Grinding device

Abstract

The utility model belongs to the technical field of grinding equipment manufacturing, and discloses a grinding device which comprises a bracket, a retaining ring, an upper flange, an upper cover ring, a main body, a protective seat, an air bag rubber diaphragm, an edge pressing block and a positioning sealing seat, a retaining ring is arranged below the bracket; an upper cover ring is arranged above the bracket; a main body is fixedly arranged inside the upper cover ring; an upper flange is arranged above the main body; a positioning sealing seat is arranged between the bracket and the main body; a protective seat is arranged on the main body; an air bag rubber diaphragm is fixedly arranged below the protective seat; the air bag rubber diaphragm can be used for adsorbing and fixing a to-be-ground part; an edge pressing block is detachably arranged on the inner side of the air bag rubber diaphragm; the edge of the to-be-ground part is jacked and pressed through the edge pressing block; and a sealing ring seat is detachably and fixedly arranged on the protective seat. Through the combined design of the air bag rubber diaphragm, the protective seat and the edge pressing block, the grinding pressure can be ensured to be more uniformly distributed on the surface of the to-be-ground part in the grinding process of the to-be-ground part.

Description

Technical Field

[0001] This application relates to the field of grinding equipment technology, and more specifically, to a grinding apparatus. Background Technology

[0002] In the semiconductor material processing, wafers, as the basic material for commonly used semiconductor devices and integrated circuits, often require polishing. The quality of the polishing technology directly affects the quality of the silicon wafer and the performance of the semiconductor device. A polishing apparatus used for chemical mechanical polishing (CMP) of wafer components awaiting polishing typically includes a polishing platform, a polishing head, and a polishing pad mounted on the polishing platform. In the component manufacturing process, CMP involves fixing and adsorbing the back side of the component to be polished onto the polishing head, supplying a chemical polishing slurry to the polishing surface covered with the polishing pad, pressing the front side of the component onto the polishing pad, applying pressure through the polishing head, and simultaneously causing relative movement between the polishing platform and the polishing head to mechanically polish the surface of the component after chemical etching.

[0003] Prior art publication CN111168561B provides a grinding head for a wafer grinding apparatus, comprising a first rotating shaft, a grinding disk, and an adsorption-type combined pad. The first rotating shaft is fixedly connected to the upper end of the grinding disk. The adsorption-type combined pad includes a back pad, a fixing ring, and a buffer ring. The back pad is fixed to the lower surface of the grinding disk, and the fixing ring and the buffer ring are fixed to the lower surface of the back pad. The fixing ring is sleeved on the outside of the buffer ring, and the buffer ring and the back pad do not form a wafer receiving space enclosed by the lower surfaces of the fixing ring and the buffer ring. This invention's grinding head, by providing a buffer ring between the fixing ring and the wafer to be ground, can effectively prevent edge stress concentration caused by the fixing ring during grinding, thus improving the wafer grinding effect.

[0004] While the existing technical solutions described above can achieve the relevant beneficial effects through their structure, they still have the following drawbacks: Existing overall top-pressure grinding techniques have some problems, especially when the part to be ground is large or the material properties are uneven, which may lead to insufficient surface flatness or poor thickness uniformity after grinding. Existing techniques are not suitable for grinding parts with cut edges or notches; there is no specific solution for cut edges, leading to some adverse effects; when the part to be ground has a cut edge notch and is subjected to overall adsorption and top-pressure grinding, the following problems may occur: 1. Insufficient pressure: The edge cannot be sealed, and the grinding fluid enters between the back of the wafer and the silicone gasket film, corroding and contaminating the back of the wafer and the silicone gasket film; low removal rate and low efficiency; 2. Excessive pressure: It will squeeze the silicone gasket film into contact with the grinding pad, causing wear and tear on the silicone gasket film, increasing production costs; 3. Uneven grinding: Due to the cut edge notch on the part to be ground, the grinding head may experience uneven grinding pressure distribution when contacting the part. This can lead to inconsistent thickness on the surface of the part to be ground after grinding, thus affecting the flatness of the part and the quality of subsequent processes. 4. Chipping and breakage: The part to be ground is a brittle material. If it is subjected to uneven pressure or impact during the grinding process, especially at notches, it is easy to chip or break. This will not only reduce the yield of the part to be ground, but also increase production costs.

[0005] In view of this, we propose a grinding device. Utility Model Content

[0006] 1. Technical problems to be solved

[0007] The purpose of this application is to provide a grinding device that solves the technical problems mentioned in the background art. Through the combined design of the protective seat and the edge pressure block, it ensures that the grinding pressure is more evenly distributed on the surface of the part to be ground, especially for parts with notched edges. It can increase the grinding pressure to improve the removal rate and grinding efficiency, while also improving the utilization rate of related consumables and saving production costs. It improves the flatness of the part to be ground and the quality of subsequent processes. It reduces the risk of chipping and breakage. It disperses stress concentration, reducing the risk of cracks or fractures caused by stress concentration in subsequent processing or use, and also helps maintain the stable electrical properties of the part to be ground.

[0008] 2. Technical Solution

[0009] This application provides a grinding device, including: a bracket, a retaining ring, an upper flange, an upper cover ring, a main body, a protective seat, an airbag rubber diaphragm, a side pressure block, and a positioning sealing seat;

[0010] A retaining ring is detachably fixed at the bottom of the bracket;

[0011] The bracket is detachably fixed with a top cover ring at the top;

[0012] The main body is slidably mounted on the inner side of the top cover ring; an upper flange is detachably and fixedly mounted on the top of the main body; the upper flange is detachably and fixedly connected to the drive shaft of the external device; the upper flange and the drive shaft of the external device are detachably and fixedly connected through a standard interface to achieve rotation and air circuit control. This ensures the stability and reliability of power transmission.

[0013] A positioning sealing seat is provided between the bracket and the main body;

[0014] A protective seat is detachably fixed to the main body; the protective seat is slidably fitted with a retaining ring.

[0015] A detachable airbag rubber diaphragm is fixedly installed at the lower end of the protective seat; the airbag rubber diaphragm can adsorb and fix the parts to be ground. The airbag rubber diaphragm is positioned between the protective seat, the retaining ring, and the bracket; the protective seat slides on the main body, and the protective seat cooperates with the retaining ring to ensure smooth operation during the grinding process. The airbag rubber diaphragm is made of highly elastic, wear-resistant, and corrosion-resistant material. It uses negative pressure to adsorb and fix the parts to be ground to achieve the transfer of grinding parts between different grinding tables and between different functional worktables. Pressure can be applied individually during grinding to ensure the stability and uniformity of the grinding process.

[0016] An edge pressure block is detachably fixed to the inside of the airbag rubber diaphragm. The edge pressure block applies pressure to the edge of the part to be ground.

[0017] A sealing ring seat is detachably and fixedly installed on the protective base. The sealing ring seat is slidably fitted with the bracket;

[0018] The part to be ground can be a part with cut edges or notches, or other parts that require special control of the edges.

[0019] The above technical solution securely connects the upper flange to the drive shaft of the external equipment; the airbag rubber diaphragm adsorbs and fixes the part to be ground. A protective seat presses down on the center of the part to be ground; edge pressure blocks press down on the edges. This prevents the airbag diaphragm from exceeding the wafer thickness and contacting the grinding fluid and platform when grinding parts with kerfed edges, due to insufficient edge sealing or excessive pressure. The external equipment drives the upper flange and airbag rubber diaphragm to rotate, thereby rotating the part to be ground for grinding.

[0020] As an optional embodiment of this invention, an outer limiting ring is detachably snap-fitted onto the outer side of the airbag rubber diaphragm. The outer limiting ring further restricts the displacement of the part to be ground during the grinding process, ensuring that the part remains in the correct grinding position. Simultaneously, the outer limiting ring provides additional support for the airbag rubber diaphragm, preventing deformation or damage under high pressure. The outer limiting ring is made of wear-resistant and corrosion-resistant materials to ensure its long-term stability and reliability.

[0021] As an optional embodiment of this utility model, a positioning sealing seat is provided between the bracket and the main body, and a rolling diaphragm is provided on the outer side of the positioning sealing seat; the inner side of the rolling diaphragm is provided between the main body and the positioning sealing seat; the outer side of the rolling diaphragm is provided between the upper cover ring and the bracket, thereby achieving a good sealing effect. The rolling diaphragm is made of a material with high elasticity, wear resistance, and corrosion resistance to ensure its long-term sealing performance and stability.

[0022] As an optional solution of this utility model, a plurality of drainage grooves are evenly distributed at the lower end of the retaining ring; the drainage grooves are used to drain the grinding liquid during the grinding process of the part to be ground, and at the same time to observe the wear degree of the retaining ring.

[0023] The above technical solution allows the drain tank to drain the grinding fluid from the grinding process of the parts to be ground, and also to observe the wear of the retaining ring.

[0024] As an optional solution of this utility model, the airbag rubber diaphragm is provided with a side cavity and a main cavity;

[0025] A positioning protrusion is fixedly provided on the side wall of the side cavity; a groove that mates with the positioning protrusion is provided on the side pressure block;

[0026] The edge pressure block is set inside the edge cavity and is fixed and positioned by the positioning protrusion.

[0027] An outer sealing ring and an inner sealing ring are fixedly installed on the opening side of the side cavity.

[0028] The outer limiting ring is located on the outside of the side cavity.

[0029] The airbag rubber diaphragm has air holes.

[0030] The protective seat is snapped into the main cavity.

[0031] Through the above technical solution, the side cavity is mainly used to accommodate the side pressure block, and the positioning protrusion engages with the groove on the side pressure block to achieve a snap-fit ​​fixation. This design ensures the stability and accuracy of the side pressure block during the grinding process. The main cavity is used to snap into the protective seat, providing support for the middle part of the part to be ground. The outer and inner sealing rings improve airtightness. These two sealing rings together improve the airtightness of the part to be ground during the grinding process, preventing grinding fluid and other impurities from entering the side cavity from the outside and avoiding gas leakage.

[0032] As an optional embodiment of this utility model, the protective seat includes a shaft, a frustum, and a pressure plate;

[0033] A frustum is coaxially fixed to one end of the shaft; a pressure plate is fixedly mounted on the frustum.

[0034] Two sealing ring slots are provided on the shaft; the sealing ring slots are used to place the sealing rings. Air grooves A, B and C are provided on the pressure plate from the outside to the inside.

[0035] The shaft is equipped with air passages. These air passages are connected to air slots A, B, and C. The air passages can be connected to an external air source via connectors.

[0036] The pressure plate has a connecting groove that connects air groove A, air groove B and air groove C; the shaft has an air passage.

[0037] The above technical solution utilizes negative pressure to adsorb and fix the workpiece to be ground in air grooves A and C. Air grooves A and C function similarly to suction cups, adsorbing and fixing the workpiece. The design of multiple air grooves ensures more uniform air pressure distribution on the workpiece. Due to the large number of air grooves, air pressure can be distributed over a wider area, thus avoiding excessive localized stress on the workpiece. Uniform air pressure distribution helps ensure the stability and accuracy of the workpiece during the grinding process, improving grinding quality. Multiple air grooves create more air pressure support points, which work together to more firmly fix the workpiece on the pressure plate.

[0038] As an optional embodiment of this utility model, a pressure ring is detachably fixedly provided on the side pressure block; the side pressure block and the pressure ring are fixedly connected by several bolts. Both the pressure ring and the side pressure block are annular structures.

[0039] The above technical solution uses a pressure ring to fix the side pressure block and the airbag rubber diaphragm.

[0040] As an optional solution of this utility model, the upper flange is provided with air passage A, air passage B and air passage C;

[0041] Air passage A is connected to the shaft air passage, air groove A, and air groove C;

[0042] The combination of the rolling diaphragm and the sealing ring C creates an air pressure chamber A between the main body, the upper cover ring, the protective seat, and the bracket.

[0043] The side cavity of the airbag rubber diaphragm, together with the bracket, protective seat and sealing ring seat, forms the air pressure chamber B;

[0044] Air passage B is connected to compressed air chamber A. The cooperation between compressed air passage B and compressed air chamber A allows the top cover ring, protective seat, and bracket to move downwards under the action of air compression.

[0045] Air passage C is connected to air compressor chamber B. Through the cooperation of air compressor chamber B and air compressor passage, the edge pressure block and airbag rubber diaphragm apply pressure to the edge of the part to be ground.

[0046] The axial air passage, air groove A, air groove C and the main cavity form a vacuum adsorption chamber; the parts to be ground are adsorbed and fixed through the vacuum adsorption chamber and the airbag rubber diaphragm.

[0047] As an optional solution of this utility model, a sealing ring A is provided between the upper flange and the body;

[0048] A sealing ring B is provided between the shaft and the main body of the protective seat; the sealing ring B is set in the sealing ring groove;

[0049] The upper end of the truncated cone of the protective seat is provided with an annular groove A, and a sealing ring C is provided in the annular groove A; when the truncated cone contacts the bracket, the sealing ring C can play a sealing role.

[0050] The sealing ring seat has an annular groove B, and a sealing ring D is provided in the annular groove B. When the sealing ring seat contacts the bracket, the sealing ring D can play a sealing role.

[0051] A sealing ring E is provided between the inner sealing ring and the bracket.

[0052] As an optional solution of this utility model, a wafer adsorption positioning detection mechanism is detachably and fixedly installed on the protective base; the lower end of the wafer adsorption positioning detection mechanism is connected to the air groove B.

[0053] The wafer adsorption positioning detection mechanism includes a fixing plate, an overflow nozzle, and positioning bolts;

[0054] The fixing plate is detachably fixed to the protective base by positioning bolts;

[0055] An vent is slidably mounted on the fixed plate;

[0056] A spring is installed on the vent nozzle; a rubber ring is installed below the spring on the vent nozzle.

[0057] The bracket has air passages D and E; air passages D and E are connected.

[0058] One end of air passage D corresponds to the overflow nozzle; the lower end of air passage E is connected to the side cavity; and a sealing plug is detachably fixed at the upper end of air passage E.

[0059] 3. Beneficial effects

[0060] One or more technical solutions provided in this application have at least the following technical effects or advantages:

[0061] 1. This utility model uses a protective seat to press down on the middle part of the part to be ground; and edge pressure blocks to press down on the edges of the part to be ground. This avoids the problem of the air bladder film exceeding the wafer thickness and contacting the grinding fluid and grinding platform when grinding parts with kerfed edges, which can occur when the edges are not sealed or the pressure is too high. It can apply greater pressure without causing the air bladder film to exceed the wafer thickness and contact the grinding fluid and grinding platform, thus improving the removal rate and production efficiency.

[0062] 2. By pressing the edge of the part to be ground with the edge pressure block, the problem of incomplete grinding of the edge of the part to be ground when grinding the part with the cut edge is avoided, thus improving the grinding quality and yield.

[0063] 3. Highly adaptable, capable of grinding parts with cut edges. This device can adsorb, fix and grind parts with cut edges, expanding its application range and flexibility.

[0064] 4. The combined design of the protective seat and the edge pressure block ensures that the grinding pressure is more evenly distributed on the surface of the workpiece during grinding, especially for workpieces with notched edges. The pressing action of the edge pressure block on the edge of the workpiece compensates for the uneven grinding pressure caused by the notch, reduces the inconsistency in the thickness of the workpiece surface after grinding, and thus improves the flatness of the workpiece and the quality of subsequent processes.

[0065] 5. Reduces the risk of chipping and breakage: By applying additional pressure to the edges of the workpiece to be ground using the edge pressure block, the risk of chipping or breakage caused by uneven pressure or impact during the grinding process can be effectively reduced. This design is particularly suitable for workpieces with notched edges, significantly improving the yield rate and reducing production costs.

[0066] 6. It can disperse stress concentration: The pressing action of the edge pressure block on the edge of the part to be ground not only helps to evenly distribute the grinding pressure, but also disperses the stress concentration at the notch to a certain extent. This can reduce the risk of cracks or fractures caused by stress concentration in the part to be ground during subsequent processing or use, and at the same time help to maintain the stability of the electrical performance of the part to be ground, thereby improving the performance and reliability of the chip.

[0067] 7. This invention utilizes an airbag rubber diaphragm made of highly elastic, wear-resistant, and corrosion-resistant material. The diaphragm uses negative pressure to adhere and fix the part to be ground, ensuring stability and uniformity during the grinding process. The flexibility of the airbag rubber diaphragm helps reduce stress concentration and damage during grinding, protecting the integrity and performance of the part to be ground. Attached Figure Description

[0068] Figure 1 This is an overall schematic diagram of the grinding apparatus disclosed in a preferred embodiment of this application;

[0069] Figure 2 This is a schematic diagram of the external structure of the grinding apparatus disclosed in a preferred embodiment of this application;

[0070] Figure 3 This is a schematic diagram of the retaining ring of the grinding apparatus disclosed in a preferred embodiment of this application;

[0071] Figure 4 This is a schematic diagram of the engagement of the retaining ring and the airbag rubber diaphragm of the grinding device disclosed in a preferred embodiment of this application;

[0072] Figure 5 This is a schematic diagram of the airbag rubber diaphragm structure of the grinding device disclosed in a preferred embodiment of this application;

[0073] Figure 6 for Figure 5 Sectional view along line AA;

[0074] Figure 7 This is a schematic diagram of the protective base of the grinding apparatus disclosed in a preferred embodiment of this application;

[0075] Figure 8 This is a schematic diagram of the wafer adsorption positioning detection mechanism of the grinding apparatus disclosed in a preferred embodiment of this application, mounted on a protective base.

[0076] Figure 9 This is a schematic diagram of the wafer adsorption positioning detection mechanism of the grinding apparatus disclosed in a preferred embodiment of this application.

[0077] Figure 10 This is a schematic diagram of the holder of the grinding apparatus disclosed in a preferred embodiment of this application.

[0078] Figure 11 for Figure 10 Sectional view along the BB direction.

[0079] Figure label:

[0080] 1. Bracket; 2. Retaining ring; 3. Upper flange; 4. Part to be ground; 5. Upper cover ring; 6. Main body; 7. Protective seat; 8. Airbag rubber diaphragm; 9. Side pressure block; 10. Outer limit ring; 11. Rolling diaphragm; 12. Positioning sealing seat; 13. Pressure ring; 14. Sealing ring seat; 15. Sealing ring A; 16. Sealing ring B; 17. Sealing ring C; 18. Sealing ring D; 19. Sealing ring E; 21. Drainage groove; 31. Air passage A; 32. Air passage B; 33. Air passage C; 71 72. Shaft; 73. Frustum; 74. Pressure plate; 75. Air groove A; 76. Air groove B; 77. Connecting groove; 78. Air groove C; 79. Sealing ring slot; 70. Wafer adsorption positioning detection mechanism; 71. Fixing plate; 72. Overflow nozzle; 73. Spring; 74. Rubber ring; 75. Positioning bolt; 76. Shaft air passage; 87. Side cavity; 88. Main cavity; 89. Positioning protrusion; 80. Outer sealing ring; 81. Inner sealing ring; 82. Air passage E; 103. Air path D; 104. Air path E. Detailed Implementation

[0081] The present application will be further described in detail below with reference to the accompanying drawings.

[0082] Reference Figure 1 This application provides a grinding device, including: a bracket 1, a retaining ring 2, an upper flange 3, an upper cover ring 5, a main body 6, a protective seat 7, an airbag rubber diaphragm 8, an edge pressure block 9, and a positioning sealing seat 12;

[0083] A retaining ring 2 is detachably fixed at the bottom of the bracket 1;

[0084] A top cover ring 5 is detachably fixed above the bracket 1;

[0085] The main body 6 is slidably mounted on the inner side of the upper cover ring 5; the upper flange 3 is detachably fixed on the upper part of the main body 6; the upper flange 3 is detachably fixedly connected to the drive shaft of the external device; the upper flange 3 and the drive shaft of the external device are detachably fixedly connected through a standard interface (such as a flange, clamp, etc.) to achieve power transmission. This ensures the stability and reliability of power transmission.

[0086] A positioning sealing seat 12 is detachably fixed on the main body 6;

[0087] A protective seat 7 is slidably mounted on the main body 6; the protective seat 7 is slidably fitted with the retaining ring 2.

[0088] An airbag rubber diaphragm 8 is detachably fixed at the lower end of the protective seat 7; the airbag rubber diaphragm 8 can adsorb and fix the part 4 to be ground. The airbag rubber diaphragm 8 is positioned between the protective seat 7, the retaining ring 2, and the bracket 1; the protective seat 7 slides on the main body 6, and the protective seat 7 cooperates with the retaining ring 2 to ensure smooth operation during the grinding process. The airbag rubber diaphragm 8 is made of highly elastic, wear-resistant, and corrosion-resistant material, and uses negative pressure to adsorb and fix the part 4 to be ground, ensuring stability and uniformity during the grinding process. At the same time, the flexibility of the airbag rubber diaphragm 8 helps to reduce stress concentration and damage during the grinding process. The airbag rubber diaphragm 8 adsorbs and fixes the part 4 to be ground, achieving stable adsorption through negative pressure, ensuring grinding uniformity.

[0089] The upper cover ring 5 protects the internal components. The upper cover ring 5, together with the retaining ring 2, the main body 6, the protective seat 7 and the bracket 1, form a closed space.

[0090] An edge pressure block 9 is detachably fixed to the inner side of the airbag rubber diaphragm 8. The edge pressure block 9 presses down on the edge of the part 4 to be ground.

[0091] A sealing ring seat 14 is detachably and fixedly mounted on the protective base 7. The sealing ring seat 14 is slidably engaged with the bracket 1.

[0092] The part to be ground 4 can be a circular part with a cut edge or a notch.

[0093] In this technical solution, the upper flange 3 is fixedly connected to the drive shaft of the external equipment; the part to be ground 4 is adsorbed and fixed by the airbag rubber diaphragm 8. The protective seat 7 presses down on the middle part of the part to be ground 4; the edge pressure block 9 presses down on the edge of the part to be ground 4. The external equipment drives the upper flange 3 and the airbag rubber diaphragm 8 to rotate, thereby driving the part to be ground 4 to rotate for grinding. This avoids the problem of the airbag diaphragm exceeding the thickness of the wafer and contacting the grinding fluid and grinding platform when grinding parts with cut edges, where the edges cannot be sealed or the pressure is too high. It allows for higher pressure without the problem of the airbag diaphragm exceeding the thickness of the wafer and contacting the grinding fluid and grinding platform, thus improving the removal rate and production efficiency.

[0094] Furthermore, an outer limiting ring 10 is detachably snap-fitted onto the outer side of the airbag rubber diaphragm 8. The outer limiting ring 10 restricts the displacement of the airbag rubber diaphragm 8 during the grinding process, ensuring that the part 4 to be ground remains in the correct grinding position. Simultaneously, the outer limiting ring 10 provides additional support for the airbag rubber diaphragm 8, preventing deformation or damage under high pressure. The outer limiting ring 10 should be made of wear-resistant and corrosion-resistant materials to ensure its long-term stability and reliability.

[0095] Furthermore, a positioning sealing seat 12 is provided between the bracket 1 and the main body 6, and a rolling diaphragm 11 is provided on the outer side of the positioning sealing seat 12; the inner side of the rolling diaphragm 11 is provided between the main body 6 and the positioning sealing seat 12; the outer side of the rolling diaphragm 11 is provided between the upper cover ring 5 and the bracket 1, and the rolling diaphragm 11 plays a good sealing role.

[0096] The rolling diaphragm 11 is made of a highly elastic, wear-resistant, and corrosion-resistant material to ensure its sealing performance and stability during long-term use.

[0097] Reference Figure 3 and Figure 4 The retaining ring 2 has several drainage grooves 21 evenly distributed at its lower end. The drainage grooves 21 are used to drain the grinding fluid during the grinding process of the part to be ground, and also to observe the wear degree of the retaining ring 2. The design of the drainage grooves 21 allows the grinding fluid to be smoothly discharged from below the retaining ring 2, avoiding the accumulation of grinding fluid that could lead to a decrease in grinding effect or equipment failure.

[0098] In this technical solution, the drain trough 21 is used to drain the grinding fluid during the grinding process of the part to be ground, and at the same time, it is used to observe the wear degree of the retaining ring 2. When the depth of the drain trough 21 is worn to the set minimum value, it indicates that the retaining ring 2 has been excessively worn and needs to be replaced with a new retaining ring 2.

[0099] Reference Figure 5 and Figure 6 The airbag rubber diaphragm 8 is provided with a side cavity 81 and a main cavity 82;

[0100] A positioning protrusion 83 is fixedly provided on the side wall of the side cavity 81; a groove that mates with the positioning protrusion 83 is provided on the side pressure block 9;

[0101] The edge pressure block 9 is set inside the edge cavity 81 and is fixed and positioned by the positioning protrusion 83.

[0102] An outer sealing ring 84 and an inner sealing ring 85 are fixedly installed on the opening side of the side cavity 81.

[0103] The outer limiting ring 10 is located on the outside of the side cavity 81.

[0104] The airbag rubber diaphragm 8 is provided with air holes 86.

[0105] The protective seat 7 is snapped into the main cavity 82.

[0106] In this technical solution, the side cavity 81 is mainly used to accommodate the side pressure block 9, and is fixed in place by engaging with the groove on the side pressure block 9 through the positioning protrusion 83. This design ensures the stability and accuracy of the side pressure block 9 during the grinding process. The main cavity 82 is used to engage with the protective seat 7, providing support for the middle part of the part 4 to be ground. The outer sealing ring 84 and the inner sealing ring 85 can improve airtightness. These two sealing rings together improve the airtightness of the part to be ground during the grinding process, preventing grinding fluid and other impurities from entering the side cavity 81 from the outside and avoiding gas leakage.

[0107] Furthermore, the inner wall of the cavity 81 is provided with multiple progressively inward-advancing steps. These steps are designed to hold the protective seat 7 in place, ensuring its stability and positional accuracy during the grinding process. The progressive design of multiple steps achieves a more secure engagement, preventing the protective seat 7 from moving or falling off during grinding.

[0108] The upper end of the outer wall of cavity 81 slopes outward:

[0109] The upper end of the outer wall of the cavity 81 is designed to slope outwards. This design facilitates the snapping of the outer sealing ring 84 between the retaining ring 2 and the bracket 1. The sloped outer wall provides a guiding surface, making it easier for the outer sealing ring 84 to be installed in the correct position and to better cooperate with the retaining ring 2 and the bracket 1, achieving a good sealing effect.

[0110] Reference Figure 7 The protective seat 7 includes a shaft 71, a frustum 72, and a pressure plate 73;

[0111] A frustum 72 is coaxially fixed at one end of the shaft 71; a pressure plate 73 is fixedly mounted on the frustum 72.

[0112] Two sealing ring slots 77 are provided on the shaft 71; the sealing ring slots 77 are used to place the sealing rings. The pressure plate 73 has air grooves A74, B75 and C76 in sequence from the outside to the inside.

[0113] An air passage 78 is provided on the shaft 71. The air passage 78 is connected to air slots A74, B75, and C76. The air passage 78 can be connected to an external air source through a connector.

[0114] The pressure plate 73 is provided with a connecting groove 751, which connects the air groove A74, air groove B75 and air groove C76.

[0115] A shaft air passage 79 is provided on the shaft 71;

[0116] In this technical solution, negative pressure is used to adsorb and fix the workpiece 4 to be ground using air grooves A74 and C76. Air grooves A74 and C76 function similarly to suction cups to adsorb and fix the workpiece 4. The design of multiple air grooves allows for more uniform air pressure distribution on the workpiece. Due to the large number of air grooves, the air pressure can be distributed over a wider area, thus avoiding excessive localized stress on the workpiece. Uniform air pressure distribution helps ensure the stability and accuracy of the workpiece during the grinding process, improving grinding quality. Multiple air grooves can form more air pressure support points, which work together to more firmly fix the workpiece to be ground on the pressure plate 73. This stable fixation helps prevent displacement or deformation of the workpiece during grinding, thus ensuring grinding accuracy and consistency.

[0117] Furthermore, a pressure ring 13 is detachably fixedly provided on the side pressure block 9; preferably, the side pressure block 9 and the pressure ring 13 are fixedly connected by several bolts. Both the pressure ring 13 and the side pressure block 9 are annular structures.

[0118] The edge pressure block 9 and pressure ring 13 support and fix the airbag rubber diaphragm 8, ensuring even force distribution on the part to be ground. When grinding parts with cut edges or notches, the edge pressure block 9 and pressure ring 13 support and fix the airbag rubber diaphragm 8, keeping it horizontal above the cut edge or notch. This prevents grinding fluid from entering between the airbag rubber diaphragm 8 and the part to be ground, ensuring a good grinding effect. Without the support of the edge pressure block 9 and pressure ring 13, the airbag rubber diaphragm 8 above the cut edge or notch will sag under gravity during grinding, causing it to be worn and damaged by the grinding head, reducing its service life.

[0119] In this technical solution, the side pressure block 9 and the airbag rubber diaphragm 8 are fixed by the pressure ring 13.

[0120] Furthermore, an air passage A31, an air passage B32, and an air passage C33 are provided on the upper flange 3;

[0121] Air passage A31 is connected to shaft air passage 79, air groove A74 and air groove C76;

[0122] The cooperation of the rolling diaphragm 11 and the sealing ring C17 forms an air pressure chamber A between the main body 6, the upper cover ring 5, the protective seat 7 and the bracket 1;

[0123] The side cavity 81 of the airbag rubber diaphragm 8, together with the bracket 1, the protective seat 7 and the sealing ring seat 14, forms the air pressure chamber B;

[0124] Air passage B32 is connected to compressed air chamber A. Through the cooperation of compressed air passage 32 and compressed air chamber A, the upper cover ring 5, protective seat 7 and bracket 1 can be moved downward under the action of air compression.

[0125] Air passage C33 is connected to air compressor chamber B. Through the cooperation of air compressor chamber B and air compressor passage 32, the edge pressure block 9 and the airbag rubber diaphragm 8 press against the edge of the part 4 to be ground.

[0126] The axial air passage 79, air groove A74, air groove C76 and main cavity 82 form a vacuum adsorption chamber; the workpiece 4 to be ground is adsorbed and fixed through the vacuum adsorption chamber and the air bag rubber diaphragm 8.

[0127] Furthermore, a sealing ring A15 is provided between the upper flange 3 and the body 6;

[0128] A sealing ring B16 is provided between the shaft 71 of the protective seat 7 and the main body 6; the sealing ring B16 is located in the sealing ring groove 77;

[0129] The upper end of the truncated cone 72 of the protective seat 7 is provided with an annular groove A, and a sealing ring C17 is provided in the annular groove A; when the truncated cone 72 contacts the bracket 1, the sealing ring C17 can play a sealing role.

[0130] The sealing ring seat 14 has an annular groove B, and the annular groove B is provided with a sealing ring D18. When the sealing ring seat 14 contacts the bracket 1, the sealing ring D18 can play a sealing role.

[0131] A sealing ring E19 is provided between the inner sealing ring 85 and the bracket 1.

[0132] Reference Figure 8 , Figure 9 , Figure 10 and Figure 11 A wafer adsorption positioning detection mechanism 78 is detachably fixed on the protective base 7; the lower end of the wafer adsorption positioning detection mechanism 78 is connected to the air groove B75.

[0133] The wafer adsorption positioning detection mechanism 78 includes a fixing plate 781, an overflow nozzle 782, and a positioning bolt 785;

[0134] The fixing plate 781 is detachably fixed to the protective base 7 by the positioning bolts 785;

[0135] An overflow nozzle 782 is slidably provided on the fixed plate 781;

[0136] A spring 783 is provided on the vent 782; a rubber ring 784 is provided below the spring 783 on the vent 782.

[0137] The bracket 1 is provided with air passage D101 and air passage E102; air passage D101 and air passage E102 are connected; one end of air passage D101 corresponds to the overflow nozzle 782; the lower end of air passage E102 is connected to the side cavity 81; a sealing plug is detachably fixed at the upper end of air passage E102.

[0138] In this technical solution, when the airbag rubber diaphragm 8 uses negative pressure to adsorb and fix the part 4 to be ground, the airbag rubber diaphragm 8 contacts the lower end of the overflow nozzle 782 and gradually pushes the overflow nozzle 782 upward. The overflow nozzle 782 is pushed upward, making the side cavity 81 connected with the air groove A74, air groove C76 and main cavity 82, so that the air pressure is uniform. This allows the airbag rubber diaphragm 8 to apply uniform pressure to all parts of the part 4 to be ground, improving the grinding effect. The gas pressure inside the device is maintained within a suitable range. During the grinding process, the airbag rubber diaphragm 8 uses negative pressure to adsorb and fix the part 4 to be ground. The rubber ring 784 is used to enhance the sealing effect and prevent gas leakage, thereby improving the working efficiency and performance of the gas valve 78.

[0139] The working principle of this grinding device is as follows: First, the part to be ground 4 is placed under the airbag rubber diaphragm 8. The protective seat 7 is moved downward by the air pressure of the external equipment, so that the airbag rubber diaphragm 8 contacts the part to be ground 4. Then, through the external equipment and the vacuum circuit 31, the airbag rubber diaphragm 8 adsorbs and fixes the part to be ground 4 (the pressure plate 73 presses the middle part of the part to be ground 4, and the edge part of the part to be ground 4 is pressed by the side pressure block 9). The pressure in the side cavity 81 and the main cavity 82 is different. When the airbag rubber diaphragm 8 adsorbs and fixes the part to be ground 4 by negative pressure, the airbag rubber diaphragm 8 contacts the lower end of the overflow nozzle 782 and gradually pushes the overflow nozzle 782 upward. The overflow nozzle 782 is pushed upward, so that the side cavity 81 is connected with the air groove A74, the air groove C76 and the main cavity 82, and the air pressure is uniform. The airbag rubber diaphragm 8 presses the various parts of the part to be ground 4 evenly, improving the grinding effect. The grinding operation is performed by rotating the entire device and the part 4 to be ground using external equipment. After grinding, the part 4 to be ground is separated from the airbag rubber diaphragm 8 through the compressed air passage 32. Since the connecting groove 751 connects air grooves A74, B75, and C76, the part 4 to be ground can be quickly and evenly separated from the airbag rubber diaphragm 8, avoiding damage to the part 4 due to uneven force during separation. This facilitates the removal of the part 4 and the replacement with a new part 4 for grinding. The combined design of the protective seat 7 and the edge pressure block 9 ensures that the grinding pressure is more evenly distributed on the surface of the part to be ground, especially for parts with notched edges. The pressing action of the edge pressure block 9 on the edge of the part to be ground compensates for uneven grinding pressure caused by the notch, reducing the inconsistency in the thickness of the surface after grinding, thereby improving the flatness of the part and the quality of subsequent processes.

[0140] This invention utilizes an airbag rubber diaphragm 8 made of highly elastic, wear-resistant, and corrosion-resistant material. It employs negative pressure to adsorb and fix the workpiece 4 to be ground, ensuring stability and uniformity during the grinding process. The flexibility of the airbag rubber diaphragm 8 helps reduce stress concentration and damage during grinding, protecting the integrity and performance of the workpiece. The edge pressure block 9 presses against the edge of the workpiece 4, preventing issues such as the airbag diaphragm failing to seal the edge or excessive pressure causing it to exceed the wafer thickness and contact the grinding fluid and platform when grinding workpieces with slits. This improves grinding quality and yield. It is highly adaptable and can grind workpieces with slits. The device can adsorb, fix, and grind workpieces with slits, applying significant pressure without failing to seal the edge or causing the airbag diaphragm to exceed the wafer thickness and contact the grinding fluid and platform. This improves removal rate and production efficiency, expanding its application scope and flexibility.

[0141] The above-described embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A grinding apparatus, comprising: The bracket, retaining ring, upper flange, upper cover ring, main body, protective seat, airbag rubber diaphragm, side pressure block, and positioning sealing seat; the upper flange is detachably fixedly installed on the upper part of the main body; its characteristic is: A retaining ring is detachably fixed at the bottom of the bracket; a top cover ring is detachably fixed at the top of the bracket; a main body is slidably mounted inside the top cover ring; and a positioning sealing seat is provided between the bracket and the main body. The main body is detachably and fixedly equipped with a protective seat; the protective seat is slidably fitted with a retaining ring. An airbag rubber diaphragm is detachably and fixedly installed below the protective base; a side pressure block is detachably and fixedly installed inside the airbag rubber diaphragm; a sealing ring seat is detachably and fixedly installed on the protective base; the sealing ring seat is slidably fitted with the bracket.

2. The grinding apparatus according to claim 1, characterized in that: A detachable and fixed positioning sealing seat is installed at the bottom of the main body, and a rolling diaphragm is installed on the outside of the positioning sealing seat; the inner side of the rolling diaphragm is located between the main body and the positioning sealing seat; the outer side of the rolling diaphragm is located between the upper cover ring and the bracket, which serves as a sealing function.

3. The grinding apparatus according to claim 1, characterized in that: The airbag rubber diaphragm is provided with a side cavity and a main cavity; A positioning protrusion is fixedly provided on the side wall of the side cavity; a groove that mates with the positioning protrusion is provided on the side pressure block; the side pressure block is placed inside the side cavity and is fixedly positioned by the positioning protrusion. An outer sealing ring and an inner sealing ring are fixedly installed on the opening side of the side cavity; an outer limiting ring is installed on the outside of the side cavity; and the protective seat is engaged with the main cavity.

4. The grinding apparatus according to claim 1, characterized in that: The protective seat includes a shaft, a frustum, and a pressure plate; A frustum is coaxially fixed to one end of the shaft; a pressure plate is fixedly mounted on the frustum. A sealing ring groove is provided on the shaft; air grooves A, B and C are provided on the pressure plate from the outside to the inside. The shaft is equipped with an air passage; the air passage is connected to air groove A, air groove B and air groove C. The pressure plate has a connecting groove that connects air groove A, air groove B and air groove C; the shaft has an air passage.

5. The grinding apparatus according to claim 1, characterized in that: A pressure ring is detachably fixed to the side pressure block.

6. The grinding apparatus according to claim 5, characterized in that: Both the pressure ring and the side pressure block are ring structures.

7. The grinding apparatus according to claim 4, characterized in that: The upper flange is equipped with air passage A, air passage B and air passage C; air passage A is connected to the shaft air passage, air groove A and air groove C; The combination of the rolling diaphragm and the sealing ring C forms an air pressure chamber A between the main body, the upper cover ring, the protective seat, and the bracket; the side cavity of the airbag rubber diaphragm, together with the bracket, the protective seat, and the sealing ring seat, forms an air pressure chamber B. Air passage B is connected to air compressor chamber A; air passage C is connected to air compressor chamber B. The axial air passage, air groove A, air groove C and the main cavity together form a vacuum adsorption chamber.

8. The grinding apparatus according to claim 1, characterized in that: The protective base is detachably and fixedly equipped with a wafer adsorption positioning detection mechanism. The wafer adsorption positioning detection mechanism includes a fixing plate, an overflow nozzle, and positioning bolts; the fixing plate is detachably fixed to the protective base by the positioning bolts; the overflow nozzle is slidably mounted on the fixing plate; A spring is installed on the vent nozzle; a rubber ring is installed below the spring on the vent nozzle.

9. The grinding apparatus according to claim 3, characterized in that: The airbag rubber diaphragm is made of a highly elastic, wear-resistant, and corrosion-resistant material; the inner wall of the side cavity is provided with multiple steps that gradually advance inward; the upper end of the outer wall of the side cavity is inclined outward.

10. The grinding apparatus according to claim 8, characterized in that: The lower end of the retaining ring is provided with several drainage grooves evenly distributed; the bracket is provided with air passages D and E; air passages D and E are connected. One end of air passage D corresponds to the overflow nozzle; the lower end of air passage E is connected to the side cavity; and a sealing plug is detachably fixed at the upper end of air passage E.

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