Lens calibration device and bonding machine

Abstract

The utility model relates to a lens calibration device and a bonding machine, and relates to the technical field of bonding equipment. A lens calibration device comprises an upper calibration piece, a lower calibration piece and a connecting piece, the calibration piece and the lower calibration piece are arranged on the connecting piece in parallel and at intervals, a calibration cavity is defined between the upper calibration piece and the lower calibration piece, and calibration marks are arranged on the upper calibration piece and the lower calibration piece. According to the lens calibration device provided by the invention, the lens assembly can be moved to the calibration cavity, simultaneous calibration of the upper lens and the lower lens is realized, the lens calibration device does not need to be moved in the calibration process, errors caused by movement are reduced, and the calibration precision and the calibration rate are improved.

Description

Technical Field

[0001] This application relates to the field of bonding equipment technology, and more specifically, to a lens calibration device and a bonding machine. Background Technology

[0002] Bonding is a crucial step in the packaging process of the semiconductor and electronics industries, and bonding machines are commonly used. The bonding process demands extremely high alignment precision (nanometer-level bonding) between the bonded chip and wafer. The bonding process requires a vision system to identify alignment marks and calculate errors for compensation. Two cameras, fixed back-to-back as a single unit, identify alignment marks in both upward and downward directions. The center deviation of these two cameras is critical to the calculations of the vision compensation system. The bonding arm and camera assembly are fixed on the same frame. Due to the high bonding speed of the bonding machine, the high-frequency oscillation of the bonding arm generates high-frequency vibrations in the frame, which can easily loosen the camera's fixing components, causing the camera's position to shift. This affects the center deviation of the camera assembly. If the center deviation calculation still uses the previous data after the camera assembly shifts, it will lead to chip and wafer misalignment, potentially resulting in product scrap. Therefore, the position of the camera assembly needs to be calibrated before each power-on and periodically.

[0003] Current lens calibration methods primarily involve manually placing a calibration glass plate on the loading stage to calibrate the lower lens. The lens assembly is then moved to the avoidance position, the bonding head lowers to pick up the calibration glass plate, moves it back to the calibration position, and finally the lens assembly is reset and the upper lens is calibrated. Because the calibration glass plate needs to be transferred from the stage to the bonding head, and the lens needs to move to the avoidance position and back to the calibration position, movement errors exist in this process, affecting the accuracy of the calibration results. Utility Model Content

[0004] The purpose of this application is to provide a lens calibration device and a bonding machine to solve the above-mentioned technical problems.

[0005] In a first aspect, the present invention provides a lens calibration device, which includes: an upper calibration plate, a lower calibration plate, and a connector. The calibration plate and the lower calibration plate are arranged parallel to each other and spaced apart on the connector. A calibration cavity is defined between the upper calibration plate and the lower calibration plate. Calibration marks are provided on both the upper calibration plate and the lower calibration plate.

[0006] Furthermore, the connector is a connecting plate, and both the upper and lower calibration plates are connected to the connecting plate, forming a C-shaped structure with the upper calibration plate, the connecting plate, and the lower calibration plate.

[0007] Furthermore, the connector includes a height adjustment component, with the upper calibration plate and / or the lower calibration plate connected to the height adjustment component, which is used to adjust the distance between the upper calibration plate and the small calibration plate.

[0008] Furthermore, the height adjustment component includes several parallel telescopic rods, with an upper calibration plate and a lower calibration plate respectively located at both ends of the telescopic rods.

[0009] Furthermore, the connector is provided with a detachable mounting component, and the upper and lower calibration plates are connected to the connector via the detachable mounting component.

[0010] Furthermore, the detachable mounting component includes a fixing bolt, a strip hole is provided on the connector, and fixing holes are provided on both the upper and lower calibration plates. The fixing bolt passes through the strip hole and the fixing hole to detachably connect the upper and lower calibration plates to the connector.

[0011] Furthermore, the upper calibration plate, lower calibration plate, and connector are integrally formed.

[0012] Furthermore, both the upper and lower calibration plates are transparent glass plates.

[0013] Furthermore, the calibration markings include one or more of calibration holes or calibration scale lines.

[0014] On the other hand, this utility model embodiment also provides a bonding machine, which includes a machine base, a lens assembly, and a lens calibration device of any of the above. The lens assembly is disposed on the machine base, and the lens calibration device is slidably disposed on the machine base. The lens calibration device has a calibration position close to the lens assembly and a standby position far away from the lens assembly. The lens calibration device is driven to switch between the calibration position and the standby position.

[0015] The lens calibration device provided by this utility model can move the lens assembly into the calibration cavity to achieve simultaneous calibration of the upper and lower lenses. During the calibration process, there is no need to move the lens calibration device, which reduces errors caused by movement and improves calibration accuracy and calibration speed. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 One of the perspective views of the lens calibration device provided in the embodiments of this application;

[0018] Figure 2 A second perspective view of the lens calibration device provided in the embodiments of this application;

[0019] Figure 3 A third perspective view of the lens calibration device provided in the embodiments of this application;

[0020] Figure 4 Fourth perspective view of the lens calibration device provided in the embodiments of this application.

[0021] Icons: 100 - Upper calibration piece; 200 - Lower calibration piece; 300 - Connector; 400 - Calibration cavity; 500 - Calibration mark; 600 - Telescopic rod; 700 - Fixing bolt; 800 - Strip hole. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] In the description of this application, it should be noted that the terms "inner" and "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this application is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0024] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed" and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to direct connections, indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0025] This embodiment provides

[0026] Figure 1 This application provides a lens calibration device, which includes an upper calibration plate 100, a lower calibration plate 200, and a connector 300. The calibration plate and the lower calibration plate 200 are arranged parallel to each other and spaced apart on the connector 300. A calibration cavity 400 is defined between the upper calibration plate 100 and the lower calibration plate 200. Calibration marks 500 are provided on both the upper calibration plate 100 and the lower calibration plate 200.

[0027] Please refer to Figure 1As shown, the upper calibration plate 100 and the lower calibration plate 200 are arranged parallel to each other on the connector 300, with a calibration cavity 400 formed between them at an interval. The calibration cavity 400 is used to accommodate the lens to be calibrated. Calibration marks 500 are correspondingly provided on the upper calibration plate 100 and the lower calibration plate 200, allowing operators to observe the calibration marks 500 through the lens and calibrate the lens. The upper calibration plate 100 is used to calibrate the upper lens in the lens assembly, and the lower calibration plate 200 is used to calibrate the lower lens in the lens assembly. Both the upper calibration plate 100 and the lower calibration plate 200 are connected to the connector 300, forming a single unit. During calibration, both the upper and lower lenses can be calibrated simultaneously without moving or adjusting the calibration plates. This improves calibration efficiency and avoids calibration errors caused by calibration plate movement, thus ensuring the accuracy of the calibration results.

[0028] Please refer to Figure 1 As shown, in some possible embodiments, the connector 300 is a connecting plate, and both the upper calibration piece 100 and the lower calibration piece 200 are connected to the connecting plate. The upper calibration piece 100, the connecting plate, and the lower calibration piece 200 form a C-shaped structure.

[0029] One end of the upper calibration plate 100 and the lower calibration plate 200 are connected to the connecting plate, which fixes the upper calibration plate 100 and the lower calibration plate 200, ensuring their stability. A thin, plate-like structure is used to connect and support the upper calibration plate 100 and the lower calibration plate 200, reducing the overall size of the lens calibration device and preventing collisions or interference with other structures during calibration. The upper calibration plate 100, the connecting plate, and the lower calibration plate 200 form a C-shaped structure, maximizing the opening between the upper calibration plate 100 and the lower calibration plate 200. This facilitates the movement of the lens assembly between the upper calibration plate 100 and the lower calibration plate 200, preventing collisions with the upper calibration plate 100, the lower calibration plate 200, or the connecting plate during lens assembly movement and calibration, thus ensuring the safety of the equipment. At the same time, the obstruction between the upper calibration plate 100 and the lower calibration plate 200 is reduced, which avoids affecting the light entering the calibration cavity 400 and ensures that the operator can observe the calibration mark 500 on the upper calibration plate 100 or the lower calibration plate 200 through the lens assembly.

[0030] Alternatively, please refer to Figure 2As shown, in some possible embodiments, connecting plates are provided on both sides of the upper calibration plate 100 and the lower calibration plate 200, and the two connecting plates fix the upper calibration plate 100 and the lower calibration plate 200 from both sides. The upper calibration plate 100, the lower calibration plate 200, and the two connecting plates form a tubular structure, and a calibration cavity 400 for placing the lens to be calibrated is formed inside. Openings are formed on both sides of the calibration cavity 400 to facilitate moving the lens assembly into the calibration cavity 400 for calibration. The two connecting plates support the upper calibration plate 100 and the lower calibration plate 200 from both sides, respectively, to ensure the stability of the upper and lower calibration plates and to prevent the upper or lower calibration plates from tilting or breaking during use, which would affect the calibration effect.

[0031] Optionally, in some possible embodiments, the connector 300 includes a height adjustment member, with the upper calibration piece 100 and / or the lower calibration piece 200 connected to the height adjustment member, which is used to adjust the distance between the upper calibration piece 100 and the small calibration plate.

[0032] The height adjustment component is used to adjust the distance between the upper calibration plate 100 and the lower calibration plate 200, thereby adapting to the lens calibration work of equipment of different specifications.

[0033] Please refer to Figure 3 As shown, optionally, in some possible embodiments, the height adjustment component includes several telescopic rods 600, with the upper calibration plate 100 and the lower calibration plate 200 respectively fixed to both ends of the telescopic rods 600. The distance between the upper calibration plate 100 and the lower calibration plate 200 can be adjusted by changing the length of the telescopic rods 600, making operation convenient and the structure simple. The telescopic rods 600 can be manually adjustable. Since a lens calibration device typically calibrates only one or one type of equipment at a time, it does not require frequent adjustment of the distance between the upper calibration plate 100 and the lower calibration plate 200; therefore, a lower-cost manual telescopic rod 600 can be used. Optionally, the telescopic rods 600 can also be electrically operated to achieve automated adjustment.

[0034] Optionally, in some possible embodiments, a length mark may be provided on the telescopic rod 600, so that the operator can observe the length of the telescopic rod 600 to know the distance between the upper calibration piece 100 and the lower calibration piece 200, and adjust the distance between the upper calibration piece 100 and the lower calibration piece 200 to a suitable distance according to the length mark to ensure the calibration effect.

[0035] Optionally, in some possible embodiments, the connector 300 is provided with a detachable mounting member, and the upper calibration piece 100 and the lower calibration piece 200 are connected to the connector 300 via the detachable mounting member.

[0036] The connector 300 is detachably connected to the upper calibration piece 100 and the lower calibration piece 200, allowing for separate production of the calibration pieces and the connector 300, thus reducing production difficulty and costs. The detachable connection between the upper calibration piece 100 and the lower calibration piece 200 and the connector 300 allows for the selection and replacement of different calibration pieces, facilitating timely replacement and maintenance when a calibration piece is damaged. Furthermore, the use of connectors 300 of varying heights allows for adjustment of the distance between the upper calibration piece 100 and the lower calibration piece 200.

[0037] Optionally, in some possible embodiments, the detachable mounting component includes a fixing bolt 700, a strip hole 800 is provided on the connector 300, and fixing holes are provided on both the upper calibration plate 100 and the lower calibration plate 200. The fixing bolt 700 passes through the strip hole 800 and the fixing hole to detachably connect the upper calibration plate 100, the lower calibration plate 200 and the connector 300.

[0038] Please refer to Figure 4 As shown, the connector 300 has several slotted holes 800, and the upper calibration plate 100 and lower calibration plate 200 have corresponding fixing holes. A detachable connection between the upper calibration plate 100 and the lower calibration plate 200 and the connector 300 can be achieved by inserting fixing bolts 700 through the slotted holes 800 and the fixing holes. The slotted holes 800 on the connector 300 also allow for height adjustment of the upper calibration plate 100 or the lower calibration plate 200 during installation.

[0039] Optionally, in some possible embodiments, the upper calibration plate 100, the lower calibration plate 200, and the connector 300 are integrally formed.

[0040] Please refer to Figure 1 As shown, the upper calibration plate 100 and the lower calibration plate 200 can be integrally formed by bending. The upper calibration plate 100, the lower calibration plate 200 and the connector 300 form a whole, which further prevents the upper calibration plate 100 and the lower calibration plate 200 from detaching from the connector 300, improves the stability of the entire lens calibration device and ensures the calibration effect.

[0041] Optionally, in some possible embodiments, both the upper calibration plate 100 and the lower calibration plate 200 are transparent glass plates.

[0042] It is understood that existing calibration strips are usually made of glass. The upper calibration strip 100 and lower calibration strip 200 in this embodiment have the same structure and material as existing calibration strips. When used, they are calibrated in the same way as existing calibration strips to ensure the calibration effect.

[0043] In some possible embodiments, the calibration mark 500 includes one or more of calibration holes or calibration scale lines. During production, a suitable calibration mark 500 can be selected according to actual calibration needs to further improve calibration effectiveness and calibration speed.

[0044] This utility model embodiment also provides a bonding machine, which includes a machine base, a lens assembly, and the aforementioned lens calibration device. The lens assembly is disposed on the machine base, and the lens calibration device is slidably disposed on the machine base. The lens calibration device has a calibration position close to the lens assembly and a standby position far from the lens assembly, and the lens calibration device is driven to switch between the calibration position and the standby position.

[0045] In this embodiment, the lens calibration device is directly integrated with the machine tool. By moving the lens calibration device, it can be switched between a calibration position and a standby position to achieve automatic calibration. During calibration, the lens calibration device is simply moved to the calibration position, and then the lens assembly is moved into the calibration cavity 400 of the lens calibration device to simultaneously calibrate the upper and lower lenses. This improves the calibration speed while avoiding errors caused by the movement of the calibration plate, thus improving the accuracy of the calibration results.

[0046] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0047] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A lens calibration device, characterized in that, include: The upper calibration plate (100), the lower calibration plate (200), and the connector (300) are arranged parallel to each other and spaced apart on the connector (300). A calibration cavity (400) is defined between the upper calibration plate (100) and the lower calibration plate (200). Calibration marks are provided on both the upper calibration plate (100) and the lower calibration plate (200).

2. The lens calibration device according to claim 1, characterized in that, The connector (300) is a connecting plate. The upper calibration piece (100) and the lower calibration piece (200) are both connected to the connecting plate. The upper calibration piece (100), the connecting plate, and the lower calibration piece (200) form a C-shaped structure.

3. The lens calibration device according to claim 1, characterized in that, The connector (300) includes a height adjustment component, the upper calibration piece (100) and / or the lower calibration piece (200) are connected to the height adjustment component, and the height adjustment component is used to adjust the distance between the upper calibration piece (100) and the small calibration plate.

4. The lens calibration device according to claim 3, characterized in that, The height adjustment component includes several parallel telescopic rods (600), with the upper calibration plate (100) and the lower calibration plate respectively located at both ends of the telescopic rods (600).

5. The lens calibration device according to claim 1, characterized in that, The connector (300) is provided with a detachable mounting component, and the upper calibration piece (100) and the lower calibration piece (200) are connected to the connector (300) via the detachable mounting component.

6. The lens calibration device according to claim 5, characterized in that, The detachable mounting component includes a fixing bolt (700), a strip hole (800) is provided on the connector (300), and fixing holes are provided on both the upper calibration plate (100) and the lower calibration plate (200). The fixing bolt (700) passes through the strip hole (800) and the fixing hole to detachably connect the upper calibration plate (100), the lower calibration plate (200) and the connector (300).

7. The lens calibration apparatus according to any one of claims 1-6, characterized in that, The upper calibration plate (100), the lower calibration plate (200), and the connector (300) are integrally formed.

8. The lens calibration apparatus according to any one of claims 1-6, characterized in that, Both the upper calibration plate (100) and the lower calibration plate (200) are transparent glass plates.

9. The lens calibration apparatus according to any one of claims 1-6, characterized in that, The calibration marks include one or more of calibration holes or calibration scale lines.

10. A bonding machine, characterized in that, The device includes a machine base, a lens assembly, and a lens calibration device as described in any one of claims 1-9, wherein the lens assembly is disposed on the machine base, the lens calibration device is slidably disposed on the machine base, the lens calibration device has a calibration position close to the lens assembly and a standby position away from the lens assembly, and the lens calibration device is driven to switch between the calibration position and the standby position.

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