Wafer processing dust remover with filter cartridge convenient to replace

Abstract

The wafer processing dust remover comprises a dust remover body, the back of the dust remover body is in contact with a rear cover, the interior of the dust remover body is fixedly connected with a support, the top of the inner wall of the support is in contact with the filter cartridge, the inner side of the rear cover is fixedly connected with a sealing gasket, and the inner side of the sealing gasket is fixedly connected with the filter cartridge. The sealing gasket is slidably connected with the dust remover body, a connecting rod is fixedly connected to the inner side of the rear cover, a guide rod is slidably connected into the connecting rod in a sleeved mode, and a first spring is arranged on the outer side of the guide rod. Through the design of the rear cover and the sealing gasket, the back of the dust remover body can be sealed and fixed, the connecting rod can be limited through the insertion connection of the ball and the groove, then the rear cover and the dust remover body can be connected and fixed, the separation of the ball and the groove can be realized by directly pulling the rear cover towards the outer side, the rear cover can be conveniently detached, and the dust remover is convenient to use. And the internal structure is convenient to overhaul and maintain.

Description

Technical Field

[0001] This utility model relates to the field of dust collector technology, specifically a wafer processing dust collector with easy filter cartridge replacement. Background Technology

[0002] A wafer is an important material in semiconductor manufacturing, typically a thin, circular sheet made of silicon or other semiconductor materials. As the foundation of semiconductor chips, wafers are an indispensable component in the manufacturing of electronic devices. The wafer manufacturing process includes steps such as single crystal growth, dicing, and polishing, ultimately forming a flat, transparent, circular sheet of material.

[0003] During the production and processing of wafers, a large amount of dust and particulate matter is inevitably generated. At this time, dust collectors are needed to prevent pollution to the external environment and human body, and can also achieve the purpose of recycling wafer fragments.

[0004] Currently, in wafer processing dust collectors, the filter cartridges used for dust removal are inconvenient to disassemble after installation. Furthermore, the frequent cleaning and maintenance of these cartridges is inconvenient. Therefore, improvements are needed. Utility Model Content

[0005] The purpose of this invention is to provide a wafer processing dust collector that facilitates filter cartridge replacement, thus solving the problem of inconvenient disassembly of the filter cartridge after installation.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a wafer processing dust collector with easy filter cartridge replacement, comprising a dust collector body, a rear cover contacting the back of the dust collector body, a bracket fixedly connected inside the dust collector body, a filter cartridge contacting the top of the inner wall of the bracket, a sealing gasket fixedly connected to the inner side of the rear cover, the sealing gasket being slidably connected to the dust collector body, a connecting rod fixedly connected to the inner side of the rear cover, a guide rod slidably sleeved inside the connecting rod, a first spring provided on the outer side of the guide rod, a slider fixedly connected to the outer side of the guide rod, the slider being slidably connected to the connecting rod, a ball bearing movably sleeved inside the slider, the ball bearing being movably connected to the dust collector body, and a connecting mechanism provided on the filter cartridge.

[0007] Preferably, one end of the first spring is fixedly connected to the connecting rod, and the other end of the first spring is fixedly connected to the slider. By designing the first spring, its force can be applied to the slider.

[0008] Preferably, the dust collector body has a groove inside, and a ball bearing is movably fitted inside the groove. By designing the groove, the ball bearing can roll inside the groove.

[0009] Preferably, the connecting mechanism includes a connecting strip, which is fixedly connected inside the filter cartridge. A fixing rod is fixedly connected inside the connecting strip. A second spring is provided on the outer side of the fixing rod. An insert block is slidably sleeved on the outer side of the fixing rod. The insert block is slidably connected to the connecting strip. A connecting post is slidably sleeved on the outer side of the insert block. The connecting post is fixedly connected to the bracket and slidably connected to the connecting strip. A guide block is fixedly connected to the inner side of the connecting strip. The guide block is slidably connected to the insert block. This connecting mechanism facilitates the disassembly of the filter cartridge.

[0010] Preferably, one end of the second spring is fixedly connected to the connecting strip, and the other end of the second spring is fixedly connected to the insert block. By designing the second spring, the force of the second spring can be applied to the insert block.

[0011] Preferably, the connecting column has an inclined groove inside, and an insert block is slidably connected inside the inclined groove. By designing the inclined groove, the insert block can slide inside the inclined groove.

[0012] Preferably, the insert has a guide groove inside, and a guide block is slidably connected inside the guide groove. By designing the guide groove, the insert can slide along the guide block.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0014] 1. This utility model, through the design of the back cover and sealing gasket, can seal and fix the back of the dust collector body. By inserting the ball bearings into the groove, the connecting rod can be limited, thereby connecting and fixing the back cover to the dust collector body. The ball bearings and groove can be separated by pulling the back cover outward, which can easily disassemble the back cover and facilitate the inspection and maintenance of the internal structure.

[0015] 2. This utility model, through the design of the sliding connection between the connecting column and the connecting strip, can limit the horizontal direction of the connecting strip and the filter cartridge. With the insertion of the insert block and the inclined groove, the vertical direction of the connecting strip and the filter cartridge can be limited, realizing the connection and fixation of the filter cartridge and the bracket. When disassembling the filter cartridge, simply pull down the filter cartridge to disassemble it, which is convenient for the maintenance, cleaning or replacement of the filter cartridge. Attached Figure Description

[0016] Figure 1 The overall three-dimensional structure of this utility model Figure 1 ;

[0017] Figure 2 The overall three-dimensional structure of this utility model Figure 2 ;

[0018] Figure 3 This utility model Figure 2 A partial three-dimensional structural diagram;

[0019] Figure 4 This utility model Figure 2 Top sectional view of the rear cover;

[0020] Figure 5 This utility model Figure 4 Enlarged view of point A;

[0021] Figure 6 This utility model Figure 3 A front sectional view of the filter cartridge;

[0022] Figure 7 This utility model Figure 6 Enlarged view of point B.

[0023] In the diagram: 1. Dust collector body; 2. Rear cover; 3. Support; 4. Filter cartridge; 5. Sealing gasket; 6. Connecting rod; 7. Guide rod; 8. First spring; 9. Connecting mechanism; 10. Sliding block; 11. Ball bearing; 12. Groove; 91. Connecting strip; 92. Fixing rod; 93. Second spring; 94. Insert block; 95. Connecting column; 96. Inclined groove; 97. Guide block; 98. Guide channel. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5A wafer processing dust collector with easy-to-replace filter cartridges includes a dust collector body 1, a rear cover 2 in contact with the back of the dust collector body 1, a bracket 3 fixedly connected inside the dust collector body 1, a filter cartridge 4 in contact with the top of the inner wall of the bracket 3, a sealing gasket 5 fixedly connected to the inner side of the rear cover 2, the sealing gasket 5 being slidably connected to the dust collector body 1, a connecting rod 6 fixedly connected to the inner side of the rear cover 2, a guide rod 7 slidably sleeved inside the connecting rod 6, a first spring 8 provided on the outer side of the guide rod 7, one end of the first spring 8 being fixedly connected to the connecting rod 6, and the other end of the first spring 8 being fixedly connected to the connecting rod 6. One end is fixedly connected to the slider 10. By designing the first spring 8, the force of the first spring 8 can be applied to the slider 10. The slider 10 is fixedly connected to the outside of the guide rod 7. The slider 10 is slidably connected to the connecting rod 6. The inside of the slider 10 is movably fitted with a ball bearing 11. The ball bearing 11 is movably connected to the dust collector body 1. The inside of the dust collector body 1 is provided with a groove 12. The ball bearing 11 is movably fitted inside the groove 12. By designing the groove 12, the ball bearing 11 can roll inside the groove 12. A connecting mechanism 9 is provided on the filter cartridge 4.

[0026] Please see Figure 1 , Figure 2 , Figure 3 , Figure 6 , Figure 7 The connecting mechanism 9 includes a connecting strip 91. The connecting strip 91 is fixedly connected inside the filter cartridge 4. A fixing rod 92 is fixedly connected inside the connecting strip 91. A second spring 93 is provided on the outside of the fixing rod 92. One end of the second spring 93 is fixedly connected to the connecting strip 91, and the other end is fixedly connected to the insert block 94. The second spring 93 is designed so that its force can act on the insert block 94. The insert block 94 is slidably sleeved on the outside of the fixing rod 92, and the insert block 94 is slidably connected to the connecting strip 91. A connecting post 95 is slidably sleeved on the outside of the insert block 94. The filter cartridge 95 has an inclined groove 96 inside, and an insert block 94 is slidably connected inside the inclined groove 96. The inclined groove 96 is designed so that the insert block 94 can slide inside the inclined groove 96. The connecting column 95 is fixedly connected to the bracket 3 and slidably connected to the connecting strip 91. The inner side of the connecting strip 91 is fixedly connected to the guide block 97, and the guide block 97 is slidably connected to the insert block 94. The insert block 94 has a guide groove 98 inside, and the guide block 97 is slidably connected inside the guide groove 98. The guide groove 98 is designed so that the insert block 94 can slide along the guide block 97. The connecting mechanism 9 is designed to facilitate the disassembly of the filter cartridge 4.

[0027] The specific implementation process of this utility model is as follows: When it is necessary to disassemble the rear cover 2, pull the rear cover 2 outward directly. The rear cover 2 drives the connecting rod 6 to move, and the connecting rod 6 drives the ball 11 to move. The ball 11 will roll along the arc surface of the groove 12. The ball 11 will be squeezed and pushed into the connecting rod 6. The ball 11 will drive the slider 10 to move horizontally. The slider 10 drives the guide rod 7 to move. The slider 10 squeezes the first spring 8 at the same time, which can separate the ball 11 from the groove 12. Then the connecting rod 6 can be pulled out from the dust collector body 1, and the rear cover 2 can be disassembled, which is convenient for the inspection and maintenance of the internal structure.

[0028] When the filter cartridge 4 needs to be disassembled, first remove the back cover 2, then pull down the filter cartridge 4 directly. The filter cartridge 4 drives the connecting bar 91 to move, and the connecting bar 91 drives the insert block 94 to move. The insert block 94 will slide along the inclined surface of the inclined groove 96 inside the connecting post 95. The insert block 94 will slide into the connecting bar 91. The insert block 94 will slide along the guide block 97. At the same time, the insert block 94 can slide along the fixing rod 92. The insert block 94 will squeeze the second spring 93, which can separate the insert block 94 from the inclined groove 96. Then the connecting bar 91 can be separated from the connecting post 95, and the filter cartridge 4 can be removed. The filter cartridge 4 is easy to disassemble, which facilitates the maintenance, cleaning or replacement of the filter cartridge 4.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wafer processing dust collector with easy-to-replace filter cartridges, comprising a dust collector body (1), characterized in that: The back of the dust collector body (1) is in contact with a rear cover (2). A bracket (3) is fixedly connected inside the dust collector body (1). A filter cartridge (4) is in contact with the top of the inner wall of the bracket (3). A sealing gasket (5) is fixedly connected to the inner side of the rear cover (2). The sealing gasket (5) is slidably connected to the dust collector body (1). A connecting rod (6) is fixedly connected to the inner side of the rear cover (2). A guide rod (7) is slidably sleeved inside the connecting rod (6). A first spring (8) is provided on the outer side of the guide rod (7). A slider (10) is fixedly connected to the outer side of the guide rod (7). The slider (10) is slidably connected to the connecting rod (6). A ball bearing (11) is movably sleeved inside the slider (10). The ball bearing (11) is movably connected to the dust collector body (1). A connecting mechanism (9) is provided on the filter cartridge (4).

2. A wafer processing dust collector with easily replaceable filter cartridges according to claim 1, characterized in that: One end of the first spring (8) is fixedly connected to the connecting rod (6), and the other end of the first spring (8) is fixedly connected to the slider (10).

3. A wafer processing dust collector with easily replaceable filter cartridges according to claim 1, characterized in that: The dust collector body (1) has a groove (12) inside, and a ball bearing (11) is movably connected inside the groove (12).

4. A wafer processing dust collector with easily replaceable filter cartridges according to claim 1, characterized in that: The connecting mechanism (9) includes a connecting strip (91). The connecting strip (91) is fixedly connected inside the filter cartridge (4). A fixing rod (92) is fixedly connected inside the connecting strip (91). A second spring (93) is provided on the outside of the fixing rod (92). An insert (94) is slidably sleeved on the outside of the fixing rod (92). The insert (94) is slidably connected to the connecting strip (91). A connecting column (95) is slidably sleeved on the outside of the insert (94). The connecting column (95) is fixedly connected to the bracket (3). The connecting column (95) is slidably connected to the connecting strip (91). A guide block (97) is fixedly connected to the inside of the connecting strip (91). The guide block (97) is slidably connected to the insert (94).

5. A wafer processing dust collector with easily replaceable filter cartridges according to claim 4, characterized in that: One end of the second spring (93) is fixedly connected to the connecting bar (91), and the other end of the second spring (93) is fixedly connected to the insert block (94).

6. A wafer processing dust collector with easily replaceable filter cartridges according to claim 4, characterized in that: The connecting column (95) has an inclined groove (96) inside, and a plug (94) is slidably connected inside the inclined groove (96).

7. A wafer processing dust collector with easily replaceable filter cartridges according to claim 4, characterized in that: The insert (94) has a guide groove (98) inside, and a guide block (97) is slidably connected inside the guide groove (98).

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