Mounting device and wafer detection system

Abstract

The utility model relates to a mounting device and a wafer detection system. The mounting device comprises a first mounting plate, a second mounting plate and a locking mechanism, and the second mounting plate is arranged on one side of the first mounting plate; the locking mechanism comprises a locking assembly, the locking assembly comprises a first locking piece and a locking sub-assembly, the first locking piece can be slidably connected with the side, away from the second mounting plate, of the first mounting plate in the first direction, and the locking sub-assembly is arranged on the side, facing the first mounting plate, of the second mounting plate and penetrates through the first mounting plate and the first locking piece. The first locking piece is provided with a first position and a second position relative to the locking sub-assembly; when the first locking piece is located at the first position, the first locking piece and the locking sub-assembly are locked, so that the first mounting plate and the second mounting plate are locked; when the first locking member is in the second position, the first locking member is separable from the locking subassembly. The mounting device can realize quick locking or unlocking of the first mounting plate and the second mounting plate.

Description

Technical Field

[0001] This application relates to the field of wafer inspection technology, specifically to an installation device and a wafer inspection system. Background Technology

[0002] In wafer inspection systems, the test machine is electrically connected to the test bench panel via hardware, enabling electrical connection between the test machine and the probe cards mounted on the test bench panel. To ensure the stability of this electrical connection, a stable mounting device is required to securely connect the test machine to the test bench panel. A common method is to screw the test machine onto the test bench panel, but this installation method is time-consuming, labor-intensive, and inconvenient for users to replace or repair the test machine. Utility Model Content

[0003] In view of this, this application provides an installation device and a wafer inspection system, wherein the installation device can quickly lock or unlock the first mounting plate and the second mounting plate.

[0004] This application provides an installation device, comprising: a first mounting plate, a second mounting plate, and a locking mechanism. The second mounting plate is disposed on one side of the first mounting plate. The locking mechanism includes a locking component, which includes a first locking member and a locking sub-component. The first locking member is slidably connected to the side of the first mounting plate opposite to the second mounting plate along a first direction. The locking sub-component is disposed on the side of the second mounting plate facing the first mounting plate and passes through the first mounting plate and the first locking member. The first locking member has a first position and a second position relative to the locking sub-component. When the first locking member is in the first position, the first locking member and the locking sub-component are locked together to lock the first mounting plate and the second mounting plate. When the first locking member is in the second position, the first locking member and the locking sub-component are separable.

[0005] Further, the first locking member has a sliding groove, the sliding groove including a first sub-groove and a second sub-groove that are bent and connected, both the first sub-groove and the second sub-groove penetrating a preset surface, and the second sub-groove also penetrating the surface of the first locking member facing the first mounting plate; the locking sub-assembly includes a connecting sub-assembly and a second locking member, the connecting sub-assembly being mounted on the second mounting plate, the second locking member being rotatably disposed on the side of the connecting sub-assembly facing the preset surface, and the second locking member passing through the sliding groove; when the first locking member is in a first position, the second locking member is located in the first sub-groove; when the first locking member is in a second position, the second locking member is located in the second sub-groove, the arrangement direction of the first position and the second position is parallel to the first direction, wherein the preset surface is the surface of the first locking member facing the connecting sub-assembly.

[0006] Furthermore, the locking mechanism also includes a driving component and a connecting rod. The driving component, the connecting rod, and the first locking component are arranged sequentially along a first direction. The driving component is rotatably connected to the first mounting plate, and the two ends of the connecting rod are rotatably connected to the driving component and the first locking component, respectively. When the driving component rotates relative to the first mounting plate, it drives the connecting rod to move the first locking component along the first direction, thereby causing the first locking component to move relative to the second locking component between a first position and a second position, thereby realizing the locking and unlocking between the first mounting plate and the second mounting plate.

[0007] Furthermore, the number of locking components is two sets, and the two sets of locking components are spaced apart along the second direction. The locking mechanism also includes a linkage component, which is disposed on the side of the first mounting plate opposite to the second mounting plate, and the opposite ends of the linkage component are rotatably connected to the first locking members of the two locking components. When the driving component drives the first locking member of one of the two sets of locking components to move along the first direction, the linkage component drives the first locking member of the other of the two sets of locking components to move in the opposite direction of the first direction, wherein the first direction intersects the second direction.

[0008] Further, the linkage assembly includes a first linkage rod, a first rotating member, a second linkage rod, a second rotating member, and a third linkage rod connected in sequence. Along a first direction, the driving member and the first rotating member are arranged in sequence, and the first rotating member is rotatably connected to the first mounting plate. Along a second direction, the first rotating member and the second rotating member are arranged in sequence, and the second rotating member is rotatably connected to the first mounting plate. The opposite ends of the first linkage rod are respectively rotatably connected to the first locking member and the first rotating member of one of the two sets of locking assemblies. The opposite ends of the second linkage rod are respectively rotatably connected to the first rotating member and the second rotating member. The opposite ends of the third linkage rod are respectively rotatably connected to the second rotating member and the first locking member of the other of the two sets of locking assemblies.

[0009] Furthermore, the first mounting plate has a first positioning hole and a second positioning hole spaced apart; the locking mechanism further includes a third locking member, which is movably disposed on the driving member. When the first locking member is in a first position, the third locking member passes through the first positioning hole to limit the first locking member to the first position; when the first locking member is in a second position, the third locking member passes through the second positioning hole to limit the first locking member to the second position.

[0010] Further, the connecting sub-assembly includes a first connector, a second connector, and an adjusting member. The first connector is disposed on the side of the second mounting plate facing the first mounting plate. The second connector is disposed on the side of the first connector facing the preset surface and is movable relative to the first connector along a third direction. The adjusting member is used to fix the relative position of the second connector and the first connector. There are multiple second locking members, which are rotatably disposed on the side of the second connector facing the preset surface. The third direction intersects the first direction, and the third direction is the arrangement direction of the first mounting plate and the second mounting plate.

[0011] Furthermore, the second connector has an adjustment hole, the width of which along a third direction is greater than the width along a direction perpendicular to the third direction. The first connector has a through hole, the orthographic projection of which onto the surface of the second connector facing the first connector falls into the adjustment hole. The adjustment member is sequentially inserted through the adjustment hole and the through hole to fix the relative position of the second connector and the first connector.

[0012] Furthermore, the locking mechanism also includes a guide assembly disposed between the first locking member and the first mounting plate. The guide assembly includes a first guide member and a second guide member. The first guide member is connected to the first mounting plate and extends along a first direction. The second guide member is connected to the first locking member and is slidably connected to the first guide member. The first guide member and the second guide member cooperate to provide guidance for the movement of the first locking member in the first direction.

[0013] This application also provides a wafer inspection system, which includes: a mounting device, a sample stage, a probe card, a test stage panel, and a tester, as provided in this application. The test stage panel is disposed on one side of the sample stage, and a second mounting plate is fixedly disposed on the test stage panel. The test stage panel is used to support the probe card. The tester is disposed on the side of the test stage panel away from the sample stage, and the first mounting plate is mounted on the outer periphery of the tester. The tester is used to electrically connect with the probe card. The mounting device is used to fix the tester to one side of the test stage panel.

[0014] In this application, the locking sub-assembly passes through the first mounting plate and the first locking member. The relative position of the locking sub-assembly with the first mounting plate and the second mounting plate is fixed. When the first locking member moves relative to the first mounting plate along a first direction, the relative position of the first locking member and the locking sub-assembly changes, thereby realizing the switching of the first locking member between the first position and the second position. Specifically, when the first locking member is in the first position, the first locking member and the portion of the locking sub-assembly passing through the first locking member are locked together. At this time, the relative position of the first locking member and the locking sub-assembly is limited, thereby fixing the relative position of the first mounting plate and the second mounting plate. When the first locking member is in the second position, the portion of the first locking member and the portion of the locking sub-assembly passing through the first locking member can be separated, realizing the unlocking between the first mounting plate and the second mounting plate. In this application, locking or unlocking between the first mounting plate and the second mounting plate can be achieved by sliding the first locking member relative to the first mounting plate along the first direction. The method of locking and unlocking the first mounting plate and the second mounting plate by the mounting device is simple and efficient. When the mounting device is applied to the wafer inspection system, the first mounting plate is mounted on the outer periphery of the tester, and the second mounting plate is mounted on the test bench panel. By locking or unlocking the first mounting plate and the second mounting plate, the tester and the test bench panel can be locked and unlocked. The mounting device simplifies the installation procedure of the tester and the test bench panel, and facilitates the disassembly of the tester and the test bench panel, making it convenient for users to replace or repair the tester. The mounting device has good performance. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the implementation will be briefly introduced below. Obviously, the drawings described below are some implementations of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of a wafer inspection system according to an embodiment of this application;

[0017] Figure 2 This is an exploded structural diagram of a wafer inspection system according to an embodiment of this application;

[0018] Figure 3 This is a schematic diagram of the installation device according to an embodiment of this application;

[0019] Figure 4 This is an exploded structural diagram of an installation device according to an embodiment of this application;

[0020] Figure 5 This is an exploded structural diagram of an installation device according to another embodiment of this application;

[0021] Figure 6 for Figure 5 Enlarged view of the dashed box A in the middle;

[0022] Figure 7 This is a top view of an installation device according to an embodiment of this application;

[0023] Figure 8 for Figure 7 Cross-sectional view along the BB direction;

[0024] Figure 9 This is a partial structural schematic diagram of an installation device according to an embodiment of this application;

[0025] Figure 10 for Figure 5 Enlarged view of the dashed box in the middle (C);

[0026] Figure 11 This is a partial top view of the installation device according to an embodiment of this application;

[0027] Figure 12 for Figure 11 A cross-sectional view along the DD direction;

[0028] Figure 13 This is a schematic diagram of the structure of a locking sub-component according to an embodiment of this application.

[0029] Explanation of reference numerals in the attached figures:

[0030] 100 - Mounting device, 110 - First mounting plate, 111 - First positioning hole, 112 - Second positioning hole, 113 - First end, 114 - Second end, 115 - Third end, 116 - Fourth end, 120 - Second mounting plate, 130 - Locking mechanism, 131 - Locking assembly, 132 - First locking element, 1321 - Slide groove, 1322 - First sub-groove, 1323 - Second sub-groove, 1324 - Preset surface, 133 - Locking sub-assembly, 134 - Connecting sub-assembly, 1341 - First connecting element, 1342 - Second connecting element, 1343 - Adjusting element, 1344 - Adjusting hole, 1345 - Through hole, 135- Second locking element, 136- Driving element, 1361- First rotating shaft, 137- Connecting rod, 138- Linkage assembly, 1381- First linkage rod, 1382- First rotating element, 1383- Second linkage rod, 1384- Second rotating element, 1385- Third linkage rod, 1386- Second rotating shaft, 1387- Third rotating shaft, 139- Third locking element, 141- Guide assembly, 1411- First guide element, 1412- Second guide element, 200- Wafer inspection system, 210- Sample stage, 220- Probe card, 230- Test stage panel, 240- Test machine. Detailed Implementation

[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0032] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0033] In this document, references to "embodiment" or "implementation" mean that a particular feature, structure, or characteristic described in connection with an embodiment or implementation may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0034] In wafer inspection systems, the test machine is electrically connected to the test bench panel via hardware, enabling electrical connection between the test machine and the probe cards mounted on the test bench panel. To ensure the stability of this electrical connection, a stable mounting device is required to securely connect the test machine to the test bench panel. A common method is to screw the test machine onto the test bench panel, but this installation method is time-consuming, labor-intensive, and inconvenient for users to replace or repair the test machine.

[0035] See Figures 1 to 3 This application also provides a wafer inspection system 200, which includes: a mounting device 100, a sample stage 210, a probe card 220, a test stage panel 230, and a tester 240. The test stage panel 230 is disposed on one side of the sample stage 210, and a second mounting plate 120 is fixedly disposed on the test stage panel 230. The test stage panel 230 is used to support the probe card 220. The tester 240 is disposed on the side of the test stage panel 230 away from the sample stage 210, and a first mounting plate 110 is mounted on the outer periphery of the tester 240. The tester 240 is used to electrically connect with the probe card 220. The mounting device 100 is used to fix the tester 240 to one side of the test stage panel 230.

[0036] Understandably, the testing machine 240, the probe card 220, and the sample stage 210 are arranged sequentially along the arrangement direction of the first mounting plate 110 and the second mounting plate 120.

[0037] In this embodiment, the mounting device 100 is used to fix the test machine 240 to one side of the test stage panel 230. Specifically, the first mounting plate 110 of the mounting device 100 is mounted on the outer periphery of the test machine 240, and the second mounting plate 120 of the mounting device 100 is fixedly mounted on the test stage panel 230. When the first locking member 132 in the locking mechanism 130 is in the first position, the first locking member 132 and the locking sub-assembly 133 are in a locked state to lock the first mounting plate 110 and the second mounting plate 120, thereby locking the test machine 240 and the test stage panel 230, and enabling the test machine 240 to be stably electrically connected to the probe card 220 disposed on the test stage panel 230, so that the probe card 220 can contact the sample to be tested and effectively test the sample to be tested, thereby improving the testing performance of the wafer inspection system 200 on the sample to be tested. When the first locking member 132 in the locking mechanism 130 is in the second position, the first locking member 132 can be separated from the locking sub-assembly 133, and the first mounting plate 110 and the second mounting plate 120 can be separated, thereby realizing the separation of the test machine 240 from the test bench panel 230. In this embodiment, the mounting device 100 can lock or unlock the first mounting plate 110 and the second mounting plate 120 by sliding the first locking member 132 relative to the first mounting plate 110 in a first direction. This locking and unlocking method is simple and efficient, simplifies the installation procedure of the test machine 240 and the test bench panel 230, and facilitates the disassembly of the test machine 240 and the test bench panel 230, making it easier for users to replace or repair the test machine 240, thus giving the wafer inspection system 200 better performance.

[0038] See Figure 3 and Figure 4 This application provides an installation device 100, which includes: a first mounting plate 110, a second mounting plate 120, and a locking mechanism 130. The second mounting plate 120 is disposed on one side of the first mounting plate 110. The locking mechanism 130 includes a locking component 131, which includes a first locking member 132 and a locking sub-component 133. The first locking member 132 is movable along a first direction (e.g., ...). Figure 3(As shown in the X direction) The first mounting plate 110 is slidably connected to the side of the second mounting plate 120 opposite to the second mounting plate 120. The locking sub-assembly 133 is disposed on the side of the second mounting plate 120 facing the first mounting plate 110 and passes through the first mounting plate 110 and the first locking member 132. The first locking member 132 has a first position and a second position relative to the locking sub-assembly 133. When the first locking member 132 is in the first position, the first locking member 132 is locked with the locking sub-assembly 133 to lock the first mounting plate 110 and the second mounting plate 120. When the first locking member 132 is in the second position, the first locking member 132 and the locking sub-assembly 133 can be separated.

[0039] Understandably, the first mounting plate 110 and the second mounting plate 120 are stacked.

[0040] Understandably, the first locking element 132 is disposed adjacent to the locking sub-assembly 133.

[0041] In this embodiment, the locking sub-assembly 133 passes through the first mounting plate 110 and the first locking member 132. The relative position of the locking sub-assembly 133 with the first mounting plate 110 and the second mounting plate 120 is fixed. When the first locking member 132 moves relative to the first mounting plate 110 along a first direction, the relative position of the first locking member 132 and the locking sub-assembly 133 changes, thereby realizing the switching of the first locking member 132 between the first position and the second position. Specifically, when the first locking member 132 is in the first position, the first locking member 132 and the locking sub-assembly 133 partially lock together. At this time, the relative position of the first locking member 132 and the locking sub-assembly 133 is limited, thereby fixing the relative position of the first mounting plate 110 and the second mounting plate 120. When the first locking member 132 is in the second position, the portion of the first locking member 132 that is inserted into the locking sub-assembly 133 can be separated from the portion of the first locking member 132, thereby unlocking the first mounting plate 110 and the second mounting plate 120. In this embodiment, locking or unlocking the first mounting plate 110 and the second mounting plate 120 can be achieved by sliding the first locking member 132 relative to the first mounting plate 110 along a first direction. The mounting device 100 provides a simple and efficient method for locking and unlocking the first mounting plate 110 and the second mounting plate 120. When the mounting device 100 is applied to the wafer inspection system 200, the first mounting plate 110 is mounted on the outer periphery of the test machine 240, and the second mounting plate 120 is mounted on the test bench panel 230. By locking or unlocking the first mounting plate 110 and the second mounting plate 120, the test machine 240 and the test bench panel 230 can be locked and unlocked. The mounting device 100 simplifies the installation procedure of the test machine 240 and the test bench panel 230, and facilitates the disassembly of the test machine 240 and the test bench panel 230, making it easier for users to replace or repair the test machine 240. The mounting device 100 has good performance.

[0042] See Figures 5 to 8In some embodiments, the first locking member 132 has a groove 1321, the groove 1321 including a first sub-groove 1322 and a second sub-groove 1323 bent and connected, both the first sub-groove 1322 and the second sub-groove 1323 penetrating a preset surface 1324, the second sub-groove 1323 also penetrating the surface of the first locking member 132 facing the first mounting plate 110; the locking sub-assembly 133 includes a connecting sub-assembly 134 and a second locking member 135, the connecting sub-assembly 134 being mounted on the second mounting plate 120, and the second locking member 135 being rotatably mounted. The second locking member 135 is disposed on the side of the connecting sub-assembly 134 facing the preset surface 1324, and passes through the slide groove 1321; when the first locking member 132 is in the first position, the second locking member 135 is located in the first sub-groove 1322; when the first locking member 132 is in the second position, the second locking member 135 is located in the second sub-groove 1323, and the arrangement direction of the first position and the second position is parallel to the first direction, wherein the preset surface 1324 is the surface of the first locking member 132 facing the connecting sub-assembly 134.

[0043] Understandably, the first sub-slot 1322 extends along the first direction, and the extension direction of the second sub-slot 1323 is parallel to the arrangement direction of the first mounting plate 110 and the second mounting plate 120.

[0044] Understandably, the second locking member 135 is rotatably disposed on the side of the connecting sub-assembly 134 facing the preset surface 1324, and the second locking member 135 passes through the slide groove 1321. It can be that the second locking member 135 is rotatably disposed in the slide groove 1321.

[0045] Understandably, the preset surface 1324 is positioned toward the center of the first mounting plate 110.

[0046] Understandably, the first locking member 132 is positioned closer to the outer periphery of the first mounting plate 110 than the locking sub-assembly 133.

[0047] In this embodiment, the second locking member 135 is rotatably disposed in the slide groove 1321. When the first locking member 132 moves relative to the first mounting plate 110, the first locking member 132 moves relative to the second locking member 135 along a first direction, thereby changing the relative position of the second locking member 135 in the slide groove 1321. The rotatability of the second locking member 135 relative to the slide groove 1321 reduces the resistance to the movement of the second locking member 135 relative to the slide groove 1321 when the first locking member 132 moves relative to the second locking member 135, thus improving the smoothness of the first locking member 132 switching between the first and second positions and increasing the efficiency of the locking mechanism 130 in locking or unlocking the first mounting plate 110 and the second mounting plate 120. In this embodiment, the arrangement direction of the first and second positions is parallel to the first direction. Therefore, when the first locking member 132 moves relative to the first mounting plate 110 along the first direction, the first locking member 132 can switch between the first and second positions. When the first locking member 132 is in the first position, the second locking member 135 is located in the first sub-slot 1322. Specifically, the second locking member 135 is located at the end of the first sub-slot 1322 away from the second sub-slot 1323, so that the second locking member 135 is securely disposed in the first sub-slot 1322 of the first locking member 132. The first locking member 132 and the second locking member 135 are in a locked state, thereby locking the first mounting plate 110 and the second mounting plate 120. When the first locking member 132 is in the second position, the second locking member 135 is located in the second sub-slot 1323. Specifically, the second locking member 135 is located at the end of the second sub-slot 1323 near the first sub-slot 1322. Furthermore, the second sub-groove 1323 penetrates the surface of the first locking member 132 facing the first mounting plate 110, allowing the second locking member 135 to disengage from the end of the second sub-groove 1323 away from the first sub-groove 1322. That is, the first locking member 132 and the second locking member 135 are in a separable state, thereby unlocking the first mounting plate 110 and the second mounting plate 120. The first locking member 132 and the second locking member 135 cooperate; by moving the first locking member 132, the position of the second locking member 135 within the groove 1321 of the first locking member 132 changes, thereby achieving the locking and unlocking of the first mounting plate 110 and the second mounting plate 120. The locking and unlocking method provided in this embodiment is simple and efficient, and the mounting device 100 has good performance.

[0048] Optionally, in some embodiments, the second locking member 135 is a rotating wheel.

[0049] See Figure 9 In some embodiments, the locking mechanism 130 further includes a driving member 136 and a connecting rod 137. The driving member 136, the connecting rod 137, and the first locking member 132 are arranged sequentially along a first direction. The driving member 136 is rotatably connected to the first mounting plate 110, and the two ends of the connecting rod 137 are respectively rotatably connected to the driving member 136 and the first locking member 132. When the driving member 136 rotates relative to the first mounting plate 110, it drives the connecting rod 137 to move the first locking member 132 along the first direction, thereby causing the first locking member 132 to move relative to the second locking member 135 between a first position and a second position, thereby realizing the locking and unlocking between the first mounting plate 110 and the second mounting plate 120.

[0050] Understandably, the two ends of the connecting rod 137 are rotatably connected to the driving member 136 and the first locking member 132, respectively. When the driving member 136 rotates relative to the first mounting plate 110, the moving direction of the connecting rod 137 has a certain angle with the first direction, thereby driving the first locking member 132 to move relative to the first mounting plate 110 along the first direction.

[0051] In this embodiment, the driving member 136, the connecting rod 137, and the first locking member 132 are all disposed on the first mounting plate 110 and arranged sequentially along the first direction. When a user rotates the driving member 136 and rotates it relative to the first mounting plate 110, the driving member 136 drives the connecting rod 137 to move. During this process, the opposite ends of the connecting rod 137 are rotatably connected to the driving member 136 and the first locking member 132, respectively, so that the first locking member 132 moves relative to the first mounting plate 110 along the first direction under the drive of the connecting rod 137. This causes the first locking member 132 to move relative to the second locking member 135 at a first position and a second position, thereby adjusting the relative position of the first locking member 132 and the second locking member 135, thereby realizing the locking and unlocking between the first mounting plate 110 and the second mounting plate 120.

[0052] Optionally, the drive member 136 has a first rotating shaft 1361, which passes through the drive member 136 and the first mounting plate 110, and the drive member 136 is rotatably connected to the first mounting plate 110 relative to the first rotating shaft 1361.

[0053] Understandably, the first rotating shaft 1361 is a rotating bearing.

[0054] Optionally, the connecting rod 137 includes a first joint bearing, a first connecting part, and a second joint bearing connected in sequence. One end of the first joint bearing is disposed on the driving member 136, and one end of the second joint bearing is disposed on the first locking member 132. The opposite ends of the first connecting part can be threadedly connected to the first joint bearing and the second joint bearing, so as to adjust the distance between the first joint bearing and the second joint bearing according to the distance between the driving member 136 and the first locking member 132.

[0055] Optionally, the first joint bearing is a spherical sliding bearing to realize the rotational connection between the first connecting part and the driving member 136; the second joint bearing is a spherical sliding bearing to realize the rotational connection between the first connecting part and the first locking member 132.

[0056] See Figure 5 and Figure 9 In some embodiments, the number of locking components 131 is two sets, and the two sets of locking components 131 are along a second direction (e.g., Figure 5 (As shown in the Y direction) The locking mechanism 130 is further provided with a linkage component 138. The linkage component 138 is disposed on the side of the first mounting plate 110 away from the second mounting plate 120, and the two opposite ends of the linkage component 138 are respectively rotatably connected to the first locking members 132 of the two locking components 131. When the driving member 136 drives the first locking member 132 of one of the two sets of locking components 131 to move along the first direction, the linkage component 138 drives the first locking member 132 of the other set of locking components 131 to move in the opposite direction of the first direction, wherein the first direction intersects the second direction.

[0057] Optionally, in some embodiments, the first direction is perpendicular to the second direction.

[0058] In this embodiment, one of the two sets of locking components 131, the linkage component 138, and the other of the two sets of locking components 131 are arranged around the outer periphery of the first mounting plate 110 in a "C" shape.

[0059] In this embodiment, the two sets of locking components 131 are spaced apart along the second direction. When the mounting device 100 is installed in the wafer inspection system 200, the first mounting plate 110 is installed on the outer periphery of the test machine 240, and the two sets of locking components 131 are installed on opposite sides of the test machine 240. In other words, one of the two sets of locking components 131, the linkage component 138, and the other of the two sets of locking components 131 are arranged around the outer periphery of the test machine 240. The two sets of locking components 131 cooperate with each other to lock and unlock the first mounting plate 110 and the second mounting plate 120, thereby improving the stability of the locking mechanism 130 in fixing the relative positions of the first mounting plate 110 and the second mounting plate 120. In this embodiment, the locking mechanism 130 further includes a linkage component 138. In the mounting device 100, the driving member 136, the connecting rod 137, one of the two sets of locking components 131, the linkage component 138, and the two sets of locking components 131 are arranged sequentially. When the driving member 136 rotates, it drives the connecting rod 137 and the first locking member 132 of one of the two sets of locking components 131 to move relative to the first mounting plate 110 along the first direction. The two ends of the linkage component 138 are rotatably connected to the first locking members 132 of the two sets of locking components 131, so the linkage component 138 will drive the first locking member 132 of the other set of locking components 131 to move in the opposite direction of the first direction. The mounting device 100 in this embodiment is provided with two sets of locking components 131 and linkage components 138. By driving the driving component 136, the user can simultaneously achieve the first locking component 132 of the two sets of locking components 131 in the first position or in the second position with the cooperation of the linkage components 138. This improves the stability of fixing the relative position of the first mounting plate 110 and the second mounting plate 120, while facilitating the user to unlock or lock the first mounting plate 110 and the second mounting plate 120, improving the efficiency of unlocking or locking the first mounting plate 110 and the second mounting plate 120, and further improving the performance of the mounting device 100.

[0060] Specifically, when the first locking member 132 of one of the two sets of locking components 131 moves toward the drive member 136 along the first direction, the first locking member 132 of the other set of locking components 131 moves away from the drive member 136 along the first direction; when the first locking member 132 of one of the two sets of locking components 131 moves away from the drive member 136 along the first direction, the first locking member 132 of the other set of locking components 131 moves toward the drive member 136 along the first direction.

[0061] In some embodiments, the linkage assembly 138 includes a first linkage rod 1381, a first rotating member 1382, a second linkage rod 1383, a second rotating member 1384, and a third linkage rod 1385 connected in sequence. Along a first direction, the driving member 136 and the first rotating member 1382 are arranged in sequence, and the first rotating member 1382 is rotatably connected to the first mounting plate 110. Along a second direction, the first rotating member 1382 and the second rotating member 1384 are arranged in sequence, and the second rotating member 1384 is rotatably connected to the first mounting plate 110. The opposite ends of the first linkage rod 1381 are rotatably connected to the first locking member 132 and the first rotating member 1382 of one of the two sets of locking assemblies 131, respectively. The opposite ends of the second linkage rod 1383 are rotatably connected to the first rotating member 1382 and the second rotating member 1384, respectively. The opposite ends of the third linkage rod 1385 are rotatably connected to the second rotating member 1384 and the first locking member 132 of the other set of locking assemblies 131, respectively.

[0062] Understandably, the driving component 136, the connecting rod 137, one of the two sets of locking components 131, the first linkage rod 1381, the first rotating component 1382, the second linkage rod 1383, the second rotating component 1384, the third linkage rod 1385, and the other of the two sets of locking components 131 are arranged around the outer periphery of the first mounting plate 110 and are configured in a "C" shape.

[0063] Understandably, the two ends of the first linkage rod 1381 are rotatably connected to the first locking member 132 and the first rotating member 1382 of one of the two sets of locking components 131, respectively. When the first locking member 132 moves along the first direction and drives the first linkage rod 1381 to move, the moving direction of the first linkage rod 1381 has a certain angle with the first direction, thereby driving the first rotating member 1382 to rotate.

[0064] Understandably, the two ends of the second linkage rod 1383 are rotatably connected to the first rotating component 1382 and the second rotating component 1384, respectively. During the rotation of the first rotating component 1382, the moving direction of the second linkage rod 1383 has a certain angle with the second direction, thereby driving the second rotating component 1384 to rotate.

[0065] Understandably, the two ends of the second linkage rod 1383 are rotatably connected to the second rotating member 1384 and the first locking member 132 of the other of the two sets of locking components 131, respectively. During the rotation of the second rotating member 1384, the moving direction of the second linkage rod 1383 has a certain angle with the first direction, thereby driving the first locking member 132 of the other of the two sets of locking components 131 to move along the first direction.

[0066] In the installation device 100 provided in this embodiment, the driving member 136, the connecting rod 137, one of the two sets of locking components 131, the first linkage rod 1381, the first rotating member 1382, the second linkage rod 1383, the second rotating member 1384, the third linkage rod 1385, and the two sets of locking components 131 are arranged sequentially. When the driving member 136 rotates, it drives the connecting rod 137 and the first locking member 132 of one of the two sets of locking components 131 to move relative to the first mounting plate 110 in a first direction. The first linkage rod 1381 moves and the first rotating member 1382 rotates relative to the first mounting plate 110, thereby moving the second linkage rod 1383 and pulling the second rotating member 1384 to rotate relative to the first mounting plate 110. Furthermore, the third linkage rod 1385 moves relative to the first mounting plate 110 in the opposite direction of the first direction under the action of the second rotating member 1384, thereby moving the first locking member 132 of the other one of the two sets of locking components 131 in the opposite direction of the first direction. The mounting device 100 in this embodiment is provided with two sets of locking components 131 and linkage components 138. By driving the driving member 136, the user can achieve the first locking member 132 of the two sets of locking components 131 being simultaneously in the first position or simultaneously in the second position with the cooperation of the first linkage rod 1381, the first rotating member 1382, the second linkage rod 1383, the second rotating member 1384, and the third linkage rod 1385. This improves the stability of fixing the relative position of the first mounting plate 110 and the second mounting plate 120, while facilitating the user to unlock or lock the first mounting plate 110 and the second mounting plate 120, improving the efficiency of unlocking or locking the first mounting plate 110 and the second mounting plate 120, and further improving the performance of the mounting device 100.

[0067] Optionally, the first rotating member 1382 has a second rotating shaft 1386, which passes through the first rotating member 1382 and the first mounting plate 110. The first rotating member 1382 is rotatably connected to the first mounting plate 110 relative to the second rotating shaft 1386.

[0068] Understandably, the second rotating shaft 1386 is a rotating bearing.

[0069] Optionally, the second rotating member 1384 has a third rotating shaft 1387, which passes through the second rotating member 1384 and the first mounting plate 110, and the second rotating member 1384 is rotatably connected to the first mounting plate 110 relative to the third rotating shaft 1387.

[0070] Understandably, the third rotating shaft 1387 is a rotating bearing.

[0071] Optionally, the first rotating shaft 1361, the second rotating shaft 1386, and the third rotating shaft 1387 are spaced apart and together form a triangular region. In other words, the shape formed by the first rotating shaft 1361, the second rotating shaft 1386, and the third rotating shaft 1387 connected in sequence is a triangle.

[0072] In this embodiment, the first rotating shaft 1361, the second rotating shaft 1386, and the third rotating shaft 1387 together form a triangular region. This allows the first rotating component 1382 to rotate relative to the second rotating shaft 1386, and the second rotating component 1384 to rotate relative to the third rotating shaft 1387, all under the cooperation of the connecting rod 137, the first linkage rod 1381, the second linkage component 1384 to rotate relative to the third rotating shaft 1387, and the efficiency of simultaneously locking and unlocking the two sets of locking components 131 to be improved, further enhancing the performance of the mounting device 100.

[0073] Understandably, the first mounting plate 110 has a first end 113, a second end 114, a third end 115, and a fourth end 116 arranged sequentially around the first mounting plate 110. The first end 113 and the second end 114 are arranged sequentially along a first direction, the fourth end 116 and the third end 115 are arranged sequentially along the first direction, and the second end 114 and the third end 115 are arranged sequentially along a second direction. The driving member 136 is located at the first end 113, the first rotating member 1382 is located at the second end 114, one of the two sets of locking components 131 is located between the first end 113 and the second end 114, the second rotating member 1384 is located at the third end 115, and the other of the two sets of locking components 131 is located between the third end 115 and the fourth end 116.

[0074] Optionally, the first linkage rod 1381 includes a third joint bearing, a first linkage part, and a fourth joint bearing connected in sequence. One end of the third joint bearing is disposed on the first locking member 132, and one end of the fourth joint bearing is disposed on the first rotating member 1382. The opposite ends of the first linkage part can be threadedly connected to the third joint bearing and the fourth joint bearing, so as to adjust the distance between the third joint bearing and the fourth joint bearing according to the distance between the first locking member 132 and the first rotating member 1382.

[0075] Optionally, the third joint bearing is a spherical sliding bearing to realize the rotational connection between the first linkage part and the first locking member 132; the fourth joint bearing is a spherical sliding bearing to realize the rotational connection between the first linkage part and the first rotating member 1382.

[0076] Optionally, the second linkage rod 1383 includes a fifth joint bearing, a second linkage part, and a sixth joint bearing connected in sequence. One end of the fifth joint bearing is disposed on the first rotating member 1382, and one end of the sixth joint bearing is disposed on the second rotating member 1384. The opposite ends of the second linkage part can be threadedly connected to the fifth joint bearing and the sixth joint bearing, so as to adjust the distance between the fifth joint bearing and the sixth joint bearing according to the distance between the first rotating member 1382 and the second rotating member 1384.

[0077] Optionally, the fifth joint bearing is a spherical sliding bearing to realize the rotational connection between the second linkage part and the first rotating member 1382; the sixth joint bearing is a spherical sliding bearing to realize the rotational connection between the second linkage part and the second rotating member 1384.

[0078] Optionally, the third linkage 1385 includes a seventh joint bearing, a third linkage part, and an eighth joint bearing connected in sequence. One end of the seventh joint bearing is disposed on the second rotating member 1384, and one end of the eighth joint bearing is disposed on the first locking member 132. The opposite ends of the third linkage part can be threadedly connected to the seventh joint bearing and the eighth joint bearing, so as to adjust the distance between the seventh joint bearing and the eighth joint bearing according to the distance between the second rotating member 1384 and the first locking member 132.

[0079] Optionally, the seventh joint bearing is a spherical sliding bearing to realize the rotational connection between the third linkage part and the second rotating member 1384; the eighth joint bearing is a spherical sliding bearing to realize the rotational connection between the third linkage part and the first locking member 132.

[0080] See Figure 5 ,as well as Figures 10 to 12 In some embodiments, the first mounting plate 110 has a first positioning hole 111 and a second positioning hole 112 spaced apart; the locking mechanism 130 further includes a third locking member 139, which is movably disposed on the driving member 136. When the first locking member 132 is in a first position, the third locking member 139 passes through the first positioning hole 111 to limit the first locking member 132 in the first position; when the first locking member 132 is in a second position, the third locking member 139 passes through the second positioning hole 112 to limit the first locking member 132 in the second position.

[0081] Understandably, the third locking member 139 is movably disposed on the driving member 136. This means that the third locking member 139 and the driving member 136 are separable. When the third locking member 139 and the driving member 136 are in a separable state, the first locking member 132 can move relative to the first mounting plate 110 along a first direction. When the third locking member 139 passes through the driving member 136 and one of the first positioning hole 111 and the second positioning hole 112, the position of the first locking member 132 is limited.

[0082] In this embodiment, when the first locking member 132 is in the first position, the third locking member 139 is sequentially inserted through the driving member 136 and the first positioning hole 111 to limit the relative position of the driving member 136 and the first mounting plate 110, thereby limiting the relative position of the first locking member 132 and the second locking member 135, so that the first locking member 132 is limited to the first position. Even if the first mounting plate 110 and the second mounting plate 120 are in a locked state, the stability of the locking mechanism 130 in fixing the relative position of the first mounting plate 110 and the second mounting plate 120 is further improved, so as to prevent the second locking member 135 from sliding out of the groove 1321 of the first locking member 132 and causing the first mounting plate 110 to fall towards the second mounting plate 120. When the mounting device 100 is applied to the wafer inspection system 200, it can improve the stability of the tester 240 located on one side of the test stage panel 230, thereby ensuring the stability of the electrical connection between the tester 240 and the probe card 220, and thus ensuring the stability of the wafer inspection system 200 in inspecting the sample to be inspected. When the first locking member 132 is in the second position, the third locking member 139 is sequentially inserted through the drive member 136 and the second positioning hole 112 to limit the relative position of the drive member 136 and the first mounting plate 110, thereby limiting the relative position of the first locking member 132 and the second locking member 135, so as to limit the first locking member 132 to the second position, preventing the first locking member 132 from switching arbitrarily between the first position and the second position, so that the first mounting plate 110 and the second mounting plate 120 are in a separable state. When the mounting device 100 is applied to the wafer inspection system 200, it facilitates the separation of the test machine 240 from the test station panel 230, thereby improving the performance of the wafer inspection system 200.

[0083] See Figure 4 and Figure 13 In some embodiments, the connecting sub-assembly 134 includes a first connector 1341, a second connector 1342, and an adjusting member 1343. The first connector 1341 is disposed on the side of the second mounting plate 120 facing the first mounting plate 110, and the second connector 1342 is disposed on the side of the first connector 1341 facing the preset surface 1324 and is movable along a third direction (e.g., Figure 13The second connecting member 1342 (in the Z direction) moves relative to the first connecting member 1341. The adjusting member 1343 is used to fix the relative position of the second connecting member 1342 and the first connecting member 1341. There are multiple second locking members 135, which are rotatably disposed on the side of the second connecting member 1342 facing the preset surface 1324. The third direction intersects with the first direction, and the third direction is the arrangement direction of the first mounting plate 110 and the second mounting plate 120.

[0084] Understandably, the first connector 1341, the second connector 1342, and the first locking member 132 are arranged sequentially from the center of the first mounting plate 110 to the outer periphery.

[0085] In this embodiment, the second connecting member 1342 is disposed on the side of the first connecting member 1341 facing the preset surface 1324 and is movable relative to the first connecting member 1341 in a third direction. The second locking member 135 is rotatably disposed on the second connecting member 1342. Therefore, when it is necessary to adjust the distance between the first mounting plate 110 and the second mounting plate 120 in a third direction, the relative position of the second connecting member 1342 and the first connecting member 1341 can be adjusted to change the distance between the second locking member 135 and the second mounting plate 120 in a third direction. When the first locking member 132 is in the first position, the second locking member 135 is locked to the first locking member 132, thereby fixing the first mounting plate 110 to one side of the second mounting plate 120 and maintaining a certain distance from the second mounting plate 120. Furthermore, there are multiple second locking members 135. On one hand, the multiple second locking members 135 correspond one-to-one with the multiple sliding grooves 1321 of the first locking member 132, so that the first locking member 132 and the multiple second locking members 135 are in a locked state. The multiple second locking members 135 cooperate with each other to improve the stability of the locking mechanism 130 in fixing the relative position of the first mounting plate 110 and the second mounting plate 120. On the other hand, the multiple second locking members 135 are spaced apart on the side of the second connecting member 1342 facing the preset surface 1324. By adjusting the relative position of the second connecting member 1342 and the first connecting member 1341, the relative position of the multiple second locking members 135 and the second mounting plate 120 can be adjusted, thereby fixing the distance between the first mounting plate 110 and the second mounting plate 120 within a specific range. This solution avoids the need to adjust the relative positions of the multiple second locking members 135 and the second mounting plate 120 one by one, which is beneficial to further improve the performance of the mounting device 100.

[0086] Optionally, the first locking member 132 may have multiple grooves 1321, with one second locking member 135 rotatably disposed in one groove 1321, and different second locking members 135 rotatably disposed in different grooves 1321. In other words, the number of second locking members 135 is equal to the number of grooves 1321, and the second locking members 135 and the grooves 1321 are arranged in a one-to-one correspondence.

[0087] In some embodiments, the second connector 1342 has an adjustment hole 1344, the width of the adjustment hole 1344 along a third direction is greater than the width along a direction perpendicular to the third direction, and the first connector 1341 has a through hole 1345, the orthographic projection of the through hole 1345 onto the surface of the second connector 1342 facing the first connector 1341 falls into the adjustment hole 1344, and the adjustment member 1343 is sequentially inserted through the adjustment hole 1344 and the through hole 1345 to fix the relative position of the second connector 1342 and the first connector 1341.

[0088] Optionally, in some embodiments, the adjustment hole 1344 is an "waist-shaped" hole; in other embodiments, the adjustment hole 1344 is a "rectangular" hole.

[0089] Understandably, the orthographic projection of the through hole 1345 onto the surface of the second connector 1342 facing the first connector 1341 falls into the adjustment hole 1344. This can be achieved by the adjustment hole 1344 having a larger radial dimension in the third direction than the through hole 1345 in the third direction, and the adjustment hole 1344 having a larger radial dimension in the direction perpendicular to the third direction than the through hole 1345 in the direction perpendicular to the third direction.

[0090] In this embodiment, the second connector 1342 has an adjustment hole 1344, and the width of the adjustment hole 1344 along a third direction is greater than the width along a direction perpendicular to the third direction. The orthographic projection of the through hole 1345 onto the surface of the second connector 1342 facing the first connector 1341 falls into the adjustment hole 1344, so that the relative position of the second connector 1342 and the first connector 1341 in the third direction is adjustable. Specifically, by changing the position of the adjustment member 1343 passing through the adjustment hole 1344, the relative position of the second connector 1342 and the first connector 1341 in the third direction can be changed and fixed, thereby adjusting the distance in the third direction when the first mounting plate 110 and the second mounting plate 120 are fixed to each other. When the mounting device 100 is applied to the wafer inspection system 200, it can adjust the distance between the tester 240 and the test stage panel 230 so that the tester 240 can be stably electrically connected to the probe card 220 set on the test stage panel 230, thereby improving the performance of the wafer inspection system 200.

[0091] See Figure 5 and Figure 12 In some embodiments, the locking mechanism 130 further includes a guide assembly 141 disposed between the first locking member 132 and the first mounting plate 110. The guide assembly 141 includes a first guide member 1411 and a second guide member 1412. The first guide member 1411 is connected to the first mounting plate 110 and extends along a first direction. The second guide member 1412 is connected to the first locking member 132 and is slidably connected to the first guide member 1411. The first guide member 1411 and the second guide member 1412 cooperate to provide guidance for the movement of the first locking member 132 in the first direction.

[0092] In this embodiment, the first guide member 1411 is disposed on the side of the first mounting plate 110 facing the first locking member 132 and extends along a first direction. The second guide member 1412 is disposed on the side of the first locking member 132 facing the first mounting plate 110 and is slidably connected to the first guide member 1411 along the first direction. When the driving member 136 rotates, the connecting rod 137 drives the first locking member 132 to move under the drive of the driving member 136. The first locking member 132 moves relative to the first guide member 1411 along the first direction under the restriction of the second guide member 1412, thereby allowing the second locking member 135 to move within the first sub-groove 1322. During this process, the opposite ends of the connecting rod 137 are rotatably connected to the driving member 136 and the first locking member 132. The moving direction of the connecting rod 137 deviates from the first direction, and the moving direction of the first locking member 132 is parallel to the extending direction of the first sub-groove 1322, so as to reduce the resistance of the first locking member 132 moving relative to the second locking member 135, thereby improving the smoothness of the first locking member 132 switching between the first position and the second position, and improving the efficiency of the locking mechanism 130 in locking or unlocking the first mounting plate 110 and the second mounting plate 120.

[0093] In this application, the terms "embodiment" and "implementation" mean that a specific feature, structure, or characteristic described in connection with an embodiment can be included in at least one embodiment of this application. The appearance of these phrases in various locations throughout the specification does not necessarily refer to the same embodiment, nor are they independent or alternative embodiments mutually exclusive with other embodiments. Those skilled in the art will understand, explicitly and implicitly, that the embodiments described in this application can be combined with other embodiments. Furthermore, it should be understood that the features, structures, or characteristics described in the various embodiments of this application can be arbitrarily combined to form another embodiment that does not depart from the spirit and scope of the technical solution of this application, provided there is no contradiction between them.

[0094] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. An installation device, characterized in that, The installation device includes: First mounting plate; A second mounting plate, wherein the second mounting plate is disposed on one side of the first mounting plate; and A locking mechanism includes a locking component, which includes a first locking member and a locking sub-component. The first locking member is slidably connected to the side of the first mounting plate opposite to the second mounting plate along a first direction. The locking sub-component is disposed on the side of the second mounting plate facing the first mounting plate and passes through the first mounting plate and the first locking member. The first locking member has a first position and a second position relative to the locking sub-component. When the first locking member is in the first position, the first locking member and the locking sub-component are locked together to lock the first mounting plate and the second mounting plate. When the first locking member is in the second position, the first locking member and the locking sub-component are separable.

2. The installation device according to claim 1, characterized in that, The first locking member has a sliding groove, which includes a first sub-groove and a second sub-groove that are bent and connected. Both the first sub-groove and the second sub-groove penetrate a preset surface, and the second sub-groove also penetrates the surface of the first locking member facing the first mounting plate. The locking sub-assembly includes a connecting sub-assembly and a second locking member. The connecting sub-assembly is mounted on the second mounting plate, and the second locking member is rotatably disposed on the side of the connecting sub-assembly facing the preset surface. The second locking member passes through the sliding groove. When the first locking member is in a first position, the second locking member is located in the first sub-groove. When the first locking member is in a second position, the second locking member is located in the second sub-groove. The arrangement direction of the first position and the second position is parallel to the first direction. The preset surface is the surface of the first locking member facing the connecting sub-assembly.

3. The installation device according to claim 2, characterized in that, The locking mechanism further includes a driving component and a connecting rod. The driving component, the connecting rod, and the first locking component are arranged sequentially along a first direction. The driving component is rotatably connected to the first mounting plate, and the two ends of the connecting rod are rotatably connected to the driving component and the first locking component, respectively. When the driving component rotates relative to the first mounting plate, it drives the connecting rod to move the first locking component along the first direction, thereby causing the first locking component to move relative to the second locking component between a first position and a second position, thus realizing the locking and unlocking between the first mounting plate and the second mounting plate.

4. The installation device according to claim 3, characterized in that, The locking components are arranged in two sets, with the two sets of locking components spaced apart along the second direction. The locking mechanism also includes a linkage component, which is located on the side of the first mounting plate opposite to the second mounting plate. The two ends of the linkage component are rotatably connected to the first locking members of the two locking components. When the driving component moves the first locking member of one of the two sets of locking components along the first direction, the linkage component moves the first locking member of the other set of locking components in the opposite direction of the first direction. The first direction intersects the second direction.

5. The installation device according to claim 4, characterized in that, The linkage assembly includes a first linkage rod, a first rotating member, a second linkage rod, a second rotating member, and a third linkage rod connected in sequence. Along a first direction, the driving member and the first rotating member are arranged in sequence, and the first rotating member is rotatably connected to the first mounting plate. Along a second direction, the first rotating member and the second rotating member are arranged in sequence, and the second rotating member is rotatably connected to the first mounting plate. The opposite ends of the first linkage rod are rotatably connected to the first locking member and the first rotating member of one of two sets of locking assemblies, respectively. The opposite ends of the second linkage rod are rotatably connected to the first rotating member and the second rotating member, respectively. The opposite ends of the third linkage rod are rotatably connected to the second rotating member and the first locking member of the other of the two sets of locking assemblies, respectively.

6. The installation device according to claim 3, characterized in that, The first mounting plate has a first positioning hole and a second positioning hole spaced apart; the locking mechanism further includes a third locking member, which is movably disposed on the driving member. When the first locking member is in a first position, the third locking member passes through the first positioning hole to limit the first locking member to the first position; when the first locking member is in a second position, the third locking member passes through the second positioning hole to limit the first locking member to the second position.

7. The installation device according to claim 2, characterized in that, The connecting sub-assembly includes a first connector, a second connector, and an adjusting member. The first connector is disposed on the side of the second mounting plate facing the first mounting plate. The second connector is disposed on the side of the first connector facing the preset surface and is movable relative to the first connector along a third direction. The adjusting member is used to fix the relative position of the second connector and the first connector. There are multiple second locking members, which are rotatably disposed on the side of the second connector facing the preset surface. The third direction intersects with the first direction, and the third direction is the arrangement direction of the first mounting plate and the second mounting plate.

8. The installation device according to claim 7, characterized in that, The second connector has an adjustment hole, the width of which along a third direction is greater than the width along a direction perpendicular to the third direction. The first connector has a through hole, the orthographic projection of which falls into the adjustment hole on the surface of the second connector facing the first connector. The adjustment member is sequentially inserted through the adjustment hole and the through hole to fix the relative position of the second connector and the first connector.

9. The installation device according to claim 1, characterized in that, The locking mechanism further includes a guide assembly disposed between the first locking member and the first mounting plate. The guide assembly includes a first guide member and a second guide member. The first guide member is connected to the first mounting plate and extends along a first direction. The second guide member is connected to the first locking member and is slidably connected to the first guide member. The first guide member and the second guide member cooperate to provide guidance for the movement of the first locking member in the first direction.

10. A wafer inspection system, characterized in that, The wafer inspection system includes: The mounting device according to any one of claims 1 to 9; The sample stage is used to hold the sample to be tested. Probe card; A test stage panel is disposed on one side of the sample stage, and a second mounting plate is fixedly disposed on the test stage panel. The test stage panel is used to support the probe card. The testing machine is disposed on the side of the testing platform panel opposite to the sample stage. The first mounting plate is mounted on the outer periphery of the testing machine. The testing machine is used to make an electrical connection with the probe card. The mounting device is used to fix the testing machine to one side of the testing platform panel.

Images