Adjusting device and optical detection equipment

Abstract

The utility model relates to the technical field of optical detection, in particular to an adjusting device and optical detection equipment, in the adjusting device, a bearing part fixedly provided with an optical element can be installed in an installation hole of an installation base; the flexible arm in the mounting base has a first state for locking the bearing part and a second state for enabling the bearing part to rotate relative to the mounting base, the mounting base is provided with the avoiding hole communicated with the mounting hole, and the positioning structure capable of being exposed out of the avoiding hole is arranged on the peripheral surface of the bearing part, so that when the flexible arm is in the second state, the bearing part can be positioned in the avoiding hole. In other words, before the bearing part is locked on the mounting base, an auxiliary tool penetrates through the avoiding hole and is matched with the positioning structure on the bearing part so as to drive the bearing part to rotate in the circumferential direction of the mounting hole, and the angle deviation between the optical axis of the optical element and the optical axis of the system can be reduced by changing the mounting angle of the bearing part in the circumferential direction of the mounting hole. Therefore, the aberration between the acquired image and the ideal image is reduced, and the imaging effect is improved.

Description

Technical Field

[0001] This application relates to the field of optical detection technology, specifically to an adjustment device and an optical detection equipment. Background Technology

[0002] In detection equipment utilizing optical principles, optomechanical components are mounted on a mounting base. Due to machining and installation errors in the mechanical parts of the optomechanical components and the mounting base, the optical axis of the optomechanical components is often not completely perpendicular to its own mounting surface. Furthermore, the optical axis of the system on the mounting base is not completely perpendicular to the mounting plane of the mounting base, but rather there is a slight deviation angle. This results in a small angular deviation between the optical axis of the optomechanical components and the optical axis of the system on the mounting base, ultimately leading to a large aberration between the image captured by the camera and the ideal image. Utility Model Content

[0003] This application provides an adjustment device and an optical detection equipment to solve the technical problem of large aberrations between the acquired imaging image and the ideal imaging image.

[0004] According to a first aspect, one embodiment provides an adjusting device, comprising:

[0005] A carrier for mounting and fixing optical elements, the carrier having an outer peripheral surface, the outer peripheral surface being provided with a positioning structure for cooperating with an auxiliary tool;

[0006] The mounting base has mounting holes for mounting the carrier, the mounting base includes a plurality of flexible arms that surround the carrier, the mounting base has clearance holes that communicate with the mounting holes, the positioning structure can be exposed in the clearance holes, and the size of the clearance holes is larger than the size of the positioning structure in the circumferential direction of the mounting holes;

[0007] The flexible arm has a first state and a second state. In the first state, the flexible arm is pressed against the outer peripheral surface to lock the carrier. In the second state, the auxiliary tool can pass through the clearance hole and cooperate with the positioning structure, and drive the carrier to rotate in the circumferential direction of the mounting hole.

[0008] In one optional embodiment, there are multiple positioning structures, with two adjacent positioning structures arranged at intervals in the circumferential direction of the mounting hole, and at least one positioning structure exposed in the clearance hole.

[0009] In one alternative embodiment, the distance between two adjacent positioning structures is smaller than the dimension of the clearance hole in the circumferential direction of the mounting hole.

[0010] In one optional embodiment, the clearance hole is an elongated hole, and the dimension of the clearance hole in the circumferential direction of the mounting hole is greater than the dimension of the clearance hole in the axial direction of the mounting hole;

[0011] The clearance hole extends in the radial plane of the mounting hole, or the extension direction of the clearance hole has an angle of less than 90° with the radial plane of the mounting hole.

[0012] In one optional embodiment, the mounting base includes a base body, the mounting hole is provided on the base body, and the flexible arm is connected to the base body; the clearance hole is located on the flexible arm and / or the base body.

[0013] In one optional embodiment, the mounting base is used to mount on the main body of the optical inspection equipment;

[0014] The adjusting device includes a wave spring and a fixing member. The fixing member is connected to the mounting base. The wave spring is press-fitted and fixed between the support member and the fixing member in the axial direction of the mounting hole, or the wave spring is press-fitted and fixed between the support member and the equipment body. The wave spring can apply an elastic force to the support member in the axial direction of the mounting hole.

[0015] In one alternative embodiment, a plurality of the flexible arms are arranged at intervals in the circumferential direction of the mounting hole, and an movable gap is provided between two adjacent flexible arms, the size of which is related to the tightness of the two flexible arms.

[0016] In one optional embodiment, the mounting base includes a base body, the mounting hole is provided on the base body, the flexible arm has a connecting end and a suspension end in its extending direction, the connecting end is connected to the base body; the two opposite suspension ends form the movable gap and are movably connected by bolts.

[0017] In one optional embodiment, the flexible arm is integrally formed with the base body, and the plurality of flexible arms form an inner wall surface that surrounds the carrier, wherein the inner wall surface is coplanar with the wall surface of the mounting hole in the second state.

[0018] In one alternative embodiment, the carrier has an optical channel arranged coaxially with the mounting hole, the optical channel being used to configure one or more optical elements.

[0019] In one optional embodiment, the carrier is provided with a scale mark for identifying the rotation angle of the carrier within the mounting hole, the scale mark being located outside the mounting hole.

[0020] According to a second aspect, one embodiment provides an optical detection device, including a device body, an optical element, and an adjustment device as described in any of the above embodiments, wherein the optical element is fixed on the carrier, and the mounting base is mounted and fixed on the device body.

[0021] According to the adjustment device and optical detection equipment of the above embodiments, the carrier with the optical element fixed on it can be installed in the mounting hole of the mounting base. The flexible arm in the mounting base has two states. In the first state, the flexible arm locks the carrier in the mounting base. Since there is a positioning structure on the outer circumferential surface of the carrier, the mounting base has a clearance hole communicating with the mounting hole, and the positioning structure can be exposed in the clearance hole. In the second state, that is, before the carrier is locked in the mounting base, an auxiliary tool passes through the clearance hole and cooperates with the positioning structure on the carrier to drive the carrier to rotate in the circumferential direction of the mounting hole. By changing the mounting angle of the carrier in the circumferential direction of the mounting hole, the angular deviation between the optical axis of the optical element and the optical axis of the system on the mounting base can be reduced, thereby reducing the aberration between the acquired image and the ideal image and improving the imaging effect. Attached Figure Description

[0022] Figure 1 This is a schematic diagram illustrating the positional relationship between the mounting surface on the mounting base, the mounting mating surface on the carrier, the optical axis of the system, and the optical axis of the optical element in one embodiment.

[0023] Figure 2 This is a partial assembly and disassembly diagram of the main body of the device and the adjustment device in one embodiment;

[0024] Figure 3 This is an exploded view of the assembly structure of a portion of the main body of the device and the adjustment device in another embodiment;

[0025] Figure 4 This is a schematic diagram showing the relative positions of the wave spring and the fixing member in the adjustment device in one embodiment.

[0026] Figure 5 This is a schematic diagram showing the assembly and disassembly structure of the adjustment device in one embodiment.

[0027] In the diagram: 1. Main body of the equipment; 2. Mounting base; 21. Base body; 22. Mounting hole; 23. Flexible arm; 231. Connecting end; 232. Suspension end; 25. Clearance hole; 26. Mounting surface; 3. Bearing component; 31. First part; 311. Positioning structure; 32. Second part; 321. Annular retaining ring; 322. Scale marking; 33. Mounting mating surface; 4. Waveform spring; 5. Fixing component; 6. Optical element. Detailed Implementation

[0028] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0029] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments, and the operational steps involved in each embodiment can also be rearranged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for clearly describing a particular embodiment and do not imply that they represent the necessary components and / or order.

[0030] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0031] This application provides an adjustment device that can be applied in an optical detection device to adjust the optical axis of the optical element 6 to reduce the angular deviation between the optical axis of the optical element 6 and the system optical axis, thereby reducing the aberration between the acquired image and the ideal image and improving the imaging effect.

[0032] Please refer to Figures 2 to 5 The adjustment device typically includes a carrier 3 and a mounting base 2. The carrier 3 is used to mount and fix the optical element 6. The carrier 3 can be a cylindrical structure with an internal cavity forming an optical channel. The optical element 6 can be located within this optical channel, which can accommodate one or more optical elements 6. The optical element 6 can be installed in the optical channel by snap-fit ​​or screw-on method to achieve the mounting and fixing of the optical element 6 in the optical channel of the carrier 3.

[0033] The mounting base 2 is used to install and fix it on the main body 1 of the optical inspection equipment. The mounting base 2 has a mounting hole 22, which is a circular hole. The support member 3 has an outer peripheral surface, which is a cylindrical surface. The support member 3 can be installed and fixed in the mounting hole 22 of the base, so as to achieve relative fixation between the optical element 6 and the main body 1.

[0034] The optical axis of the optical system on the main body 1 is the system optical axis, and the optical axis of the optical element 6 fixedly installed on the support 3 is the optical element optical axis. The cross-sectional shape of the optical channel on the support 3 can be circular to facilitate the fixed installation of the optical element 6. At the same time, when the processing accuracy is high, it also helps to make the optical channel and the mounting hole 22 on the mounting base 2 coaxially arranged, which helps to reduce the distance between the system optical axis and the optical element optical axis.

[0035] After the carrier 3 is fixed on the mounting base 2, the mounting base 2 has a mounting surface 26 for mounting and positioning the carrier 3, and the carrier 3 has a mounting mating surface 33 that fits against the mounting surface 26. Both the mounting surface 26 and the mounting mating surface 33 can be solid surfaces or imaginary surfaces. Theoretically, the mounting surface 26 on the mounting base 2 should be perpendicular to the optical axis of the system, and the mounting mating surface 33 on the carrier 3 should be perpendicular to the optical axis of the optical element 6.

[0036] However, due to processing and installation errors, the mounting surface 26 on the mounting base 2 is not actually perfectly perpendicular to the optical axis of the system, and the mounting mating surface 33 on the carrier 3 is also not perfectly perpendicular to the optical axis of the optical element 6. Please refer to... Figure 1 In the figure, OO represents the mounting surface 26 of the mounting base 2, O'-O' represents the mounting mating surface 33 of the carrier 3, NN represents the normal of the mounting surface 26 or the mounting mating surface 33, PP represents the system optical axis, and MM represents the optical axis of the optical element 6. Processing errors and installation errors will cause a small deviation angle α between the optical axis of the optical element 6 and the system optical axis. This deviation angle α will cause a large aberration between the actual imaging and the theoretical imaging of the optical detection equipment.

[0037] In the adjustment device of this application embodiment, the angle between the optical axis of the optical element 6 fixed on the carrier 3 and the system optical axis can be adjusted and reduced by rotating the carrier 3 relative to the mounting base 2 in the mounting hole 22. Please continue to refer to Figure 1 In this diagram, M'-M' represents the optical axis of the optical element 6 after rotating the support component 3. The angle between the optical axis of the optical element 6 after rotating the support component 3 and the system optical axis is α', where α' < α. This reduces the aberration between the actual and theoretical imaging, thereby improving the imaging effect and detection accuracy of the optical detection equipment. It should be noted that... Figure 1 The angles α' and α in the equation are actually very small angles, such as less than 2 degrees.

[0038] In the adjustment device of this application embodiment, please continue to refer to Figures 2 to 5To facilitate the rotation of the carrier 3 within the mounting base 2, the mounting base 2 includes several flexible arms 23. The flexible arms 23 encircle the carrier 3 around the mounting hole 22. The flexible arms 23 have a first state where they are pressed against the outer circumferential surface of the carrier 3 to lock the carrier 3 in place. The flexible arms 23 also have a second state where they are spaced apart from the outer circumferential surface of the carrier 3 to allow the carrier 3 to rotate within the mounting hole 22. When the flexible arms 23 are in the second state, the carrier 3 can be rotated relative to the mounting base 2 to adjust the angle between the optical axis of the optical element 6 and the system optical axis. When the angle between the optical axis of the optical element 6 and the system optical axis is adjusted to minimize the aberration between the actual imaging and the theoretical imaging, the flexible arms 23 can be switched to the first state to achieve relative fixation of the positions of the carrier 3 and the mounting base 2.

[0039] Additionally, a clearance hole 25 communicating with the mounting hole 22 is provided on the mounting base 2, and a positioning structure 311 is provided on the outer peripheral surface of the support member 3. The positioning structure 311 can be exposed in the clearance hole 25 so that an auxiliary tool (not shown in the figure) can pass through the clearance hole 25 and cooperate with the positioning structure 311, such as a pry bar or a wrench, so that the support member 3 can be rotated in the mounting base 2 by the auxiliary tool.

[0040] For details, please continue to refer to Figures 2 to 5 In order to enable the carrier 3 to have a large rotation angle in the mounting hole 22 so as to satisfy the large angle adjustment range between the optical axis of the optical element 6 and the optical axis of the system, the clearance hole 25 is set to have a larger dimension in the circumferential direction of the mounting hole 22 than the dimension in the circumferential direction of the positioning structure 311. In this way, the auxiliary tool that cooperates with the positioning structure 311 can drive the carrier 3 to have a large rotation stroke relative to the mounting base 2.

[0041] In some embodiments, multiple positioning structures 311 are provided on the outer peripheral surface of the carrier 3. Two adjacent positioning structures 311 are arranged at intervals in the circumferential direction of the mounting hole 22. Regardless of the position of the carrier 3 in the circumferential direction of the mounting hole 22, at least one positioning structure 311 can be exposed in the clearance hole 25.

[0042] In one embodiment, when the structural strength requirements of the mounting base 2 are not high or the angle adjustment range requirements between the optical axis of the optical element 6 and the system optical axis are not high, only one positioning structure 311 can be provided exposed in the clearance hole 25 so that the auxiliary tool can pass through the clearance hole 25 and cooperate with the positioning structure 311 to drive the carrier 3 to rotate relative to the mounting base 2, thereby realizing the adjustment of the angle between the optical axis of the optical element and the system optical axis.

[0043] In one embodiment, to ensure the structural strength of the mounting base 2, the size of the clearance hole 25 in the circumferential direction of the mounting hole 22 cannot be too large. At the same time, in order to satisfy the requirement that the optical axis of the optical element 6 and the optical axis of the system have a large angular adjustment range, two or more positioning structures 311 can be provided to be exposed in the clearance hole 25. The distance between two adjacent positioning structures 311 in the circumferential direction of the mounting hole 22 is less than the size of the clearance hole 25 in the circumferential direction of the mounting hole 22. In this way, when the auxiliary tool drives one of the positioning structures 311 to rotate clockwise around the mounting hole 22 until the positioning structure 311 is at the edge of the clearance hole 25, it can be satisfied that there are other positioning structures 311 in the clearance hole 25 that can cooperate with the auxiliary tool, so that the auxiliary tool can continue to drive the carrier 3 to rotate in the clockwise direction.

[0044] Of course, in other embodiments, the distance between two adjacent positioning structures 311 in the circumferential direction of the mounting hole 22 can be equal to or slightly smaller than the size of the clearance hole 25 in the circumferential direction of the mounting hole 22. In embodiments where the positioning structure 311 is a positioning hole, even if the auxiliary tool drives one of the positioning structures 311 to rotate to the edge of the clearance hole 25, as long as the edge of another positioning hole is located in the clearance hole 25, the auxiliary tool can cooperate with the clearance hole 25 to continue to drive the carrier 3 to rotate.

[0045] It should be noted that during the process of the auxiliary tool connecting the positioning structure 311 and driving the carrier 3 to rotate, the mounting surface 26 of the mounting base 2 and the mounting mating surface 33 of the carrier 3 will rotate relative to each other. Due to the non-perpendicular nature of the mounting surface 26 and the mounting mating surface 33 relative to the optical axis of the system, the deviation angle between the optical axis of the optical element 6 and the optical axis of the system will change slightly at each rotation position. The change in deviation angle can be expressed by the aberration between the actual image and the theoretical image of the beam emitted by the optical element on the camera. When the aberration is the smallest, the deviation angle is considered to be the smallest. At this time, it can be considered that the carrier 3 has been rotated and adjusted to a suitable position in the mounting base 2.

[0046] In some embodiments, the clearance hole 25 is an elongated hole, and the dimension of the clearance hole 25 in the circumferential direction of the mounting hole 22 is greater than the dimension of the clearance hole 25 in the axial direction of the mounting hole 22. In embodiments where the positioning structure 311 is a positioning hole, the dimension of the clearance hole 25 in the axial direction of the mounting hole 22 can be smaller than the dimension of the positioning hole in the axial direction of the mounting hole 22, as long as the auxiliary tool can pass through the clearance hole 25 and cooperate with the positioning structure 311.

[0047] Please refer to Figures 2 to 5The length direction of the clearance hole 25 extends in the radial plane of the mounting hole 22. Alternatively, in other embodiments, the length direction of the clearance hole 25 has an angle of less than 90° with the radial plane of the mounting hole 22. As long as the auxiliary tool and the positioning structure 311 cooperate to drive the carrier 3 to move along the length direction of the clearance hole 25, the carrier 3 can rotate relative to the mounting base 2.

[0048] In one embodiment, please continue to refer to Figures 2 to 5 The positioning structure 311 can be a positioning hole, which can be a round hole or a polygonal hole, and the auxiliary tool can be a pry bar with a circular or polygonal cross-sectional shape. In another embodiment, the positioning structure 311 can also be a positioning protrusion, which can be a cylindrical structure, a polygonal structure or other irregular structure, and the auxiliary tool can be a wrench that cooperates with the positioning protrusion.

[0049] In some embodiments, for the mounting base 2, please refer to... Figures 2 to 5 The mounting base 2 includes a base body 21, and mounting holes 22 are provided on the base body 21. The flexible arm 23 can be integrally formed with the base body 21, or in other embodiments, the flexible arm 23 can also be installed on the base body 21 by fasteners.

[0050] The clearance hole 25 can be set on the base body 21, or it can also be set on the flexible arm 23. Alternatively, one part of the clearance hole 25 in the circumferential direction of the mounting hole 22 can be located on the base body 21, and the other part can be located on the flexible arm 23. The specific location of the clearance hole 25 can be set as long as it can simultaneously meet the structural strength requirements of the flexible arm 23 and the base body 21.

[0051] In some embodiments, please continue to refer to Figures 2 to 5 The flexible arm 23 is provided to surround the mounting hole 22. The mounting hole 22 is a round hole. The flexible arm 23 extends in the circumferential direction of the mounting hole 22. The flexible arm 23 has a connecting end 231 and a suspension end 232 in its extending direction. The connecting end 231 of the flexible arm 23 is connected to the base body 21 in the circumferential direction of the mounting hole 22 by fasteners or is integrally formed with the base body 21.

[0052] In some embodiments, the number of flexible arms 23 may be one, two, or more. Each flexible arm 23 extends circumferentially around the mounting hole 22, and adjacent flexible arms 23 are spaced apart circumferentially around the mounting hole 22, so that the flexible arms 23 form a structure that surrounds the mounting hole 22. Each flexible arm 23 has an inner wall surface that surrounds the mounting hole 22, and this inner wall surface is coplanar with the hole wall surface of the mounting hole 22 when the flexible arm 23 is in the second state, so as to facilitate the integral forming of the flexible arm 23 and the base body 21.

[0053] In embodiments where there is one or an odd number of flexible arms 23, the suspension end 232 of the flexible arm 23 can have a movable gap with the base body 21 in the circumferential direction of the mounting hole 22. The suspension end 232 of the flexible arm 23 and the base body 21 can be movably connected by bolts (not shown in the figure). Tightening the bolts can reduce the movable gap and simultaneously press the inner wall surface of the flexible arm 23 against the outer circumferential surface of the support member 3, so that the flexible arm 23 is in the first state of locking the support member 3, realizing the clamping of the support member 3 by the flexible arm 23. The size of the movable gap is related to the degree of clamping of the support member 3 by the flexible arm 23. The movable gap can be increased by loosening the bolts to release the locking of the support member 3 by the flexible arm 23, so that the flexible arm 23 switches from the first state to the second state, thereby facilitating the rotation of the support member 3 relative to the mounting base 2 and facilitating the adjustment of the angle between the optical axis of the optical element and the optical axis of the system.

[0054] In embodiments with two or an even number of flexible arms 23, the flexible arms 23 are arranged in a ring and spaced apart in the radial plane of the mounting hole 22. Adjacent flexible arms 23 are arranged in pairs, and the suspension ends 232 of the paired, adjacent flexible arms 23 are arranged opposite each other in the circumferential direction of the mounting hole 22, forming a movable gap between the opposing suspension ends 232. The opposing suspension ends 232 can be movably connected by bolts. Tightening the bolts reduces the movable gap and simultaneously presses the inner wall surface of the flexible arm 23 against the outer circumferential surface of the carrier 3, placing the flexible arm 23 in a first state of locking the carrier 3, thus achieving the clamping of the carrier 3 by the flexible arm 23. The size of the movable gap is related to the degree of clamping of the carrier 3 by the flexible arm 23. Loosening the bolts increases the movable gap, allowing the flexible arm 23 to release the clamping of the carrier 3, switching the flexible arm 23 from the first state to the second state. This facilitates the rotation of the carrier 3 relative to the mounting base 2, and facilitates the adjustment of the angle between the optical axis of the optical element and the optical axis of the system.

[0055] During the rotation of the bearing member 3 relative to the mounting base 2, in order to facilitate the operator in identifying the rotation angle of the bearing member 3, please refer to some embodiments. Figures 3 to 5As shown, a scale mark 322 is provided on the carrier 3. This scale mark 322 is used to identify the angle of rotation of the carrier 3 within the mounting hole 22 of the mounting base 2. The carrier 3 has a first part 31 located within the mounting hole 22 of the mounting base 2, and a second part 32 exposed outside the mounting hole 22 in the extending direction of the mounting hole 22. The scale mark 322 can be an angle scale mark or other marks that facilitate the identification of the rotation angle. The scale mark 322 can be set on the outer peripheral surface of the second part 32, or it can also be set on the axial end face of the second part 32. During the rotation of the carrier 3 relative to the mounting base 2, the rotation angle of the carrier 3 can be identified by the scale mark 322 to avoid the rotation angle of the carrier 3 exceeding 360°, that is, to avoid over-rotation of the carrier 3. In addition, the setting of the scale mark 322 also makes it convenient for the operator to confirm the specific position of the carrier 3 at the position of minimum aberration, so that the operator can find the specific position of the carrier 3 at the position of minimum aberration after rotating the carrier 3 one revolution.

[0056] In other embodiments, the scale markings 322 can also be set at the positioning structure 311 of the carrier 3. For example, multiple positioning structures 311 can be numbered. In an embodiment with six positioning structures 311, when all the positioning structures 311 are exposed in the clearance hole 25 during the rotation of the carrier 3, it can be determined that the carrier 3 has rotated one revolution.

[0057] Of course, in other embodiments, the scale mark 322 may not be set, as long as the aberration between the actual image and the ideal image after the carrier 3 is rotated is less than the aberration between the actual image and the ideal image before the carrier 3 is rotated.

[0058] In some embodiments, please refer to Figures 3 to 5 To prevent the mounting surface of the carrier 3 from separating from the mounting surface on the mounting base 2 or from experiencing a small angular deviation during rotation, the adjustment device also includes a wave spring 4 and a fixing member 5. The mounting base 2 is used to mount the device body 1 of the optical inspection equipment. The fixing member 5 is connected to the mounting base 2. The wave spring 4 is pressed and fixed between the carrier 3 and the fixing member 5 in the axial direction of the mounting hole 22, or the wave spring 4 is pressed and fixed between the carrier 3 and the device body 1. The wave spring 4 can apply an elastic force to the carrier 3 in the axial direction of the mounting hole 22. This elastic force can ensure that the axial surface of the carrier 3 is in contact with the axial surface of the mounting base 2 in the axial direction of the mounting hole 22. The axial surface of the mounting base 2 can be used as the mounting surface on the mounting base 2 for mounting and positioning the carrier 3, and the axial surface of the carrier 3 can be used as the mounting mating surface on the carrier 3 for mounting on the mounting base 2 and mating with the mounting surface.

[0059] Specifically, in one embodiment, please refer to... Figures 3 to 5The wave spring 4 is a ring structure, the fastener 5 is a ring hollow structure, and the fastener 5 can be a cover structure. The mounting base 2 is installed on the equipment body 1 of the optical inspection equipment, and the fastener 5 covers the side of the mounting base 2 facing away from the equipment body 1. The fastener 5 can be connected to the mounting base 2 by threads. The first part 31 of the carrier 3 is located in the mounting hole 22 of the mounting base 2. The outer circumferential surface of the second part 32 is provided with an annular retaining ring 321 structure. The annular retaining ring 321 can be integrally formed with the carrier 3. The annular retaining ring 321 is located on the side of the mounting base 2 away from the main body 1 in the axial direction of the mounting hole 22. The wave spring 4 is located on the side of the annular retaining ring 321 away from the mounting base 2. The wave spring 4 is press-fitted and fixed between the annular retaining ring 321 and the fixing member 5 in the axial direction of the mounting hole 22. After the fixing member 5 is locked to the mounting base 2, under the action of the elastic force of the wave spring 4, the annular retaining ring 321 is pressed against the axial end face of the mounting base 2 in the axial direction of the mounting hole 22.

[0060] The surface on the annular retaining ring 321 that mates with the axial end face of the mounting base 2 can serve as the mounting mating surface of the carrier 3, while the axial end face on the mounting base 2 that mates with the annular retaining ring 321 can serve as the mounting surface of the mounting base 2. During the rotation of the carrier 3, the wave spring 4 can ensure that the mounting surface of the mounting base 2 and the mounting mating surface of the carrier 3 remain in contact, thus avoiding an increase in the angle between the optical axis of the optical element and the optical axis of the system due to the tilt of the mounting mating surface of the carrier 3.

[0061] In another embodiment, the carrier 3 may not have an annular retaining ring. The wave spring 4 is press-fitted and fixed between the carrier 3 and the device body 1 in the circumferential direction of the mounting hole 22. The fixing member 5 is threadedly connected to the mounting base 2. The fixing member 5 has an axial surface that fits with the axial end face of the carrier 3. Under the elastic force of the wave spring 4, the axial end face of the carrier 3 fits with the axial surface of the fixing member 5. The axial surface of the fixing member 5 can serve as the mounting surface of the mounting base 2, while the axial end face of the carrier 3 can serve as the mounting mating surface. The wave spring 4 can ensure that the axial surface of the fixing member 5 and the axial end face of the carrier 3 remain in contact during the rotation of the carrier 3, so as to avoid the increase of the deflection angle between the optical axis of the optical element and the optical axis of the system due to the tilt of the mounting mating surface of the carrier 3.

[0062] This application also provides an optical inspection device, which includes a device body 1, an optical element 6, and an adjustment device as described in any of the above embodiments. The optical element 6 can be an objective lens or a lens barrel. One or more optical elements 6 can be provided. The optical element 6 is fixed on the carrier 3. The mounting base 2 is fixed on the device body 1. The mounting hole 22 of the mounting base 2 is used for the system optical axis on the device body 1 to pass through. The optical axis of the optical element 6 fixed on the carrier 3 can be adjusted by the adjustment device to reduce the deflection angle between the optical axis of the optical element 6 and the system optical axis, thereby reducing the aberration between the actual image and the ideal image and improving the imaging effect.

[0063] The above-described specific examples are for illustrative purposes only and are not intended to limit the scope of this invention. Those skilled in the art to which this invention pertains can make various simple deductions, modifications, or substitutions based on the concept of this invention.

Claims

1. An adjusting device, characterized in that, include: A carrier for mounting and fixing optical elements, the carrier having an outer peripheral surface, the outer peripheral surface being provided with a positioning structure for cooperating with an auxiliary tool; The mounting base has mounting holes for mounting the carrier, the mounting base includes a plurality of flexible arms that surround the carrier, the mounting base has clearance holes that communicate with the mounting holes, the positioning structure can be exposed in the clearance holes, and the size of the clearance holes is larger than the size of the positioning structure in the circumferential direction of the mounting holes; The flexible arm has a first state and a second state. In the first state, the flexible arm is pressed against the outer peripheral surface to lock the carrier. In the second state, the auxiliary tool can pass through the clearance hole and cooperate with the positioning structure, and drive the carrier to rotate in the circumferential direction of the mounting hole.

2. The adjusting device as described in claim 1, characterized in that, There are multiple positioning structures, with two adjacent positioning structures arranged at intervals in the circumferential direction of the mounting hole, and at least one positioning structure exposed in the clearance hole.

3. The adjusting device as described in claim 2, characterized in that, The distance between two adjacent positioning structures is smaller than the dimension of the clearance hole in the circumferential direction of the mounting hole.

4. The adjusting device as described in claim 1, characterized in that, The clearance hole is an elongated hole, and the dimension of the clearance hole in the circumferential direction of the mounting hole is greater than the dimension of the clearance hole in the axial direction of the mounting hole. The clearance hole extends in the radial plane of the mounting hole, or the extension direction of the clearance hole has an angle of less than 90° with the radial plane of the mounting hole.

5. The adjusting device as described in claim 1, characterized in that, The mounting base includes a base body, the mounting hole is provided on the base body, and the flexible arm is connected to the base body; the clearance hole is located on the flexible arm and / or the base body.

6. The adjusting device as described in any one of claims 1 to 5, characterized in that, The mounting base is used to install on the main body of the optical inspection equipment; The adjusting device includes a wave spring and a fixing member. The fixing member is connected to the mounting base. The wave spring is press-fitted and fixed between the support member and the fixing member in the axial direction of the mounting hole, or the wave spring is press-fitted and fixed between the support member and the equipment body. The wave spring can apply an elastic force to the support member in the axial direction of the mounting hole.

7. The adjusting device according to any one of claims 1 to 4, characterized in that, Multiple flexible arms are arranged at intervals in the circumferential direction of the mounting hole, and there is a movable gap between two adjacent flexible arms. The size of the movable gap is related to the tightness of the two flexible arms.

8. The adjusting device as described in claim 7, characterized in that, The mounting base includes a base body, the mounting hole is provided on the base body, the flexible arm has a connecting end and a suspension end in its extension direction, the connecting end is connected to the base body; the two opposite suspension ends form the movable gap and are movably connected by bolts.

9. The adjusting device as described in claim 8, characterized in that, The flexible arm is integrally formed with the base body, and the multiple flexible arms form an inner wall surface that surrounds the bearing member. In the second state, the inner wall surface is coplanar with the wall surface of the mounting hole.

10. The adjusting device according to any one of claims 1 to 5, characterized in that, The carrier has an optical channel arranged coaxially with the mounting hole, and the optical channel is used to configure one or more optical elements.

11. The adjusting device according to any one of claims 1 to 5, characterized in that, The carrier is provided with a scale mark for identifying the rotation angle of the carrier within the mounting hole, and the scale mark is located outside the mounting hole.

12. An optical inspection device, characterized in that, The device includes a main body, an optical element, and an adjustment device according to any one of claims 1 to 11, wherein the optical element is fixed on the carrier and the mounting base is fixed on the main body.

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