Micro-hemispherical gyroscope sensor

Abstract

The utility model discloses a micro-hemisphere gyro sensor, which is characterized in that an exciting electrode and a detecting electrode are separately arranged, so that compared with the traditional electrode design with an integrated structure, the micro-hemisphere gyro sensor has the advantage that the effectively utilized capacitance can be obviously increased under the condition of the same structural size. The design not only optimizes the capacitance performance, but also greatly reduces the signal interference intensity between the excitation electrode and the detection electrode, thereby effectively improving the mechanical sensitivity and the measurement precision of the gyroscope. The innovation not only enhances the performance of the equipment, but also provides a more reliable technical basis for the development of a high-precision navigation and positioning system.

Description

Technical Field

[0001] This utility model relates to the field of gyroscope technology, specifically to a micro-hemispherical gyroscope sensor capable of detecting angles or angular velocities. Background Technology

[0002] In the research and development of miniature high-precision gyroscopes, the micro-hemispherical gyroscope has become a research hotspot due to its low cost, compact size, and excellent precision performance. Advances in this technological field largely depend on the design and optimization of its core component—the micro-hemispherical gyroscope sensor. The micro-hemispherical gyroscope sensor mainly consists of a resonator, an excitation electrode, and a detection electrode, among which the design of the excitation and detection electrodes directly affects the gyroscope's performance.

[0003] Currently, there are various design schemes for excitation and detection electrodes, mainly including planar, cylindrical, and spherical structures. Among these structures, planar structures have been favored by many research institutions in China due to their relatively simple construction and fabrication process. However, planar excitation and detection electrodes also have some inherent limitations in existing technologies.

[0004] Specifically, existing planar excitation and detection electrodes are typically manufactured using an integrated process. This means that a single electrode must simultaneously perform multiple functions, including resonator vibration excitation, orthogonal detection, orthogonal control, and standing wave detection. This design limits the number of electrodes that can be effectively used for each function, thereby increasing the noise level during vibration signal detection. Increased noise not only affects the accuracy of the gyroscope but also poses a challenge to its reliability in practical applications.

[0005] Furthermore, because the excitation and detection electrodes in the planar structure are located on the same plane, their electrical shielding is relatively poor. This design flaw makes signal interference particularly prominent, further limiting the potential for reducing gyroscope detection noise. Interference between electrical signals not only reduces the gyroscope's measurement accuracy but can also cause system instability, thus affecting its overall performance.

[0006] In summary, although planar excitation and detection electrodes have been widely used in microspherical gyroscope sensors, their insufficient number of functional electrodes and poor electrical shielding have become key factors restricting further improvements in gyroscope performance. Therefore, exploring new excitation and detection electrode designs to improve electrode functionality and electrical shielding is of great significance for promoting the development of microspherical gyroscope technology. Utility Model Content

[0007] To address the aforementioned shortcomings of existing technologies, the purpose of this invention is to provide a micro-hemispherical gyroscope sensor that solves the problems of insufficient number of functional electrodes and electrical signal interference in existing micro-hemispherical gyroscope sensors with integrated planar excitation and detection electrodes.

[0008] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0009] A micro-hemispherical gyroscope sensor includes a detection electrode substrate with a plurality of detection electrodes disposed on the substrate. All detection electrodes are arranged circumferentially around the central axis of the detection electrode substrate. An excitation cover is mounted on the detection electrode substrate, the central axis of which overlaps with the central axis of the detection electrode substrate. The excitation cover includes an integrally formed cover wall and a cover top. A through hole centered on the central axis of the excitation cover is formed on the cover top. A plurality of excitation electrodes are disposed on the cover top, arranged circumferentially around the central axis of the excitation cover. Each excitation electrode includes excitation electrodes disposed on the upper and lower surfaces of the cover top and an excitation electrode disposed on the wall of the through hole in the cover top. The excitation electrodes on the upper and lower surfaces of the cover top are activated by the excitation electrodes disposed on the wall of the through hole in the cover top. The electrodes are electrically connected; the excitation cover and the detection electrode substrate form a cavity with an open top, and a resonator is installed in the cavity. The resonator is a hemispherical cover with the opening facing downwards. The edge of the opening of the hemispherical cover extends outwards to form a cover rim. The top of the hemispherical cover can pass through a through hole, and the cover rim extends into the top of the cover while suspended. The upper surface of the hemispherical cover is concave in the middle, so that a hollow anchor post with an open top extends downwards on the lower surface. The bottom of the hollow anchor post is fixedly connected to the resonator connecting electrode set on the detection electrode substrate, so that the resonator can be suspended and generate vibration. At the same time, power is supplied to the resonator through the resonator connecting electrode. The detection electrode is located directly below the cover rim. The surface of the resonator is completely covered with an electrode film.

[0010] Furthermore, the detection electrode includes an upper detection electrode and a lower detection electrode respectively disposed on the upper and lower surfaces of the detection electrode substrate. The middle part of the upper detection electrode that is not directly opposite the cover edge is disconnected to form two upper detection electrodes. The two upper detection electrodes are electrically connected to the lower detection electrode respectively through connecting electrodes disposed in through holes opened on the detection electrode substrate.

[0011] Furthermore, the distance between the outer edge of the cover and the central axis of the detection electrode substrate is greater than the distance between the end of the upper detection electrode disconnection near the central axis of the detection electrode substrate and the central axis of the detection electrode substrate.

[0012] Furthermore, the distance between the outer edge of the cover and the central axis of the detection electrode substrate is greater than the distance between the end of the excitation electrode on the lower surface of the cover near the cover wall and the central axis of the detection electrode substrate.

[0013] Furthermore, the excitation electrode on the lower surface of the cover and the detection electrode opposite to the edge of the cover are arranged in a fan-shaped ring towards the central axis of the detection electrode substrate.

[0014] Furthermore, the detection electrode is disposed on the upper surface of the detection electrode substrate.

[0015] Furthermore, there are 8 excitation electrodes and 16 detection electrodes.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. This utility model of a micro-hemispherical gyroscope sensor, by separating the excitation electrode and the detection electrode, significantly increases the effective capacitance under the same structural size conditions compared to the traditional integrated electrode design. This design not only optimizes capacitance performance but also greatly reduces the signal interference intensity between the excitation and detection electrodes, thereby effectively improving the gyroscope's mechanical sensitivity and measurement accuracy. This innovation not only enhances the device's performance but also provides a more reliable technical foundation for the development of high-precision navigation and positioning systems. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the micro-hemispherical gyroscope sensor of Embodiment 1 of this utility model.

[0019] Figure 2 This is a schematic diagram of the structure of the micro-hemispherical gyroscope sensor in Embodiment 2 of this utility model.

[0020] In the figure, the detection electrode substrate 1, detection electrode 2, excitation cover 3, cover wall 31, cover top 32, resonator 4, hemispherical cover 41, cover edge 42, hollow anchor post 43, central axis 5, resonator connecting electrode 6, and excitation electrode 7. Detailed Implementation

[0021] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings; it should be understood that the preferred embodiments are only for illustrating the present invention and not for limiting the scope of protection of the present invention.

[0022] Example 1

[0023] This embodiment provides a micro-hemispherical gyroscope sensor, such as Figure 1As shown, the device includes a detection electrode substrate 1, on which a plurality of detection electrodes 2 are disposed. All detection electrodes 2 are arranged circumferentially around the central axis 5 of the detection electrode substrate 1. An excitation cover 3 is mounted on the detection electrode substrate 1, the central axis of which overlaps with the central axis of the detection electrode substrate 1. The excitation cover 3 includes an integrally formed cover wall 31 and a cover top 32. A through hole centered on the central axis of the excitation cover 3 is formed on the cover top 32. A plurality of excitation electrodes 7 are disposed on the cover top 32, all of which are arranged circumferentially around the central axis of the excitation cover 3. Each excitation electrode 7 includes excitation electrodes disposed on the upper and lower surfaces of the cover top 32 and excitation electrodes disposed on the through hole wall of the cover top 32. The excitation electrodes on the upper and lower surfaces of the cover top 32 are activated through the excitation electrodes disposed on the through hole wall of the cover top 32. Electrical connection; the excitation cover 3 and the detection electrode substrate 1 form an open cavity at the top. A resonator 4 is installed in the cavity. The resonator 4 is a hemispherical cover 41 with the opening facing downwards. The edge of the opening of the hemispherical cover 41 extends outwards to form a cover edge 42. The top of the hemispherical cover 41 can pass through a through hole, and the cover edge 42 extends into the top of the cover 32. The upper surface of the hemispherical cover 41 is concave downwards in the middle, so that a hollow anchor post 43 with an open top extends downwards on the lower surface. The bottom of the hollow anchor post 43 is fixedly connected to the resonator connecting electrode 6 set on the detection electrode substrate 1, so that the resonator 4 can be suspended and generate vibration. At the same time, power is supplied to the resonator 4 through the resonator connecting electrode 6. The detection electrode 2 is located directly below the cover edge 42. The surface of the resonator 4 is completely covered with an electrode film.

[0024] In specific implementation, the detection electrode 2 includes an upper detection electrode and a lower detection electrode respectively disposed on the upper and lower surfaces of the detection electrode substrate 1. The middle portion of the upper detection electrode, which is not directly opposite the cover edge 42, is disconnected to form two upper detection electrodes. The two upper detection electrodes are electrically connected to the lower detection electrode through connecting electrodes disposed in through holes in the detection electrode substrate 1. This increases the distance between the detection electrode 2 and the excitation electrode 7, reduces electrical signal interference between them, and improves the accuracy of angle change or angular velocity value measurement.

[0025] In specific implementation, the distance between the outer side of the cover edge 42 and the central axis 5 of the detection electrode substrate 1 is greater than the distance between the end of the upper detection electrode disconnection near the central axis 5 of the detection electrode substrate 1 and the central axis 5 of the detection electrode substrate 1. In this way, the electrical signal between the detection electrode 2 and the excitation electrode 7 can be shielded by the resonator 4, reducing the electrical signal interference between the two.

[0026] In a specific implementation, the distance between the outer edge of the cover 42 and the central axis 5 of the detection electrode substrate 1 is greater than the distance between the end of the excitation electrode 7 on the lower surface of the cover top 32 near the cover wall 31 and the central axis 5 of the detection electrode substrate 1. In this way, the electrical signal between the detection electrode 2 and the excitation electrode 7 can be shielded by the resonator 4, reducing the electrical signal interference between the two.

[0027] In a specific implementation, the excitation electrode 7 on the lower surface of the cover 32 and the detection electrode 2 facing the cover edge 42 are arranged in a fan-shaped ring towards the central axis 5 of the detection electrode substrate 1.

[0028] In a specific implementation, there are 8 excitation electrodes 7 and 16 detection electrodes 2.

[0029] Working principle: During operation, a pair of excitation capacitors are formed between the excitation electrode 7 on the lower surface of the cover top 32 and the electrode film on the lower surface of the cover edge 42. An AC voltage is applied to the capacitor to generate an electrostatic force to excite the resonator 4, causing it to vibrate stably at the mechanical frequency of the four antinode mode. When there is a rotational angular velocity parallel to the central axis 5 of the detection electrode substrate 1, the standing wave of the resonator in the four antinode mode will precess at its cover edge 42. The precession angle can be detected by the change in the detection capacitance formed between the detection electrode 2 and the electrode film on the upper surface of the cover edge 42 of the resonator, and then the external angle change or angular velocity value can be calculated.

[0030] Example 2

[0031] This embodiment provides a micro-hemispherical gyroscope sensor, such as Figure 2 As shown, the main difference from Embodiment 1 is that the detection electrode 2 is only disposed on the upper surface of the detection electrode substrate 1, and is not broken in the middle. Furthermore, the relative magnitude of the distance between the end of the excitation electrode 7 on the lower surface of the cover 32 near the cover wall 31 and the central axis 5 of the detection electrode substrate 1, and the distance between the outer side of the cover edge 42 and the central axis 5 of the detection electrode substrate 1 is not limited. This reduces process complexity and improves production efficiency.

[0032] In summary, unlike micro-hemispherical resonators that use a planar structure for the excitation and detection electrodes as an integrated unit, this invention separates the excitation and detection electrodes, allowing for a larger effective capacitance within the same structural size. Furthermore, it reduces signal interference between the excitation and detection electrodes, resulting in higher mechanical sensitivity and accuracy for the gyroscope.

[0033] The above embodiments of this utility model are merely illustrative examples and are not intended to limit the implementation of this utility model. Those skilled in the art can make other variations and modifications based on the above description. It is impossible to exhaustively list all possible implementations here. All obvious variations or modifications derived from the technical solutions of this utility model are still within the protection scope of this utility model.

Claims

1. A micro-hemispherical gyroscope sensor, comprising a detection electrode substrate, characterized in that, The detection electrode substrate has a plurality of detection electrodes arranged at circumferential intervals around the central axis of the detection electrode substrate. An excitation cover is mounted on the detection electrode substrate, the central axis of which overlaps with the central axis of the detection electrode substrate. The excitation cover includes an integrally formed cover wall and a cover top. A through hole centered on the central axis of the excitation cover is formed on the cover top. A plurality of excitation electrodes are arranged at circumferential intervals around the central axis of the excitation cover on the cover top. Each excitation electrode includes excitation electrodes on the upper and lower surfaces of the cover top and an excitation electrode on the wall of the through hole in the cover top. The excitation electrodes on the upper and lower surfaces of the cover top are electrically connected through the excitation electrode on the wall of the through hole in the cover top. An excitation cover and a detection electrode substrate form an open cavity at the top. A resonator is installed inside the cavity. The resonator is a hemispherical cover with its opening facing downwards. The edge of the opening of the hemispherical cover extends outwards to form a rim. The top of the hemispherical cover can pass through a through hole, and the rim extends downwards into the top of the cover. The upper surface of the hemispherical cover is concave in the middle, and a hollow anchor post with an open top extends downwards on the lower surface. The bottom of the hollow anchor post is fixedly connected to the resonator connecting electrode set on the detection electrode substrate, so that the resonator can be suspended and generate vibration. At the same time, power is supplied to the resonator through the resonator connecting electrode. The detection electrode is located directly below the rim. The surface of the resonator is completely covered with an electrode film.

2. The micro-hemispherical gyroscope sensor according to claim 1, characterized in that, The detection electrode includes an upper detection electrode and a lower detection electrode respectively disposed on the upper and lower surfaces of the detection electrode substrate. The middle part of the upper detection electrode that is not directly opposite the cover edge is disconnected to form two upper detection electrodes. The two upper detection electrodes are electrically connected to the lower detection electrode through connecting electrodes disposed in through holes opened on the detection electrode substrate.

3. The micro-hemispherical gyroscope sensor according to claim 2, characterized in that, The distance between the outer edge of the cover and the central axis of the detection electrode substrate is greater than the distance between the end of the upper detection electrode disconnection near the central axis of the detection electrode substrate and the central axis of the detection electrode substrate.

4. The micro-hemispherical gyroscope sensor according to claim 1, characterized in that, The distance between the outer edge of the cover and the central axis of the detection electrode substrate is greater than the distance between the end of the excitation electrode on the lower surface of the cover near the cover wall and the central axis of the detection electrode substrate.

5. The micro-hemispherical gyroscope sensor according to claim 1, characterized in that, The excitation electrodes on the lower surface of the cover and the detection electrodes opposite the edge of the cover are arranged in a fan-shaped ring towards the central axis of the detection electrode substrate.

6. The micro-hemispherical gyroscope sensor according to claim 1, characterized in that, The detection electrode is disposed on the upper surface of the detection electrode substrate.

7. The micro-hemispherical gyroscope sensor according to claim 1, characterized in that, The system has 8 excitation electrodes and 16 detection electrodes.

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