Composite diaphragm assembly applied to semiconductor pneumatic diaphragm pump

Abstract

The utility model discloses a composite diaphragm assembly applied to a semiconductor pneumatic diaphragm pump. The composite diaphragm assembly comprises a diaphragm unit, a connecting unit and a fixing unit. The connecting unit is connected with the diaphragm unit into a whole through the fixing unit, the connecting unit is located at the rear end of the diaphragm unit, and the fixing unit is located at the front end of the diaphragm unit; the diaphragm unit is provided with a diaphragm body, the diaphragm body is sequentially provided with an anti-corrosion layer, a reinforcing layer and an elastic layer from front to back, the diaphragm body is sequentially provided with a diaphragm ring and a limiting ring from the inner ring to the outer ring, a limiting cushion layer is further arranged between the elastic layer and the reinforcing layer in the limiting ring, and the front end and the rear end of the limiting ring are each provided with a plurality of rubber reinforcing rings. By arranging the anti-corrosion layer, the reinforcing layer and the elastic layer, stable and reliable supporting can be provided for the diaphragm body, transportation control over different fluid flows can be achieved by arranging the diaphragm ring and the limiting ring, and by arranging the limiting cushion layer, gear control over the diaphragm ring by the limiting ring can be guaranteed.

Description

Technical Field

[0001] This utility model relates to the technical field of composite diaphragm structure for pneumatic diaphragm pumps, and more particularly to a composite diaphragm assembly applied to semiconductor pneumatic diaphragm pumps. Background Technology

[0002] A pneumatic diaphragm pump is a new type of fluid machinery that uses the reciprocating motion of a diaphragm to achieve the purpose of liquid transportation. It mainly uses compressed air as its main power source and has a strong self-priming ability. It can transport various corrosive, highly toxic, flammable, volatile liquids, as well as liquids containing small particles and high viscosity. It can support forward and reverse rotation and has good leak-proof, corrosion-resistant, and easy-to-maintain characteristics.

[0003] Pneumatic diaphragm pumps are widely used in the semiconductor industry, typically for conveying various chemical liquids, etching solutions, cleaning solutions, and waste liquids. In practical applications, the diaphragm structure, as a crucial conveying component, plays a primary role in liquid transport. Currently, Chinese patent CN218266271U discloses a structure for replacing the composite diaphragm in a pneumatic diaphragm pump. However, the overall diaphragm structure disclosed in this solution is relatively simple, with only a first diaphragm clamping element and a second diaphragm clamping element on both sides of the diaphragm. Fluid flow control cannot be achieved through the diaphragm itself, relying solely on a connected cylinder. Furthermore, the adjustment range of fluid flow during transport control is not significant, resulting in low precision in fluid regulation and failing to meet the current fluid flow requirements, leading to numerous inconveniences in use. Therefore, further improvements to the diaphragm structure are needed to address the flow control issues of pneumatic diaphragm pumps in the semiconductor industry. Utility Model Content

[0004] To address the aforementioned issues, this application proposes a composite diaphragm assembly for semiconductor pneumatic diaphragm pumps, resolving the technical problem in the prior art where the diaphragm structure is simple and the diaphragm cannot achieve fluid flow regulation.

[0005] To achieve the above technical objectives, this utility model provides the following solution:

[0006] A composite diaphragm assembly for use in a semiconductor pneumatic diaphragm pump includes a diaphragm unit, a connecting unit, and a fixing unit;

[0007] The connecting unit is integrated with the diaphragm unit via the fixing unit, wherein the connecting unit is located at the rear end of the diaphragm unit and the fixing unit is located at the front end of the diaphragm unit;

[0008] The diaphragm unit is provided with a diaphragm body. The diaphragm body is provided with an anti-corrosion layer, a reinforcing layer and an elastic layer from front to back. The diaphragm body is provided with a diaphragm ring and a limiting ring from the inner ring to the outer ring. A limiting pad is also provided between the elastic layer and the reinforcing layer in the limiting ring. Several rubber reinforcing rings are provided at the front and rear ends of the limiting ring respectively.

[0009] Furthermore, the diaphragm ring includes a first diaphragm ring and a second diaphragm ring, and the limiting ring includes a first limiting ring and a second limiting ring; the diaphragm body is provided with a first diaphragm ring, a first limiting ring, a second diaphragm ring, and a second limiting ring in sequence from the inner ring to the outer ring.

[0010] Furthermore, a first limiting pad is provided between the elastic layer and the reinforcing layer in the first limiting ring, and a second limiting pad is provided between the elastic layer and the reinforcing layer in the second limiting ring.

[0011] Furthermore, several rubber reinforcing rings are respectively provided at the front and rear ends of the first limiting ring; several rubber reinforcing rings are respectively provided at the front and rear ends of the second limiting ring.

[0012] Furthermore, the fixing unit is also provided with an outer shell, and a reinforcing plate is provided near the front end of the diaphragm body on the outer shell, and the reinforcing plate is in contact with the front end of the diaphragm body.

[0013] Furthermore, the connecting unit includes a support member that is connected to a first threaded groove on the outer casing away from the diaphragm body.

[0014] Furthermore, the outer ring of the support member is evenly provided with several support ribs, and a support plate is provided at the end of the support rib near the diaphragm body, and the support plate is directly connected to the diaphragm body.

[0015] Furthermore, the connecting unit includes a threaded component that connects to a second threaded groove inside the housing.

[0016] Furthermore, the diaphragm unit also includes a first fixing plate and a second fixing plate, with the diaphragm body located between the first fixing plate and the second fixing plate and connected through a through hole.

[0017] Furthermore, the outer shell, reinforcing plate, first threaded groove, and second threaded groove are designed as a single unit.

[0018] The beneficial effects of this application include, but are not limited to:

[0019] (1) By setting up diaphragm units, connecting units and fixing units, the position of the diaphragm units can be effectively fixed and supported, so that the diaphragm can maintain better stability during the reciprocating transport of liquid. At the same time, the diaphragm body is also provided with anti-corrosion layer, reinforcing layer and elastic layer, which can not only provide anti-corrosion and corrosion resistance, but also provide better support for the diaphragm body with the reinforcing layer and elastic layer.

[0020] (2) In this application, the diaphragm body is further provided with several diaphragm rings and limiting rings from the inside out. Limiting pads are provided in the elastic layer and reinforcing layer of the limiting rings. This ensures that during the reciprocating motion of the diaphragm rings, only the innermost ring moves. The limiting ring closest to the innermost ring then acts as a limiter, effectively preventing fatigue of the remaining diaphragm rings during the overall reciprocating motion and thus further ensuring the overall service life of the diaphragm body. By designing several diaphragm rings in conjunction with limiting rings, the speed changes during fluid transport can be effectively realized. The limiting rings provide good limiting for the diaphragm rings, offering different transport speeds during fluid transport, thereby achieving higher precision and more standardized operation during fluid transport.

[0021] (3) In this application, several rubber reinforcing rings are also provided at the front and rear ends of the limiting ring, which can increase the strength of the limiting ring and, together with the limiting pad, limit the position of the diaphragm ring in the inner ring of the limiting ring, avoid the overall fatigue of the diaphragm body during the reciprocating motion of the diaphragm body, improve the accuracy of fluid delivery, and ensure the stability of the delivery process. Attached Figure Description

[0022] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0023] Figure 1 This is a cross-sectional schematic diagram of the composite diaphragm assembly provided by this utility model;

[0024] Figure 2 This is a rear view of the composite diaphragm assembly provided by this utility model;

[0025] Figure 3 This is a front view of the composite diaphragm assembly provided by this utility model;

[0026] Figure 4 This is a schematic diagram of the structure at point A of the composite diaphragm assembly provided by this utility model.

[0027] List of components and reference numerals:

[0028] 1. Diaphragm unit; 2. Connecting unit; 3. Fixing unit; 101. Diaphragm body; 102. Anti-corrosion layer; 103. Reinforcing layer; 104. Elastic layer; 105. First diaphragm ring; 106. Second diaphragm ring; 107. First limiting ring; 108. Second limiting ring; 109. First limiting pad; 110. Second limiting pad; 111. Reinforcing ring; 112. First fixing plate; 113. Second fixing plate; 114. Through hole; 115. Front end; 116. Rear end; 201. Outer shell; 202. Reinforcing plate; 203. First threaded groove; 204. Second threaded groove; 301. Threaded component; 302. Support component; 303. Support rib; 304. Support plate. Detailed Implementation

[0029] To more clearly illustrate the overall concept of this application, a detailed explanation is provided below with reference to the accompanying drawings.

[0030] To better understand the above-mentioned objectives, features, and advantages of this application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0031] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below.

[0032] Furthermore, it should be understood in the description of this application that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0033] A composite diaphragm assembly for use in semiconductor pneumatic diaphragm pumps, such as Figure 1 , Figure 4As shown, it includes a diaphragm unit 1, a connecting unit 2, and a fixing unit 3. The connecting unit 2 is connected to the diaphragm unit 1 as a whole through the fixing unit, wherein the connecting unit 2 is located at the rear end of the diaphragm unit 1 and the fixing unit is located at the front end of the diaphragm unit 1. The diaphragm unit 1 is provided with a diaphragm body 101, and the diaphragm body 101 is provided with an anti-corrosion layer 102, a reinforcing layer 103, and an elastic layer 104 in sequence from front to back. The diaphragm body 101 is provided with a plurality of diaphragm rings and limiting rings in sequence from the inner ring to the outer ring. A limiting pad is also provided between the elastic layer 104 and the reinforcing layer 103 in the limiting ring. A plurality of rubber reinforcing rings 111 are provided at the front end and the rear end of the limiting ring, respectively.

[0034] By setting up diaphragm unit 1, connecting unit 2, and fixing unit, the position of diaphragm unit 1 can be effectively fixed and supported, so that the diaphragm can maintain better stability during the reciprocating liquid transport process. At the same time, the diaphragm body 101 is provided with anti-corrosion layer 102, reinforcing layer 103, and elastic layer 104 from front end to rear end, which not only provides anti-corrosion and corrosion resistance, but also the reinforcing layer 103 and elastic layer 104 can provide better support for the diaphragm body 101. Furthermore, by sequentially arranging several diaphragm rings and limiting rings from the innermost ring near the center to the outermost ring of the diaphragm body 101, and by setting limiting pads in the elastic layer 104 and reinforcing layer 103 of the limiting ring, it is possible to ensure that only the innermost diaphragm ring moves during the reciprocating motion. At this time, the limiting ring closest to the innermost diaphragm ring can effectively limit the movement of the diaphragm ring. By reducing the movement frequency of the remaining diaphragm rings during the overall reciprocating motion, potential fatigue of the diaphragm rings can be effectively avoided, thereby further ensuring the overall service life of the diaphragm body 101. By designing several diaphragm rings in conjunction with limiting rings, the speed changes during fluid transport can be effectively realized. The limiting rings provide good limiting for the diaphragm rings, offering different transport speeds during fluid transport, thus achieving higher precision and more standardized operation during fluid transport.

[0035] In another embodiment, such as Figure 1As shown, the diaphragm ring includes a first diaphragm ring 105 and a second diaphragm ring 106, and the limiting ring includes a first limiting ring 107 and a second limiting ring 108; the diaphragm body 101 is provided with the first diaphragm ring 105, the first limiting ring 107, the second diaphragm ring 106 and the second limiting ring 108 in sequence from the inner ring to the outer ring. By setting the first diaphragm ring 105, the first limiting ring 107, the second diaphragm ring 106, and the second limiting ring 108, the diaphragm body 101 can achieve two gears for fluid transport: a high gear and a low gear. In the low gear, the first diaphragm ring 105 will reciprocate under the restriction of the first limiting ring 107, achieving a small amplitude movement of the diaphragm body 101. In the high gear, the second diaphragm ring 106 will reciprocate under the restriction of the second limiting ring 108. At this time, the second diaphragm ring 106 will also drive the first limiting ring 107 and the first diaphragm ring 105 to move together, achieving a larger amplitude movement of the diaphragm body 101, ensuring more precise and stable liquid transport in the semiconductor industry.

[0036] In another embodiment, such as Figure 4 As shown, a first limiting pad 109 is provided between the elastic layer 104 and the reinforcing layer 103 in the first limiting ring 107, and a second limiting pad 110 is provided between the elastic layer 104 and the reinforcing layer 103 in the second limiting ring 108. By providing the first limiting pad 109 and the second limiting pad 110, the limiting ring can be provided with a certain strength and support, ensuring that the limiting ring can play a position limiting role on the diaphragm ring. The first limiting pad 109 and the second limiting pad 110 can be made of reinforcing rubber material to achieve control of different flow rates of the diaphragm body 101 during fluid transport.

[0037] In another embodiment, such as Figure 1-3 As shown, the first limiting ring 107 has several rubber reinforcing rings 111 at its front and rear ends; the second limiting ring 108 also has several rubber reinforcing rings 111 at its front and rear ends. By setting several rubber reinforcing rings 111 at the front and rear ends of the limiting rings, the strength of the limiting rings can be increased, and they can also work with the limiting pad to limit the position of the diaphragm ring in the inner ring of the limiting ring, avoiding overall fatigue of the diaphragm body 101 during reciprocating motion, improving the accuracy of fluid delivery, and ensuring the stability of the delivery process.

[0038] In another embodiment, such as Figure 1 , Figure 3As shown, the fixing unit 3 is also provided with an outer shell 201. A reinforcing plate 202 is also provided near the front end of the diaphragm body 101 on the outer shell 201, and the reinforcing plate 202 is in contact with the front end of the diaphragm body 101. The reinforcing plate 202 near the front end of the diaphragm body 101 on the outer shell 201 increases the contact area with the front end of the diaphragm body 101, providing support and stability for the diaphragm body 101. When the diaphragm pump push rod reciprocates at different amplitudes, it can cooperate with the diaphragm ring and the limiting ring to achieve rate control of fluid transport and maintain the device's sealing and stability during transport.

[0039] In another embodiment, such as Figure 1-2 As shown, the connecting unit 2 includes a support member 302, which is connected to the first threaded groove 203 of the outer shell 201 away from the diaphragm body 101. By providing the first threaded groove 203 at the end of the outer shell 201 away from the diaphragm body 101, the connecting unit 2 located at the rear end of the diaphragm body 101 can be connected to the outer shell 201 at the front end of the diaphragm body 101, forming a stable fixation of the diaphragm body 101 and improving the stability during the reciprocating motion of the diaphragm body 101.

[0040] In another embodiment, such as Figure 1-2 As shown, the outer ring of the support member 302 is evenly provided with a plurality of support ribs 303. A support plate 304 is provided at one end of the support rib 303 near the diaphragm body 101, and the support plate 304 is directly connected to the diaphragm body 101. By providing support ribs 303 around the support member 302 and providing a support plate 304 at one end of the support rib 303 near the diaphragm body 101, the contact area with the diaphragm body 101 can be increased, increasing the friction. In addition, it can cooperate with the reinforcing plate 202 at the outer shell 201 to provide greater friction and ensure stability during transportation.

[0041] In another embodiment, such as Figure 1-2 As shown, the connecting unit 2 includes a threaded component 301, which is connected to the second threaded groove 204 inside the outer casing 201. The connection between the threaded component 301 and the outer casing 201 allows the diaphragm pump push rod to be fixedly connected to the diaphragm via the threaded component 301.

[0042] In another embodiment, such as Figure 1-2 As shown, the diaphragm unit 1 also includes a first fixing plate 112 and a second fixing plate 113. The diaphragm body 101 is located between the first fixing plate 112 and the second fixing plate 113 and is connected through a through hole 114. By providing through holes 114 in the first fixing plate 112 and the second fixing plate 113, which can communicate with the through hole 114 on the outermost side of the diaphragm body 101, the first fixing plate 112 and the second fixing plate 113 can protect the diaphragm body 101 and prevent problems such as breakage at the edge connection of the diaphragm body 101.

[0043] In another embodiment, such as Figure 1-2 As shown, the outer casing 201, reinforcing plate 202, first threaded groove 203, and second threaded groove 204 are designed as a single unit. By integrating the outer casing 201, reinforcing plate 202, first threaded groove 203, and second threaded groove 204 into a single unit, the sealing performance and durability of the device can be improved. Furthermore, it can cooperate with other components to achieve fluid rate control while maintaining the overall stability of the device.

[0044] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A composite diaphragm assembly for use in a semiconductor pneumatic diaphragm pump, characterized in that, Includes diaphragm unit, connecting unit, and fixing unit; The connecting unit is integrated with the diaphragm unit via the fixing unit, wherein the connecting unit is located at the rear end of the diaphragm unit and the fixing unit is located at the front end of the diaphragm unit; The diaphragm unit is provided with a diaphragm body, which is provided with an anti-corrosion layer, a reinforcing layer and an elastic layer from front to back. The diaphragm body is provided with a diaphragm ring and a limiting ring from the inner ring to the outer ring. A limiting pad layer is also provided between the elastic layer and the reinforcing layer in the limiting ring. Several rubber reinforcing rings are provided at the front end and the rear end of the limiting ring.

2. The composite diaphragm assembly for a semiconductor pneumatic diaphragm pump according to claim 1, characterized in that, The diaphragm ring includes a first diaphragm ring and a second diaphragm ring, and the limiting ring includes a first limiting ring and a second limiting ring; the diaphragm body is provided with a first diaphragm ring, a first limiting ring, a second diaphragm ring, and a second limiting ring in sequence from the inner ring to the outer ring.

3. The composite diaphragm assembly for a semiconductor pneumatic diaphragm pump according to claim 2, characterized in that, A first limiting pad is provided between the elastic layer and the reinforcing layer in the first limiting ring, and a second limiting pad is provided between the elastic layer and the reinforcing layer in the second limiting ring.

4. The composite diaphragm assembly for a semiconductor pneumatic diaphragm pump according to claim 2, characterized in that, The first limiting ring has several rubber reinforcing rings at its front and rear ends respectively; the second limiting ring has several rubber reinforcing rings at its front and rear ends respectively.

5. The composite diaphragm assembly for a semiconductor pneumatic diaphragm pump according to claim 1, characterized in that, The fixing unit is also provided with an outer shell, and a reinforcing plate is provided near the front end of the diaphragm body. The reinforcing plate is in contact with and connected to the front end of the diaphragm body.

6. The composite diaphragm assembly for a semiconductor pneumatic diaphragm pump according to claim 1, characterized in that, The connecting unit includes a support member, which is connected to a first threaded groove of the outer shell away from the diaphragm body.

7. The composite diaphragm assembly for a semiconductor pneumatic diaphragm pump according to claim 6, characterized in that, The outer ring of the support member is evenly provided with a number of support ribs, and a support plate is provided at one end of the support rib near the diaphragm body. The support plate is directly connected to the diaphragm body.

8. The composite diaphragm assembly for a semiconductor pneumatic diaphragm pump according to claim 1, characterized in that, The connecting unit includes a threaded component, which is connected to a second threaded groove inside the outer casing.

9. The composite diaphragm assembly for a semiconductor pneumatic diaphragm pump according to claim 1, characterized in that, The diaphragm unit also includes a first fixing plate and a second fixing plate, with the diaphragm body located between the first fixing plate and the second fixing plate and connected through a through hole.

10. The composite diaphragm assembly for a semiconductor pneumatic diaphragm pump according to claim 5, characterized in that, The outer shell, reinforcing plate, first threaded groove, and second threaded groove are designed as a single unit.

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