Automatic nitrogen control device

Abstract

The utility model discloses an automatic nitrogen control device. The gas inlet end of the electromagnetic valve is connected to a nitrogen conveying pipeline, and the gas outlet end of the electromagnetic valve is connected to a high-low temperature circulating box through a connecting pipeline; nitrogen is conveyed to the high-low temperature circulating box through the electromagnetic valve; the flow of nitrogen conveyed to the high-low temperature circulating box in the connecting pipeline is measured through a flow meter arranged on the connecting pipeline; the input end of the automatic control loop is electrically connected with a trigger circuit of the high and low temperature circulation box, and the automatic control loop is synchronously powered on / off when the trigger circuit is powered on / off; the automatic control loop is used for controlling opening and closing of the electromagnetic valve and controlling the alarm to give an alarm based on the measurement result of the flowmeter. According to the utility model, nitrogen can be automatically input into the high-low temperature circulation box when the high-low temperature circulation box runs, moisture is removed through the nitrogen under the condition that the five-time capacity is met, water spots on the surface of a chip are avoided, and nitrogen introduction is automatically cut off when the high-low temperature circulation box does not run, so that the gas consumption is saved.

Description

Technical Field

[0001] This utility model relates to the field of chip testing, and more specifically, to an automatic nitrogen control device. Background Technology

[0002] After manufacturing, integrated circuit chips undergo a series of tests to ensure their performance and reliability. One crucial test is the high and low temperature cycling test, typically conducted using a specialized device—the high and low temperature cycling chamber. The functions of the high and low temperature cycling chamber are as follows: First, it simulates environmental conditions: by rapidly or slowly changing the temperature, it simulates the temperature variations that might be encountered in actual working environments, evaluating the performance and stability of integrated circuits under extreme temperature conditions. Second, it detects potential faults: by repeatedly cycling through different temperature ranges, it accelerates the aging process, testing the durability of materials or structures. This allows potential design or manufacturing defects to be exposed under extreme temperatures. Third, it verifies reliability: under extremely cold or hot conditions, it verifies the reliability and lifespan of the IC chip within its expected operating temperature range.

[0003] This step effectively evaluates the performance of integrated circuit chips under different temperature environments, thereby ensuring their stability and reliability in practical applications. Therefore, high and low temperature cycling (TC) is a crucial step in the integrated circuit testing process.

[0004] As product reliability requirements increase and customers demand stricter control over the reliability of each individual product, more and more customers are conducting 100% reliability verification on their products. Since traditional reliability verification only involved sampling a subset of products, the capacity requirements for equipment were not particularly high. However, with the increasing number of reliable products, equipment capacity has become a crucial indicator of equipment capability. Adding extra equipment to meet capacity demands would significantly increase production costs; therefore, increasing the capacity of existing equipment has become the optimal solution for businesses.

[0005] To increase equipment capacity for chip packaging materials made of plastic and EMI products, multiple layers of products were added. However, when materials were introduced through the door, the high moisture content in the air caused water stains to form at low temperatures. When the number of EMI products was increased fivefold, a large number of water stains appeared on the chip surface, failing to meet product appearance standards for shipment. Therefore, inert gas was used to remove the moisture and prevent water stains from appearing on the chip surface. However, during actual production, there were downtime situations where the pipeline continuously supplied inert gas, resulting in a significant waste of inert gas. Furthermore, insufficient inert gas flow would affect the effectiveness of moisture removal even with a fivefold increase in capacity.

[0006] The information disclosed in the background section of this utility model is intended only to enhance the understanding of the general background of this utility model, and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0007] The purpose of this invention is to propose an automatic nitrogen control device that automatically cuts off the nitrogen supply when the high and low temperature circulating chamber is not in operation, thereby saving gas consumption. It also removes moisture through nitrogen while meeting 5 times the production capacity, thus preventing water stains from appearing on the chip surface.

[0008] To achieve the above objectives, this utility model proposes an automatic nitrogen control device, comprising:

[0009] A solenoid valve, wherein the inlet end of the solenoid valve is connected to a nitrogen delivery pipeline, and the outlet end of the solenoid valve is connected to a high and low temperature circulation chamber via a connecting pipeline; the solenoid valve controls the nitrogen delivery pipeline to deliver nitrogen to the high and low temperature circulation chamber.

[0010] A flow meter is installed on the connecting pipeline, and the flow meter is used to measure the flow rate of nitrogen gas delivered to the high and low temperature circulating chamber in the connecting pipeline;

[0011] An alarm device, used to issue an alarm.

[0012] An automatic control loop is provided, the input of which is electrically connected to the trigger circuit of the high and low temperature circulating chamber. When the trigger circuit is energized / de-energized, the automatic control loop is simultaneously energized / de-energized. The automatic control loop is electrically connected to the solenoid valve, the flow meter, and the alarm, respectively. The automatic control loop is used to control the opening and closing of the solenoid valve and to control the alarm to sound an alarm based on the measurement results of the flow meter.

[0013] Optionally, the automatic control loop includes:

[0014] The first relay has one end of its coil and one end of its normally open contact electrically connected to one end of the program run button of the high and low temperature cycle chamber, the other end of the first relay electrically connected to the first input terminal of the automatic control circuit, and the other end of the program run button electrically connected to the second input terminal of the automatic control circuit.

[0015] The second relay has one end of its coil electrically connected to the other end of the normally open contact of the first relay, and the other end of its coil electrically connected to the first input terminal.

[0016] A transformer has two input terminals electrically connected to the first input terminal and the second input terminal, respectively. The first output terminal of the transformer is electrically connected to one end of the normally open contact of the second relay. The other end of the normally open contact of the second relay is electrically connected to one end of the solenoid valve and the flow meter, respectively. The second output terminal of the transformer is electrically connected to one end of the power input terminal of the solenoid valve and the flow meter, respectively. The other end of the power input terminal of the solenoid valve and the flow meter is electrically connected to the second output terminal of the transformer.

[0017] The third relay has its coil electrically connected to the signal output terminal of the flow meter, one end of the normally open contact of the third relay is electrically connected to the first output terminal of the transformer, the other end of the normally open contact of the third relay is electrically connected to one end of the alarm, and the other end of the alarm is electrically connected to the second output terminal of the transformer.

[0018] Optionally, the operating voltage of the first relay is 220V.

[0019] Optionally, the operating voltage of the second relay is 220V.

[0020] Optionally, the transformer is a 220V-24V transformer.

[0021] Optionally, the operating voltage of the solenoid valve is 24V.

[0022] Optionally, the operating voltage of the flow meter is 24V.

[0023] Optionally, the alarm operates at a voltage of 24V.

[0024] Optionally, the voltage of the flow meter output signal is 5V, and the operating voltage of the third relay is 5V.

[0025] Optionally, the flow meter is set to a flow threshold of 100 L / min. When the flow meter detects that the flow rate of nitrogen in the connecting pipeline is lower than 100 L / min, it outputs a signal to the coil of the third relay, the normally open contact of the third relay closes, and the alarm is powered on.

[0026] The beneficial effects of this invention are as follows: By connecting the power supply of the nitrogen automatic control device to the trigger circuit of the high and low temperature cycle chamber, the nitrogen automatic control device is powered when the high and low temperature cycle chamber is running and de-powered when the high and low temperature cycle chamber is not running. This enables the automatic input of nitrogen into the high and low temperature cycle chamber during operation, and the removal of moisture through nitrogen to avoid water stains on the chip surface when the high and low temperature cycle chamber is not running. The nitrogen supply is automatically cut off when the high and low temperature cycle chamber is not running, thus saving gas consumption.

[0027] The device of this invention has other features and advantages that will be apparent from or will be set forth in detail in the accompanying drawings and following detailed description, which together serve to explain the particular principles of this invention. Attached Figure Description

[0028] The above and other objects, features and advantages of the present invention will become more apparent from the more detailed description of exemplary embodiments of the present invention in conjunction with the accompanying drawings, in which the same reference numerals generally represent the same components.

[0029] Figure 1 A schematic diagram of an automatic nitrogen control device according to an embodiment of the present invention is shown.

[0030] Figure 2 A schematic diagram of the automatic control circuit of a nitrogen automatic control device according to an embodiment of the present invention is shown.

[0031] Explanation of reference numerals in the attached figures:

[0032] DQ, Nitrogen delivery pipeline; LJ, Connecting pipeline; X, High and low temperature circulating chamber; N, First input terminal of automatic control circuit; L, Second input terminal of automatic control circuit; KM1, Coil of first relay; KM2, Coil of second relay; KM3, Coil of third relay; KM1.1, Normally open contact of first relay; KM2.1, Normally open contact of second relay; KM3.1, Normally open contact of third relay; S, Program run button; BY, Transformer; D, Solenoid valve; C, Flow meter; BJ, Alarm. Detailed Implementation

[0033] An automatic nitrogen control device according to the present invention includes:

[0034] The solenoid valve has its inlet end connected to the nitrogen delivery pipeline and its outlet end connected to the high and low temperature circulation chamber via a connecting pipeline. The solenoid valve controls the nitrogen delivery pipeline to deliver nitrogen to the high and low temperature circulation chamber.

[0035] A flow meter, installed on the connecting pipeline, is used to measure the flow rate of nitrogen gas delivered to the high and low temperature circulating chamber in the connecting pipeline;

[0036] An alarm device, used to issue an alarm.

[0037] The automatic control loop has its input terminal electrically connected to the trigger circuit of the high and low temperature circulating chamber. When the trigger circuit is energized / de-energized, the automatic control loop is energized / de-energized synchronously. The automatic control loop is electrically connected to the solenoid valve, flow meter, and alarm respectively. The automatic control loop is used to control the opening and closing of the solenoid valve and to control the alarm to sound an alarm based on the measurement results of the flow meter.

[0038] Specifically, the nitrogen automatic control device of this utility model includes an automatic control circuit, a solenoid valve, a flow meter, and an alarm. The inlet end of the solenoid valve is connected to a nitrogen delivery pipeline, and the other end is connected to a high-low temperature circulation chamber via a connecting pipeline. A flow meter is installed on the connecting pipeline. The solenoid valve, flow meter, and alarm are all electrically connected to the automatic control circuit, which supplies power to them. The flow meter has a set flow threshold. When the flow meter detects that the flow rate entering the high-low temperature circulation chamber is lower than the flow threshold, the automatic control circuit controls the alarm to sound. The power supply terminal of the automatic control circuit is connected to the trigger circuit of the high-low temperature circulation chamber. When the high-low temperature circulation chamber is running, i.e., when the trigger circuit is energized... The automatic control circuit is simultaneously energized, at which point the solenoid valve opens, and nitrogen in the nitrogen delivery pipeline is delivered to the high and low temperature circulation chamber through the solenoid valve. The flow meter is energized to detect the flow rate of nitrogen delivered to the high and low temperature circulation chamber. When the nitrogen flow rate is lower than the flow rate threshold set by the flow meter, the automatic control circuit controls the alarm to sound. When the high and low temperature circulation chamber is not running, i.e., when the trigger circuit is de-energized, the automatic control circuit is also de-energized. This invention can automatically input nitrogen into the high and low temperature circulation chamber when it is running, remove moisture through nitrogen to avoid water stains on the chip surface while meeting 5 times the production capacity, and automatically cut off the nitrogen supply when the high and low temperature circulation chamber is not running, saving gas consumption.

[0039] In one example, the automatic control loop includes:

[0040] The first relay has one end of its coil and one end of its normally open contact electrically connected to one end of the program run button of the high and low temperature cycle chamber, the other end of the first relay electrically connected to the first input terminal of the automatic control circuit, and the other end of the program run button electrically connected to the second input terminal of the automatic control circuit.

[0041] The second relay has one end of its coil electrically connected to the other end of the normally open contact of the first relay, and the other end of its coil electrically connected to the first input terminal.

[0042] The transformer has two input terminals electrically connected to the first and second input terminals respectively. The first output terminal of the transformer is electrically connected to one end of the normally open contact of the second relay. The other end of the normally open contact of the second relay is electrically connected to one end of the solenoid valve and the flow meter respectively. The second output terminal of the transformer is electrically connected to one end of the power input terminal of the solenoid valve and the flow meter respectively. The other end of the power input terminal of the solenoid valve and the flow meter is electrically connected to the second output terminal of the transformer.

[0043] The third relay's coil is electrically connected to the flow meter's signal output terminal. One end of the third relay's normally open contact is electrically connected to the transformer's first output terminal, and the other end of the third relay's normally open contact is electrically connected to one end of the alarm. The other end of the alarm is electrically connected to the transformer's second output terminal.

[0044] Specifically, the automatic control circuit includes: a first relay, a second relay, a transformer, and a third relay. One end of the coil and one end of the normally open contact of the first relay are electrically connected to one end of the program run button of the high and low temperature circulating chamber. The other end of the first relay is electrically connected to the first input terminal of the automatic control circuit, and the other end of the program run button is electrically connected to the second input terminal of the automatic control circuit. One end of the coil of the second relay is electrically connected to the other end of the normally open contact of the first relay, and the other end of the coil of the second relay is electrically connected to the first input terminal. The two input terminals of the transformer are electrically connected to the first and second input terminals, respectively. The first output terminal of the transformer is electrically connected to one end of the normally open contact of the second relay. The other end of the normally open contact of the second relay is electrically connected to one end of the solenoid valve and the flow meter, respectively. The second output terminal of the transformer is electrically connected to one end of the power input terminal of the solenoid valve and the flow meter, respectively. The other end of the power input terminal of the solenoid valve and the flow meter is electrically connected to the second output terminal of the transformer. The coil of the third relay is electrically connected to the signal output terminal of the flow meter. One end of the normally open contact of the electrical appliance is electrically connected to the first output terminal of the transformer, and the other end of the normally open contact of the third relay is electrically connected to one end of the alarm. The other end of the alarm is electrically connected to the second output terminal of the transformer. When the program run button of the high and low temperature circulation chamber is pressed, the program run button closes, the trigger circuit of the high and low temperature circulation chamber is energized, the first and second input terminals of the automatic control circuit are energized, the transformer is energized, the coil of the first relay is energized, the normally open contact of the first relay closes, energizing the coil of the second relay, and the normally open contact of the second relay closes. The output voltage of the transformer is supplied to the solenoid valve and the flow meter. After the solenoid valve is energized, it opens, and the nitrogen in the nitrogen delivery pipeline is delivered to the high and low temperature circulation chamber through the solenoid valve. After the flow meter is energized, it detects the flow rate of the nitrogen delivered to the high and low temperature circulation chamber in real time. When the flow rate of the nitrogen is lower than the flow rate threshold set by the flow meter, the flow meter outputs a voltage signal to the coil of the third relay, and the normally open contact of the third relay closes. The output voltage of the transformer is supplied to the alarm through the closed normally open contact of the third relay, and the alarm is energized and sounds.

[0045] In one example, the first relay operates at 220V.

[0046] In one example, the second relay operates at 220V.

[0047] In one example, the transformer is a 220V-24V transformer.

[0048] In one example, the solenoid valve operates at a voltage of 24V.

[0049] In one example, the flow meter operates at 24V.

[0050] In one example, the alarm operates at 24V.

[0051] In one example, the voltage of the flow meter output signal is 5V, and the operating voltage of the third relay is 5V.

[0052] In one example, the flow meter is set to a flow threshold of 100 L / min. When the flow meter detects that the flow rate of nitrogen in the connecting pipeline is lower than 100 L / min, it outputs a signal to the coil of the third relay. The normally open contact of the third relay closes, and the alarm is activated.

[0053] Specifically, after multiple experiments, it was found that, to ensure that no water stains appear on the chip surface, the nitrogen flow rate introduced into the high and low temperature circulating chamber must be no less than 100L / min, while meeting the requirement of 5 times the production capacity.

[0054] The present invention will now be described in more detail with reference to the accompanying drawings. While preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present invention will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art.

[0055] Example:

[0056] like Figure 1 As shown, this embodiment provides an automatic nitrogen control device, including:

[0057] Solenoid valve D has its inlet end connected to nitrogen delivery pipeline DQ, and its outlet end connected to high and low temperature circulating chamber X via connecting pipeline LJ; the solenoid valve controls the nitrogen delivery pipeline DQ to deliver nitrogen to high and low temperature circulating chamber X.

[0058] Flow meter C is installed on the connecting pipe LJ. Flow meter C is used to measure the flow rate of nitrogen gas delivered from the connecting pipe LJ to the high and low temperature circulating chamber X.

[0059] Alarm BJ is used to issue an alarm.

[0060] The automatic control loop has its input terminals L and N (220V) electrically connected to the trigger circuit of the high and low temperature cycling chamber X. When the trigger circuit is powered on / off, the automatic control loop is powered on / off synchronously. The automatic control loop is electrically connected to the solenoid valve D, the flow meter C, and the alarm BJ respectively. The automatic control loop is used to control the opening and closing of the solenoid valve D, and to control the alarm BJ to sound an alarm based on the measurement results of the flow meter C.

[0061] like Figure 2As shown, the automatic control circuit includes: a first relay, a second relay, a transformer BY, and a third relay. One end of the coil KM1 of the first relay and one end of the normally open contact KM1.1 of the first relay are electrically connected to one end of the program run button S of the high and low temperature cycling chamber X. The other end of the coil KM1 of the first relay is electrically connected to the first input terminal N of the automatic control circuit, and the other end of the program run button S is electrically connected to the second input terminal L of the automatic control circuit. One end of the coil KM2 of the second relay is electrically connected to the other end of the normally open contact KM1.1 of the first relay, and the other end of the coil KM2 of the second relay is electrically connected to the first input terminal N. Electrical connections: The two input terminals of transformer BY are electrically connected to the first input terminal N and the second input terminal L, respectively. The first output terminal of transformer BY is electrically connected to one end of the normally open contact KM2.1 of the second relay. The other end of the normally open contact KM2.1 of the second relay is electrically connected to one end of the solenoid valve D and the flow meter C, respectively. The second output terminal of transformer BY is electrically connected to one end of the power input terminal of the solenoid valve D and the flow meter C, respectively. The other end of the power input terminal of the solenoid valve D and the flow meter C is electrically connected to the second output terminal of transformer BY. The coil KM3 of the third relay is electrically connected to the signal output terminal of the flow meter C. The normally open contact of the third relay... One end of KM3.1 is electrically connected to the first output terminal of transformer BY, and the other end of the normally open contact of the third relay KM3.1 is electrically connected to one end of alarm BJ, and the other end of alarm BJ is electrically connected to the second output terminal of transformer BY. When the program run button S of the high and low temperature circulating chamber X is pressed, the program run button S closes, the trigger circuit of the high and low temperature circulating chamber X is energized, at this time the first input terminal N and the second input terminal L of the automatic control circuit are energized, transformer BY is energized, the coil KM1 of the first relay is energized, the normally open contact KM1.1 of the first relay closes, so that the coil KM2 of the second relay is energized, and the normally open contact KM2 of the second relay is energized. When contact KM2.1 closes, the output voltage of transformer BY is supplied to solenoid valve D and flow meter C. Solenoid valve D opens after being energized, and nitrogen in nitrogen delivery pipeline DQ is delivered to high and low temperature circulation chamber X through solenoid valve D. Flow meter C is energized and monitors the flow rate of nitrogen delivered to high and low temperature circulation chamber X in real time. When the flow rate of nitrogen is lower than the flow rate threshold set by flow meter C, flow meter C outputs a voltage signal to the coil KM3 of the third relay. The normally open contact KM3.1 of the third relay closes, and the output voltage of transformer BY is supplied to alarm BJ through the closed normally open contact KM3.1 of the third relay. Alarm BJ is then energized and sounds an alarm.

[0062] The operating voltage of the first relay is 220V.

[0063] The operating voltage of the second relay is 220V.

[0064] The transformer BY is a 220V-24V transformer.

[0065] The operating voltage of solenoid valve D is 24V.

[0066] The operating voltage of flow meter C is 24V.

[0067] The operating voltage of alarm BJ is 24V.

[0068] The flow meter C outputs a 5V voltage signal, and the operating voltage of the third relay is 5V.

[0069] The flow rate threshold set for flow meter C is 100C / min. When flow meter C detects that the flow rate of nitrogen in the connecting pipe LJ is lower than 100C / min, it outputs a 5V voltage signal to the coil KM3 of the third relay. The normally open contact KM3.1 of the third relay closes, and the alarm BJ is powered on to sound an alarm.

[0070] The various embodiments of the present invention have been described above. These descriptions are exemplary and not exhaustive, nor are they limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments.

Claims

1. An automatic nitrogen control device, characterized in that, include: A solenoid valve, wherein the inlet end of the solenoid valve is connected to a nitrogen delivery pipeline, and the outlet end of the solenoid valve is connected to a high and low temperature circulation chamber via a connecting pipeline; the solenoid valve controls the nitrogen delivery pipeline to deliver nitrogen to the high and low temperature circulation chamber. A flow meter is installed on the connecting pipeline, and the flow meter is used to measure the flow rate of nitrogen gas delivered to the high and low temperature circulating chamber in the connecting pipeline; An alarm device, used to issue an alarm. An automatic control loop is provided, the input of which is electrically connected to the trigger circuit of the high and low temperature circulating chamber. When the trigger circuit is energized / de-energized, the automatic control loop is simultaneously energized / de-energized. The automatic control loop is electrically connected to the solenoid valve, the flow meter, and the alarm, respectively. The automatic control loop is used to control the opening and closing of the solenoid valve and to control the alarm to sound an alarm based on the measurement results of the flow meter.

2. The nitrogen automatic control device according to claim 1, characterized in that, The automatic control loop includes: The first relay has one end of its coil and one end of its normally open contact electrically connected to one end of the program run button of the high and low temperature cycle chamber, the other end of the first relay electrically connected to the first input terminal of the automatic control circuit, and the other end of the program run button electrically connected to the second input terminal of the automatic control circuit. The second relay has one end of its coil electrically connected to the other end of the normally open contact of the first relay, and the other end of its coil electrically connected to the first input terminal. A transformer has two input terminals electrically connected to the first input terminal and the second input terminal, respectively. The first output terminal of the transformer is electrically connected to one end of the normally open contact of the second relay. The other end of the normally open contact of the second relay is electrically connected to one end of the solenoid valve and the flow meter, respectively. The second output terminal of the transformer is electrically connected to one end of the power input terminal of the solenoid valve and the flow meter, respectively. The other end of the power input terminal of the solenoid valve and the flow meter is electrically connected to the second output terminal of the transformer. The third relay has its coil electrically connected to the signal output terminal of the flow meter, one end of the normally open contact of the third relay is electrically connected to the first output terminal of the transformer, the other end of the normally open contact of the third relay is electrically connected to one end of the alarm, and the other end of the alarm is electrically connected to the second output terminal of the transformer.

3. The nitrogen automatic control device according to claim 2, characterized in that, The operating voltage of the first relay is 220V.

4. The nitrogen automatic control device according to claim 2, characterized in that, The operating voltage of the second relay is 220V.

5. The nitrogen automatic control device according to claim 2, characterized in that, The transformer is a 220V-24V transformer.

6. The nitrogen automatic control device according to claim 5, characterized in that, The solenoid valve operates at a voltage of 24V.

7. The nitrogen automatic control device according to claim 5, characterized in that, The flow meter operates at a voltage of 24V.

8. The nitrogen automatic control device according to claim 5, characterized in that, The alarm operates at 24V.

9. The nitrogen automatic control device according to claim 2, characterized in that, The voltage of the output signal of the flow meter is 5V, and the operating voltage of the third relay is 5V.

10. The nitrogen automatic control device according to claim 9, characterized in that, The flow meter is set with a flow threshold of 100 L / min. When the flow meter detects that the flow rate of nitrogen in the connecting pipeline is lower than 100 L / min, it outputs a signal to the coil of the third relay, the normally open contact of the third relay closes, and the alarm is powered on.

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