Gas flow channel base and gas path system

Abstract

The utility model discloses a gas flow channel base and a gas path system, relates to the semiconductor processing equipment field, and the gas flow channel base comprises a base body provided with a flow channel, the base body comprises a first connecting part and a second connecting part, the base body is also provided with an accommodating groove, the first connecting part is used for connecting a first external connection structure, and the second connecting part is used for connecting a second external connection structure; the base is connected with the second connecting part; the base is provided with a containing groove, the first positioning piece and the base are integrally formed, the first positioning piece extends into the containing groove, and the first positioning piece is used for being connected with a second external connection structure. According to the gas flow channel base provided by the technical scheme of the utility model, the assembly precision can be ensured, the pin does not need to be manually driven, and the assembly is convenient.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a gas flow channel base and gas path system. Background Technology

[0002] IGS Integrated Gas Systems have been developed and used in the semiconductor industry abroad for over 20 years. They use modular components that are interconnected. The required gas circuits are built according to the gas circuit requirements, such as assembling sealing systems, valve bodies, flow controllers, filters, etc., to synthesize various gas circuit integrated systems with multiple possible combinations.

[0003] The flow channel block base is a key component in building the gas path system. However, currently, the assembly of the bases relies on manual positioning, which can easily lead to deviations in the assembly reference, affecting the assembly of the entire gas path system. Utility Model Content

[0004] The main purpose of this utility model is to provide a gas flow channel base, which aims to solve the technical problem that deviations are easily caused in the current base assembly.

[0005] To achieve the above objectives, the gas flow channel base proposed in this utility model includes:

[0006] The base body is provided with a flow channel. The base body includes a first connecting part and a second connecting part. The base body is also provided with a receiving groove. The first connecting part is used to connect a first external structure.

[0007] The base is connected to the second connecting part; and

[0008] The first positioning element is integrally formed with the base and extends into the receiving groove. The first positioning element is used to connect the second external structure.

[0009] In one embodiment, the second connecting portion has a second positioning hole, and the base is provided with a second positioning member, which is connected to the second positioning hole.

[0010] In one embodiment, the second positioning member has a plurality of protrusions, which are disposed on the outer peripheral wall of the second positioning member and spaced apart in the circumferential direction, and the protrusions are interference-fitted with the second positioning hole.

[0011] In one embodiment, the base is further provided with a boss, the second positioning member is disposed on the boss, and the boss is in contact with the second connecting part.

[0012] In one embodiment, the boss is provided with a sealing layer and is sealed to the surface of the second connecting portion.

[0013] In one embodiment, the base body is provided with a machining port, which is disposed facing the second connection portion and communicates with the flow channel. The gas flow channel base also includes a cover plate, which is used to seal the connection of the machining port.

[0014] In one embodiment, the base body has an inlet and an outlet, the inlet and the outlet being connected to the flow channel, and the inner diameter of the flow channel gradually increases or decreases from the outlet to the inlet.

[0015] In one embodiment, there are two second connecting portions, and the receiving groove is located between the two second connecting portions.

[0016] In one embodiment, the base body further includes a connecting groove, and the base is disposed in the connecting groove; and / or,

[0017] The first connecting part has a first positioning hole, and the first positioning hole is connected to the first external structure.

[0018] This utility model also proposes a gas path system, including the gas flow channel base as described above.

[0019] This utility model's technical solution employs a base body connected to a base, with a first positioning component mounted on the base. Specifically, the first connecting part of the base body is used to connect to a first external structure, and the second connecting part is connected to the base. The base is integrally formed with the first positioning component to connect to the second external structure. In this way, when the first positioning component connects to the external structure, the assembly reference will not be damaged. Compared with the existing method that requires manual pinning for positioning, the first positioning component in this technical solution can ensure the accuracy of the assembly reference. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0021] Figure 1 A schematic diagram of the structure of an embodiment of the gas flow channel base provided by this utility model;

[0022] Figure 2 An exploded structural diagram of an embodiment of the gas flow channel base provided by this utility model;

[0023] Figure 3 A schematic diagram of the structure of the base body in an embodiment of the gas flow channel base provided by this utility model;

[0024] Figure 4 A cross-sectional structural schematic diagram of an embodiment of the gas flow channel base provided by this utility model;

[0025] Figure 5 This is another cross-sectional view of an embodiment of the gas flow channel base provided by this utility model.

[0026] Explanation of icon numbers:

[0027] 100. Base body; 110. Flow channel; 111. Inlet; 112. Outlet; 120. First connecting part; 121. First positioning hole; 130. Second connecting part; 131. Second positioning hole; 140. Receiving groove; 150. Machining port; 151. Cover plate; 160. Connecting groove;

[0028] 200. Base; 210. Second positioning component; 211. Protrusion; 220. Boss;

[0029] 300. First positioning component.

[0030] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0032] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0033] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0034] In the existing technology, the flow channel block base is used as the main component to build the gas path system. However, when the bases are assembled together, they rely on manual assembly and positioning, which can easily lead to deviations in the assembly reference and affect the assembly of the entire gas path system.

[0035] This utility model proposes a gas flow channel base.

[0036] Please see Figures 1 to 5 In one embodiment of this utility model, the gas flow channel 110 base includes: a base body 100, a base 200, and a first positioning member 300. The base body 100 is provided with the flow channel 110, and the base body 100 includes a first connecting part 120 and a second connecting part 130. The base body 100 is also provided with a receiving groove 140. The first connecting part 120 is used to connect a first external structure. The base 200 is connected to the second connecting part 130. The first positioning member 300 is integrally formed with the base 200 and extends into the receiving groove 140. The first positioning member 300 is used to connect a second external structure.

[0037] In this embodiment, the base body 100 is made of 316L stainless steel or a high-nickel alloy. The stainless steel is from the 3-series, including ordinary 316L, high-purity 316L, and ultra-high-purity 316L. The high-nickel alloy includes alloy 22, alloy 276, and similar series, ensuring that the raw materials and their sealing performance meet the SEMI-F20 requirements. The base 200 and the first positioning component 300 are integrally molded with high precision using MIM metal injection molding, eliminating the need for CNC machine tool processing and ensuring accuracy. The first positioning component 300 corresponds to the pin in the gas flow channel 110 in the prior art, facilitating the fit between the gas flow channel 110 base proposed in this embodiment and the gas flow channel 110 base in the prior art, saving costs and not affecting product maintenance.

[0038] In practical implementation, a flow channel 110 is opened inside the base body 100 for gas circulation, connecting the gas passages between various mechanisms. The first connecting part 120 and the second connecting part 130 are located at opposite ends of the base body 100, facilitating the connection of the corresponding first and second external structures. A receiving groove 140 is provided at one end of the base body 100 near the second connecting part 130. The base 200 is connected to the second connecting part 130 and forms one side wall of the receiving groove 140. When the second external structure is connected to the first positioning member 300, part of the second external structure is located within the receiving groove 140. Specifically, one end of the first positioning member 300 is connected to the base 200, and the other end extends towards the receiving groove 140 and into it. It can be understood that the second external structure is provided with a connecting hole that mates with the first positioning member 300, and the connecting hole is inserted into the first positioning member 300. The first external structure and the second external structure can be two other gas flow channel 110 bases or other types of flow channel 110 bases, thereby enabling the connection of multiple flow channel 110 bases to assemble the entire gas path system.

[0039] Additionally, it should be noted that the base 200 and the base body 100 can be integrally formed, so as to ensure the positioning of the first positioning member 300 and improve the strength of the entire gas flow channel 110 base.

[0040] This utility model's technical solution employs a base body 100 connected to a base 200, with a first positioning element 300 disposed on the base 200. Specifically, the first connecting part 120 of the base body 100 is used to connect to a first external structure, and the second connecting part 130 is connected to the base 200. The base 200 integrally forms the first positioning element 300 to connect to a second external structure. In this way, when the first positioning element 300 connects to the external structure, the assembly reference will not be damaged. Compared with the existing method that requires manual pinning for positioning, the first positioning element 300 in this technical solution can ensure the accuracy of the assembly reference and is easy to assemble.

[0041] In one embodiment, the second connecting part 130 has a second positioning hole 131, and the base 200 is provided with a second positioning member 210, which is connected to the second positioning hole 131.

[0042] Specifically, the base 200 has a protruding second positioning member 210. Two second positioning members 210 are arranged side by side to restrict the degree of freedom of the base 200. The second positioning member 210 is interference-fitted with the second positioning hole 131 to ensure the stability of the connection of the base 200. It can be understood that two second positioning holes 131 are provided. The second positioning hole 131 is a reference hole in the horizontal direction during assembly and is engaged with the base 200. The surface of the second connecting part 130 contacts and connects with the base 200, restricting the vertical displacement of the base 200, thus serving as a reference for the vertical assembly of the base 200. In this way, the second connecting part 130 can be integrally machined on a CNC machine tool, ensuring that the reference is completed in one machining operation, improving accuracy.

[0043] Further, refer to Figure 2 As shown, the second positioning member 210 is provided with a plurality of protrusions 211. The protrusions 211 are provided on the outer peripheral wall of the second positioning member 210 and are spaced apart along the circumferential direction. The protrusions 211 are interference-fitted with the second positioning hole 131.

[0044] The sidewall of the second positioning member 210 forms multiple protrusions 211. In specific implementation, three protrusions 211 are provided, making the second positioning member 210 form a hexagonal structure. The protrusions 211 are interference-fitted with the inner wall of the second positioning hole 131. In this way, the second positioning member 210 and the second positioning hole 131 are tightly fitted by point contact, which can improve the strength and stability of the connection, thereby ensuring the true circularity of the second positioning hole 131 and improving assembly consistency.

[0045] In one embodiment, the base 200 is further provided with a boss 220, and a second positioning member 210 is provided on the boss 220. The boss 220 is in contact with the second connecting portion 130. The second positioning member 210 protrudes from the surface of the boss 220 and is connected to the second positioning hole 131. The surface of the boss 220 is in contact with the surface of the second connecting portion 130, serving as a reference for positioning the base 200 in the vertical direction.

[0046] In one embodiment, the boss 220 is provided with a sealing layer and is sealed to the surface of the second connecting portion 130.

[0047] Under extreme high and low temperature and pressure conditions, when the base 200 boss 220 and the second connecting part 130 are assembled, NMT nano-injection molding technology can be used to add a nano-coating to the boss 220 or apply HAF adhesive paper to the surface of the boss 220 and then process it in a furnace to form a sealing layer and improve the sealing performance of the assembly between the base 200 and the base body 100.

[0048] In one embodiment, the base body 100 is provided with a machining port 150, which is disposed toward the second connecting portion 130 and communicates with the flow channel 110. The gas flow channel 110 base also includes a cover plate 151, which is used to seal the connection of the machining port 150.

[0049] In the specific implementation process, in order to process the flow channel 110, a machining port 150 is opened in the base body 100 to facilitate the machining of the flow channel 110 by a CNC machine tool. After the flow channel 110 is machined, the machining port 150 is sealed by a cover plate 151 to ensure the sealing performance of the flow channel 110. Specifically, the cover plate 151 is welded to the base body 100 to ensure sealing performance.

[0050] In this embodiment, the machining port 150 is located at one end of the base body 100 where the second connecting part 130 is provided. This is beneficial for protecting the weld after welding and preventing damage to the weld during the transportation of parts, which would affect the sealing performance.

[0051] refer to Figure 4 and Figure 5 As shown, in one embodiment, the base body 100 has an inlet 111 and an outlet 112, which are respectively connected to the flow channel 110. The inner diameter of the flow channel 110 gradually increases or decreases from the outlet 112 to the inlet 111. The inlet 111 and outlet 112 are opened on the same side of the base, making the flow channel 110 a C-shaped flow channel 110. Specifically, the inner diameter of the flow channel 110 gradually increases or decreases from the outlet 112 to the inlet 111, causing the inner wall of the flow channel 110 to form a conical surface. The angle between the generatrix of the conical surface and the central axis is allowed to vary from -2 degrees to +2 degrees. Within this 4-degree tolerance range, the area and capacity of the flow channel 110 can be changed, thereby changing the gas flow rate. (Refer to...) Figure 5 As shown.

[0052] In one embodiment, two second connecting portions 130 are provided, and a receiving groove 140 is provided between the two second connecting portions 130. Specifically, the second connecting portion 130 is a connecting arm structure that extends away from the base body 100 and is used to cooperate with the first connecting portion 120 of another gas flow channel 110 base. When multiple gas flow channel 110 bases are assembled, they are assembled and connected in sequence, and the first connecting portion 120 of adjacent gas flow channel 110 bases cooperates with the second connecting portion 130.

[0053] In addition, unlike the prior art where the second connection part 130 is limited by space and thus affects machining, in this embodiment, the second connection part 130 is an open configuration with both sides serving as reference positions, which can shorten machining time and allow for the direct use of fly cutter surface technology to improve surface roughness.

[0054] In one embodiment, the base body 100 further includes a connecting groove 160, and the base 200 is disposed in the connecting groove 160. The connecting groove 160 is used to accommodate the base 200 so that the surface of the base 200 is flush with the base body 100, facilitating assembly. Additionally, the first connecting portion 120 has a first positioning hole 121, which connects to a first external structure. It is understood that the first external structure is equipped with a pin and connects to the first positioning hole 121 to achieve assembly.

[0055] This utility model also proposes a gas path system, which includes a gas flow channel base. The specific structure of the gas flow channel base is as described in the above embodiments. Since this gas path system adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here. The gas path system may include multiple gas flow channel bases, which are connected sequentially to form a whole to meet the gas path system design.

[0056] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the inventive concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A gas flow channel base, characterized in that, include: The base body is provided with a flow channel. The base body includes a first connecting part and a second connecting part. The base body is also provided with a receiving groove. The first connecting part is used to connect a first external structure. The base is connected to the second connecting part; and The first positioning element is integrally formed with the base and extends into the receiving groove. The first positioning element is used to connect the second external structure.

2. The gas flow channel base as described in claim 1, characterized in that, The second connecting part has a second positioning hole, and the base is provided with a second positioning component, which is connected to the second positioning hole.

3. The gas flow channel base as described in claim 2, characterized in that, The second positioning member has multiple protrusions, which are located on the outer peripheral wall of the second positioning member and spaced apart in the circumferential direction. The protrusions are interference-fitted with the second positioning hole.

4. The gas flow channel base as described in claim 2, characterized in that, The base is also provided with a boss, and the second positioning member is provided on the boss, and the boss is in contact with the second connecting part.

5. The gas flow channel base as described in claim 4, characterized in that, The boss is provided with a sealing layer and is sealed to the surface of the second connecting part.

6. The gas flow channel base as described in claim 1, characterized in that, The base body is provided with a machining port, which is positioned facing the second connection part and communicates with the flow channel. The gas flow channel base also includes a cover plate, which is used to seal the connection of the machining port.

7. The gas flow channel base as described in claim 1, characterized in that, The base body has an inlet and an outlet, which are respectively connected to the flow channel. The inner diameter of the flow channel gradually increases or decreases from the outlet to the inlet.

8. The gas flow channel base as described in claim 1, characterized in that, The second connecting part is provided in two parts, and the receiving groove is provided between the two second connecting parts.

9. The gas flow channel base as described in claim 1, characterized in that, The base body is further provided with a connecting groove, and the base is disposed in the connecting groove; and / or The first connecting part has a first positioning hole, and the first positioning hole is connected to the first external structure.

10. A gas path system, characterized in that, Includes the gas flow channel base as described in any one of claims 1-9.

Images