mark 111 is used to represent the crystal direction of the surface of the sample to be tested 101, and the pointing direction of the positioning mark 111 has a preset included angle with the crystal direction of the surface of the sample to be tested 101. The detection system further comprises a detection mechanism (not shown in the figure) configured to acquire the position of the positioning mark 111 to determine the crystal direction of the sample to be tested 101. The controller 103 is further configured to make the extension direction of the stripe projected on the surface of the sample to be tested 101 parallel to the crystal direction of the surface of the sample to be tested 101 based on the crystal direction.
[0061] It should be noted that the preset included angle is the included angle between the pointing direction of the positioning mark 111 and any crystal direction of the surface of the sample to be tested 101.
[0062] Specifically, in the embodiment, the positioning mark 111 is an open edge, and the pointing direction of the positioning mark 111 is the direction of the line connecting the positioning mark 111 and the center of the sample to be tested. The preset included angle is 45°. In other embodiments, the preset included angle can be 0°. In other embodiments, the positioning mark can be a cross-shaped or linear mark on the surface of the sample to be tested 101.
[0063] In the embodiment, the extension direction of the stripe on the surface of the sample to be tested 101 is parallel to the crystal direction of the surface of the sample to be tested 101, the defects on the surface of the sample to be tested 101 are most obvious, that is, the slip lines are clearest, thereby further improving the accuracy of the detection system in detecting the defects of the sample to be tested 101.
[0064] In combination with reference Figure 1 and Figure 4 wherein, Figure 4 FIG. 1 is a structural schematic diagram of a detection system according to an embodiment of the present disclosure.
[0065] In some embodiments, the detection system can further comprise a translation mechanism 108 configured to control the relative translation of the carrier table 100 and the structured light source 102, and the total distance of relative translation at the same time is less than or equal to the period distance of a single stripe. A processor (not shown in the figure) is configured to acquire initial images of multiple moving positions in the translation process of the translation mechanism 108, the multiple initial images constitute a feedback image, and the defects on the surface of the sample to be tested 101 are acquired according to the feedback image. In other words, when the feedback image is acquired, the processor first acquires multiple initial images, and then acquires the feedback image according to the multiple initial images, so as to improve the accuracy of the slip lines presented on the feedback image.
[0066] If the feedback image in the first direction is needed, the bearing table 100 is controlled to rotate relative to the structured light source 102 during the acquisition process, and is rotated to the position corresponding to the first direction, and the first initial image is taken. Then the bearing table 100 is controlled to translate relative to the structured light source 102, and the second initial image is taken. The above steps are repeated until the required number of initial images are acquired. Then the feedback image is obtained according to the contents corresponding to the plurality of initial images.
[0067] During the translation of the bearing table 100 relative to the structured light source 102, the controller can control the translation direction to form an angle with the stripe extension direction in the structured light. When the translation direction is perpendicular to the stripe extension direction in the structured light, the feedback image obtained according to the plurality of initial images is optimal.
[0068] The processor can be a chip with computing capability, which can acquire the feedback image according to the plurality of initial images, perform phase analysis to obtain the slope of the surface of the to-be-measured sample, and obtain the curvature or height data according to the slope, and then obtain the to-be-measured target according to the curvature or height data. The to-be-measured target is a step. The step includes an edge of a to-be-measured surface on the surface of the to-be-measured target, or a tiny burr, or a groove on the to-be-measured surface of the to-be-measured target.
[0069] In the embodiment, the translation mechanism 108 includes a first translation mechanism 118 connected with the bearing table 100 to drive the bearing table 100 to translate along the preset direction, and / or a second translation mechanism 128 connected with the structured light source 102 to drive the structured light source 102 to translate along the preset direction.
[0070] The first translation mechanism 118 is used to drive the bearing table 100 to move, and the second translation mechanism 128 is used to drive the structured light source to move, so as to facilitate the processor to acquire the initial images at a plurality of movement positions, thereby improving the detection accuracy of the detection system.
[0071] The controller 103 can be connected with the translation mechanism 108 to control the translation of the translation mechanism 108. The first translation mechanism 118 is controlled by the controller 103 to drive the bearing table 100 to translate along the preset direction, and / or the second translation mechanism 128 is controlled by the controller 103 to drive the structured light source 102 to translate along the preset direction.
[0072] In the embodiment, the first translation mechanism 118 and the first rotation mechanism 105 can belong to the same mechanism, that is, the mechanism connected with the bearing table can realize rotation and translation. In other embodiments, the first translation mechanism 118 and the first rotation mechanism 105 can be two mechanisms that do not interfere with each other.
[0073] The controller 103 first controls the extension direction of the fringes of the structured light to be a first angle with the sample direction of the sample to be measured 101, then controls the relative translation of the carrier table 100 and the structured light source 102 through the translation mechanism 108, obtains multiple initial images, and forms a feedback image according to the multiple initial images through the processor. After obtaining the feedback image of the first angle, the carrier table 100 is controlled to rotate through the first rotating mechanism 105, so that the extension direction of the fringes of the structured light is a second angle with the sample direction of the sample to be measured 101, then the carrier table 100 is controlled to relatively translate with the structured light source 102 through the translation mechanism 108, and the above process is repeated until the required number of feedback images are obtained, so that the imaging device obtains all slip lines on the surface of the sample to be measured 101.
[0074] In the embodiment, the detection system further includes a processor configured to obtain steps on the surface of the sample to be measured 101 according to the feedback images of different relative directions obtained by the imaging device 104, the steps including one or more of slip lines or step defects in combination.
[0075] The feedback images obtained by the imaging device 104 are processed by the processor, so that the defects (for example, one or more of slip lines or step defects in combination) on the surface of the sample to be measured 101 are analyzed according to the feedback images, thereby facilitating subsequent analysis and processing of the sample to be measured 101.
[0076] In the technical scheme of the detection system described above, by controlling the relative rotation of the carrier table 100 and the structured light source 102 when detecting the sample to be measured 101, the extension direction of the fringes of the structured light projected onto the surface of the sample to be measured 101 at different times is different, so that the imaging device 104 can capture the surface of the sample to be measured 101 from multiple different angles. By obtaining the defects on the surface of the sample to be measured 101 from multiple different angles, the accuracy of the detection system can be improved, thereby avoiding the situation that the imaging device 104 misses detection.
[0077] The following will be described in combination with Figure 5 The second embodiment of the present disclosure is described, which is different from the above-mentioned embodiment. In the embodiment, the structured light source is controlled to rotate, and the same or similar parts as the above-mentioned embodiment are referred to the above-mentioned embodiment, which will not be described hereinafter.
[0078] Figure 5 A structural schematic diagram of a detection system according to another embodiment of the present disclosure is provided.
[0079] Reference Figure 5In the embodiment, the detection system comprises a carrier table 200 for placing the sample 201 to be detected, a structured light source 202, a controller 203, and an imaging device 204, and further comprises a second rotating mechanism 206 for rotating the structured light source 202 around the normal direction of the plane where the plurality of fringes are located, that is, the second rotating mechanism 206 controls the structured light source 202 to rotate under the control of the controller 203, so as to realize the relative rotation of the carrier table 200 and the structured light source 202, to adjust the extension direction of the fringes of the structured light transmitted to the surface of the sample 201 to be detected, so as to change the feedback image obtained by the imaging device 204, that is, to facilitate the imaging device to obtain the slip line on the surface of the sample 201 to be detected from different directions, thereby improving the accuracy of the detection system in detecting the slip line.
[0080] The structured light source 202 comprises a screen, the fringes are patterns on the screen, and the rotating mechanism 207 is used for controlling the rotation of the patterns on the screen; or the structured light source 202 comprises a projection light source and a grating, and the light emitted by the projection light source forms structured light after passing through the grating, wherein the rotating mechanism 207 is used for controlling the rotation of the grating. It can be understood that the rotation of the patterns on the screen can be controlled by the central processing unit or other electronic components in the screen to control the rotation of the patterns, or directly control the different patterns presented on the screen, so as to form the feedback image of the slip line with different extension directions on the surface of the sample 201 to be detected.
[0081] It can be understood that the rotating mechanism 207 for controlling the rotation of the patterns on the screen or the rotation of the grating can be the second rotating mechanism 206.
[0082] In other embodiments, the detection system can simultaneously comprise the first rotating mechanism 205 and the second rotating mechanism 206. On the one hand, it can improve the adjustment speed between the carrier table 200 and the structured light source 202, and on the other hand, it can reduce the angle of single rotation of the carrier table 200 and the structured light source 202.
[0083] The detection system can comprise a second translation mechanism 228. In the embodiment, the second translation mechanism 228 and the second rotating mechanism 206 can belong to the same mechanism, that is, the mechanism connected with the structured light source 202 can realize rotation and translation, so as to reduce the volume of the detection system and improve the accuracy of the detection system. In other embodiments, the second translation mechanism 228 and the second rotating mechanism 206 can be two mechanisms that do not interfere with each other.
[0084] The controller 203 first controls the extension direction of the fringes of the structured light to be a first angle with the sample direction of the sample to be measured 201, then controls the relative translation of the carrier table 200 and the structured light source 202 through the translation mechanism 208, and acquires a plurality of initial images, and forms a feedback image according to the plurality of initial images through the processor, acquires the feedback image of the first angle, then controls the rotation of the structured light source 202 through the second rotation mechanism 206 to make the extension direction of the fringes of the structured light to be a second angle with the sample direction of the sample to be measured 201, then controls the relative translation of the carrier table 200 and the structured light source 202 through the translation mechanism 208, and repeats the above process until the required number of feedback images are acquired, so that the imaging device acquires all the slip lines on the surface of the sample to be measured 201.
[0085] Those skilled in the art can understand that the above-mentioned embodiments are specific embodiments for realizing the present disclosure, and in actual application, various changes can be made in form and details without departing from the spirit and scope of the embodiments of the present disclosure. Any person skilled in the art can make various modifications and modifications without departing from the spirit and scope of the embodiments of the present disclosure, therefore the protection scope of the embodiments of the present disclosure should be subject to the scope defined by the claims.
Claims
1. A detection system, characterized in that, The application relates to a detection system for detecting a sample, comprising: a bearing table for placing the sample to be detected; a structured light source for providing structured light and projecting the structured light on the surface of the sample to be detected, wherein the structured light comprises a plurality of light-and-dark stripes extending along the same direction, or the structured light comprises a plurality of light-and-dark stripes extending along a plurality of different directions respectively; the stripes projected by the structured light source at different time points have different relative directions with the surface of the sample to be detected; an imaging device for acquiring a feedback image formed by the structured light projected on the surface of the sample to be detected.
2. The detection system of claim 1, wherein, The sample to be detected is a crystal, the extending direction of the stripes is parallel to the crystal direction of the surface of the sample to be detected or has an acute angle with the crystal direction, and the angle between the relative directions is equal to the angle between the crystal directions.
3. The detection system of claim 2, wherein, The sample to be detected is a hexagonal close-packed crystal, or the surface of the sample to be detected is a <111> crystal surface of a face-centered cubic crystal, and the number of the relative directions is greater than or equal to 3. The angle between the extending directions of the stripes of the structured light projected on the surface of the sample to be detected at different time points is 60 DEG, and the number of the stripes in different extending directions is greater than or equal to 3. Alternatively, the structured light comprises a plurality of light-and-dark stripes extending along a plurality of different directions respectively, the number of the different directions is at least 3, and the angle between adjacent different directions is 60 DEG.
4. The detection system of claim 2, wherein, The surface of the sample to be detected is a <100> crystal surface or a <110> crystal surface of a face-centered cubic crystal, or the sample to be detected is a body-centered cubic crystal, and the number of the relative directions is greater than or equal to 2. The angle between the extending directions of the stripes of the structured light projected on the surface of the sample to be detected at different time points is 90 DEG, and the number of the stripes in different extending directions is greater than or equal to 2. Alternatively, the structured light comprises a plurality of light-and-dark stripes extending along a plurality of different directions respectively, the number of the different directions is at least 2, and the angle between adjacent different directions is 90 DEG.
5. The detection system according to claim 3 or 4, characterized in that If the structured light comprises a plurality of light-and-dark stripes extending along the same direction, the detection system further comprises: a controller for controlling the relative rotation of the bearing table and the structured light source so that the stripes projected by the structured light source at different time points have two or more than three different relative directions with the surface of the sample to be detected; a rotating mechanism controlled by the controller so that the extending direction of the stripes is adjustable relative to the relative direction of the surface of the sample to be detected, and the extending directions of the stripes of the structured light projected on the surface of the sample to be detected at different time points are different.
6. The detection system of claim 5, wherein, The rotating mechanism comprises: a first rotating mechanism connected with the bearing table and the controller, the first rotating mechanism being used for rotating the surface of the bearing table under the control of the controller; and / or a second rotating mechanism controlled by the controller so that the structured light source rotates around the normal direction of the plane where the stripes are located.
7. The detection system of claim 5, wherein, The structured light source comprises a screen, the stripes are patterns on the screen, and the rotating mechanism is used for controlling the rotation of the patterns on the screen; or The structured light source comprises a projection light source and a grating, light emitted by the projection light source passes through the grating to form the structured light, and the rotating mechanism is used to control rotation of the grating.
8. The detection system of claim 5, wherein, The sample to be measured further comprises a positioning mark used to represent a crystal direction of a surface of the sample to be measured, the positioning mark has a preset included angle with the crystal direction of the surface of the sample to be measured; and the detection system further comprises: a detection mechanism used to obtain a position of the positioning mark to determine the crystal direction of the sample to be measured; the controller is further used to make an extension direction of the fringe projected on the surface of the sample to be measured parallel to the crystal direction of the surface of the sample to be measured based on the crystal direction.
9. The detection system of claim 1, wherein, Further comprising: a translation mechanism used to control relative translation of the carrier table and the structured light source, and a total distance of relative translation at the same time is less than or equal to a period distance of a single fringe; a processor used to obtain initial images of multiple moving positions in a translation process of the translation mechanism, multiple initial images constitute the feedback image, and obtain a defect of the surface of the sample to be measured based on the feedback image.
10. The detection system of claim 9, wherein, The translation mechanism comprises: a first translation mechanism connected with the carrier table to drive the carrier table to translate along a preset direction; and / or a second translation mechanism connected with the structured light source to drive the structured light source to translate along a preset direction.
11. The detection system of claim 1, wherein, The structured light comprises multiple fringes of light and dark alternation extending along the same direction, and a number of relative rotations of the carrier table and the structured light source is greater than or equal to a number of crystal directions of the surface of the sample to be measured. Or, The structured light comprises multiple fringes of light and dark alternation extending along multiple different directions respectively, and a number of the different directions is greater than or equal to a number of crystal directions of the surface of the sample to be measured.
12. The detection system of claim 1, wherein, Further comprising: a processor used to obtain a step of the surface of the sample to be measured based on feedback images of different relative directions obtained by the imaging device, and the step comprises one or more of a slip line or a step defect in combination.