TVOC (Total Volatile Organic Compound) detection device for semiconductor clean room

Abstract

The utility model belongs to the technical field of TVOC detection, and discloses a TVOC detection device for a semiconductor clean room, which comprises a detection instrument and a base, the detection instrument is connected with a movable column, the movable column is provided with a sliding chute, the base is connected with a fixed column, the fixed column is in sliding connection with the sliding chute, the inner wall of the sliding chute is connected with a fixed plate, and the fixed plate is rotationally connected with a rotating shaft I; the two ends of the first rotating shaft are connected with a driven bevel gear and a first threaded rod respectively, the first threaded rod is in threaded connection with the fixed column, the movable column is rotationally connected with a second rotating shaft, the second rotating shaft is connected with a driving bevel gear, the driving bevel gear is meshed with the driven bevel gear, the second rotating shaft is connected with a first handle, the base is connected with a moving device, and the detection instrument is connected with a placing device. The height of the detection instrument can be adjusted, detection can be carried out at different heights, the space from the area close to the ground to the space above the equipment can be covered, pollution conditions of all heights in the clean room can be comprehensively known, and missing of potential pollution areas is avoided.

Description

Technical Field

[0001] This utility model relates to the field of TVOC detection technology, and in particular to a TVOC detection device for semiconductor cleanrooms. Background Technology

[0002] Materials used in semiconductor manufacturing, such as silicon wafers and photoresists, are extremely sensitive to TVOCs in the environment. Certain components of TVOCs may adsorb onto the silicon wafer surface, altering its surface properties. During subsequent processing, these adsorbed organic compounds can interfere with the growth of deposited thin films, leading to decreased film purity, uneven thickness, or deteriorated electrical properties. For photoresists, TVOCs may react chemically, reducing their photosensitivity, resolution, and etching resistance.

[0003] A search of Chinese utility model patent (publication number CN220506388U) reveals a TVOC testing device, which includes a fixed column, a fixed plate, a base, a connecting column, a movable plate, movable wheels, connecting plates, bolts, storage components, and other structures. This device solves the problem that existing testing instruments require lifting and moving the device to the required location during use, which consumes a lot of manpower and increases the labor cost during transportation, thus reducing testing efficiency.

[0004] However, practical application has revealed that this technical solution still has at least the following drawbacks:

[0005] In complex environments like semiconductor cleanrooms, TVOC distribution is not uniform. Due to the combined effects of various factors such as temperature, ventilation systems, equipment layout, and the location of contamination sources, TVOC concentrations at different heights can vary significantly. This current technical solution can only measure the TVOC concentration at a fixed height, failing to provide a comprehensive understanding of the contamination situation at all heights within the cleanroom, thus overlooking potentially contaminated areas. Utility Model Content

[0006] The present invention aims to provide a TVOC detection device for semiconductor cleanrooms to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A TVOC detection device for semiconductor cleanrooms includes a detection instrument and a base. The detection instrument is connected to a movable column, which has a sliding groove. The base is connected to a fixed column, which is slidably connected to the sliding groove. A fixed plate is connected to the inner wall of the sliding groove. The fixed plate is rotatably connected to a first rotating shaft. A driven bevel gear and a threaded rod are respectively connected to the two ends of the first rotating shaft. The threaded rod is threadedly connected to the fixed column. The movable column is rotatably connected to a second rotating shaft, which is connected to a driving bevel gear. The driving bevel gear meshes with the driven bevel gear. The second rotating shaft is connected to a first handle. The base is connected to a moving device, and the detection instrument is connected to a placement device.

[0009] Preferably, the mobile device includes casters, the base has a hidden groove, the base is threadedly connected to a threaded rod, the threaded rod is connected to a handle, the threaded rod is rotatably connected to a base plate, the base plate is slidably connected to the hidden groove, the base plate is connected to a damping spring shock absorber, and the damping spring shock absorber is connected to the casters.

[0010] Preferably, the placement device includes a placement plate, the detection instrument is connected to a support block, the support block is hinged to the placement plate, the detection instrument is connected to a hook, the placement plate is connected to a hanging rope, the hanging rope is made of elastic material, and the hanging rope cooperates with the hook.

[0011] Preferably, the fixed column has a limiting groove, the movable column is connected to a limiting block, and the limiting block is slidably connected to the limiting groove.

[0012] Preferably, the base is connected to an anti-slip pad.

[0013] The beneficial effects of this technical solution compared to existing technologies are as follows:

[0014] (1) This technical solution, by setting up a sliding groove, threaded rod one, driven bevel gear, driving bevel gear, rotating shaft one, and rotating shaft two, allows the moving column to move up and down relative to the fixed column, thereby adjusting the height of the detection instrument. This enables detection at different heights, covering areas from near the ground to above the equipment. It provides a comprehensive understanding of the contamination status at various heights within the cleanroom, avoiding the omission of potential contaminated areas. When threaded rod one rotates, due to the presence of the thread, the moving column that meshes with it moves linearly along the axial direction of threaded rod one. The thread pitch is fixed, meaning that for every certain angle of rotation, the moving column will rise or fall a precise distance. This precise transmission method allows for high-precision height adjustment of the detection instrument, ensuring that the detection position is precisely in the critical area where contamination leakage may occur.

[0015] (2) By setting up hidden grooves, threaded rods, and a base plate, the casters can be concealed, and the device can be placed directly on the base, increasing the contact area with the ground. The center of gravity is relatively lowered, and the bottom contact area is increased, thereby improving the stability of the device and ensuring that the detection instrument can accurately detect the concentration of TVOC in the air, improving the reliability and accuracy of the detection results. By setting up damping spring shock absorbers, when the device moves over uneven ground or vibrates, the impact force on the casters will be transmitted to the damping spring shock absorbers first. The springs will undergo elastic deformation, absorbing and storing this impact energy, converting the impact force into the elastic potential energy of the springs, thereby reducing the vibration amplitude transmitted to the base plate and the entire device.

[0016] (3) By setting up a placement board, components related to the testing instrument can be temporarily placed for easy access, thereby saving operation time and improving work efficiency. By setting up hooks, hanging ropes, and support blocks, the placement board can be rotated and folded up, making it less susceptible to collisions and damage, thus extending its service life. It also provides more spacious space for personnel movement and equipment operation.

[0017] (4) By setting limit blocks and limit grooves, the moving column is prevented from detaching from the fixed column, thereby preventing the detection instrument from being damaged due to accidental detachment, ensuring the safety of the equipment, helping to better monitor the air quality of the clean room, and ensuring the smooth progress of the semiconductor manufacturing process.

[0018] (5) By setting anti-slip pads, the friction between the base and the placement surface can be increased, so that the device can better resist displacement when subjected to external force, keep the device in the original position, and thus ensure the stability of the detection instrument. Attached Figure Description

[0019] Figure 1 This is a front sectional view of the present invention;

[0020] Figure 2 Top sectional view of the fixed column and the movable column provided by this utility model;

[0021] Figure 3 Side view of the testing instrument provided by this utility model;

[0022] Attached reference numerals: 1. Testing instrument; 2. Slide groove; 3. Rotating shaft II; 4. Driven bevel gear; 5. Fixed plate; 6. Limiting groove; 7. Threaded rod I; 8. Threaded rod II; 9. Base; 10. Damping spring shock absorber; 11. Anti-slip pad; 12. Caster wheel; 13. Hidden groove; 14. Base plate; 15. Handle II; 16. Limiting block; 17. Fixed column; 18. Rotating shaft I; 19. Handle I; 20. Driving bevel gear; 21. Moving column; 22. Support block; 23. Placement plate; 24. Hanging rope; 25. Hook. Detailed Implementation

[0023] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments:

[0024] like Figure 1-3 The illustrated TVOC detection device for semiconductor cleanrooms includes a detection instrument 1 and a base 9. Figure 1-2 As shown, the base 9 has an anti-slip pad 11 connected to its bottom wall, and the testing instrument 1 has a movable column 21 connected to its bottom wall. The movable column 21 has a sliding groove 2 inside, and an opening is provided at the bottom of the sliding groove 2. The base 9 is connected to a fixed column 17, which enters the sliding groove 2 through the opening and slides in a sliding connection with the sliding groove 2. Limiting grooves 6 are provided on the left and right side walls of the fixed column 17, and limiting blocks 16 are connected to the left and right side walls of the sliding groove 2. The limiting blocks 16 slide in a sliding connection with the limiting grooves 6. A fixed plate 5 is connected to the inner wall of the slide 2. A rotating shaft 18 is rotatably connected to the fixed plate 5, passing through the fixed plate 5. A driven bevel gear 4 is connected to the top of the rotating shaft 18, and a threaded rod 7 is connected to the bottom of the rotating shaft 18. The threaded rod 7 is threadedly connected to the fixed column 17. A rotating shaft 3 is rotatably connected to the movable column 21, passing through the slide 2. A driving bevel gear 20 is connected to the rotating shaft 3, which meshes with the driven bevel gear 4. A handle 19 is connected to one end of the rotating shaft 3 located on the outer side of the slide 2. Rotating the handle 19 causes the rotating shaft 3 to rotate, and the driving bevel gear 20 on the rotating shaft 3 rotates accordingly. Because the driving bevel gear 20 meshes with the driven bevel gear 4, the driven bevel gear 4 drives the rotating shaft 18 to rotate as well. The threaded rod 7 connected to the bottom end of the rotating shaft 18 is threadedly connected to the fixed column 17. As the threaded rod 7 rotates, it moves upward relative to the fixed column 17, causing the movable column 21 connected to the fixed plate 5 to move up and down along the axial direction of the fixed column 17. The limiting block 16 cooperates with the limiting groove 6, so that the movable column 21 can only slide within the length range of the limiting groove 6.

[0025] like Figure 1As shown, a moving device is connected to the base 9, which includes casters 12. A hidden groove 13 is provided at the bottom of the base 9. Two sets of threaded rods 8 are threadedly connected to the base 9. A handle 15 is connected to the top of each threaded rod 8, and a base plate 14 is rotatably connected to the bottom of each threaded rod 8. The base plate 14 is slidably connected to the hidden groove 13. Four sets of damping spring shock absorbers 10 are connected to the base plate 14, and each set of damping spring shock absorbers 10 is connected to one of the four casters 12. Rotating the handle 15 causes the threaded rods 8 to rotate. Because the threaded rods 8 are threadedly connected to the base 9, their rotation causes them to move downwards relative to the base 9, thereby moving the base plate 14 downwards along the hidden groove 13 until the casters 12 contact the ground and lift the base 9. At this point, the damping spring shock absorbers 10 act as a buffer, absorbing vibration and impact during the movement of the device and reducing swaying caused by uneven ground. Reverse rotation of handle 15 causes threaded rod 8 to move base plate 14 upward, and caster wheel 12 retracts into hidden groove 13. The device is directly supported by base 9.

[0026] like Figure 1 , Figure 3 As shown, the testing instrument 1 is connected to a placement device, which includes a placement plate 23. A support block 22 is connected to the right side wall of the testing instrument 1. The support rod is wedge-shaped. The vertical side wall of the support block 22 is connected to the testing instrument 1, and the horizontal top wall of the support block 22 is hinged to the placement plate 23. A hook 25 is connected to the right side wall of the testing instrument 1. A hanging rope 24, made of elastic material, is connected to the top of the placement plate 23 and can be hung on the hook 25. When the placement plate 23 is needed, the hanging rope 24 is unhooked from the hook 25. Under the action of gravity, the placement plate 23 rotates downward around the hinge of the support block 22. The support block 22 supports the placement plate 23, and at this time, the placement plate 23 is in a horizontal state and can be used to place components related to the testing instrument 1. After use, the placement plate 23 is rotated upward, and the hanging rope 24 is hung on the hook 25. The placement plate 23 is then folded up, reducing the space occupied.

[0027] The specific implementation process is as follows:

[0028] In use, rotate handle 19 according to the required testing height to raise the testing instrument 1 to the appropriate height. When moving the device, simultaneously rotate both sets of threaded rods 8 to lower the base plate 14, ground the casters 12, and lift the base 9. At this point, the device can be pushed to the appropriate position. After reaching the appropriate position, simultaneously rotate both sets of threaded rods 8 in the opposite direction to retract the casters 12 into the hidden groove 13, and the device is supported by the base 9. When it is necessary to place testing-related components, the hanging rope 24 can be removed from the hook 25, and the placement plate 23 can be rotated to make it contact the support block 22. The relevant components can then be placed on the placement plate 23. When not in use, rotate the placement plate 23 upward to make it fit against the side wall of the testing instrument 1, and then hang the hanging rope 24 on the hook 25.

[0029] The above descriptions are merely embodiments of this utility model. Commonly known technical solutions and / or characteristics are not described in detail here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the technical solution of this utility model. These modifications and improvements should also be considered within the scope of protection of this utility model, and will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application should be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A TVOC detection device for semiconductor cleanrooms, characterized in that: The instrument includes a testing instrument (1) and a base (9). The testing instrument (1) is connected to a movable column (21), which has a sliding groove (2). The base (9) is connected to a fixed column (17), which is slidably connected to the sliding groove (2). The inner wall of the sliding groove (2) is connected to a fixed plate (5). The fixed plate (5) is rotatably connected to a rotating shaft (18). The two ends of the rotating shaft (18) are respectively connected to a driven bevel gear (4) and a threaded rod (7). The threaded rod (7) is threadedly connected to the fixed column (17). The movable column (21) is rotatably connected to a rotating shaft (3). The rotating shaft (3) is connected to a driving bevel gear (20), which meshes with the driven bevel gear (4). The rotating shaft (3) is connected to a handle (19). The base (9) is connected to a moving device. The testing instrument (1) is connected to a placement device.

2. The TVOC detection device for semiconductor cleanrooms as described in claim 1, characterized in that: The mobile device includes casters (12), the base (9) has a hidden groove (13), the base (9) is threadedly connected to a threaded rod (8), the threaded rod (8) is connected to a handle (15), the threaded rod (8) is rotatably connected to a base plate (14), the base plate (14) is slidably connected to the hidden groove (13), the base plate (14) is connected to a damping spring shock absorber (10), and the damping spring shock absorber (10) is connected to the casters (12).

3. The TVOC detection device for semiconductor cleanrooms as described in claim 1, characterized in that: The placement device includes a placement plate (23), the testing instrument (1) is connected to a support block (22), the support block (22) is hinged to the placement plate (23), the testing instrument (1) is connected to a hook (25), the placement plate (23) is connected to a hanging rope (24), the hanging rope (24) is made of elastic material, and the hanging rope (24) cooperates with the hook (25).

4. The TVOC detection device for semiconductor cleanrooms as described in claim 1, characterized in that: The fixed column (17) has a limiting groove (6), and the movable column (21) is connected to a limiting block (16). The limiting block (16) is slidably connected to the limiting groove (6).

5. The TVOC detection device for semiconductor cleanrooms as described in claim 1, characterized in that: The base (9) is connected to an anti-slip pad (11).

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