Multilayer current collector coating device with static elimination mechanism

Abstract

The utility model relates to the technical field of multi-layer current collectors, in particular to a multi-layer current collector coating device with an electrostatic elimination mechanism, which is characterized in that a plurality of groups of molecular pumps are distributed outside a coating chamber, two groups of main rollers are arranged in the coating chamber, and baffles for separating spaces on two sides of the two groups of main rollers from a space between the two groups of main rollers are arranged in the coating chamber; a film material unwinding mechanism and a film material winding mechanism of the main rollers are both located between the two main rollers, target materials are located on the two sides of the main rollers, and static electricity eliminating mechanisms are installed at the positions where the film materials enter the main rollers; the static electricity eliminating mechanism comprises an upper support and a lower support, the upper support is fixedly installed in the coating cavity, the bottom of the upper support is connected with the lower support through an adjusting mechanism, a static electricity eliminator is installed on the bottom face of the lower support, and a leaning roller is installed at the bottom of the static electricity eliminator. The static electricity on the surface of the film material is eliminated, the phenomena of needle holes, holes and the like on the film surface caused by target material sparking and abnormal discharge due to the static electricity generated by the film material in the magnetic control process are avoided, and the vacuum coating quality is improved.

Description

Technical Field

[0001] This application relates to the field of multilayer current collector technology, and in particular to a multilayer current collector coating apparatus with an electrostatic elimination mechanism. Background Technology

[0002] In the production process of multilayer current collectors, the magnetron sputtering process is prone to static electricity due to the large contact area between the base film and the roller system. In addition, the low resistivity of the film material itself also makes it easy to generate static electricity. Static electricity can cause the target material to spark and abnormal discharge during the production process, resulting in phenomena such as holes and pinholes. There is no good way to eliminate static electricity in the existing production process. Utility Model Content

[0003] To address the pinhole and hole problems caused by static electricity during magnetostatic control, this application provides a multilayer current collector coating device with a static electricity elimination mechanism.

[0004] The multilayer current collector coating device with an electrostatic elimination mechanism provided in this application adopts the following technical solution:

[0005] A multilayer current collector coating apparatus with an electrostatic elimination mechanism includes a coating chamber, several sets of molecular pumps distributed outside the coating chamber, two sets of main rollers respectively carrying the front and back sides of the film material inside the coating chamber, and a baffle separating the space on both sides of the two sets of main rollers from the space between the two sets of main rollers inside the coating chamber. The film material unwinding mechanism and the film material winding mechanism of the main rollers are both located between the two main rollers. The target material for coating the film material carried on the main rollers is located on both sides of the main rollers. An electrostatic elimination mechanism is installed where the film material enters the main rollers. The electrostatic elimination mechanism includes an upper support and a lower support. The upper support is fixedly installed inside the coating chamber, and the bottom of the upper support is connected to the lower support through an adjustment mechanism. An electrostatic eliminator is installed on the bottom surface of the lower support. The bottom of the electrostatic eliminator is equipped with a roller for placing the film material. The adjustment mechanism can adjust the distance between the electrostatic eliminator and the main rollers.

[0006] By employing the above technical solution, a molecular pump outside the coating chamber is used to evacuate the coating chamber, providing a vacuum for the magnetron sputtering process of vacuum coating. Inside the coating chamber, two sets of main rollers sequentially wind the front and back sides of the film material unwound from the film material unwinding mechanism. A certain voltage is applied between the target material and the film material located outside the two main rollers, ionizing the gas to form plasma. Ions in the plasma are accelerated and collide with the target surface under the influence of the electric field, sputtering target atoms and depositing them onto the film material to form a thin film. An electrostatic elimination mechanism is installed where the film material enters the main rollers. By introducing opposite charges onto the surface of the object, it neutralizes the static electricity on the surface, thereby eliminating static electricity and preventing the base film from generating static electricity during the magnetron sputtering process, which could cause target arcing, abnormal discharge, or pinholes and pores on the film surface. The electrostatic elimination device consists of an upper bracket fixedly installed within the coating chamber, equipped with an electrostatic eliminator. When the electrostatic eliminator operates, it generates a large number of positive and negative ions through high-voltage discharge. When a statically charged film material is guided near the electrostatic eliminator by the bottom roller, these positive and negative ions move towards the film material under the influence of the electrostatic field and neutralize the static charge on the film surface, thus eliminating static electricity. Furthermore, an adjustment mechanism installed at the bottom of the upper bracket drives the lower bracket to move, thereby adjusting the position of the film material entering the main roller and improving the smoothness of the electrostatic-eliminating film material entering the main roller.

[0007] Preferably, the film unwinding mechanism includes an unwinding roller and several sets of guide rollers, wherein tension rollers are also installed between the guide rollers, and a flattening roller capable of guiding the film material along the tangent of the main roller is also installed at the point where the film material enters the main roller on the film unwinding mechanism.

[0008] By adopting the above technical solution, the membrane unwinding mechanism unwinds the membrane material through the unwinding roller. The membrane material is guided into the main roller by two sets of guide rollers. The tension of the membrane material is adjusted by tension rollers between the two sets of guide rollers. A flattening roller is set between the guide rollers and the main roller to ensure that the membrane material can enter the main roller flat.

[0009] Preferably, the film winding mechanism includes a winding roller and several guide rollers, wherein tension rollers are also installed between the guide rollers, and a flattening roller that can guide the film along the tangent of the winding roller is also installed near the winding roller, and a tracking roller is also installed between the flattening roller and the winding roller.

[0010] By adopting the above technical solution, the film unwinding mechanism winds up the coated film through the take-up roller. Two sets of guide rollers guide the film on the main roller to the take-up roller. Tension rollers are used between the two sets of guide rollers to adjust the tension of the film. A flattening roller is set between the guide rollers and the take-up roller to ensure the flatness of the film entering the take-up roller. A tracking roller is also set before the film enters the take-up roller to monitor and adjust the position of the film during the transmission process, ensuring that the film can travel accurately along the predetermined path throughout the production line, avoiding deviation, wrinkles, and other situations that affect product quality and production efficiency.

[0011] Preferably, a guide roller and a flattening roller for transferring the film material are also installed between the main rollers, wherein the guide roller is located at the film material discharge end and the flattening roller is located at the film material feed end of the main roller, which can guide the film material along the tangent of the main roller.

[0012] By adopting the above technical solution, the guide rollers between the main rollers can act on the previous set of main rollers, allowing the film material on the main rollers to adhere to the main rollers. The flattening rollers set at the feed end of the next set of main rollers can adhere the film material to the main rollers, thus improving the continuity of film material transfer between the two sets of main rollers.

[0013] Preferably, the adjustment mechanism includes two sets of slide rails connected to the bottom of the upper support. The two ends of the slide rails are connected to the upper support through a first limiter and a second limiter, respectively. A slide block is slidably installed on the slide rail, and the bottom of the slide block is connected to the lower support.

[0014] Preferably, a threaded sleeve is also installed on the slide, and the threaded sleeve cooperates with the lead screw at the output end of the driver installed on the upper bracket for transmission.

[0015] Preferably, a drive cylinder is also installed at the bottom of the slide, wherein the top of the drive cylinder is connected to the slide via a slide connecting plate, and the bottom of the drive cylinder is connected to the lower bracket via a drive cylinder connecting plate.

[0016] Preferably, a limiting block is also installed at the end of the roller away from the static eliminator. The limiting block is located at the free ends of both sides of the lower support, and the spacing between the limiting blocks is adapted to the width of the main roller.

[0017] By adopting the above technical solution, the upper support consists of two sets of frames connected by a slide rail. The two ends of the slide rail are connected to the upper support via a first limiter and a second limiter, respectively. When adjusting the lower support horizontally, a driver on the upper support rotates the lead screw at the output end of a servo motor driver, which, in conjunction with the lead screw sleeve on the top of the slide block, drives the slide block to move horizontally on the slide rod, thus driving the lower support mounted at the bottom of the slide block. A drive cylinder is also installed at the bottom of the slide block. The upper and lower ends of the drive cylinder are connected to the slide block and the lower support via a slide block connecting plate and a drive cylinder connecting plate, respectively. The drive cylinder can drive the lower support with the static eliminator to move longitudinally. Furthermore, the limit block at the free end of the lower support can be adapted to the width of the main roller, aligning the position of the lower support with the sides of the main roller to ensure the stability of the film material transmission. The entire adjustment mechanism realizes the adjustment of the static eliminator in both the horizontal and vertical directions, improving the static elimination quality of the film material.

[0018] In summary, this application includes the following beneficial technical effects:

[0019] This application introduces charges in the opposite direction onto the surface of the film material before vacuum coating through an electrostatic elimination mechanism to neutralize the static electricity on the object surface, thereby achieving the purpose of eliminating static electricity and preventing the base film from generating static electricity during the magnetron process, which could cause target arcing, abnormal discharge, and pinholes or holes on the film surface. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of a multilayer current collector coating device with an electrostatic elimination mechanism;

[0021] Figure 2 This is a front view of the adjustment mechanism in a multilayer current collector coating device with an electrostatic elimination mechanism;

[0022] Figure 3 This is a side view of the adjustment mechanism in a multilayer current collector coating device with an electrostatic elimination mechanism.

[0023] Explanation of reference numerals in the attached drawings: 1. Coating chamber; 11. Molecular pump; 12. Main roller; 121. Target material; 13. Baffle; 2. Film unwinding mechanism; 21. Unwinding roller; 3. Film winding mechanism; 31. Winding roller; 4. Static eliminator mechanism; 41. Upper support; 411. Driver; 412. Lead screw; 42. Lower support; 421. Static eliminator; 422. Guide roller; 4221. Limiting block; 43. Adjusting mechanism; 431. Slide rail; 432. First limiter; 433. Second limiter; 434. Slide seat; 4341. Wire sleeve; 435. Drive cylinder; 4351. Slide seat connecting plate; 4352. Drive cylinder connecting plate; 5. Guide roller; 6. Tension roller; 7. Flattening roller; 8. Tracking roller. Detailed Implementation

[0024] The following is in conjunction with the appendix Figure 1-3 This application will be described in further detail.

[0025] This application discloses a multilayer current collector coating device with an electrostatic elimination mechanism.

[0026] Reference Figure 1 , Figure 2 and Figure 3A multilayer current collector coating device with an electrostatic elimination mechanism includes a coating chamber 1, several sets of molecular pumps 11 distributed outside the coating chamber 1, two sets of main rollers 12 respectively carrying the front and back sides of the film material inside the coating chamber 1, and a baffle 13 separating the space on both sides of the two sets of main rollers 12 from the space between the two sets of main rollers 12 inside the coating chamber 1. The film material unwinding mechanism 2 and the film material winding mechanism 3 of the main rollers 12 are both located between the two main rollers 12, and the target material 121 for coating the film material carried on the main rollers 12 is located on the main rollers 12. On both sides, an electrostatic elimination mechanism 4 is installed where the film material enters the main roller 12. The electrostatic elimination mechanism 4 includes an upper support 41 and a lower support 42. The upper support 41 is fixedly installed inside the coating chamber 1, and its bottom is connected to the lower support 42 via an adjustment mechanism 43. An electrostatic eliminator 421 is installed on the bottom surface of the lower support 42, and a roller 422 for placing the film material is installed at the bottom of the electrostatic eliminator 421. The adjustment mechanism 43 can adjust the distance between the electrostatic eliminator 421 and the main roller 12. A molecular pump 11 outside the coating chamber 1 is used to evacuate the coating chamber 1, providing a vacuum for the magnetron vacuum coating process. Two sets of main rollers 12 in the coating chamber 1 sequentially wind the front and back sides of the film material unwound from the film material unwinding mechanism 2. A certain voltage is applied between the target material 121 located outside the two main rollers 12 and the film material, causing gas ionization to form plasma. Ions in the plasma are accelerated and collide with the surface of the target material 121 under the influence of the electric field, sputtering the atoms of the target material 121 and depositing them onto the film material to form a thin film. An electrostatic elimination mechanism 4 is installed where the film material enters the main rollers 12. By introducing charges in the opposite direction onto the surface of the object, it neutralizes the static electricity on the surface, thereby eliminating static electricity and preventing the base film from generating static electricity during the magnetron sputtering process, which could cause sparking or abnormal discharge on the target material 121, resulting in pinholes or holes on the film surface. The electrostatic elimination device is equipped with an electrostatic eliminator 421 mounted on an upper bracket 41 fixedly installed inside the coating chamber 1. When the electrostatic eliminator 421 is working, it generates a large number of positive and negative ions through high-voltage discharge. When a statically charged film material is guided near the electrostatic eliminator 421 by the bottom roller 422, these positive and negative ions move towards the statically charged film material under the action of the electrostatic field and neutralize the static charge on the surface of the film material, thereby eliminating the static electricity on the surface of the object. Furthermore, the adjustment mechanism 43 installed at the bottom of the upper bracket 41 can drive the lower bracket 42 to move, thereby adjusting the position of the film material entering the main roller 12 and improving the smoothness of the static-eliminating film material entering the main roller 12.

[0027] Reference Figure 1 , Figure 2 and Figure 3The membrane unwinding mechanism 2 includes an unwinding roller 21 and several sets of guide rollers 5. Tension rollers 6 are also installed between the guide rollers 5. A flattening roller 7 is installed at the point where the membrane enters the main roller 12, allowing the membrane to enter along the tangent of the main roller 12. The membrane unwinding mechanism 2 unwinds the membrane via the unwinding roller 21. The membrane is guided into the main roller 12 by two sets of guide rollers 5. The tension of the membrane is adjusted between the two sets of guide rollers 5 by the tension rollers 6. The flattening roller 7 is positioned between the guide rollers 5 and the main roller 12 to ensure the membrane enters the main roller 12 smoothly.

[0028] Reference Figure 1 , Figure 2 and Figure 3 The film winding mechanism 3 includes a winding roller 31 and several guide rollers 5. Tension rollers 6 are installed between the guide rollers 5. A flattening roller 7 is installed near the winding roller 31 on each guide roller 5 to guide the film material along the tangent of the winding roller 31. A tracking roller 8 is installed between the flattening roller 7 and the winding roller 31. The film unwinding mechanism 2 winds up the coated film material via the winding roller 31. Two sets of guide rollers 5 guide the film material from the main roller 12 to the winding roller 31. Tension rollers 6 adjust the tension of the film material between the two sets of guide rollers 5. The flattening roller 7 is installed between the guide rollers 5 and the winding roller 31 to ensure the flatness of the film material entering the winding roller 31. A tracking roller 8 is installed before the film material enters the winding roller 31 to monitor and adjust the position of the film material during transmission, ensuring that the film material travels accurately along a predetermined path throughout the production line, avoiding deviations, wrinkles, and other issues that affect product quality and production efficiency.

[0029] Reference Figure 1 , Figure 2 and Figure 3 Guide rollers 5 and flattening rollers 7 for transferring film material are also installed between the main rollers 12. The guide rollers 5 are located at the film material discharge end, and the flattening rollers 7 are located at the film material feed end of the main rollers 12, which can guide the film material along the tangent of the main rollers 12. The guide rollers 5 between the main rollers 12 can act on the previous set of main rollers 12 to make the film material on the main rollers 12 adhere to the main rollers 12. The flattening rollers 7 located at the feed end of the next set of main rollers 12 can adhere the film material to the main rollers 12, thereby improving the continuity of film material transfer between the two sets of main rollers 12.

[0030] Reference Figure 1 , Figure 2 and Figure 3The adjusting mechanism 43 includes two sets of slide rails 431 connected to the bottom of the upper bracket 41. Both ends of the slide rails 431 are connected to the upper bracket 41 via a first limiter 432 and a second limiter 433, respectively. A slide block 434 is slidably mounted on the slide rails 431, and the bottom of the slide block 434 is connected to the lower bracket 42. A threaded sleeve 4341 is also mounted on the slide block 434, and the threaded sleeve 4341 engages with the lead screw 412 at the output end of the driver 411 mounted on the upper bracket 41 for transmission. A drive cylinder 435 is also mounted at the bottom of the slide block 434, with the top of the drive cylinder 435 connected to the slide block 434 via a slide block connecting plate 4351, and the bottom of the drive cylinder 435 connected to the lower bracket 42 via a drive cylinder connecting plate 4352. A limit block 4221 is also installed at the end of the roller 422 away from the static eliminator 421. The limit blocks 4221 are located at the free ends of both sides of the lower support 42, and the spacing between the limit blocks 4221 is adapted to the width of the main roller 12. The upper support 41 consists of two sets of frames, and a slide rail 431 is connected between the two sets of frames. The two ends of the slide rail 431 are connected to the upper support 41 through the first limiter 432 and the second limiter 433, respectively. When the lower support 42 is adjusted horizontally, the driver 411 on the upper support 41 rotates through the lead screw 412 at the output end of the servo motor driver 411, which cooperates with the lead sleeve 4341 on the top of the slide block 434 to drive the slide block 434 to move horizontally on the slide rod, thereby driving the lower support 42 installed at the bottom of the slide block 434. A drive cylinder 435 is also installed at the bottom of the slide block 434. The upper and lower ends of the drive cylinder 435 are connected to the slide block 434 and the lower support 42 through the slide block connecting plate 4351 and the drive cylinder connecting plate 4352, respectively. The drive cylinder 435 can drive the lower support 42 with the static eliminator 421 to move longitudinally. The limiting block 4221 set at the bottom free end of the lower support 42 can be adapted to the width of the main roller 12, so that the position of the lower support 42 matches the two sides of the main roller 12, ensuring the stability of the film material transmission. The entire adjustment mechanism 43 realizes the adjustment of the static eliminator 421 in the horizontal and vertical directions, improving the static elimination quality of the film material.

[0031] Working principle: During operation, the molecular pump 11 outside the coating chamber 1 is used to evacuate the coating chamber 1, providing a vacuum for the magnetron vacuum coating process. The film material unwinding mechanism 2, located between the two main rollers 12, unwinds the film material to be coated. The position of the static elimination mechanism 4 is adjusted by the adjusting mechanism 43 to eliminate static electricity on the surface of the film material before it enters the main rollers 12 for coating. A certain voltage is applied between the target material 121 located outside the two main rollers 12 and the film material to ionize the gas and form plasma. The ions in the plasma are accelerated and collide with the surface of the target material 121 under the action of the electric field, sputtering the atoms of the target material 121 and depositing them on the film material to form a thin film. After the two sets of main rollers 12 coat both sides of the film material, it is wound up by the film material winding mechanism 3.

[0032] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A multilayer current collector coating apparatus with an electrostatic elimination mechanism, characterized in that: The coating chamber (1) includes a coating chamber (1), and several sets of molecular pumps (11) are distributed outside the coating chamber (1). The coating chamber (1) is equipped with two sets of main rollers (12) that carry the front and back sides of the film material respectively. The coating chamber (1) is equipped with a baffle (13) that separates the space on both sides of the two sets of main rollers (12) from the space between the two sets of main rollers (12). The film material unwinding mechanism (2) and the film material winding mechanism (3) of the main roller (12) are located between the two main rollers (12). The target material (121) used to coat the film material carried on the main roller (12) is located on both sides of the main roller (12). An electrostatic elimination mechanism (4) is installed at the point where the film material enters the main roller (12). The static elimination mechanism (4) includes an upper support (41) and a lower support (42). The upper support (41) is fixedly installed in the coating chamber (1), and the bottom of the upper support (41) is connected to the lower support (42) through an adjustment mechanism (43). A static eliminator (421) is installed on the bottom surface of the lower support (42). A roller (422) for placing film material is installed at the bottom of the static eliminator (421). The adjustment mechanism (43) can adjust the distance between the static eliminator (421) and the main roller (12).

2. The multilayer current collector coating apparatus with an electrostatic elimination mechanism according to claim 1, characterized in that: The unwinding mechanism (2) includes an unwinding roller (21) and several sets of guide rollers (5), wherein tension rollers (6) are also installed between the guide rollers (5), and a flattening roller (7) is also installed at the point where the film enters the main roller (12) on the unwinding mechanism (2) to allow the film to enter along the tangent of the main roller (12).

3. The multilayer current collector coating apparatus with an electrostatic elimination mechanism according to claim 1, characterized in that: The film winding mechanism (3) includes a winding roller (31) and several guide rollers (5), wherein tension rollers (6) are also installed between the guide rollers (5), and a flattening roller (7) that can guide the film along the tangent of the winding roller (31) is also installed near the winding roller (31) of the guide roller (5), and a tracking roller (8) is also installed between the flattening roller (7) and the winding roller (31).

4. The multilayer current collector coating apparatus with an electrostatic elimination mechanism according to claim 1, characterized in that: A guide roller (5) and a flattening roller (7) for transferring the film material are also installed between the main rollers (12). The guide roller (5) is located at the discharge end of the film material, and the flattening roller (7) is located at the feed end of the main roller (12), which can guide the film material along the tangent of the main roller (12).

5. A multilayer current collector coating apparatus with an electrostatic elimination mechanism according to claim 1, characterized in that: The adjustment mechanism (43) includes two sets of slide rails (431) connected to the bottom of the upper bracket (41). The two ends of the slide rails (431) are connected to the upper bracket (41) through the first limiter (432) and the second limiter (433) respectively. A slide seat (434) is slidably installed on the slide rails (431), and the bottom of the slide seat (434) is connected to the lower bracket (42).

6. A multilayer current collector coating apparatus with an electrostatic elimination mechanism according to claim 5, characterized in that: A threaded sleeve (4341) is also installed on the slide (434), and the threaded sleeve (4341) cooperates with the lead screw (412) at the output end of the driver (411) installed on the upper bracket (41) for transmission.

7. A multilayer current collector coating apparatus with an electrostatic elimination mechanism according to claim 6, characterized in that: A drive cylinder (435) is also installed at the bottom of the slide (434), wherein the top of the drive cylinder (435) is connected to the slide (434) through the slide connecting plate (4351), and the bottom of the drive cylinder (435) is connected to the lower bracket (42) through the drive cylinder connecting plate (4352).

8. A multilayer current collector coating apparatus with an electrostatic elimination mechanism according to claim 7, characterized in that: The end of the roller (422) away from the static eliminator (421) is also equipped with a limiting block (4221). The limiting block (4221) is located at the free ends of both sides of the lower support (42), and the spacing between the limiting blocks (4221) is adapted to the width of the main roller (12).

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