Eccentric rotating cross-environment switching mechanism
By designing an eccentrically rotating cross-environment transfer mechanism, and utilizing the combination of rotating modules and air shower modules, the problem of material transfer between different cleanroom environments was solved, achieving efficient and clean transfer, preventing dust from entering advanced cleanrooms, and improving transfer accuracy and cleanliness.
Patent Information
- Application Number
- CN202422425151.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-08
- Publication Date
- 2025-10-28
- Estimated Expiration
- 2034-10-08
AI Technical Summary
During the production and transportation of IC substrates or wafers, sheet materials are prone to dust accumulation during material transport and need to be transferred from low-level cleanrooms to high-level cleanrooms. Existing technologies make it difficult to ensure that the materials and material carts are aligned and in the correct positions, and cannot effectively prevent dust from entering high-level cleanrooms.
An eccentric rotating cross-environment transfer mechanism was designed, including a feeding device, a rotating device, and an air shower module. Through the cooperation of the rotating module, the telescopic module, and the forks, the material can be transferred from a low-level cleanroom environment to a high-level cleanroom environment. During the transfer process, the air shower module is used for secondary cleaning to prevent dust from entering the high-level cleanroom.
It enables safe transfer of materials between different cleanroom environments, ensures the cleanliness of material surfaces, avoids dust contamination of advanced cleanrooms, and improves the accuracy and cleanliness of the transfer process.
Smart Images
Figure CN223480051U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of material transfer technology, specifically to an eccentrically rotating cross-environment transfer mechanism. Background Technology
[0002] During the production and transportation of IC substrates or wafers, sheet materials need to be stacked neatly before being transported by material carts. However, dust easily adheres to the products during transportation by material carts. This is especially true for some semiconductor materials that require high-precision, dust-free processing. Before entering the cleanroom, the products need to be dust-free.
[0003] To address the issue of materials moving from a low-level cleanroom environment to a high-level cleanroom environment, and the need for materials to travel along a double-zigzag path, an eccentric rotating cross-environment transfer mechanism has been developed to ensure the alignment and position of the materials with the material cart. Utility Model Content
[0004] The purpose of this invention is to provide an eccentrically rotating cross-environment transfer mechanism, which solves the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: an eccentrically rotating cross-environment transfer mechanism, comprising a feeding device one, a rotating device, and a feeding device two. The rotating device is connected to the feeding device one and the feeding device two on both sides, and the inner cavities of the feeding device one, the rotating device, and the feeding device two are interconnected. A rotating module is provided inside the rotating device, and a telescopic module and a fork are provided on the telescopic module. Both the feeding device one and the feeding device two are provided with a door one, and the door one on the feeding device one and the feeding device two are arranged in opposite directions. An air shower module is provided on the top of the feeding device one and the feeding device two, and the air shower module is used to blow and clean the material inside the inner cavity of the feeding device one or the feeding device two.
[0006] Preferably, the feeding device 1 and the feeding device 2 are provided with a guide wheel assembly and a lifting assembly. The lifting assembly includes a lifting module and two mounting plates 1 connected to the lifting module. The two mounting plates 1 are located on both sides of the inner cavity of the feeding device 1 or the feeding device 2. Each mounting plate 1 is provided with two bearing members, which are located on the front and rear sides of the mounting plate 1 respectively.
[0007] Preferably, the mounting plate is further provided with a straightening component, which includes a propulsion cylinder and a push plate connected to the propulsion cylinder, and the propulsion cylinder propels inward.
[0008] Preferably, the rotating module includes a rotating motor and a turntable linked to the rotating motor, and the turntable is rotatably connected to the mounting frame of the rotating device.
[0009] Preferably, the guide wheel assembly includes a second mounting plate and a guide wheel rotatably connected to the second mounting plate, wherein the second mounting plate is located on both sides of the inner cavity of the first feeding device or the second feeding device.
[0010] Preferably, the rotating device is provided with two doors on both sides, and the feeding device can be isolated by the corresponding door on the rotating device.
[0011] Preferably, the first door on the feeding device and the second feeding device are lifting doors.
[0012] Preferably, the two doors on both sides of the rotating device are lifting doors.
[0013] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0014] This invention features a rotating module within a rotating device, a telescopic module on the rotating module, and forks mounted on the telescopic module. These components enable the transfer of materials between feeding device one and feeding device two. The doors on feeding device one and feeding device two are arranged in opposite directions, allowing for double-fold turning stroke transmission. Materials move from a low-level cleanroom environment to a high-level cleanroom environment. The air shower modules at the top of feeding device one and feeding device two perform secondary air shower cleaning on the materials, preventing dust from entering the high-level cleanroom. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the structure of the utility model Figure 1 ;
[0016] Figure 2 This is a schematic diagram of the structure of the utility model Figure 2 ;
[0017] Figure 3 This is a partial structural schematic diagram of the rotating device of this utility model;
[0018] Figure 4 This is a partial structural schematic diagram of the present invention. Detailed Implementation
[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0020] Please see Figures 1 to 4This utility model provides an embodiment of an eccentrically rotating cross-environment transfer mechanism, comprising a feeding device 10, a rotating device 30, and a feeding device 20. The feeding device 10 is the inlet end, and the feeding device 20 is the outlet end. The rotating device 30 is connected to the feeding device 10 and the feeding device 20 on both sides, respectively. The internal cavities of the feeding device 10, the rotating device 30, and the feeding device 20 are interconnected. A rotating module 31 is provided inside the rotating device 30. The rotating module 31 is equipped with a telescopic module 32 and a fork 33 mounted on the telescopic module 32. The rotating module 31 drives the pushing module 32 and the fork 33 to rotate 180 degrees left and right. The telescopic module 32 can drive the fork 33 to extend into the inner cavity of the feeding device 10 or the feeding device 20. Both the feeding device 10 and the feeding device 20 are equipped with a door 1. After the door 1 is opened, a material cart (not shown) can enter the feeding device 10 or the feeding device 20.
[0021] In this embodiment, the feeding device 10 and the door 1 on the feeding device 20 are arranged in opposite directions. The two material carts enter the feeding device 10 and the feeding device 20 respectively. The material carts carry materials into the feeding device 10 and are first cleaned by the air shower module 2 set on the top of the feeding device 10. Then, the material is transferred to the feeding device 20 by the rotation module 31, the telescopic module 32 and the forks 33 and placed on the corresponding material cart. The air shower module 2 set on the top of the feeding device 20 cleans the material a second time. Finally, the door 1 on the feeding device 20 opens and the material cart carries the material into the high-grade cleanroom. This realizes double-fold turning stroke transmission and prevents dust on the surface of the material from entering the high-grade cleanroom.
[0022] The feeding device 10 and the feeding device 20 are equipped with guide wheel assemblies and lifting assemblies. The lifting assembly includes a lifting module 3 and two mounting plates 4 connected to the lifting module 3. The two mounting plates 4 are located on both sides of the inner cavity of the feeding device 10 or the feeding device 20. Each mounting plate 4 is equipped with two bearing members 5, which are located on the front and rear sides of the mounting plate 4 respectively. The feeding device 10 or the feeding device 20 is equipped with four bearing members 5. The four bearing members 5 are used to support the four corners of the material and cooperate with the lifting module 3 to raise it, so that the forks 33 can be driven to the bottom of the material to realize the picking or unloading action.
[0023] In this embodiment, a positioning component 40 is also provided in the feeding device 10 and the feeding device 20. After the material cart enters the feeding device 10 or the feeding device 20, the positioning component 40 can lock and fix the material cart to achieve the positioning effect of the material cart.
[0024] The mounting plate 4 is also equipped with a straightening component, which includes a push cylinder 6 and a push plate 7 connected to the push cylinder 6. The push cylinder 6 pushes inward and drives the push plate 7 to move towards the center. The push plate 7 straightens and aligns the stacked materials.
[0025] The rotating module 31 includes a rotating motor 8 and a turntable 9 that is linked to the rotating motor 8. The turntable 9 is rotatably connected to the mounting frame of the rotating device 30.
[0026] The guide wheel assembly includes a mounting plate 21 and guide wheels 12 rotatably connected to the mounting plate 21. The mounting plate 21 is located on both sides of the inner cavity of the feeding device 10 or the feeding device 20. When the material cart enters the feeding device 10 or the feeding device 20, the sides of the material cart abut against the guide wheels 12.
[0027] The rotating device 30 is provided with two doors 13 on both sides. The feeding device 10 or the feeding device 20 can be separated from the rotating device 30 by the corresponding door 13. After being separated, the feeding device 10 or the feeding device 20 can be cleaned by the corresponding air shower module 2. When it is necessary to transfer materials through the forks 33, the corresponding door 13 is opened.
[0028] In this embodiment, the storage door 1 on the feeding device 10 and the feeding device 20 is a lifting storage door.
[0029] In this embodiment, the two doors 13 on both sides of the rotating device 30 are lifting doors.
[0030] In this embodiment, the horizontal height of the first silo door 1 is higher than that of the second silo door 13, and a raised platform 50 is provided in front of the first feeding device 10. This technical solution can realize the transfer of materials at different heights.
[0031] Furthermore, it also includes an electrical control box 60 and an air shower box 70. The air shower box 70 is used to provide airflow to the two air shower modules 2 for blowing and cleaning. The electrical control box 60 is used to control the feeding device 10, the rotating device 30, the feeding device 20, and the air shower box 70.
[0032] The aforementioned material cart is an AGV (Automated Guided Vehicle). AGVs are small transport vehicles equipped with electromagnetic, optical, or other automatic guidance devices, capable of traveling along a prescribed guidance path, and possessing safety protection and various transfer functions. They improve the overall intelligence and automation of the equipment and reduce labor costs.
[0033] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.
Claims
1. An eccentrically rotating cross-environment transfer mechanism, comprising a feeding device one, a rotating device, and a feeding device two, characterized in that: The rotating device is connected to feeding device one and feeding device two on both sides, and the inner cavities of feeding device one, rotating device and feeding device two are interconnected. The rotating device is equipped with a rotating module, a telescopic module and a fork on the telescopic module. Both feeding device one and feeding device two are equipped with a door, and the doors on feeding device one and feeding device two are arranged in opposite directions. The top of feeding device one and feeding device two are equipped with an air shower module, which is used to blow and clean the material in the inner cavity of feeding device one or feeding device two.
2. The eccentrically rotating cross-environmental transfer mechanism according to claim 1, characterized in that: The feeding device 1 and feeding device 2 are equipped with guide wheel assemblies and lifting assemblies. The lifting assembly includes a lifting module and two mounting plates 1 connected to the lifting module. The two mounting plates 1 are located on both sides of the inner cavity of the feeding device 1 or feeding device 2. Each mounting plate 1 is equipped with two bearing members, which are located on the front and rear sides of the mounting plate 1 respectively.
3. The eccentrically rotating cross-environmental transfer mechanism according to claim 2, characterized in that: The mounting plate is also provided with a centering assembly, which includes a propulsion cylinder and a push plate connected to the propulsion cylinder, and the propulsion cylinder is pushed inward.
4. The eccentrically rotating cross-environmental transfer mechanism according to claim 1, characterized in that: The rotating module includes a rotating motor and a turntable linked to the rotating motor. The turntable is rotatably connected to the mounting frame of the rotating device.
5. The eccentrically rotating cross-environmental transfer mechanism according to claim 2, characterized in that: The guide wheel assembly includes a second mounting plate and guide wheels rotatably connected to the second mounting plate, wherein the second mounting plate is located on both sides of the inner cavity of the first feeding device or the second feeding device.
6. The eccentrically rotating cross-environmental transfer mechanism according to claim 1, characterized in that: The rotating device is provided with two bin doors on both sides, and the feeding device one or the feeding device two can be separated from the rotating device by the bin door two on the corresponding side.
7. The eccentrically rotating cross-environmental transfer mechanism according to claim 1, characterized in that: The first and second feeding devices have lifting doors.
8. The eccentrically rotating cross-environmental transfer mechanism according to claim 6, characterized in that: The two side doors of the rotating device are lifting doors.