Resistivity detection device

Abstract

The utility model discloses a resistivity detection device, the resistivity detection device comprises a mass flow meter, a humidity control unit, a temperature control unit, a steady flow air supply unit and a resistivity detector which are sequentially communicated through a pipeline, compressed air is introduced into the mass flow meter, and the resistivity detector is communicated with external atmosphere; the mass flow meter is used for adjusting the air flow of the compressed air; the humidity control unit is used for adjusting the humidity of the compressed air; the temperature control unit is used for adjusting the temperature of the compressed air; and the steady-flow air supply unit is used for converting compressed air into micro air flow. According to the resistivity detection device, a detection environment with preset temperature and preset humidity can be provided for the resistivity detector through the temperature control unit and the humidity control unit, and compared with the prior art, the resistivity detection device has higher detection precision; according to the utility model, different temperature and humidity conditions can be preset according to actual conditions, and accurate detection of resistivity of different semi-insulating films can be realized.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semi -insulated thin film resistivity detection technical field, specifically related to a resistivity detection device. BACKGROUND

[0002] Non - contact semi -insulated thin film resistivity tester is often used for the nondestructive characterization of semi -insulated thin film material with resistivity above 10 5 Ω·cm, and is often used for the detection of resistivity of semiconductor wafer such as GaN, SiC, Ga2O3 and GaAs.

[0003] The non - contact semi -insulated thin film resistivity tester detects the resistivity of semi -insulated thin film sample through the transient charging and discharging process of the ring capacitive sensor, however, the test result of sample resistivity is affected by the temperature and humidity of the environment, the existing non - contact semi -insulated thin film resistivity tester cannot accurately control the temperature and humidity of the environment, and cannot meet the demand of sample resistivity characterization under specific temperature and humidity conditions, and when the ring capacitive sensor in the non - contact semi -insulated thin film resistivity tester is transiently charged and discharged, the test sample placed therein is heated, causing the temperature of the sample to rise, and the sample resistivity to increase.

[0004] The information disclosed in this section is intended only to increase an understanding of the general background of the present utility model and should not be construed as recognizing or implying that this information constitutes prior art with respect to the present utility model. CONTENT OF THE UTILITY MODEL

[0005] The utility model aims at providing a resistivity detection device, which can solve the technical problem that the existing non - contact semi -insulated thin film resistivity tester has deviation in the detection result due to the influence of temperature and humidity when detecting the resistivity of sample.

[0006] In order to achieve the above object, a resistivity detection device is provided in one specific embodiment of the utility model, which comprises a mass flow meter, a humidity control unit, a temperature control unit, a steady flow air supply unit and a resistivity detector connected in sequence through a pipeline, the mass flow meter is connected with compressed air, and the resistivity detector is connected with external atmosphere; the mass flow meter is used for adjusting the air flow of compressed air; the humidity control unit is used for adjusting the humidity of compressed air; the temperature control unit is used for adjusting the temperature of compressed air; and the steady flow air supply unit is used for converting compressed air into micro air flow.

[0007] In one or more embodiments of the utility model, the steady flow air supply unit is provided with an air inlet and an air outlet, an air duct is arranged between the air inlet and the air outlet, the air duct comprises a first air duct which is inclined to one side along the airflow direction and a second air duct which is inclined to the other side along the airflow direction, the first air duct and the second air duct are staggered along the airflow direction, and a shunt terminal is arranged in each of the first air duct and the second air duct.

[0008] In one or more embodiments of the utility model, the width of the first air duct and the second air duct gradually increases along the airflow direction, and the width of the shunt terminal gradually increases along the airflow direction.

[0009] In one or more embodiments of the utility model, the resistivity detection device further comprises a controller, and the controller is electrically connected with the mass flow meter, the humidity control unit, the temperature control unit and the steady flow air supply unit through communication cables.

[0010] In one or more embodiments of the utility model, the resistivity detector comprises a housing and a sample table arranged in the housing, an annular temperature and humidity sensor is arranged on the sample table, an air inlet is arranged on one side of the housing, the air inlet is communicated with the air outlet of the steady flow air supply unit through a pipeline, and an air outlet is arranged on the top of the housing.

[0011] In one or more embodiments of the utility model, metal meshes are arranged in the air inlet and the air outlet of the resistivity detector.

[0012] In one or more embodiments of the utility model, the mesh number of the metal mesh is 100-10000, and the ventilation area of a single mesh is 0.0001mm 2 -0.5mm 2 .

[0013] In one or more embodiments of the utility model, the annular temperature and humidity sensor comprises an infrared temperature sensor and a humidity-sensitive resistance sensor.

[0014] In one or more embodiments of the utility model, the humidity control unit comprises an ultrasonic humidification module and a condensation dehumidification module, and the humidity control range of the humidity control unit is 20%-65%.

[0015] In one or more embodiments of the utility model, the temperature control unit is externally provided with a heat preservation layer, and the temperature control range of the temperature control unit is -30℃-50℃.

[0016] Compared with the prior art, the resistivity detection device can provide a detection environment meeting a preset temperature and a preset humidity requirement for the resistivity detector through the temperature control unit and the humidity control unit, avoids the influence of heat generated by the capacitive sensor on the sample during use, sample resistivity change caused by sample heating, and external environment temperature and humidity change on the detection result, and has higher detection precision than the prior art.

[0017] The utility model discloses still can according to actual situation, preset different temperature and humidity condition, realize accurate detection to different type semi-insulating thin film resistivity. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to make the technical personnel of the present technical field better understand the technical scheme in the present utility model, the technical scheme in the present utility model embodiments will be described clearly and completely below with reference to the drawings in the present utility model embodiments. Obviously, the described embodiments are only a part of the embodiments of the present utility model, not all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor should belong to the scope of protection of the present utility model.

[0019] Figure 1 It is a structure diagram of resistivity detection device in a specific embodiment of the utility model;

[0020] Figure 2 It is a structure diagram of steady flow air supply unit in a specific embodiment of the utility model. DETAILED DESCRIPTION

[0021] In order to make the technical personnel of the present technical field better understand the technical scheme in the present utility model, the technical scheme in the present utility model embodiments will be described clearly and completely below with reference to the drawings in the present utility model embodiments. Obviously, the described embodiments are only a part of the embodiments of the present utility model, not all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor should belong to the scope of protection of the present utility model.

[0022] In the description of the present utility model, it is understood that the orientation or position relationship indicated by the terms "vertical", "horizontal", "top", "bottom", "upper", "lower", "front", "rear" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the present utility model.

[0023] As described in the background, the non-contact resistivity detector of the semi-insulating thin film detects the resistivity of the semi-insulating thin film sample through the transient discharge of the ring capacitive sensor, but the temperature and air humidity of the detection environment can affect the detection result of the sample resistivity, the resistivity detector in the prior art does not have the function of accurately controlling the temperature and humidity of the environment, so it cannot meet the needs of detecting the sample resistivity under specific temperature and humidity conditions; and when the sample is placed in the resistivity detector, the sample will be heated due to the transient discharge of the ring capacitive sensor, causing the temperature of the sample surface to rise and the sample resistivity to change; when it is necessary to characterize the resistivity distribution of each position of the sample, the temperature change caused by the heating of the sample cannot accurately characterize the distribution of the sample resistivity.

[0024] Referring to Figure 1 To solve the above technical problems, the resistivity detection device in a specific embodiment of the present application includes a resistivity detector 1, a mass flow meter 2, a humidity control unit 3, a temperature control unit 4, and a stable flow air supply unit 5; wherein the mass flow meter 2, the humidity control unit 3, the temperature control unit 4, the stable flow air supply unit 5, and the resistivity detector 1 are sequentially communicated through a pipeline 7, the mass flow meter 2 is connected to the compressed air, and the resistivity detector 1 is connected to the external atmosphere; the mass flow meter 2 is used to adjust the air flow of the compressed air; the humidity control unit 3 is used to adjust the humidity of the compressed air; the temperature control unit 4 is used to adjust the temperature of the compressed air; and the stable flow air supply unit 5 is used to convert the compressed air into a micro air flow.

[0025] Referring to Figure 1As shown, compressed air enters the inside of the mass flow meter 2 through the pipeline, the mass flow meter 2 is used to adjust the air flow of the compressed air, and the air outlet of the mass flow meter 2 is used to maintain the atmospheric pressure of the test environment; the mass flow meter 2 inputs the air flow meeting the atmospheric pressure of the test environment into the humidity control unit 3, the humidity control unit 3 includes a humidifying assembly and a condensation dehumidifying assembly, and is used to control the humidity of the compressed air flow, and in the embodiment, the humidity control unit 3 controls the humidity of the compressed air flow in the range of 20% to 65%; the humidity control unit 3 inputs the compressed air flow meeting the humidity requirement into the temperature control unit 4, the temperature control unit 4 is internally provided with a semiconductor refrigerating sheet, the semiconductor refrigerating sheet controls the temperature of the input compressed air flow, and the temperature control range is-30℃ to 50℃. The air outlet of the temperature control unit 4 inputs the compressed air meeting the air pressure, humidity and temperature requirements of the test environment into the stable flow air supply unit 5, the stable flow air supply unit 5 changes the air flow with atmospheric fluctuation into a stable micro air flow, and the air outlet of the stable flow air supply unit 5 inputs the micro air flow into the inside of the resistivity detector 1, the resistivity detector 1 detects the resistivity and resistance distribution of the sample under the condition of meeting the preset detection environment of the sample, and in the embodiment, the model of the resistivity detector 1 is SemiMap Corema-ER, and the manufacturing material of the stable flow air supply unit 5 is non-metallic material, such as ABS.

[0026] Referring to Figure 2 As shown, the stable flow air supply unit 5 is provided with an air inlet 54 and an air outlet 55, the air inlet 54 and the air outlet 55 are provided with an air duct therebetween, the air duct includes a first air duct 51 inclined to one side along the air flow direction and a second air duct 52 inclined to the other side along the air flow direction, the first air duct 51 and the second air duct 52 are staggered along the air flow direction, and the first air duct 51 and the second air duct 52 are respectively provided with a shunt terminal 53.

[0027] In the embodiment, the stable flow air supply unit 5 includes at least four air ducts, the air inlet of each air duct is connected with the temperature control unit 4 through the pipeline 7, the air outlet of each air duct is connected with the resistivity detector 1 through the pipeline 7, each air duct includes at least six first air ducts 51 and six second air ducts 52, and at least one shunt terminal 53 is arranged in each air duct, and in the specific embodiment, the inclination degree of the first air duct 51 and the second air duct 52 to the two sides along the air flow direction can be adjusted according to the requirement, and the branch structure formed by the first air duct 51 and the second air duct 52 can reduce the flow rate of the compressed air flow, so that the high-speed compressed air becomes a stable micro air flow.

[0028] In a further embodiment, the resistivity detection device further includes a controller 6, and the controller 6 is electrically connected with the mass flow meter 2, the humidity control unit 3, the temperature control unit 4 and the stable flow air supply unit 5 through the communication cable 7.

[0029] The controller 6 is used for controlling the mass flow meter 2, the humidity control unit 3, the temperature control unit 4 and the constant-flow air supply unit 5 respectively, so that the gas input into the resistivity detector 1 meets the preset requirements, the internal detection environment of the resistivity detector 1 is adjusted, and the accuracy of the detection result is improved.

[0030] In a further embodiment, the resistivity detector 1 comprises a shell 11 and a sample table 12 arranged in the shell, the sample table 12 is provided with a ring-shaped temperature and humidity sensor 13, one side of the shell 11 is provided with an air inlet 14, the air inlet 14 is communicated with the air outlet of the constant-flow air supply unit 5 through the pipeline 7, the top of the shell 11 is provided with an air outlet 15, and the ring-shaped temperature and humidity sensor 13 comprises an infrared temperature sensor and a humidity-sensitive resistance sensor.

[0031] The sample to be detected is placed on the sample table 12, the environmental temperature and humidity in the shell 11 of the resistivity detector 1 are observed through the ring-shaped temperature and humidity sensor 13, the mass flow meter 2, the humidity control unit 3, the temperature control unit 4 and the constant-flow air supply unit 5 are controlled to start working, the humidity control unit 3 and the temperature control unit 4 are adjusted by the controller 6, so that the environmental temperature and humidity in the shell 11 meet the requirements of the sample to be detected on the detection environment, the controller 6 adjusts the mass flow meter 2 to continuously supplement the constant-temperature and constant-humidity air to the sample table 13, so that the temperature and humidity of the sample are kept stable, and then the resistivity and resistance distribution of the sample to be detected are detected by using the resistivity detector 1.

[0032] In a further embodiment, metal nets 16 are arranged in the air inlet and the air outlet of the resistivity detector 1, the metal nets 16 are metal nets made of copper, silver, stainless steel and the like, the mesh number of the metal nets 16 is 100-10,000, the ventilation area of a single mesh is 0.0001mm 2 -0.5mm 2 The metal nets 16 are used for shielding external electromagnetic fields and gas flow, so as to ensure the accuracy of the detection result.

[0033] In the embodiment, the resistivity detector 1, the mass flow meter 2, the humidity control unit 3 and the temperature control unit 4 are all common devices in the field, and the implementation modes of the functions of each device are mature prior art, so the specific structures are not described here.

[0034] The resistivity detection device in the utility model can provide a detection environment meeting preset temperature and humidity requirements for the resistivity detector 1 through the temperature control unit 3 and the humidity control unit 4, avoids the influence of the heat generated by the instantaneous discharge of the capacitive sensor on the sample to cause the change of the resistivity of the sample and the influence of the change of the external environmental temperature and humidity on the detection result, has higher detection precision compared with the prior art, and can preset different temperature and humidity conditions according to actual conditions to realize accurate detection on different types of semi-insulating thin film resistivity.

[0035] It will be obvious to a person skilled in the art that the application is not limited to the details of the above-described exemplary embodiments, but that the application can be implemented in other concrete forms without departing from the spirit or essential characteristics of the application. The embodiments should, therefore, be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the above description, and all changes which come within the meaning and range of equivalents of the claims are therefore intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the scope of the claims concerned.

[0036] Furthermore, it should be understood that although the present specification describes exemplary embodiments, the application is not limited to only one independent technical solution in each embodiment, and the specification is described in this way only for the sake of clarity, and a person skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by a person skilled in the art.

Claims

1. A resistivity detecting device, characterized by, The resistivity detection device comprises a mass flow meter, a humidity control unit, a temperature control unit, a steady flow air supply unit and a resistivity detector connected in sequence through pipelines, the mass flow meter is connected to compressed air, and the resistivity detector is connected to the external atmosphere; the mass flow meter is used to adjust the air flow of the compressed air; the humidity control unit is used to adjust the humidity of the compressed air; the temperature control unit is used to adjust the temperature of the compressed air; and the steady flow air supply unit is used to convert the compressed air into a micro air flow.

2. The resistivity detecting apparatus according to claim 1, characterized by The steady flow air supply unit is provided with an air inlet and an air outlet, an air duct is arranged between the air inlet and the air outlet, the air duct comprises a first air duct inclined to one side along the air flow direction and a second air duct inclined to the other side along the air flow direction, the first air duct and the second air duct are staggered along the air flow direction, and the first air duct and the second air duct are respectively provided with a shunt terminal.

3. The resistivity detecting apparatus according to claim 2, characterized by The width of the first air duct and the second air duct gradually increases along the air flow direction, and the width of the shunt terminal gradually increases along the air flow direction.

4. The resistivity detecting apparatus according to claim 1, characterized by The resistivity detection device further comprises a controller, and the controller is electrically connected to the mass flow meter, the humidity control unit, the temperature control unit and the steady flow air supply unit through communication cables.

5. The resistivity detecting apparatus according to claim 1, characterized by The resistivity detector comprises a shell and a sample table arranged in the shell, the sample table is provided with an annular temperature and humidity sensor, one side of the shell is provided with an air inlet, the air inlet is connected to the air outlet of the steady flow air supply unit through a pipeline, and the top of the shell is provided with an air outlet.

6. The resistivity detecting apparatus according to claim 5, wherein The air inlet and the air outlet of the resistivity detector are provided with metal nets.

7. The resistivity detection apparatus according to claim 6, characterized by The metal mesh has a mesh number of 100-10000, and a ventilation area of 0.0001mm 2 ~0.5mm 2 .

8. The resistivity detecting apparatus according to claim 5, wherein The annular temperature and humidity sensor comprises an infrared temperature sensor and a humidity-sensitive resistance sensor.

9. The resistivity detecting apparatus according to claim 1, wherein The humidity control unit comprises an ultrasonic humidification module and a condensation dehumidification module, and the humidity control range of the humidity control unit is 20% to 65%.

10. The resistivity detecting apparatus according to claim 1, wherein The temperature control unit is externally provided with a heat preservation layer, and the temperature control range of the temperature control unit is -30℃ to 50℃.

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