Special groove processing machine for lengthened quartz boat of semiconductor

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and discloses a semiconductor lengthened quartz boat groove processing special machine which comprises a lengthened longitudinal base and a door-shaped support fixedly arranged on the longitudinal base, a workbench capable of moving longitudinally is arranged on the longitudinal base, a groove cutting mechanism is arranged above the workbench, and a groove cutting mechanism is arranged above the groove cutting mechanism. The grooving mechanism is connected with a driving mechanism for driving the grooving mechanism to lift and transversely move, and the driving mechanism is fixedly arranged on the door-shaped bracket; the grooving mechanism comprises a grooving cutter, the rear end of the workbench can move to the front side of the grooving cutter, and the front end of the workbench can move to the rear side of the grooving cutter. The movement amplitude of the workbench and the workpiece is greatly increased through the longitudinal base arranged in a lengthened mode, groove machining of the lengthened quartz boat can be completed at a time, and the machining efficiency and the consistency and stability of product quality can be greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a special machine for processing grooves in an extended quartz boat for semiconductor manufacturing. Background Technology

[0002] Quartz boats are essential tools in diffusion processes. Whether in semiconductor device diffusion or solar energy diffusion, quartz components are extensively used as carriers. Quartz boats are heat-resistant, do not deform, do not contaminate devices, and are reusable. Especially in recent years, due to the rapid development of the solar energy industry, the use of quartz boats has become increasingly widespread, playing a significant role in the photovoltaic industry. Structurally, a quartz boat is essentially a boat-like carrier composed of multiple slotted quartz square rods and a pair of quartz side caps. Multiple solar cells can be inserted into the slots for diffusion processing. Therefore, slotting the quartz square rods is undoubtedly the most crucial step in quartz boat processing. Especially for long quartz boats, the length of the square rods makes positioning and fixing them during slotting a challenge. Existing long quartz boat processing methods, due to their excessive length, require two clamping and two processing steps to complete the process, resulting in low efficiency. Alternatively, the quartz long boat rods can be processed separately, and then multiple rods are assembled, which also leads to low processing efficiency. Utility Model Content

[0003] The purpose of this invention is to provide a special machine for grooving extended quartz boats for semiconductors. By extending the longitudinal base, the movement range of the worktable and workpiece is greatly increased, and the grooving of the extended quartz boat can be completed in one go, which can greatly improve the processing efficiency and the consistency and stability of product quality.

[0004] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0005] A special machine for grooving semiconductor extended quartz boats includes an extended longitudinal base and a gantry bracket fixed on the longitudinal base. The longitudinal base is provided with a longitudinally movable worktable. A grooving mechanism is provided above the worktable. The grooving mechanism is connected to a drive mechanism that drives it to lift, move laterally, and is fixed on the gantry bracket.

[0006] The grooving mechanism includes a grooving cutter, the rear end of the worktable is movable to the front side of the grooving cutter, and the front end of the worktable is movable to the rear side of the grooving cutter.

[0007] When grooving, first fix the lengthened quartz boat on the fixture, and then fix the fixture on the workbench. The grooving tool can be driven by the driving mechanism to move horizontally and vertically. The longitudinal movement of the workbench can drive the lengthened quartz boat to move longitudinally. In cooperation with the grooving tool, the grooving work can be completed. Since the longitudinal base is lengthened, the moving range of the workbench on the longitudinal base is increased, so that the grooving work of the lengthened quartz boat can be completed.

[0008] The present utility model is further configured as: the driving mechanism includes a horizontal sliding base and a vertical sliding base. One end of the horizontal sliding base facing the portal bracket is fixed with a horizontal slider, and the horizontal slider is slidably connected to the horizontal guide rail, and the horizontal guide rail is fixed on the portal bracket. A horizontally arranged first screw rod is rotatably connected to the portal bracket, and a first driving block is screwed to the first screw rod. The first driving block is fixedly connected to the horizontal sliding base. A first servo motor for driving the first screw rod to rotate is fixed on the portal bracket, and the first servo motor is electrically connected to a controller.

[0009] A vertical guide rail is fixed on the vertical sliding base, and a vertical slider is slidably connected to the vertical guide rail. The vertical slider is fixed on the horizontal sliding base. A second screw rod parallel to the vertical guide rail is rotatably connected to the vertical sliding base. A second driving block is screwed to the middle of the second screw rod, and the second driving block is fixedly connected to the horizontal sliding base. A second servo motor for driving the second screw rod to rotate is fixed on the vertical sliding base, and the second servo motor is electrically connected to the controller.

[0010] Through the above technical solutions, the first servo motor drives the first screw rod to rotate, the first screw rod drives the first driving block to move horizontally, and the first driving block drives the horizontal sliding base to move on the horizontal guide rail. The second servo motor drives the second screw rod to rotate. Since the second driving block is fixed on the horizontal sliding base and does not move up and down, the second screw rod generates an upward or downward movement, and the second screw rod drives the vertical sliding base to move up or down on the vertical guide rail. Through the first servo motor and the second servo motor, the horizontal movement and the vertical movement of the grooving mechanism are driven, which is convenient for the grooving tool to process the quartz boat.

[0011] The present utility model is further configured as: the horizontal sliding base is in a "C" shape.

[0012] The horizontal sliding base is inserted and sleeved on the outside of the vertical sliding base. There are two groups of vertical guide rails, and the corresponding vertical sliders of the two groups of vertical guide rails are respectively fixed on the inner walls of the two opposite sides of the horizontal sliding base.

[0013] Through the above technical solutions, the vertical sliding base is provided with two groups of vertical sliders and slide rails, which can improve the moving stability of the vertical sliding base on the horizontal sliding base.

[0014] The present invention is further configured such that: the grooving mechanism also includes a gearbox fixed on a vertical sliding base, a rotating shaft is rotatably connected to the gearbox, and a drive box arranged in the shape of "𠃍" with the upper part larger and the lower part smaller is fixed to the end of the rotating shaft extending out of the box body through a connecting plate; the drive box is provided with a large pulley, a small pulley, a belt connecting the large pulley and the small pulley, and a third motor driving the large pulley to rotate, and the third motor is electrically connected to the controller;

[0015] The small pulley is fixedly connected to one end of the cutter shaft, and the grooving cutter is detachably fixed to the other end of the cutter shaft; the middle part of the cutter shaft is rotatably connected inside the support sleeve, and the support sleeve is fixedly connected to the drive housing through a connecting block.

[0016] Through the above technical solution, the grooving cutter and the cutter shaft are detachably connected, which facilitates the replacement of the grooving cutter; at the same time, the rear of the grooving cutter is a support sleeve, which can reduce the space occupied by the rear end of the grooving cutter, thereby reducing the interference between the equipment and the quartz boat; the third motor drives the large pulley to rotate, and the large pulley drives the small pulley to rotate faster through the belt. The small pulley drives the grooving cutter to rotate quickly through the cutter shaft, so that the grooving cutter can perform grooving work on the quartz boat.

[0017] The present invention is further configured such that: a worm and a worm wheel are provided in the gearbox body, the worm wheel is fixedly connected to the tilting shaft, the worm is rotatably connected in the gearbox body and one end of the worm is connected to a fourth servo motor that drives it to rotate, and the fourth servo motor is electrically connected to the controller.

[0018] Through the above technical solution, the fourth servo motor drives the worm gear to rotate, the worm gear drives the worm wheel to rotate through a certain angle, the worm wheel drives the drive housing to rotate through the flip shaft to rotate through a certain angle, and the drive housing drives the grooving cutter to flip through the support sleeve, cutter shaft, etc. to rotate through a certain angle, thereby tilting the grooving cutter at a certain angle. The tilting of the grooving cutter allows for slanted grooving on the quartz boat.

[0019] The present invention is further configured such that the grooving knife is available in various sizes and specifications.

[0020] The above technical solution provides grooving tools in various specifications, which can be used to groove quartz boats of different sizes.

[0021] The present invention is further configured such that: a longitudinal slider and a third drive block are fixed at the bottom of the workbench; the third drive block is rotatably connected to the middle of a longitudinally arranged third screw; the longitudinal slider is inserted into a longitudinal guide rail; the longitudinal guide rail is fixed to a longitudinal base; both ends of the third screw are rotatably connected to the longitudinal base; one end of the third screw is connected to a fifth servo motor that drives it to rotate; and the fifth servo motor is electrically connected to a controller.

[0022] A chip-blocking plate is provided above the third screw. The middle part of the chip-blocking plate is inserted into the third drive block, and the two ends of the chip-blocking plate are fixedly connected to the longitudinal base.

[0023] Through the above technical solution, the fifth servo motor drives the third screw to rotate, the third screw drives the third drive block to move longitudinally, the third drive block drives the worktable to move, and the worktable drives the quartz boat workpiece to move. The chip-blocking plate can prevent the silica sludge generated by grooving from entering the third screw, thereby ensuring the smooth movement of the worktable.

[0024] The outstanding effect of this utility model is:

[0025] Compared with existing technologies, the extended longitudinal base greatly increases the range of movement of the worktable and workpiece, enabling the groove machining of the extended quartz boat to be completed in one go, which can significantly improve processing efficiency and the consistency and stability of product quality.

[0026] By adjusting the inclination of the grooving cutter, slanted grooves can be machined on an extended quartz boat, increasing its practicality;

[0027] The grooving cutter is available in various sizes and is easy to replace, making it suitable for grooving work on extended quartz boats of different sizes. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of this utility model;

[0029] Figure 2 This is a schematic diagram of the grooving mechanism of this utility model;

[0030] Figure 3 This is a cross-sectional view of the grooving mechanism of this utility model;

[0031] Figure 4 This is a schematic diagram of the drive mechanism of this utility model;

[0032] Figure 5 This is a schematic diagram of the assembly of the workbench and longitudinal base of this utility model.

[0033] Attached reference numeral: 10, longitudinal base;

[0034] 20. Portal bracket;

[0035] 30. Worktable; 31. Longitudinal slider; 32. Third drive block; 33. Third screw; 34. Longitudinal guide rail; 35. Fifth servo motor; 36. Chip guard plate;

[0036] 40. Grooving mechanism; 401. Grooving cutter; 402. Gearbox; 403. Tilting shaft; 404. Drive housing; 405. Large pulley; 406. Small pulley; 407. Belt; 408. Third motor; 409. Cutter shaft; 410. Support sleeve; 411. Connecting block; 412. Worm gear; 413. Worm wheel; 414. Fourth servo motor; 415. Connecting disc;

[0037] 50. Drive mechanism; 501. Horizontal sliding base; 502. Vertical sliding base; 503. Horizontal slider; 504. Horizontal guide rail; 505. First screw; 506. First drive block; 507. First servo motor; 508. Vertical guide rail; 509. Second screw; 510. Second drive block; 511. Second servo motor;

[0038] 90. Quartz boat. Detailed Implementation

[0039] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0040] The following is for reference Figures 1 to 5 The embodiments of this utility model are described below:

[0041] A special machine for grooving semiconductor extended quartz boats, such as Figure 1 As shown, it includes an extended longitudinal base 10 and a portal frame 20 fixed on the longitudinal base 10. The longitudinal base 10 is provided with a longitudinally movable worktable 30. A grooving mechanism 40 is provided above the worktable 30. The grooving mechanism 40 is connected to a drive mechanism 50 that drives it to lift, move laterally, and is fixed on the portal frame 20.

[0042] The grooving mechanism 40 includes a grooving blade 401. The rear end of the worktable 30 can be moved to the front side of the grooving blade 401, and the front end of the worktable 30 can be moved to the rear side of the grooving blade 401.

[0043] During grooving, the extended quartz boat is first fixed to the fixture, which is then fixed to the worktable. A drive mechanism moves the grooving cutter laterally and vertically, while the longitudinal movement of the worktable moves the extended quartz boat longitudinally. Combined with the grooving cutter, this completes the grooving process. Due to the extended longitudinal base, the worktable's range of motion on the longitudinal base is increased, thus enabling the grooving of the extended quartz boat.

[0044] like Figure 4As shown in the figure, the drive mechanism 50 of this embodiment includes a horizontal sliding base 501 and a vertical sliding base 502. One end of the horizontal sliding base 501 facing the gantry bracket 20 is fixed with a horizontal slider 503, and the horizontal slider 503 is slidably connected to a horizontal guide rail 504, and the horizontal guide rail 504 is fixed on the gantry bracket 20. A horizontally arranged first screw rod 505 is rotatably connected to the gantry bracket 20. The first screw rod 505 is screwed with a first driving block 506, and the first driving block 506 is fixedly connected to the horizontal sliding base 501. A first servo motor 507 for driving the first screw rod 505 to rotate is fixed on the gantry bracket 20, and the first servo motor 507 is electrically connected to a controller.

[0045] A vertical guide rail 508 is fixed on the vertical sliding base 502, and a vertical slider is slidably connected to the vertical guide rail 508, and the vertical slider is fixed on the horizontal sliding base 501. A second screw rod 509 parallel to the vertical guide rail 508 is rotatably connected to the vertical sliding base 502. The middle part of the second screw rod 509 is screwed with a second driving block 510, and the second driving block 510 is fixedly connected to the horizontal sliding base 501. A second servo motor 511 for driving the second screw rod 509 to rotate is fixed on the vertical sliding base 502, and the second servo motor 511 is electrically connected to the controller.

[0046] Through the above technical solution, the first servo motor drives the first screw rod to rotate, the first screw rod drives the first driving block to move horizontally, and the first driving block drives the horizontal sliding base to move on the horizontal guide rail; by the second servo motor driving the second screw rod to rotate, since the second driving block is fixed on the horizontal sliding base and does not move up and down, the second screw rod generates an upward or downward movement, and the second screw rod drives the vertical sliding base to move up or down on the vertical guide rail; through the first servo motor and the second servo motor, the horizontal movement and the vertical movement of the grooving mechanism are driven, which is convenient for the grooving tool to process the quartz boat.

[0047] The horizontal sliding base 501 is in a "C" shape.

[0048] The horizontal sliding base 501 is inserted outside the vertical sliding base 502. There are two groups of the vertical guide rails 508, and the corresponding vertical sliders of the two groups of vertical guide rails 508 are respectively fixed on the opposite inner walls of the horizontal sliding base 501.

[0049] Through the above technical solution, the vertical sliding base is provided with two groups of vertical sliders and slide rails, which can improve the movement stability of the vertical sliding base on the horizontal sliding base.

[0050] As Figure 2As shown, the grooving mechanism 40 of this embodiment also includes a gearbox 402 fixed on a vertical sliding base 502. A flipping shaft 403 is rotatably connected to the gearbox 402. The end of the flipping shaft 403 extending out of the gearbox 402 is fixed to a drive box 404 arranged in the shape of "𠃍" with a larger upper part and a smaller lower part through a connecting plate 415. The drive box 404 is provided with a large pulley 405 and a small pulley 406 arranged vertically, a belt 407 connecting the large pulley 405 and the small pulley 406, and a third motor 408 that drives the large pulley 405 to rotate. The third motor is electrically connected to the controller.

[0051] The small pulley 406 is fixedly connected to one end of the cutter shaft 409, and the grooving cutter 401 is detachably fixed to the other end of the cutter shaft 409; the middle part of the cutter shaft 409 is rotatably connected inside the support sleeve 410, and the support sleeve 410 is fixedly connected to the drive housing 404 through the connecting block 411.

[0052] Through the above technical solution, the grooving cutter and the cutter shaft are detachably connected, which facilitates the replacement of the grooving cutter; at the same time, the rear of the grooving cutter is a support sleeve, which can reduce the space occupied by the rear end of the grooving cutter, thereby reducing the interference between the equipment and the quartz boat; the third motor drives the large pulley to rotate, and the large pulley drives the small pulley to rotate faster through the belt. The small pulley drives the grooving cutter to rotate quickly through the cutter shaft, so that the grooving cutter can perform grooving work on the quartz boat.

[0053] like Figure 3 As shown, the gearbox 402 of this embodiment is provided with a worm gear 412 and a worm wheel 413. The worm wheel 413 is fixedly connected to the flip shaft 403. The worm gear 412 is rotatably connected inside the gearbox 402 and one end of it is connected to a fourth servo motor 414 that drives it to rotate. The fourth servo motor is electrically connected to the controller.

[0054] Through the above technical solution, the fourth servo motor drives the worm gear to rotate, the worm gear drives the worm wheel to rotate through a certain angle, the worm wheel drives the drive housing to rotate through the flip shaft to rotate through a certain angle, and the drive housing drives the grooving cutter to flip through the support sleeve, cutter shaft, etc. to rotate through a certain angle, thereby tilting the grooving cutter at a certain angle. The tilting of the grooving cutter allows for slanted grooving on the quartz boat.

[0055] The grooving blade 401 comes in various sizes and specifications.

[0056] The above technical solution provides grooving tools in various specifications, which can be used to groove quartz boats of different sizes.

[0057] like Figure 5As shown, the bottom of the workbench 30 in this embodiment is fixed with a longitudinal slider 31 and a third drive block 32. The third drive block 32 is rotatably connected to the middle of the longitudinally arranged third screw 33. The longitudinal slider 31 is inserted into the longitudinal guide rail 34, and the longitudinal guide rail 34 is fixed to the longitudinal base 10. The two ends of the third screw 33 are rotatably connected to the longitudinal base 10. One end of the third screw 33 is connected to a fifth servo motor 35 that drives it to rotate. The fifth servo motor 35 is electrically connected to the controller.

[0058] A chip-blocking plate 36 is provided above the third screw 33. The middle part of the chip-blocking plate 36 is inserted into the third drive block 32, and the two ends of the chip-blocking plate 36 are fixedly connected to the longitudinal base 10.

[0059] Through the above technical solution, the fifth servo motor drives the third screw to rotate, the third screw drives the third drive block to move longitudinally, the third drive block drives the worktable to move, and the worktable drives the quartz boat workpiece to move. The chip-blocking plate can prevent the silica sludge generated by grooving from entering the third screw, thereby ensuring the smooth movement of the worktable.

[0060] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model. These improvements and modifications assumed above should also be considered within the protection scope of the present utility model.

Claims

1. A semiconductor extended quartz boat trenching machine, comprising an extended longitudinal base (10) and a portal frame (20) fixed on the longitudinal base (10), characterized in that: A longitudinally movable workbench (30) is provided on the longitudinal base (10). A grooving mechanism (40) is provided above the workbench (30). The grooving mechanism (40) is connected to a driving mechanism (50) that drives it to lift and move horizontally. The driving mechanism (50) is fixedly arranged on the gantry bracket (20). The grooving mechanism (40) includes a grooving tool (401). The rear end of the workbench (30) can move to the front side of the grooving tool (401), and the front end of the workbench (30) can move to the rear side of the grooving tool (401).

2. The semiconductor extended quartz boat trenching machine according to claim 1, characterized in that: The driving mechanism (50) includes a horizontal sliding base (501) and a vertical sliding base (502). One end of the horizontal sliding base (501) facing the gantry bracket (20) is fixed with a horizontal slider (503). A horizontally arranged first screw rod (505) is rotatably connected to the gantry bracket (20). The first screw rod (505) is screwed with a first driving block (506). The first driving block (506) is fixedly connected to the horizontal sliding base (501). A first servo motor (507) for driving the first screw rod (505) to rotate is fixed on the gantry bracket (20). A vertical guide rail (508) is fixed on the vertical sliding base (502). A vertical slider is slidably connected to the vertical guide rail (508). The vertical slider is fixed on the horizontal sliding base (501). A second screw rod (509) parallel to the vertical guide rail (508) is rotatably connected to the vertical sliding base (502). The middle of the second screw rod (509) is screwed with a second driving block (510). The second driving block (510) is fixedly connected to the horizontal sliding base (501). A second servo motor (511) for driving the second screw rod (509) to rotate is fixed on the vertical sliding base (502).

3. The semiconductor extended quartz boat trenching machine according to claim 2, characterized in that: The horizontal sliding base (501) is in a "C" shape. The horizontal sliding base (501) is inserted outside the vertical sliding base (502). Two groups of vertical guide rails (508) are provided. The corresponding vertical sliders of the two groups of vertical guide rails (508) are respectively fixed on the two pairs of side inner walls of the horizontal sliding base (501).

4. The semiconductor extended quartz boat trenching machine according to claim 2, characterized in that: The grooving mechanism (40) further includes a gear box body (402) fixed on the vertical sliding base (502). A turning shaft (403) is rotatably connected to the gear box body (402). The end of the turning shaft (403) extending outside the box body (402) is fixed with a driving box body (404) in a shape of "ㄩ" with a large upper part and a small lower part through a connecting disc (415). A large pulley (405), a small pulley (406), a belt (407) connecting the large pulley (405) and the small pulley (406), and a third motor (408) for driving the large pulley (405) to rotate are arranged up and down in the driving box body (404). The small pulley (406) is fixedly connected to one end of the cutter shaft (409), and the grooving cutter (401) is detachably fixed to the other end of the cutter shaft (409); the middle part of the cutter shaft (409) is rotatably connected inside the support sleeve (410), and the support sleeve (410) is fixedly connected to the drive housing (404) through the connecting block (411).

5. A semiconductor extended quartz boat trenching machine according to claim 4, characterized in that: The gearbox (402) is provided with a worm (412) and a worm wheel (413). The worm wheel (413) is fixedly connected to the rotating shaft (403). The worm (412) is rotatably connected inside the gearbox (402) and one end of it is connected to a fourth servo motor (414) that drives it to rotate.

6. A semiconductor extended quartz boat trenching machine according to claim 4, characterized in that: The grooving blade (401) comes in various sizes.

7. A semiconductor extended quartz boat trenching machine according to claim 1, characterized in that: The bottom of the worktable (30) is fixed with a longitudinal slider (31) and a third drive block (32). The third drive block (32) is rotatably connected to the middle of a longitudinally arranged third screw (33). One end of the third screw (33) is connected to a fifth servo motor (35) that drives it to rotate. A chip-blocking plate (36) is provided above the third screw (33). The middle part of the chip-blocking plate (36) is inserted into the third drive block (32), and the two ends of the chip-blocking plate (36) are fixedly connected to the longitudinal base (10).

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