Air floatation crystal piercing device

Abstract

The utility model discloses an air floatation wafer pricking device which comprises a base assembly, a power piece, a shaft core, a wafer pricking head and at least two air floatation pieces, a guide hole is formed in the base assembly, the shaft core penetrates through the guide hole, one end of the shaft core is connected with the power end of the power piece, and the other end of the shaft core is connected with the wafer pricking head. A guide hole is formed in the base assembly, an air channel communicated with the guide hole is further formed in the base assembly so that an air film can be formed between the hole wall of the guide hole and the shaft core, the two air floating pieces are symmetrically arranged in the base assembly, and the air floating faces of the two air floating pieces are both opposite to the shaft core. The device can realize non-contact high-frequency reciprocating motion by arranging the air floating structure, so that the chip transfer efficiency is greatly improved.

Description

Technical Field

[0001] This application relates to the technical field of chips, and more particularly to an air-floating crystal-piercing device. Background Technology

[0002] In the modern electronics industry, with the continuous development of devices such as smartphones, tablets, automotive lighting, and displays, the demand for semiconductor chips and LED chips has increased dramatically. This places higher demands on the efficiency and quality of chip packaging, and the dimensions of many semiconductor chips and LED chips have reached the micrometer or even nanometer level. The chip-piercing process is a technique used in the manufacturing of Mini LEDs, referring to the technology of transferring Mini LED chips onto another substrate by piercing the wafer.

[0003] The crystal-piercing device is a key component used in the LED packaging field. However, the existing crystal-piercing devices cannot achieve high-frequency reciprocating motion during operation due to the presence of moving friction, which affects the efficiency of the entire production process. Utility Model Content

[0004] The purpose of this application is to provide an air-floating crystal-piercing device, which is equipped with an air-floating structure, enabling contactless high-frequency reciprocating movement, thereby greatly improving the chip transfer efficiency.

[0005] To achieve the above objectives, this application adopts the following technical solution:

[0006] On one hand, an air-floating crystal-piercing device is provided, comprising: a base assembly, a power component, a shaft, a crystal-piercing head, and at least two air-floating components. The base assembly has a guide hole, the shaft passes through the guide hole, and one end is connected to the power end of the power component, and the other end is connected to the crystal-piercing head. The base assembly also has an air passage communicating with the guide hole, so that an air film is formed between the hole wall of the guide hole and the shaft. The two air-floating components are symmetrically arranged in the base assembly, and the air-floating surfaces of the two air-floating components are opposite to the shaft.

[0007] Furthermore, the base assembly includes a metal sleeve and a protective sleeve, the guide hole is disposed on the metal sleeve, the protective sleeve covers the outer surface of the metal sleeve, and the air passage includes a first gas passage disposed on the metal sleeve and a second gas passage disposed on the protective sleeve, the first gas passage and the second gas passage being in communication.

[0008] Furthermore, the metal sleeve is equipped with an air inlet connector, one end of which is connected to the second gas channel, and the other end is connected to the gas supply equipment.

[0009] Furthermore, the metal sleeve is made of copper; and / or the protective sleeve is made of aluminum.

[0010] Furthermore, the base assembly also includes a mounting base disposed on the upper side of the protective sleeve, and the power component is mounted on the mounting base.

[0011] Furthermore, the base assembly also includes a limiting block that can contact the shaft core, thereby limiting the axial travel of the shaft core.

[0012] Furthermore, the crystal-piercing head includes a mounting plate and a needle, the mounting plate being disposed at the end of the shaft core, and the needle being mounted on the side of the mounting plate opposite to the shaft core.

[0013] Furthermore, a grating element is provided on the shaft core, and a counter that cooperates with the grating element to count is provided in the base assembly.

[0014] Furthermore, it also includes a bracket, which is installed within the base assembly, and the counter is installed on the bracket.

[0015] Furthermore, it also includes locking plates, which are detachably mounted on both sides of the crystal spike head.

[0016] The beneficial effects of this application are as follows: The base assembly has a guide hole for the shaft core to pass through. One end of the shaft core is connected to the power component, and the other end is connected to the crystal-piercing head. The base assembly is also designed with an air channel communicating with the guide hole, forming a thin air film between the shaft core and the guide hole wall, achieving contactless support and significantly reducing moving friction. Two symmetrical air-bearing components are set inside the base, with their air-bearing surfaces facing the shaft core, ensuring that the shaft core remains vertical in the guide hole and preventing skewing caused by uneven air film gaps, further enhancing motion stability. This solution not only allows the shaft core to achieve high-frequency reciprocating motion in a frictionless, low-resistance environment, significantly improving chip transfer efficiency, but also extends the device's service life, reduces maintenance costs, and improves production precision and product quality. Attached Figure Description

[0017] The present application will now be described in further detail with reference to the accompanying drawings and embodiments.

[0018] Figure 1 This is a perspective view of the air-floating crystal-piercing device described in the embodiments of this application;

[0019] Figure 2 This is a cross-sectional view of the air-floating crystal-piercing device described in the embodiments of this application;

[0020] Figure 3 This is an internal schematic diagram of the air-floating crystal-piercing device described in the embodiments of this application;

[0021] Figure 4 This is an assembly diagram of the power component, shaft core, and crystal spike head described in the embodiments of this application.

[0022] In the diagram: 1. Base assembly; 101. Metal sleeve; 102. Protective sleeve; 103. Mounting base; 2. Power component; 3. Shaft core; 4. Crystal spike head; 401. Mounting plate; 402. Needle; 5. Air float component; 6. Air inlet connector; 7. Limit block; 8. Counter; 9. Bracket; 10. Grating component; 11. Locking plate. Detailed Implementation

[0023] To make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this application are further described in detail below. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] In the description of this application, unless otherwise expressly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0025] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0026] like Figures 1-4As shown, this embodiment provides an air-floating crystal-piercing device, which includes: a base assembly 1, a power component 2, a shaft core 3, a crystal-piercing head 4, and at least two air-floating components 5. The base assembly 1 is provided with a guide hole, and the shaft core 3 passes through the guide hole, with one end connected to the power end of the power component 2 and the other end connected to the crystal-piercing head 4. The base assembly 1 is also provided with an air passage communicating with the guide hole, so that an air film is formed between the hole wall of the guide hole and the shaft core 3. The two air-floating components 5 are symmetrically arranged in the base assembly 1, and the air-floating surfaces of the two air-floating components 5 are opposite to the shaft core 3.

[0027] Based on the above scheme, the power component 2 is connected to one end of the shaft core 3 through its power end, providing power for the linear motion of the shaft core 3. The shaft core 3 passes through the guide hole of the base assembly 1, and the guide hole provides a stable motion path for the shaft core 3. The other end of the shaft core 3 is connected to the crystal-piercing head 4, which is used to perform the crystal-piercing process, that is, to pierce the wafer and transfer the chip to another substrate. Crucially, an air channel communicating with the guide hole is opened in the base assembly 1. By supplying air to the air channel, a thin air film is formed between the hole wall of the guide hole and the shaft core 3. This air film achieves contactless support between the shaft core 3 and the hole wall of the guide hole, greatly reducing the moving friction. At the same time, two air floats 5 are symmetrically arranged in the base assembly 1, and their air float surfaces are opposite to the shaft core 3. The air floats 5 ensure that the shaft core 3 remains vertical in the guide hole by uniformly blowing air, preventing the stability of the shaft core 3 from being affected by uneven or skewed air film gaps.

[0028] Overall, the contactless, low-friction movement of the core 3 achieved through the air-float structure significantly improves the chip transfer efficiency in the crystal bonding process. It also makes the movement of the core 3 smoother and more precise, thereby improving the production accuracy and product quality of the crystal bonding process. By reducing friction between the core 3 and the guide hole wall, wear and malfunctions are reduced, lowering maintenance costs and significantly extending the device's lifespan. Furthermore, the two symmetrically arranged air-float components 5 ensure the vertical position of the core 3 within the guide hole, preventing instability caused by uneven or skewed air film gaps.

[0029] Furthermore, the base assembly 1 includes a metal sleeve 101 and a protective sleeve 102. The guide hole is disposed on the metal sleeve 101, and the protective sleeve 102 covers the outer surface of the metal sleeve 101. The air passage includes a first gas channel disposed on the metal sleeve 101 and a second gas channel disposed on the protective sleeve 102, with the first gas channel communicating with the second gas channel. The metal sleeve 101, as the core component of the air flotation system, has a carefully designed guide hole inside. The guide hole provides a precise movement path for the shaft core 3, while the first gas channel guides the gas flow, ensuring the formation of a stable gas film between the shaft core 3 and the guide hole wall, which is crucial for achieving the air flotation effect. To ensure the stable operation of the air flotation system, the outer surface of the metal sleeve 101 is tightly wrapped by the protective sleeve 102. The main function of the protective sleeve 102 is to isolate external environmental factors from interfering with the internal air flotation structure, such as preventing dust, impurities, and other contaminants from entering the air passage and affecting the normal flow of gas and the formation of the gas film. Meanwhile, the protective sleeve 102 also provides a certain degree of mechanical protection, reducing wear and damage to the metal sleeve 101 during long-term use, thereby extending the service life of the entire base assembly 1. Furthermore, the protective sleeve 102 is provided with a second gas channel that communicates with the first gas channel to ensure that compressed air can smoothly enter from the outside.

[0030] To ensure a stable and efficient gas supply to the gas channel, thereby forming a uniform and stable gas film between the shaft core 3 and the guide hole wall, an air inlet connector 6 is specially provided on the protective sleeve 102. The design of the air inlet connector 6 fully considers the characteristics of gas flow and the requirements of the air flotation system. One end is tightly connected to the second gas channel, with precision machining ensuring a tight seal and smooth gas flow. The other end extends to the outside of the device, facilitating connection to the gas supply equipment. This design not only ensures the continuity and stability of the gas supply but also improves the flexibility and maintainability of the air flotation system. When gas flow adjustment or maintenance is required, operators can easily perform operations through the connection between the air inlet connector 6 and the gas supply equipment without disassembling or making complex adjustments to the entire air flotation crystal-piercing device.

[0031] Furthermore, the connection method between the air inlet connector 6 and the gas supply equipment has been carefully designed. To ensure the reliability and stability of the connection, the air inlet connector 6 adopts a standard connection interface and sealing structure, enabling seamless integration with various types of gas supply equipment. Simultaneously, the air inlet connector 6 also possesses a certain degree of anti-interference capability, effectively preventing external environmental factors from interfering with the gas supply and ensuring the stable operation of the air flotation system.

[0032] It is worth mentioning that the metal sleeve 101 is made of copper, and / or the protective sleeve 102 is made of aluminum. Copper's high thermal conductivity helps to quickly dissipate the heat generated by the air flotation system during operation, ensuring stable system operation. Simultaneously, copper also possesses high corrosion resistance and wear resistance, maintaining stable performance and structural integrity during long-term use. The protective sleeve 102, on the other hand, is made of aluminum, primarily due to its lightweight, corrosion resistance, and ease of processing. Aluminum's lightweight nature helps reduce the overall weight of the air flotation crystal-piercing device, improving its flexibility and operability. Furthermore, aluminum possesses excellent corrosion resistance, effectively resisting corrosive factors in the external environment and protecting the internal metal sleeve 101 from damage. Moreover, aluminum has good processing properties, meeting the manufacturing requirements for protective sleeves 102 of different shapes and sizes, providing more possibilities for customized design of the air flotation system.

[0033] Optionally, the base assembly 1 further includes a mounting base 103, which is disposed on the upper side of the protective sleeve 102, and the power component 2 is mounted on the mounting base 103. The mounting base 103 is cleverly positioned on the upper side of the protective sleeve 102, providing a stable mounting foundation and fixing point for the entire crystal-piercing device. The design of the mounting base 103 fully considers the connection requirements between the device and external equipment. Its robust structure can withstand the weight and vibration from the power component 2 and other components, ensuring the stable operation of the crystal-piercing device within the equipment. Simultaneously, the mounting base 103 is also equipped with standard connection interfaces and fixing holes, facilitating operators to securely connect the crystal-piercing device to external equipment (such as other components of the crystal-piercing device, equipment frame, or workbench). As one of the core components of the crystal-piercing device, the power component 2 is firmly mounted on the mounting base 103, ensuring not only precise transmission between the power component 2 and the shaft core 3, but also improving the stability and reliability of the entire crystal-piercing device. Supported by the mounting base 103, the power unit 2 can stably provide the required driving force to drive the shaft core 3 and the crystal spike head 4 to achieve efficient and precise movement.

[0034] Preferably, the base assembly 1 further includes a limiting block 7, which can contact the shaft core 3 to limit the axial travel of the shaft core 3. The limiting block 7 is designed to provide a hard limiting mechanism to ensure that the shaft core 3 remains within the set travel range during axial movement, thereby preventing the shaft core 3 from moving excessively upward or downward, which could lead to device damage or performance degradation. The limiting block 7 is positioned appropriately in the base assembly 1, and its shape and size are precisely calculated to ensure close contact with the shaft core 3 and effectively limit its axial travel. When the shaft core 3 moves up and down under the drive of the power component 2, once the set travel limit is reached, the limiting block 7 immediately contacts the shaft core 3, thereby preventing it from moving further. This design not only improves the stability and reliability of the crystal-piercing device but also ensures that the shaft core 3 and the crystal-piercing head 4 operate in precise positions, thereby improving the accuracy and efficiency of chip transfer. The use of limit block 7 also brings additional safety performance. During the operation of the device, if the shaft core 3 moves abnormally due to some reason (such as failure of power component 2, error of control system, etc.), limit block 7 can respond quickly and limit its stroke, thereby avoiding possible collisions or damage. It not only protects the key components of the crystal-piercing device, but also ensures the safety of the operators.

[0035] Furthermore, the design of the limit block 7 also takes into account the adjustment and calibration needs of the device. By adjusting the position of the limit block 7 or replacing it with a limit block 7 of a different size, the operator can easily adjust the travel range of the shaft core 3 to adapt to different working requirements or to calibrate the device, improving the flexibility and adaptability of the device and providing more convenience for the operator's adjustment and calibration work.

[0036] In some embodiments, the crystal-piercing head 4 includes a mounting plate 401 and a needle 402. The mounting plate 401 is disposed at the end of the shaft core 3, and the needle 402 is mounted on the side of the mounting plate 401 opposite to the shaft core 3. The crystal-piercing head 4 mainly consists of two parts: the mounting plate 401 and the needle 402. The mounting plate 401 is disposed at the end of the shaft core 3, and through precise machining and connection mechanisms, a firm connection and accurate transmission between it and the shaft core 3 are ensured. The structural design of the mounting plate 401 not only takes into account the installation requirements of the needle 402, but also fully considers its stability and durability during the crystal-piercing process. Through reasonable material selection and structural design, the mounting plate 401 can withstand the driving force from the shaft core 3 and the impact force of the needle 402 during the crystal-piercing process, ensuring the stable operation of the crystal-piercing head 4. The needle 402, as the core component of the crystal-piercing head 4, is directly responsible for the chip picking and placement operations. The probe 402 is mounted on the side of the mounting plate 401 opposite to the shaft core 3. Precision manufacturing and mounting processes ensure its mounting accuracy and positional precision. During the chip insertion process, the probe 402 can precisely contact the chip and pick it up from its source location with minute movements, then accurately place it at the target location. The accuracy and stability of the probe 402 are crucial in this process, directly affecting the accuracy and efficiency of chip transfer.

[0037] To further improve the performance and precision of the crystal-piercing head 4, the needle 402 in this embodiment also employs high-quality materials and advanced manufacturing processes. These materials not only possess high strength and wear resistance but also maintain stable shape and performance during the crystal-piercing process. Simultaneously, the precision of the manufacturing process ensures the dimensional accuracy and surface finish of the needle 402, thereby improving its accuracy and reliability during the crystal-piercing process.

[0038] Generally, a grating element 10 is mounted on the shaft core 3, and a counter 8 that works in conjunction with the grating element 10 is installed within the base assembly 1. The grating element 10, as a high-precision displacement sensor, is precisely mounted on the shaft core 3. Utilizing the optical principle of a grating, it converts the displacement of the shaft core 3 into an electrical signal for transmission through the movement of the grating element 10. In this process, the grating element 10 can capture minute movements of the shaft core 3 and convert them into high-precision displacement data, providing a reliable basis for subsequent counting and control. Simultaneously, a counter 8 that works in conjunction with the grating element 10 is specially provided within the base assembly 1. The counter 8 receives the electrical signal transmitted by the grating element 10 and accurately counts and records the displacement of the shaft core 3. This design not only enables real-time monitoring and control of the movement distance of the shaft core 3 but also provides strong support for the automated control and intelligent management of the device. The combined use of the grating element 10 and the counter 8 not only improves the displacement measurement accuracy of the air-floating crystal-piercing device but also enhances its control performance. During chip transfer, precise control of the movement distance and speed of the spindle 3 ensures that the needle 402 can accurately pick up and place the chip, thereby improving the accuracy and efficiency of chip transfer. Simultaneously, this design facilitates fault diagnosis and maintenance of the device. By monitoring changes in the counter 8, potential fault points can be identified and located promptly, ensuring stable operation of the device.

[0039] In the further design of the air-float crystal-piercing device, the bracket 9 provides a more stable and reliable support for the installation and fixation of the counter 8. This design detail not only enhances the stability and durability of the device but also improves the working accuracy and reliability of the counter 8. During installation, the bracket 9 is precisely installed inside the base assembly 1, forming a firm connection with it. Simultaneously, the counter 8 is also precisely installed on the bracket 9, ensuring its positional accuracy and stability. This not only improves the measurement accuracy of the counter 8 but also avoids measurement errors caused by vibration or displacement. The bracket 9 also facilitates the maintenance and upgrade of the counter 8. When maintenance or upgrades are required, operators can easily remove the counter 8 from the base assembly 1 using the bracket 9, perform the necessary operations, and then reinstall it. This not only improves maintenance efficiency but also reduces maintenance costs.

[0040] Specifically, it also includes a locking plate 11, which is detachably installed on both sides of the crystal spike head 4. When the device is in transport, the locking plate 11 can effectively prevent the circumferential surface of the shaft core 3 and the area formed between the air float 5 and the shaft core 3 (i.e., the air float surface) from being scratched or damaged. This not only protects the integrity of the air float surface, but also ensures that the device can be put into normal use immediately after arriving at its destination without the need for additional repairs or adjustments.

[0041] It is worth noting that the locking plate 11 is only retained during the transportation of the device. Once the device is installed at the workstation, the locking plate 11 will be removed, ensuring the practicality of the locking plate 11 during transportation and avoiding interference with the normal operation of the crystal spike head 4 during the operation of the device.

[0042] Furthermore, it should be noted that the total stroke of the crystal spike head 4 is 1mm. The power component 2 is a custom-designed voice coil motor, which maintains a constant force of 0.7N, achieving high force control precision of less than 0.1N and enabling high-frequency reciprocating motion at 50Hz. When the crystal spike head 4 needs to perform high-frequency motion, it can quickly change the magnitude and direction of the driving force according to the control signal, thus achieving rapid and precise position adjustment. The voice coil motor, as the power source, combined with the low-friction characteristics of the air-bearing structure, allows the crystal spike head 4 to start and stop quickly. Under high-frequency motion requirements, upon receiving instructions from the control system, the crystal spike head 4 can reach the set speed in a very short time.

[0043] In the description herein, it should be understood that the terms "upper," "lower," "left," "right," and other orientations or positional relationships are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used merely for descriptive distinction and have no special meaning.

[0044] In the description of this specification, references to terms such as "an embodiment," "example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0045] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0046] The technical principles of this application have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this application and should not be construed as limiting the scope of protection of this application in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of this application without inventive effort, and these embodiments will all fall within the scope of protection of this application.

Claims

1. A device for air-floating crystal spikes, characterized in that, include: The base assembly (1), power component (2), shaft core (3), crystal spike head (4), and at least two air flotation components (5) are provided. The base assembly (1) is provided with a guide hole. The shaft core (3) passes through the guide hole and is connected at one end to the power end of the power component (2) and at the other end to the crystal spike head (4). The base assembly (1) is also provided with an air passage communicating with the guide hole so that an air film is formed between the hole wall of the guide hole and the shaft core (3). The two air flotation components (5) are symmetrically arranged in the base assembly (1), and the air flotation surfaces of the two air flotation components (5) are opposite to the shaft core (3).

2. The air-floating crystal-piercing device according to claim 1, characterized in that, The base assembly (1) includes a metal sleeve (101) and a protective sleeve (102). The guide hole is disposed on the metal sleeve (101). The protective sleeve (102) covers the outer surface of the metal sleeve (101). The air passage includes a first gas passage disposed on the metal sleeve (101) and a second gas passage disposed on the protective sleeve (102). The first gas passage and the second gas passage are in communication.

3. The air-floating crystal-piercing device according to claim 2, characterized in that, The protective sleeve (102) is provided with an air inlet connector (6), one end of which is connected to the second gas channel and the other end is connected to the gas supply equipment.

4. The air-floating crystal-piercing device according to claim 2, characterized in that, The metal sleeve (101) is made of copper; and / or the protective sleeve (102) is made of aluminum.

5. The air-floating crystal-piercing device according to claim 2, characterized in that, The base assembly (1) further includes a mounting base (103), which is disposed on the upper side of the protective sleeve (102), and the power component (2) is mounted on the mounting base (103).

6. The air-floating crystal-piercing device according to any one of claims 1-5, characterized in that, The base assembly (1) also includes a limiting block (7) which can contact the shaft core (3) to limit the axial travel of the shaft core (3).

7. The air-floating crystal-piercing device according to any one of claims 1-5, characterized in that, The crystal-piercing head (4) includes a mounting plate (401) and a needle (402). The mounting plate (401) is disposed at the end of the shaft core (3), and the needle (402) is mounted on the side of the mounting plate (401) away from the shaft core (3).

8. The air-floating crystal-piercing device according to any one of claims 1-5, characterized in that, A grating element (10) is provided on the shaft core (3), and a counter (8) that cooperates with the grating element (10) is provided in the base assembly (1).

9. The air-floating crystal-piercing device according to claim 8, characterized in that, It also includes a bracket (9) which is installed inside the base assembly (1), and the counter (8) is installed on the bracket (9).

10. The air-floating crystal-piercing device according to any one of claims 1-5, characterized in that, It also includes a locking plate (11), which is detachably mounted on both sides of the spiked head (4).

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