Water cooling screen for single crystal growth furnace
By setting light trapping and turbulent flow structures on the inner wall of the water-cooling screen and designing a polishing layer and hollow flow channels on the outside, the problem of low heat transfer efficiency of the water-cooling screen was solved, the rapid cooling of the single crystal rods was achieved, the production efficiency was improved, and energy consumption was reduced.
Patent Information
- Application Number
- CN202422844663.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-21
- Publication Date
- 2025-10-28
- Estimated Expiration
- 2034-11-21
AI Technical Summary
The existing water-cooling screen has low heat transfer efficiency in the single crystal growth furnace, which affects the pulling speed and production efficiency of the single crystal rod and has high energy consumption.
A light-trapping structure is added to the inner wall of the water-cooling screen toward the outside of the single crystal rod, and an enhanced turbulence structure is added to the flow channel wall. At the same time, a polishing layer/reflective layer and a hollow flow channel structure are designed on the outside to improve heat transfer efficiency and reduce heat loss.
The cooling rate and production efficiency of the single crystal rod are improved, the energy consumption is reduced, and the production cost is reduced.
Smart Images
Figure CN223481339U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of single crystal material production equipment, specifically relating to a water-cooled screen for a single crystal growth furnace. Background Technology
[0002] A single crystal growth furnace is a device used to produce single crystal rods using the direct method. It generally includes a main unit, a heating power supply, and a control system. The main unit comprises a vertical frame, a water-cooled furnace body, and a crystal lifting and rotating mechanism. In the water-cooled furnace body, the raw material is melted at a high temperature. The melt is then slightly cooled to create a degree of supercooling. A single crystal (called a seed crystal), fixed to a seed crystal axis, is inserted into the surface of the melt. After the seed crystal fuses with the melt, it is slowly pulled upwards, and the crystal grows at the lower end of the seed crystal, eventually forming a single crystal rod. To improve the production efficiency of single crystal rods, the pulling speed can be increased by cooling the single crystal rod while maintaining its integrity.
[0003] In existing technologies, water-cooled screens need to enhance heat transfer to the internal single-crystal rods, rapidly removing the heat of condensation from the molten state to the single-crystal state of the raw materials, thereby accelerating the single-crystal rod pulling rate and improving single-furnace production efficiency. Therefore, current technological improvements mainly focus on the structural design of the water-cooled screen, reducing heat transfer resistance and enhancing the removal of condensation heat through structural design. Summary of the Invention
[0004] In view of the concerns in the prior art, this utility model aims to provide a water-cooled screen for a single crystal growth furnace. By adding a light-trapping structure to the outer side of the inner wall of the water-cooled screen facing the single crystal rod, and adding a turbulence-enhancing structure to the flow channel wall, the heat transfer efficiency is improved, thereby increasing the pulling speed and production efficiency. At the same time, the lower end and the outer side are designed with a cladding layer structure, and the bottom surface and the outermost layer are polished / reflective layers, thereby reducing the heat transfer between the screen and the heat exchanger, improving the protection effect on the melt, reducing energy consumption, and thus reducing production costs.
[0005] To achieve the above objectives, the embodiments of this utility model adopt the following technical solutions:
[0006] A water-cooled screen for a single crystal growth furnace, the water-cooled screen comprising: a liquid inlet 21, a liquid outlet 22, an inner wall 23, an outer wall 24, and an annular flow channel 25; the liquid inlet 21 and the liquid outlet 22 are respectively disposed at the upper end of the water-cooled screen 20, the liquid inlet 21 is connected to the bottommost flow channel of the annular flow channel 25, and the liquid outlet 22 is connected to the topmost flow channel of the annular flow channel 25;
[0007] The inner wall 24 has a light-trapping structure facing the outer surface 231 of the rod.
[0008] Preferably, the light-trapping structure is an arc-shaped vortex-like groove group or a semi-elliptical groove group.
[0009] Preferably, the inner wall 23 has an enhanced turbulence structure on its inner surface 232 facing the cavity.
[0010] Preferably, the enhanced turbulence structure is a zigzag groove, and / or an irregular right-angled groove, and / or an arc-shaped groove.
[0011] Preferably, the bottom plate 26 of the annular flow channel 25 is a thin-walled hollow structure, which includes an inner layer 261, an air gap 262, and an outer layer 263.
[0012] Preferably, the outer layer 263 and the inner layer 261 are sealed at the ends, so that the annular flow channel bottom plate 26 forms a separate hollow structure.
[0013] Preferably, the exposed side of the outer layer 263 further includes a polished layer / reflective layer 264, or the outer side of the outer layer 263 is directly designed as a polished layer / reflective layer 264.
[0014] Preferably, the exposed side of the outer wall 24 is a polished layer / reflective layer 241.
[0015] The technical solution provided by this utility model embodiment has the following beneficial effects:
[0016] The water-cooled screen for a single crystal growth furnace provided in this embodiment of the utility model includes: a liquid inlet 21, a liquid outlet 22, an inner wall 23, an outer wall 24, and an annular flow channel 25; the liquid inlet 21 and the liquid outlet 22 are respectively disposed at the upper end of the water-cooled screen 20, the liquid inlet 21 is connected to the bottommost flow channel of the annular flow channel 25, and the liquid outlet 22 is connected to the topmost flow channel of the annular flow channel 25. This invention utilizes a light-trapping structure on the outer surface 231 of the inner wall 23 of the water-cooled screen 20 facing the crystal rod to reduce the amount of heat radiated by the single crystal rod 40 returning to the single crystal rod 40 and the furnace body 10, allowing the single crystal rod 40 to cool down faster and improving pulling speed and production efficiency. Simultaneously, a turbulence structure is provided on the inner surface 232 of the inner wall 23 of the water-cooled screen 20 facing the cavity, improving heat exchange efficiency and further increasing the cooling rate of the single crystal rod. The exposed side of the outer wall 24 uses a polished / reflective layer 241, the annular flow channel base plate 26 is a hollow structure, and the exposed surface of the outer layer 263 is a polished / reflective layer 264, reducing heat exchange between the coolant and the heat shield 30, reducing heat loss from the melt 50, better protecting the melt 50, reducing the energy required to maintain the melt in a molten state, and lowering production costs.
[0017] Of course, implementing any product or method of this utility model does not necessarily require achieving all of the advantages described above at the same time. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 This is a schematic diagram of the structure of the water-cooled screen for a single crystal growth furnace as described in an embodiment of this utility model;
[0020] Figure 2 This is an embodiment of the present utility model. Figure 1 Enlarged view of part A;
[0021] Figure 3 This is a schematic diagram of the light trap structure 231 on the outer side of the single crystal rod with the inner wall facing the embodiment of this utility model;
[0022] Figure 4 This is a schematic diagram of the turbulent structure of the inner side 232 of the inner wall facing the cavity in an embodiment of this utility model.
[0023] Explanation of reference numerals in the attached figures:
[0024] 10-Single crystal furnace; 20-Water-cooled screen; 21-Liquid inlet; 22-Liquid outlet; 23-Inner wall; 231-Outer side of inner wall facing the single crystal rod; 232-Inner side of inner wall facing the cavity; 24-Outer wall; 241-Polished / reflective layer of outer wall; 25-Annular flow channel; 26-Annular flow channel base plate; 261-Inner layer of base plate; 262-Air barrier layer of base plate; 263-Outer layer of base plate; 264-Polished / reflective layer of base plate; 30-Heat shield; 40-Single crystal rod; 50-Melted material; 60-Cruise. Detailed Implementation
[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present utility model, and not all of them. The components of the embodiments of the present utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. It should be noted that, without conflict, the embodiments and features in the embodiments of the present utility model can also be combined with each other.
[0026] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. In the description of this utility model, the terms "first," "second," "third," "fourth," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0027] See attached Figure 1-4 This utility model embodiment provides a water-cooled screen for a single crystal growth furnace. The single crystal growth furnace includes a single crystal furnace body 10, a crucible 60, a heat screen 30, and a water-cooled screen 20. The crucible 60, the heat screen 30, and the water-cooled screen 20 are arranged sequentially from the outside to the inside of the furnace body, and all of them are rotating bodies. The bottom surface of the water-cooled screen is parallel to the bottom of the heat screen and maintains a predetermined distance.
[0028] The water-cooled screen 20 includes: an inlet 21, an outlet 22, an inner wall 23, an outer wall 24, and an annular flow channel 25. Coolant flows in through the inlet 21 and along the annular flow channel 25, exiting through the outlet 22. The inlet 21 and outlet 22 are respectively located at the upper end of the water-cooled screen 20. The inlet 21 is connected to the bottommost flow channel of the annular flow channel 25, and the outlet 22 is connected to the topmost flow channel of the annular flow channel 25, so that the water flowing in through the inlet 21 flows from bottom to top along the annular flow channel 25 and exits through the outlet 22.
[0029] like Figure 2 As shown, the inner wall 23 includes an outer surface 231 facing the single crystal rod and an inner surface 232 facing the cavity; the outer wall 24 includes a polished / reflective layer 241 on the exposed side; the bottom plate 26 at the lowest end of the annular flow channel 25 is a thin-walled hollow structure, which includes an inner layer 261, an air gap 262, and an outer layer 263. The inner layer 261 forms the inner surface of the annular flow channel, and the exposed side of the outer layer 263 also includes a polished / reflective layer 264, or the outer side of the outer layer 263 is directly designed as a polished / reflective layer 264; the outer layer 263 and the inner layer 261 are sealed at the ends, so that the bottom of the annular flow channel forms a separate hollow structure. The hollow structure forms an air gap 262. Through the inner layer 261, the air gap 262, and the outer layer 263, the cold energy of the coolant in the annular flow channel 25 can be better prevented from flowing to the outside, reducing heat exchange with the heat shield 30 and avoiding affecting the temperature of the melt 50. At the same time, the exposed layer of the outer layer 263 adopts a polished / reflective layer 264, which further reduces heat exchange with the heat shield 30 and increases the reflectivity of the heat radiation of the melt 50, so that the heat radiation of the melt 50 is reflected back to the melt itself, thereby reducing the heating power of the melt 50 and reducing production costs.
[0030] like Figure 3 As shown, the inner wall 23, facing the outer surface 231 of the single crystal rod, has a light-trapping structure. The light-trapping structure can be a group of arc-shaped vortex-like grooves or a group of semi-elliptical grooves. In this embodiment, an arc-shaped vortex-like groove is used as an example, but the light-trapping structure is not limited to arc-shaped vortex-like grooves.
[0031] like Figure 4As shown, the inner wall 23 facing the inner side 232 of the flow channel has a turbulence-enhancing structure. The turbulence-enhancing structure is a U-shaped groove, and / or an irregular right-angled groove, and / or an arc-shaped groove.
[0032] When the water-cooled screen is applied to a single crystal growth apparatus to produce single crystals, the single crystal rod 40 is arranged inside the single crystal furnace 10, and the water-cooled screen 20 uses the coolant flowing in the cavity to cool the single crystal rod 40. By using a light-trapping structure on the outer surface 231 of the inner wall 23 of the water-cooled screen 20 facing the crystal rod, less heat radiated by the single crystal rod 40 returns to the single crystal rod 40 and the furnace body 10, allowing the single crystal rod 40 to cool down faster and improving the pulling speed and production efficiency. At the same time, a turbulence structure is provided on the inner surface 232 of the inner wall 23 of the water-cooled screen 20 facing the cavity, which improves heat exchange efficiency and further increases the cooling rate of the single crystal rod. The exposed side of the outer wall 24 is equipped with a polished / reflective layer 241, the annular flow channel bottom plate 26 is set as a hollow structure, and the exposed surface of the outer layer 263 is set as a polished / reflective layer 264, which reduces the heat exchange between the coolant and the heat screen 30, reduces the heat loss of the melt 50 itself, better protects the melt 50, reduces the energy required for the melt to maintain a molten state, and reduces production costs.
[0033] The above description is merely a preferred embodiment of the present utility model and an explanation of the technical principles employed, and is not intended to limit the scope of the claimed utility model, but merely to illustrate preferred embodiments of the present utility model. Those skilled in the art should understand that the scope of the present utility model is not limited to the specific combination of the above-described technical features, but should also cover other technical solutions formed by any combination of the above-described technical features or their equivalents without departing from the inventive concept. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without inventive effort are within the scope of protection of the present utility model.
Claims
1. A water-cooled screen for a single crystal growth furnace, characterized in that, The water-cooled screen includes: an inlet (21), an outlet (22), an inner wall (23), an outer wall (24), and an annular flow channel (25); the inlet (21) and the outlet (22) are respectively located at the upper end of the water-cooled screen (20), the inlet (21) is connected to the bottommost flow channel of the annular flow channel (25), and the outlet (22) is connected to the topmost flow channel of the annular flow channel (25); The inner wall (23) has a light-trapping structure facing the outer side (231) of the rod.
2. The water-cooled screen for a single crystal growth furnace according to claim 1, characterized in that, The light-trapping structure is an arc-shaped vortex-like groove group or a semi-elliptical groove group.
3. The water-cooled screen for a single crystal growth furnace according to claim 1 or 2, characterized in that, The inner wall (23) has an enhanced turbulence structure on the inner side (232) facing the cavity.
4. The water-cooled screen for a single crystal growth furnace according to claim 3, characterized in that, The enhanced turbulence structure is a zigzag groove and / or an arc-shaped groove.
5. The water-cooled screen for a single crystal growth furnace according to claim 3, characterized in that, The bottom plate (26) of the annular flow channel (25) is a thin-walled hollow structure, which includes an inner layer (261), an air gap (262) and an outer layer (263).
6. The water-cooled screen for a single crystal growth furnace according to claim 5, characterized in that, The outer layer (263) and the inner layer (261) are sealed at the ends, so that the annular flow channel bottom plate (26) forms a separate hollow structure.
7. The water-cooled screen for a single crystal growth furnace according to claim 5, characterized in that, The exposed side of the outer layer (263) also includes a base plate polishing layer / reflective layer (264), or the outer side of the outer layer (263) is designed directly as a base plate polishing layer / reflective layer (264).
8. The water-cooled screen for a single crystal growth furnace according to claim 5, characterized in that, The exposed side of the outer wall (24) is an outer wall polishing layer / reflective layer (241).