Seed crystal fixing tool

Abstract

The utility model provides a seed crystal fixing tool, belongs to the technical field of semiconductor processing, and solves the problem of poor bonding effect of a seed crystal and a molybdenum table in the prior art. The device comprises a base, the base is provided with a fixing area, and the fixing area is used for fixing a molybdenum table and a seed crystal; the pressure applying assembly is arranged on the base and provided with a plurality of pressure applying pieces, the pressure applying pieces are arranged in the horizontal direction, the pressure applying pieces have the moving freedom degree in the vertical direction, and the pressure applying pieces tend to enter the fixing area; and the limiting assembly comprises a limiting piece, a limiting ring is formed in the limiting piece, and the limiting ring abuts against the multiple pressure exerting pieces in the horizontal direction to achieve limiting. The seed crystals and the molybdenum table are fixed through downward pressing of the pressing pieces, and the pressing pieces can act on the seed crystals with different thicknesses and bonding gaps, so that the most appropriate pressing acting force is provided for the seed crystals on the molybdenum table, redundant bubbles and adhesives are discharged, and the fixing effect of the seed crystals and the molybdenum table is improved.

Description

Technical Field

[0001] This application belongs to the field of semiconductor processing technology, and more specifically, relates to a seed crystal fixing fixture. Background Technology

[0002] Diamond is an ultra-wide bandgap material with a bandgap of 5.5 eV, possessing high critical electric field strength and high carrier mobility, enabling lower capacitance and on-resistance at the same voltage level. However, the quantity and quality of natural diamonds cannot meet current industrial requirements, making synthetic diamonds a current research hotspot. Microwave plasma chemical vapor deposition (MPCVD) is a high-quality single-crystal diamond preparation technology that uses microwaves as an energy source and gases such as hydrogen and methane as raw materials. When using this technology for homoepitaxial growth of single-crystal diamond, a pre-polished seed crystal is placed on a molybdenum stage for epitaxial growth. Single-crystal diamond seed crystals are typically thin and light, and during vacuuming and heating, phenomena such as positional shift can occur due to airflow and plasma discharge. Furthermore, because there is an interface between the bottom of the seed crystal and the surface of the molybdenum stage, heat dissipation is poor during growth, necessitating bonding treatment between the seed crystal and the molybdenum stage.

[0003] Existing seed crystal bonding and curing processes require heating. Since the seed crystal surface is not flat, air bubbles and adhesive between it and the molybdenum stage are difficult to completely expel after heating, resulting in poor bonding performance. Therefore, external pressure is required to remove air bubbles and excess adhesive between the seed crystal and the molybdenum stage. However, due to the small size and varying thickness of the seed crystals, applying pressure with a pressure plate can easily lead to over- or under-pressure, failing to completely solve the problem of poor bonding performance.

[0004] Based on the above, the technical problem to be solved by this application is that the bonding effect between the seed crystal and the molybdenum stage is not good. Utility Model Content

[0005] The purpose of this application is to address the aforementioned problems in the prior art by proposing a seed crystal fixing fixture, which solves the problem of poor bonding effect between the seed crystal and the molybdenum stage in the prior art and improves the bonding effect between the seed crystal and the molybdenum stage.

[0006] The objective of this application can be achieved through the following technical solution: a seed crystal fixing fixture, comprising: a base, wherein a fixing area is formed on the base for fixing a molybdenum stage and a seed crystal; a pressure applying component, wherein the pressure applying component is disposed on the base and has multiple pressure applying elements, the multiple pressure applying elements are arranged horizontally, the pressure applying elements have a degree of freedom of movement in the vertical direction, and the pressure applying elements have a tendency to enter the fixing area; and a limiting component, wherein the limiting component includes a limiting element, a limiting ring is formed within the limiting element, and the limiting ring abuts against the multiple pressure applying elements in the horizontal direction to limit their movement.

[0007] Understandably, the base is used to install the pressure-applying components and the limiting components. The fixing area on the base can be a groove or a boss, and a molybdenum platform can be placed on the molybdenum platform. After the bottom surface of the seed crystal or the upper surface of the molybdenum platform is coated with adhesive, the seed crystal is placed on the molybdenum platform, and then the pressure-applying components press down to fix the seed crystal and the molybdenum platform. Since the pressure-applying components are multiple seed crystals that can act on seed crystals of different thicknesses and bonding gaps, the most suitable pressure force is provided to each seed crystal on the molybdenum platform, excess air bubbles and adhesive are expelled, and the fixing effect between each seed crystal and the molybdenum platform is improved. It should be noted that the limiting components of the limiting components can be plate-shaped, with the central area of ​​the plate-shaped limiting component hollowed out to form a limiting ring. In addition, the limiting components can also be top pressure blocks from multiple directions, with multiple top pressure blocks surrounding the outer periphery of the pressure-applying component to form the limiting ring. By setting the limiting components, the pressure-applying component can be prevented from tilting or skewing in the horizontal direction, avoiding a decrease in pressure force or failure of pressure application.

[0008] In the aforementioned seed crystal fixing fixture, the fixing area includes multiple receiving grooves for accommodating the seed crystal. These grooves are arranged horizontally, and each groove matches a pressure-applying component vertically. It is understood that by providing multiple receiving grooves, the horizontal position of the seed crystal is fixed, preventing positional movement during bonding and thus affecting the bonding effect. Furthermore, it facilitates downward pressure from the upper pressure-applying component for fixing.

[0009] In the aforementioned seed crystal fixing fixture, the pressure-applying member has a pressure-applying part at one end near the fixing area, and the pressure-applying part can be inserted into the receiving groove. It is understood that the horizontal cross-section of the pressure-applying part can be configured to be smaller than the horizontal cross-section of the receiving groove, thereby making it easier to align the seed crystal in the receiving groove before inserting it into the receiving groove to achieve pressure fixing.

[0010] In the aforementioned seed crystal fixing fixture, the horizontal cross-section of the pressure-applying part gradually tapers towards the fixing area. It can be understood that by gradually reducing the size of the pressure-applying part towards the bottom, the pressure acting on the seed crystal surface can be increased.

[0011] In the aforementioned seed crystal fixing fixture, a counterweight is provided at the end of the pressure-applying component away from the fixing area. This counterweight is detachably connected to at least one additional counterweight. It is understood that by providing a counterweight at the end of the pressure-applying component away from the fixing area, i.e., at the top of the pressure-applying component, an additional counterweight can be attached to the counterweight. For example, the counterweight can be a bolt, with an internal thread cut out of the counterweight, allowing for a threaded connection between the counterweight and the pressure-applying component. Alternatively, the counterweight and the pressure-applying component can be magnetically connected, or they can be plugged into each other. By providing a counterweight, the weight of the pressure-applying component can be appropriately increased, thereby providing sufficient pressure to the seed crystal and improving the bonding and fixing effect.

[0012] In the aforementioned seed crystal fixing fixture, the limiting member is provided with multiple limiting grooves, which are arranged side by side in the horizontal direction and face the limiting ring. It is understood that a cylindrical workpiece can be inserted into the limiting groove to fix the pressure-applying member in the horizontal direction, preventing movement of the pressure-applying member and improving its pressure stability.

[0013] In the aforementioned seed crystal fixing fixture, the pressure-applying component is provided with a first insertion part, and a single limiting groove is directly opposite to multiple first insertion parts arranged side by side. It can be understood that by arranging multiple first insertion parts side by side and directly opposite the limiting groove, it is convenient to connect the cylindrical workpiece and the pressure-applying component, achieving limiting of the pressure-applying component in both the horizontal and vertical directions. When the cylindrical workpiece is pulled out, the pressure-applying component can apply downward pressure to the seed crystal under its own weight or the action of a counterweight.

[0014] In the aforementioned seed crystal fixing fixture, each of the multiple pressure-applying components is provided with a second insertion portion, and the multiple second insertion portions have at least a partial overlap in the vertical direction. It is understood that the second insertion portions can also be inserted into cylindrical workpieces, particularly for limiting the position of the pressure-applying components during the fixing process.

[0015] In the aforementioned seed crystal fixing fixture, the limiting member has a clearance hole on the side near the pressure applying member, and the pressure applying member has multiple sharp edges on its outer periphery, allowing these sharp edges to be inserted into the clearance hole. It is understood that by providing the clearance hole, multiple pressure applying members can be easily installed in their respective positions, simplifying the installation process.

[0016] In the aforementioned seed crystal fixing fixture, a positioning part is further provided between the limiting member and the pressure applying member, and the positioning part can abut against the pressure applying member. It can be understood that by providing the positioning part, the pressure applying member can be quickly positioned during installation, thus accelerating installation efficiency.

[0017] Compared with the prior art, this application has the following beneficial effects:

[0018] 1. This application uses a pressure-applying component to press down and fix the seed crystal to the molybdenum stage. Since the pressure-applying component consists of multiple seed crystals with different thicknesses and bonding gaps, it provides the most suitable pressure force for each seed crystal on the molybdenum stage, removes excess air bubbles and adhesive, and improves the fixing effect between each seed crystal and the molybdenum stage.

[0019] 2. This application provides multiple receiving grooves to ensure that the horizontal position of the seed crystal is fixed, to prevent the position from shifting during bonding and affecting the bonding effect, and to facilitate the pressure of the upper pressure component to apply force for fixing.

[0020] 3. This application provides clearance holes to facilitate the installation of multiple pressure-applying components into their respective positions, thus simplifying the installation process. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural diagram of the seed crystal fixing fixture of this application;

[0022] Figure 2 This is a three-dimensional structural diagram of the base of this application;

[0023] Figure 3 This is a three-dimensional structural diagram of the limiting component of this application;

[0024] Figure 4 This is a structural schematic diagram of the pressure-applying component of this application;

[0025] In the figure, 100 is the base; 110 is the fixing area; 111 is the receiving groove; 200 is the pressure application component; 210 is the pressure application element; 211 is the pressure application part; 212 is the first insertion part; 213 is the second insertion part; 214 is the edge; 215 is the counterweight part; 300 is the limiting component; 310 is the limiting element; 311 is the limiting groove; 312 is the positioning part; 313 is the clearance hole; and 320 is the limiting ring. Specific Implementation

[0026] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0027] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0029] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0030] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0031] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0032] Please refer to the attached diagram in the instruction manual. Figures 1-3 This application includes a base 100, a pressure application component 200, and a limiting component 300. The base 100 has a fixing area 110 for fixing a molybdenum stage (not shown) and a seed crystal (not shown). The pressure application component 200 is disposed on the base 100 and has multiple pressure application elements 210. The multiple pressure application elements 210 are arranged horizontally and have a degree of freedom of movement in the vertical direction. The pressure application elements 210 tend to enter the fixing area 110. The limiting component 300 includes a limiting element 310. A limiting ring 320 is formed within the limiting element 310. The limiting ring 320 abuts against the multiple pressure application elements 210 in the horizontal direction to limit their movement.

[0033] Understandably, the base 100 is used to install the pressure application component 200 and the limiting component 300. The fixing area 110 on the base 100 can be a groove or a boss. The fixing area 110 contains a molybdenum stage, on which a seed crystal can be placed. After the bottom surface of the seed crystal or the upper surface of the molybdenum stage is coated with adhesive, the seed crystal is placed on the molybdenum stage, and then the pressure application component 210 presses down to fix the seed crystal to the molybdenum stage. Since the pressure application component 210 consists of multiple seed crystals with different thicknesses and bonding gaps, it provides the most suitable pressure force for each seed crystal on the molybdenum stage, removes excess air bubbles and adhesive, and improves the fixing effect between each seed crystal and the molybdenum stage. It should be noted that the limiting component 310 of the limiting component 300 can be plate-shaped, with the central area of ​​the plate-shaped limiting component 310 hollowed out to form a limiting ring 320. In addition, the limiting component 310 can also be a top pressing block from multiple directions, with multiple top pressing blocks surrounding the outer periphery of the pressure application component 210 to form the limiting ring 320. By setting the limiting component 300, the pressure-applying component 210 can be prevented from tilting or tilting in the horizontal direction, thus avoiding a reduction in the pressure-applying force or failure to apply pressure.

[0034] See Figure 2 In some embodiments, the fixing area 110 includes a plurality of receiving grooves 111 for accommodating the seed crystal. The plurality of receiving grooves 111 are arranged horizontally, and the receiving grooves 111 are matched one-to-one with the pressure applying member 210 in the vertical direction. It can be understood that by setting multiple receiving grooves 111, the horizontal position of the seed crystal is fixed, preventing positional movement during bonding and affecting the bonding effect, and facilitating the pressure applying member 210 above to apply pressure for fixing.

[0035] See Figure 2 and Figure 4 In some embodiments, the pressure-applying member 210 has a pressure-applying part 211 at one end near the fixing area 110, and the pressure-applying part 211 can be inserted into the receiving groove 111. It is understood that the horizontal cross-section of the pressure-applying part 211 can be configured to be smaller than the horizontal cross-section of the receiving groove 111, so that it is easier to align the seed crystal in the receiving groove 111 and insert it into the receiving groove 111 to achieve pressure fixation.

[0036] See Figure 4 In some embodiments, the horizontal cross-section of the pressure-applying portion 211 gradually tapers toward the fixing region 110. It is understood that by gradually reducing the size of the pressure-applying portion 211 toward the bottom, the pressure acting on the seed crystal surface can be increased.

[0037] See Figure 3In some embodiments, the limiting member 310 is provided with multiple limiting grooves 311, which are arranged side by side in the horizontal direction and face the limiting ring 320. It is understood that a cylindrical workpiece can be inserted into the limiting groove 311 to fix the pressure applying member 210 in the horizontal direction, prevent the pressure applying member 210 from moving, and improve the pressure applying stability of the pressure applying member 210.

[0038] See Figure 3 In some embodiments, the limiting member 310 has a clearance hole 313 on the side near the pressure member 210, and the pressure member 210 has multiple edges 214 on its outer periphery, allowing the edges 214 to be inserted into the clearance hole 313. It is understood that by providing the clearance hole 313, it is convenient to install multiple pressure members 210 into the corresponding positions, simplifying the installation difficulty.

[0039] See Figure 3 In some embodiments, a positioning part 312 is further provided between the limiting member 310 and the pressure applying member 210, and the positioning part 312 can abut against the pressure applying member 210. It can be understood that by providing the positioning part 312, the pressure applying member 210 can be quickly positioned during installation, thereby speeding up the installation efficiency.

[0040] See Figure 4 In some embodiments, the pressure-applying member 210 is provided with a first insertion portion 212, and a single limiting groove 311 is directly opposite to multiple first insertion portions 212 arranged side by side. It can be understood that by arranging multiple first insertion portions 212 side by side and directly opposite the limiting groove 311, it is convenient for the cylindrical workpiece to connect the two, thereby limiting the pressure-applying member 210 in the horizontal and vertical directions. When the cylindrical workpiece is pulled out, the pressure-applying member 210 can apply downward pressure to the seed crystal under its own weight or the action of counterweight.

[0041] See Figure 4 In some embodiments, each of the multiple pressure-applying members 210 is provided with a second insertion portion 213, and the multiple second insertion portions 213 have at least a partial overlap in the vertical direction. It is understood that the second insertion portions 213 can also be inserted into cylindrical workpieces, especially for limiting the position of the pressure-applying members 210 during the fixing process.

[0042] See Figure 1 and Figure 4In some embodiments, a counterweight 215 is provided at the end of the pressure-applying member 210 away from the fixing area 110, and the counterweight 215 is detachably connected to at least one counterweight. It is understood that by providing the counterweight 215 at the end of the pressure-applying member 210 away from the fixing area 110, i.e., at the top of the pressure-applying member 210, an additional counterweight can be attached to the counterweight 215. For example, the counterweight can be a bolt, and the counterweight 215 can be hollowed out and have internal threads, allowing for a threaded connection between the counterweight and the counterweight 215. Alternatively, the counterweight 215 and the counterweight can be magnetic components, allowing for a magnetic connection. Or, the counterweight 215 and the counterweight can be plugged into each other. By providing the counterweight 215, the weight of the pressure-applying member 210 can be appropriately increased, thereby providing sufficient pressure to the seed crystal and improving the bonding and fixing effect.

[0043] Beneficial effects:

[0044] This application uses pressure-applying components 210 to press down and fix the seed crystal to the molybdenum stage. Since the pressure-applying components 210 are multiple seed crystals that can act on seed crystals of different thicknesses and bonding gaps, they provide the most suitable pressure force for each seed crystal on the molybdenum stage, expel excess air bubbles and adhesive, and improve the fixing effect between each seed crystal and the molybdenum stage. By setting multiple receiving grooves 111, the horizontal position of the seed crystal is fixed, preventing the position from shifting during bonding and affecting the bonding effect, and making it easy for the pressure-applying components 210 above to press down and fix it. By setting clearance holes 313, it is convenient to install multiple pressure-applying components 210 into the corresponding positions, simplifying the installation difficulty.

[0045] The specific embodiments described herein are merely illustrative examples of the spirit of this application. Those skilled in the art to which this application pertains may make various modifications or additions to the described specific embodiments or use similar methods to substitute them, without departing from the spirit of this application or exceeding the scope defined by the appended claims.

Claims

1. A seed crystal fixing fixture, characterized in that, include: A base (100) is provided, wherein a fixing area (110) is provided on the base (100), and the fixing area (110) is used to fix the molybdenum stage and the seed crystal; A pressure-applying assembly (200) is disposed on the base (100) and has a plurality of pressure-applying elements (210). The plurality of pressure-applying elements (210) are arranged in a horizontal direction, and the pressure-applying elements (210) have a degree of freedom of movement in a vertical direction. The pressure-applying elements (210) have a tendency to enter the fixed area (110). as well as The limiting component (300) includes a limiting member (310), in which a limiting ring (320) is formed, and the limiting ring (320) abuts against a plurality of the pressure members (210) in the horizontal direction to limit the movement.

2. The seed crystal fixing fixture according to claim 1, characterized in that, The fixed area (110) includes a plurality of receiving grooves (111), which are used to receive seed crystals. The plurality of receiving grooves (111) are arranged in a horizontal direction, and the receiving grooves (111) and the pressure member (210) are matched one by one in the vertical direction.

3. The seed crystal fixing fixture according to claim 2, characterized in that, The pressure-applying member (210) has a pressure-applying part (211) at one end near the fixed area (110), and the pressure-applying part (211) can be inserted into the receiving groove (111).

4. The seed crystal fixing fixture according to claim 3, characterized in that, The horizontal cross section of the pressure-applying part (211) gradually contracts toward the fixing area (110).

5. The seed crystal fixing fixture according to claim 1, characterized in that, The pressure-applying member (210) has a counterweight (215) at one end away from the fixed area (110), and the counterweight (215) is detachably connected to at least one counterweight.

6. The seed crystal fixing fixture according to claim 1, characterized in that, The limiting member (310) is provided with a plurality of limiting grooves (311), which are arranged side by side in the horizontal direction and face the limiting ring (320).

7. The seed crystal fixing fixture according to claim 6, characterized in that, The pressure-applying member (210) is provided with a first insertion part (212), and a single limiting groove (311) is directly opposite to a plurality of first insertion parts (212) arranged side by side.

8. The seed crystal fixing fixture according to claim 1, characterized in that, Each of the multiple pressure-applying members (210) is provided with a second insertion portion (213), and the multiple second insertion portions (213) have at least a partial overlap area in the vertical direction.

9. The seed crystal fixing fixture according to claim 1, characterized in that, The limiting member (310) has a clearance hole (313) on the side near the pressure member (210), and the pressure member (210) has multiple edges (214) on its outer periphery. The clearance hole (313) allows the edges (214) to be inserted.

10. The seed crystal fixing fixture according to claim 1, characterized in that, A positioning part (312) is also provided between the limiting member (310) and the pressure member (210), and the positioning part (312) can abut against the pressure member (210).

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