Copper frame clamping manipulator

Abstract

The utility model discloses a copper frame clamping manipulator. Relates to semiconductor production equipment. The bottom of the base is detachably and fixedly arranged on a rack, and a first motor is arranged at the top of the base; one end of the first-stage rotating arm (251) is fixedly connected with a rotating shaft of the first motor; the second-stage rotating arm (252) is rotatably arranged at the top of the other end of the first-stage rotating arm (251) through a second motor; the clamping linear driving mechanism (220) is vertically and fixedly arranged on the secondary rotating arm (252); the clamping jaw mechanism is detachably and fixedly arranged at the piston rod end of the clamping linear driving mechanism; the clamping jaw mechanism comprises a lining plate which is detachably and fixedly arranged at the piston rod end of the clamping linear driving mechanism; the front clamping jaw is vertically, detachably and fixedly arranged at the front end below the lining plate; the copper frame transferring device has the advantages of being compact in structure, improving efficiency of transferring copper frames to material baskets, reducing labor intensity and the like.

Description

Technical Field

[0001] This utility model relates to semiconductor manufacturing equipment, and more particularly to a copper frame clamping robot. Background Technology

[0002] After the power device chips are wire-bonded on the copper frame, they need to be reflowed in a reflow oven to ensure the reliability of the wire bonding. According to the process requirements, during reflow soldering, five copper frames are stacked together and placed at the entrance of the reflow oven. After each batch, a batch number tag is placed at the entrance to prevent mixing. The stack of copper frames and batch number tags are conveyed to the exit of the reflow oven in sequence by the conveyor belt. After the stack of copper frames and batch number tags are conveyed to the exit, they are set vertically and manually transported to the material basket. The manual transport to the material basket is not only inefficient but also labor-intensive. Therefore, developing a device to clamp the vertically set copper frames into the material basket is an urgent technical problem to be solved. Utility Model Content

[0003] To address the above problems, this utility model provides a copper frame clamping robot with a compact structure that improves the efficiency of transferring copper frames to material baskets and reduces manual labor intensity.

[0004] The technical solution of this utility model is:

[0005] A copper frame clamping robot includes:

[0006] The base is detachably and fixedly mounted on the frame at the bottom, and the first motor is located at the top;

[0007] One end of the primary rotating arm (251) is fixedly connected to the rotating shaft of the first motor;

[0008] The secondary rotating arm (252) is rotatably mounted on the top of the other end of the primary rotating arm (251) via a second motor;

[0009] A clamping linear drive mechanism (220) is vertically fixed on the secondary rotating arm (252);

[0010] A gripper mechanism is detachably and fixedly mounted on the piston rod end of the clamping linear drive mechanism; the gripper mechanism includes:

[0011] A liner plate is removably and washably fixedly installed at the piston rod end of the clamping linear drive mechanism;

[0012] The front gripper is vertically and detachably fixed at the front end below the liner plate;

[0013] The gripper linear drive mechanism is horizontally fixed at the end below the liner plate;

[0014] The rear gripper is fixedly connected to the piston rod end of the gripper linear drive mechanism, and the distance between it and the front gripper is adjusted by the extension and retraction control of the gripper linear drive mechanism.

[0015] Specifically, the clamping linear drive mechanism includes a clamping cylinder, a clamping hydraulic cylinder, or a clamping electric push rod.

[0016] Specifically, the gripper linear drive mechanism includes a gripper cylinder, a gripper hydraulic cylinder, or a gripper electric push rod.

[0017] Specifically, the liner has an L-shaped cross-section.

[0018] Specifically, the front gripper and the rear gripper are respectively plate-shaped structures.

[0019] Specifically, the front and rear grippers are each provided with several slots with open bottoms.

[0020] This invention includes a base, a primary rotating arm, and a secondary rotating arm. The base is detachably fixed to the frame by bolts. A first motor on the base drives the primary and secondary rotating arms to rotate, thereby rotating the gripper mechanism from the gripping station to the material basket station. When the gripper mechanism reaches the gripping station, the front and rear grippers open, forming an opening suitable for the copper frame or batch number plate. The piston rod of the clamping linear drive mechanism descends to a set position, and the front and rear grippers clamp the copper frame or batch number plate. The piston rod of the clamping linear drive mechanism retracts, and the mechanism rotates above the material basket through the cooperation of the primary and secondary rotating arms. The descent of the piston rod of the clamping linear drive mechanism places the copper frame or batch number plate into the corresponding position within the material basket. This invention has the advantages of compact structure, improved efficiency in transferring copper frames to the material basket, and reduced labor intensity. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural diagram of a copper frame clamping robot.

[0022] Figure 2 This is a three-dimensional structural diagram of the gripper mechanism;

[0023] Figure 3 This is a three-dimensional structural diagram of the reflow soldering unloading device in combination.

[0024] Figure 4 This is a three-dimensional structural diagram of the reflow soldering unloading device;

[0025] Figure 5 This is a three-dimensional structural diagram of the copper frame and batch number plate placed on the reflow soldering unloading device.

[0026] Figure 6 This is a three-dimensional structural diagram of the assembled linear drive mechanism, lifting seat, and tilting plate. Figure 1;

[0027] Figure 7 This is a three-dimensional structural diagram of the assembled linear drive mechanism, lifting seat, and tilting plate. Figure 2 ;

[0028] Figure 8 This is a three-dimensional structural diagram of the rotating shaft in its assembled state;

[0029] 110 in the diagram is the first belt conveyor.

[0030] 120 is the second belt conveyor.

[0031] 130 is the linear drive mechanism for ejecting material.

[0032] 140 is the lifting seat, 1401 is the guide section, 1402 is the vertical section, and 141 is the support frame.

[0033] 150 is the tilting plate, 151 is the rotating shaft, 1511 is the V-shaped connecting plate, and 1512 is the limiting arm.

[0034] 160 is a tilting cylinder.

[0035] 170 is the material stop mechanism.

[0036] 180 is the pushing mechanism, 181 is the pushing cylinder, and 182 is the pushing plate;

[0037] 210 is the base.

[0038] 220 is a clamping linear drive mechanism.

[0039] 230 is a gripper linear drive mechanism.

[0040] 240 is the gripper mechanism, 241 is the liner, 242 is the front gripper, 2421 is the slot, and 243 is the rear gripper.

[0041] 251 is the first-stage rotating arm, and 252 is the second-stage rotating arm. Detailed Implementation

[0042] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0043] In the description of this utility model, it should be understood that the terms "upper," "lower," "left," "right," "vertical," "horizontal," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0044] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0045] The following is for reference. Figure 1-8 Describe this utility model;

[0046] A copper frame clamping robot includes:

[0047] The base 210 is detachably and fixedly mounted on the frame at the bottom, and the first motor is located at the top;

[0048] The first-stage rotating arm 251 is fixedly connected at one end to the rotating shaft of the first motor;

[0049] The secondary rotating arm 252 is rotatably mounted on the top of the other end of the primary rotating arm 251 via a second motor; the second motor is fixedly mounted inside the secondary rotating arm 252, and its rotating rod is fixedly connected to the primary rotating arm 251.

[0050] A clamping linear drive mechanism 220 is vertically fixed on the secondary rotating arm 252;

[0051] A gripper mechanism 240 is detachably and fixedly mounted on the piston rod end of the clamping linear drive mechanism 220; the gripper mechanism 240 includes:

[0052] The liner 241 is detachably and washably fixed at the piston rod end of the clamping linear drive mechanism 220;

[0053] The front gripper 242 is vertically and detachably fixed at the front end below the liner 241;

[0054] The gripper linear drive mechanism 230 is horizontally fixed at the end below the liner plate 241; the clamping linear drive mechanism 220 includes a clamping cylinder, a clamping oil cylinder, or a clamping electric push rod.

[0055] The rear gripper 243 is fixedly connected to the piston rod end of the gripper linear drive mechanism 230, and the distance between it and the front gripper 242 is adjusted by the extension and retraction control of the gripper linear drive mechanism 230. The gripper linear drive mechanism 230 includes a gripper cylinder, a gripper hydraulic cylinder, or a gripper electric push rod.

[0056] The liner plate 241 has an L-shaped cross-section.

[0057] The front gripper 242 and the rear gripper 243 are plate-shaped structures.

[0058] The front gripper 242 and the rear gripper 243 are each provided with a number of slots 2421 with hollowed-out bottoms.

[0059] The base 210 is detachably fixed to the frame by bolts. The first motor on the base 210 drives the first-stage rotating arm 251 and the second-stage rotating arm 252 to rotate, thereby rotating the gripper mechanism 240 from the gripping station to the material basket station. When the gripper mechanism 240 rotates to the gripping station, the front gripper 242 and the rear gripper 243 open to form an opening that fits the copper frame or batch number plate. The piston rod of the clamping linear drive mechanism 220 descends to the set position, and the front gripper 242 and the rear gripper 243 clamp the copper frame or batch number plate. The piston rod of the clamping linear drive mechanism 220 retracts and rotates above the material basket through the cooperation of the first-stage rotating arm 251 and the second-stage rotating arm 252. The descent of the piston rod of the clamping linear drive mechanism 220 places the copper frame or batch number plate into the corresponding position in the material basket.

[0060] The copper frame clamping robot in this case can be used in conjunction with the reflow soldering blanking device. The reflow soldering blanking device is described in detail below.

[0061] Reflow soldering blanking device, including:

[0062] The first belt conveyor 110 is located at the discharge port of the reflow furnace;

[0063] The second belt conveyor 120 is located at the end of the first belt conveyor 110;

[0064] The top material linear drive mechanism 130 has its cylinder body vertically fixed on the frame;

[0065] The lifting seat 140 is detachably and fixedly mounted on the top of the piston rod of the top material linear drive mechanism 130 via a support frame 141; the lifting seat 140 has an L-shaped structure with its opening facing the feeding direction; the top material linear drive mechanism 130 of this invention includes a top material cylinder, a top material oil cylinder, or a top material electric push rod; the support frame 141 is detachably and fixedly mounted on the top of the piston rod of the top material linear drive mechanism 130.

[0066] Several tilting plates 150 are provided, each of which can be tilted and installed within the lifting seat 140. By tilting the tilting plates 150, horizontal materials are positioned vertically. The tilting plates 150 are tilted by a tilting mechanism on the support frame 141.

[0067] This case illustrates two implementation methods for the flipping mechanism:

[0068] Example 1:

[0069] The tilting mechanism includes a tilting cylinder;

[0070] The cylinder body of the tilting cylinder is fixedly mounted on the support frame 141, and the tilting arm is fixedly connected to the tilting plate 150.

[0071] Example 2:

[0072] The flipping mechanism includes a rotating shaft 151 hinged to a support frame 141;

[0073] The rotating shaft 151 is provided with a fixedly connected V-shaped connecting plate 1511; one end of the V-shaped connecting plate 1511 is fixedly connected to the flipping plate 150.

[0074] The support frame 141 is provided with a tilting cylinder 160 that is hinged thereto, and the piston rod of the tilting cylinder 160 is hinged to one end of the V-shaped connecting plate 1511.

[0075] Further description of the lifting seat structure:

[0076] The lifting seat 140 includes a horizontally arranged guide portion 1401 and a vertically arranged vertical portion 1402;

[0077] The inlet section 1401 is provided with a plurality of hollow mounting positions for installing the flip plate 150;

[0078] The vertical portion 1402 is provided with several gripping holes with top openings.

[0079] The inlet section 1401 is provided with several limiting holes;

[0080] The rotating shaft 151 is provided with a plurality of fixedly installed limiting arms 1512, and the limiting arms 1512 are provided with limiting protrusions that are adapted to the limiting holes; after the flipping plate 150 is flipped upward into place, the limiting protrusions are located in the limiting holes.

[0081] The front end (the material pre-contact end) of the tipping plate 150 is bent downwards to facilitate the smooth and unobstructed entry of the material into the tipping plate 150.

[0082] The front end of the inlet section 1401 bends downward.

[0083] Further optimize the stability of the first belt conveyor 110 and the second belt conveyor 120:

[0084] The first belt conveyor 110 and the second belt conveyor 120 are respectively equipped with a material blocking mechanism 170;

[0085] The material stop mechanism 170 includes:

[0086] The material-stopping cylinder has its cylinder body vertically fixed in the first belt conveyor 110;

[0087] A baffle plate is fixedly installed at the top of the baffle cylinder, and a pair of upwardly extending baffle fingers are provided on the top surface; the baffle fingers move up and down between the belts of the first belt conveyor 110.

[0088] The material blocking mechanism 170 is used to block the batch number plate or copper frame, so that it can enter the next station in an orderly manner. At the same time, it can help the pushing mechanism to correct the posture of the batch number plate or copper frame, thereby improving the stability and reliability of the device operation.

[0089] The first belt conveyor 110 and the second belt conveyor 120 are each provided with a pair of symmetrically arranged pushing mechanisms 180; the pushing mechanism 180 includes:

[0090] The pusher cylinder 181 is fixedly mounted on the side support frame of the first belt conveyor 110;

[0091] The pusher plate 182 is fixedly installed at the piston rod end of the pusher cylinder 181. The two pusher plates 182 are pushed synchronously towards the middle of the first belt conveyor 110, so that the pusher plate 182 is located in the middle of the first belt conveyor 110.

[0092] After the batch number plate or copper frame enters the first belt conveyor 110 and the second belt conveyor 120 in sequence, it is sent into the lifting seat 140. At this time, the tilting plate 150 is in its original position, consistent with the inlet part 1401. After the batch number plate or copper frame is conveyed to the position, the piston rod of the tilting cylinder 160 extends, tilting the tilting plate 150 upward. The batch number plate or copper frame is vertically positioned between the tilting plate 150 and the vertical part 1402. The batch number plate or copper frame is picked up by the side robot and placed into the preset material basket. After the batch number plate or copper frame is picked up, the tilting plate 150 returns to its original position, waiting for the next batch of batch number plates or copper frames to enter.

[0093] Regarding the information disclosed in this case, the following points need to be clarified:

[0094] (1) The accompanying drawings of the embodiments disclosed in this case only involve the structures involved in the embodiments disclosed in this case. Other structures can refer to the general design.

[0095] (2) Where there is no conflict, the embodiments and features disclosed in this case can be combined with each other to obtain new embodiments;

[0096] The above are merely specific embodiments disclosed in this case, but the scope of protection of this disclosure is not limited thereto. The scope of protection disclosed in this case shall be determined by the scope of protection of the claims.

Claims

1. A copper frame clamping robot, characterized in that, include: The base (210) is detachably fixed on the frame at the bottom and has a first motor at the top; The rotating arm (250) has one end fixedly connected to the rotating shaft of the first motor, and the other end is provided with a vertically fixed clamping linear drive mechanism (220). One end of the primary rotating arm (251) is fixedly connected to the rotating shaft of the first motor; The secondary rotating arm (252) is rotatably mounted on the top of the other end of the primary rotating arm (251) via a second motor; A clamping linear drive mechanism (220) is vertically fixed on the secondary rotating arm (252); A gripper mechanism (240) is detachably and fixedly mounted on the piston rod end of the clamping linear drive mechanism (220); the gripper mechanism (240) includes: The liner (241) is removably and washably fixed at the piston rod end of the clamping linear drive mechanism (220); The front gripper (242) is vertically and detachably fixed at the front end below the liner (241); The gripper linear drive mechanism (230) is horizontally fixed at the end below the liner (241); The rear gripper (243) is fixedly connected to the piston rod end of the gripper linear drive mechanism (230), and the distance between it and the front gripper (242) is adjusted by the extension and retraction control of the gripper linear drive mechanism (230).

2. The copper frame clamping robot according to claim 1, characterized in that, The clamping linear drive mechanism (220) includes a clamping cylinder, a clamping hydraulic cylinder, or a clamping electric push rod.

3. The copper frame clamping robot according to claim 1, characterized in that, The gripper linear drive mechanism (230) includes a gripper cylinder, a gripper hydraulic cylinder, or a gripper electric push rod.

4. The copper frame clamping robot according to claim 1, characterized in that, The liner (241) has an L-shaped cross-section.

5. The copper frame clamping robot according to claim 1, characterized in that, The front gripper (242) and the rear gripper (243) are respectively plate-shaped structures.

6. The copper frame clamping robot according to claim 1, characterized in that, The front gripper (242) and the rear gripper (243) are respectively provided with a number of slots (2421) with hollowed-out bottoms.

Images